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DOE OSTI · 3021707

INR-TEM: Robust cavity detection in multifocus TEM images via implicit neural representations

Abstract

When characterizing materials using transmission electron microscopy (TEM) images, detecting and quantifying small features in microstructures, such as cavities, pose significant challenges. Off-the-shelf object detection models, including YOLOv8, show considerable performance degradation, particularly when images vary in resolution and the objects of interest possess a low percentage of the total image region of interest. In this study, we introduce a novel detection pipeline that incorporates an implicit neural representation (INR)-based detection method, INR-TEM, and two-modality imaging (e.g., under-focused and over-focused images typically acquired during materials characterization) to improve object detection performance. The INR-TEM method incorporates a pixel-wise prediction principle inspired by pixel-wise centerness weighting. INR-TEM demonstrates superior robustness to resolution variability, maintaining high detection accuracy even at low image resolutions compared to YOLOv8. To leverage INR-TEM effectively in real-world two-modality characterization applications, we further integrate a two-stage motion correction pipeline designed explicitly for aligning multifocus TEM images. The alignment process, comprising keypoint (based on scale-invariant feature transform, SIFT) and intensity matching, significantly mitigates the adverse effects of perceived motion-induced image degradation during through-focal TEM imaging, directly enhancing INR-TEM’s detection capability over conventional single-focus images. Our integrated INR-TEM cavity detection framework notably improves performance across various cavity sizes, outperforming off-the-shelf YOLOv8 detections that rely on a single image modality.

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BibTeXRIS

Hsu, Chan-Min [Texas A & M Univ., College Station, TX (United States)] (ORCID:0000000161706611), Xu, Siyuan [Texas A & M Univ., College Station, TX (United States)] (ORCID:0000000286142493), Lynch, Matthew J. [Univ. of Michigan, Ann Arbor, MI (United States)], Wang, Yucheng [Texas A & M Univ., College Station, TX (United States)], Liu, Xingyu [Pennsylvania State Univ., University Park, PA (United States)] (ORCID:0000000329079472), Williams, Conrad [Pennsylvania State Univ., University Park, PA (United States)] (ORCID:0009000628968621), Wang, Xing [Pennsylvania State Univ., University Park, PA (United States)] (ORCID:0000000171903889), Qian, Lijun [Prairie View A & M Univ., Prairie View, TX (United States)] (ORCID:0000000315773359), Field, Kevin G. [Univ. of Michigan, Ann Arbor, MI (United States)] (ORCID:000000023105076X), Qian, Xiaoning [Texas A & M Univ., College Station, TX (United States); Brookhaven National Laboratory (BNL), Upton, NY (United States)] (ORCID:0000000243472476). 2026-02-10. INR-TEM: Robust cavity detection in multifocus TEM images via implicit neural representations. https://doi.org/10.1063/5.0301417

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