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DOE OSTI · 3374605

Nano-laminography with a transmission X-ray microscope

Nikitin, Viktor [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)] (ORCID:000000019999169X)·Mittone, Alberto [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)]·Clark, Samuel J. [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)] (ORCID:0000000286783020)·Fezzaa, Kamel [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)]·Wojcik, Michael [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)] (ORCID:000000031257870X)·Deriy, Alex [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)]·Bean, Sunil [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)]·De Carlo, Francesco [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)] (ORCID:0000000310687785)
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Abstract

Nano-laminography combines the penetrating power of hard X-rays with a tilted rotational geometry to deliver high-resolution, three-dimensional images of laterally extended, flat specimens that are otherwise incompatible with, or difficult to image using, conventional nano-tomography. In this work, we demonstrate a full-field, X-ray nano-laminography system implemented with the transmission X-ray microscope at beamline 32-ID of the upgraded Advanced Photon Source at Argonne National Laboratory, USA. By rotating the sample around an axis inclined by 20° to the incident beam, the technique minimizes the long optical path lengths that would otherwise generate excessive artifacts when planar samples are imaged edge-on. The efficiency of the technique is demonstrated with 50 nm spatial resolution and minute-scale temporal resolution 3D imaging of a planar integrated circuit sample and targeted imaging of an individual particle within a powder sample, where mounting procedures are typically challenging in regular nano-tomography. The sample mounting strategy, data acquisition, and reconstruction method will also be discussed.

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73 NUCLEAR PHYSICS AND RADIATION PHYSICSLaminographyTransmission x-rayTransmission x-ray microscope

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Nikitin, Viktor [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)] (ORCID:000000019999169X), Mittone, Alberto [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)], Clark, Samuel J. [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)] (ORCID:0000000286783020), Fezzaa, Kamel [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)], Wojcik, Michael [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)] (ORCID:000000031257870X), Deriy, Alex [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)], Bean, Sunil [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)], De Carlo, Francesco [Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)] (ORCID:0000000310687785). 2025-09-10. Nano-laminography with a transmission X-ray microscope. https://doi.org/10.1107/s1600577525007234

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