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DOE OSTI · 2542476

Systems and methods of electron beam induced processing

Abstract

Embodiments of the present disclosure provide for methods and systems for making structures using an electrospray system while under vacuum. In particular, embodiments of the present disclosure provide for methods and systems for ultra-fast growth of high aspect ratio nano/meso/micro-structures with three dimensional topological complexity and control of phase and composition of the structure formed.

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BibTeXRIS

Fedorov, Andrei G.. 2024-08-13. Systems and methods of electron beam induced processing. https://www.osti.gov/biblio/2542476

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