DOE OSTI · 3388067
Advancements in NbTiN based circuits for Superconducting Digital Logic
Abstract
Superconducting (SC) electronics have emerged as a promising platform for high-speed, energy-efficient computing and quantum information processing. This work, centered on NbTiN, presents recent advances in material science and fabrication methods leading to significant improvements in performance, scalability and vertical integration. We specifically report on fabrication and characterization of key components, including Josephson junctions (JJs), flux trapping structures and SC interconnects. Together, these efforts represent critical steps towards realizing practical, complex, dense and large-scale SC integrated circuits.
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Pokhrel, A. [Imec,Heverlee,Belgium], Huet, B. [Imec,Heverlee,Belgium], Hodges, B. [Imec USA,Kissimmee,FL,USA,32744], Ibrahim, S. [Imec USA,Kissimmee,FL,USA,32744], Bai, R. [Cornell University,Laboratory of Atomic and Solid-State Physics,Ithaca,NY,USA,14853], Brebels, S. [Imec,Heverlee,Belgium], Josephsen, T. [Imec USA,Kissimmee,FL,USA,32744], Buseyne, D. [KU Leuven,Department of Physics and Astronomy,Leuven,Belgium], Delie, G. [Imec,Heverlee,Belgium], Vangoidsenhoven, D. [Imec,Heverlee,Belgium], Elshaer, A. [Imec,Heverlee,Belgium], Tiwari, R. [Imec,Heverlee,Belgium], Lozano, D. P. [Imec,Heverlee,Belgium], Sarkar, S. K. [Imec,Heverlee,Belgium], Zhang, L. [Imec,Heverlee,Belgium], Deckers, S. [Imec,Heverlee,Belgium], Malavipathirana, H. [Imec USA,Kissimmee,FL,USA,32744], Pinzon, J. G. [Imec USA,Kissimmee,FL,USA,32744], Koufalis, P. [Imec USA,Kissimmee,FL,USA,32744], Mishra, R. [Cornell University,Laboratory of Atomic and Solid-State Physics,Ithaca,NY,USA,14853], Li, C. [Cornell University,Laboratory of Atomic and Solid-State Physics,Ithaca,NY,USA,14853], O'Neal, S. [Imec USA,Kissimmee,FL,USA,32744], Nowack, K. [Cornell University,Laboratory of Atomic and Solid-State Physics,Ithaca,NY,USA,14853], Bael, M. J. Van [KU Leuven,Department of Physics and Astronomy,Leuven,Belgium], Valente-Feliciano, A-M. [Newport News,Thomas Jefferson National Accelerator Facility,VA,USA,23606], Perumkunnil, M. [Imec,Heverlee,Belgium], Tőkei, Z. [Imec,Heverlee,Belgium]. 2026-01-30. Advancements in NbTiN based circuits for Superconducting Digital Logic. https://doi.org/10.1109/iedm50572.2025.11353860
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