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DOE OSTI · 3015015

Toward Automated Plasma Focus Ion Beam Instrument Calibration for Materials Processing [Poster]

Liu, Emerson [National Laboratory of the Rockies (NLR), Golden, CO (United States)]·Hoffmann, Madeline [National Laboratory of the Rockies (NLR), Golden, CO (United States)]·Gannon, Renae [National Laboratory of the Rockies (NLR), Golden, CO (United States)]·Spurgeon, Steven [National Laboratory of the Rockies (NLR), Golden, CO (United States)]
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Abstract

To accelerate the transition to autonomous focused ion beam (FIB) microscopy, we require an objective figure of merit (FOM) for assessing calibration. For our purposes, these FOMs related to beam astigmatism, quad, and focus. Intelligent calibration integrated into scripted workflows will enable fully automated sample preparation workflows that produce higher quality samples with less operator time.

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97 MATHEMATICS AND COMPUTINGautomationmachine learningplasma focused ion beam

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Liu, Emerson [National Laboratory of the Rockies (NLR), Golden, CO (United States)], Hoffmann, Madeline [National Laboratory of the Rockies (NLR), Golden, CO (United States)], Gannon, Renae [National Laboratory of the Rockies (NLR), Golden, CO (United States)], Spurgeon, Steven [National Laboratory of the Rockies (NLR), Golden, CO (United States)]. 2026-01-22. Toward Automated Plasma Focus Ion Beam Instrument Calibration for Materials Processing [Poster]. https://doi.org/10.2172/3015015

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