DOE OSTI · code-144332
aldsim
Abstract
SF-24-041 aldsim is a Python module that provides a set of ALD models that allow the user to explore the behavior of self-limited chemistries inside common reactor configurations.
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YANGUAS-GIL, ANGEL, ELAM, JEFFREYW. 2024-09-23. aldsim. https://doi.org/10.11578/dc.20240923.1
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