DOE OSTI · 2542476
Systems and methods of electron beam induced processing
Abstract
Embodiments of the present disclosure provide for methods and systems for making structures using an electrospray system while under vacuum. In particular, embodiments of the present disclosure provide for methods and systems for ultra-fast growth of high aspect ratio nano/meso/micro-structures with three dimensional topological complexity and control of phase and composition of the structure formed.
Keep this discovery
Explore connections, maps & timelines
Fedorov, Andrei G.. 2024-08-13. Systems and methods of electron beam induced processing. https://www.osti.gov/biblio/2542476
Cite the original work for its findings. Save a collection to share your selection of sources.