Search NASA⌕ Search

SEARCH · Search NASA

Results for “Auger electron spectroscopy”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 181 records · Page 10
All sourcesNASA NTRSDOE OSTI
NASA NTRS1987

Interactions of amorphous Ta(x)Cu(1-x) (x = 0.93 and 0.80) alloy films with Au overlayers and GaAs substrates

Amorphous Ta(93)Cu(7) and Ta(80)Cu(20) alloy films are prepared by cosputtering of pure Ta and pure Cu targets with a rotating sample holder table. To investigate the possible application of these materials as diffusion barriers for the Au-GaAs system, vacuum annealings are made in the temperature range from 200 to 800 C. Resistivity change, X-ray diffraction, and Auger electron spectroscopy measurements are performed to find the chemical and metallurgical stabilities of these materials in this system. The reaction temperature for Ta(x)Cu(1-x) in contact with GaAs lies between 500 and 700 C. For Au in contact with Ta(x)Cu(1-x) the reaction occurs at about 600 C. Amorphous Ta(93)Cu(7) shows different interdiffusion characteristics with surrounding elements than does Ta(80)Cu(20).

Oh, Jae E.↗
NASA NTRS1988

Amorphous silicon carbide coatings for extreme ultraviolet optics

Amorphous silicon carbide films formed by sputtering techniques are shown to have high reflectance in the extreme ultraviolet spectral region. X-ray scattering verifies that the atomic arrangements in these films are amorphous, while Auger electron spectroscopy and Rutherford backscattering spectroscopy show that the films have composition close to stoichiometric SiC, although slightly C-rich, with low impurity levels. Reflectance vs incidence angle measurements from 24 to 1216 A were used to derive optical constants of this material, which are presented here. Additionally, the measured extreme ultraviolet efficiency of a diffraction grating overcoated with sputtered amorphous silicon carbide is presented, demonstrating the feasibility of using these films as coatings for EUV optics.

Kortright, J. B.↗
NASA NTRS1988

Effect of substrate preparation on the structure and chemisorption properties of Pd/MgO model catalyst

Pd/MgO model catalysts are prepared by vapor deposition of Pd particles on MgO thin films which are deposited, at different temperatures, on UHV cleaved mica. MgO films and Pd particles are characterized in situ by Auger electron spectroscopy and energy-loss spectroscopy and ex situ by transmission electron microscopy. Succesive temperature programmed desorption (TPD) of CO shows a different evolution of the morphology of the Pd particles deposited on MgO films prepared at low and high temperature. In addition, on MgO prepared at low temperature, the smallest particles show a continuous decay of CO adsorption during TPD due to contamination by support species.

Henry, C. R.↗
NASA NTRS1989

A characterization study of a hydroxylated polycrystalline tin oxide surface

In this study Auger electron spectroscopy, electron spectroscopy for chemical analysis (ESCA) and electron-stimulated desorption (ESD) have been used to examine a polycrystalline tin oxide surface before and after annealing in vacuum at 500 C. Features due to surface hydroxyl groups are present in both the ESCA and ESD spectra, and ESD shows that several chemical states of hydrogen are present. Annealing at 500 C causes a large reduction in the surface hydrogen concentration but not complete removal.

Hoflund, Gar B.↗
NASA NTRS1990

Characterization study of polycrystalline tin oxide surfaces before and after reduction in CO

Polycrystalline tin oxide surfaces have been examined before and after reduction in 40 Torr of CO at 100 and 175 C using Auger electron spectroscopy (AES), electron spectroscopy for chemical analysis (ESCA), ion scattering spectroscopy (ISS) and electron stimulated desorption (ESD). The changes in the surface composition and chemical states of the surface species generally are subtle for the reductive conditions used. However, significant changes do occur with regard to the amounts and the chemical forms of the hydrogen-containing species remaining after both the 100 and 175 C reductions.

Drawdy, Jean E.↗
NASA NTRS1990

Oxidation characteristics of Ti-14Al-21Nb ingot alloy

Static oxidation kinetics of Ti14Al21Nb (wt pct) ingot alloy were studied in air over the temperature interval of 649 to 1093 C in a thermogravimetric apparatus. The oxidation products were characterized by x ray diffraction, electron microprobe analysis, energy dispersive x ray analysis, and Auger electron spectroscopy. Cross-sections of the oxidized samples were also examined using light and scanning electron microscopy. The oxidation rate was substantially lower than the conventional alloys of titanium, but the kinetics displayed a complex behavior involving two or more oxidation rates depending on the temperature and duration of exposure. The primary oxide formed was TiO2, but this oxide was doped with Nb. Small amounts of Al2O3 and TiN were also present in the scale. Diffusion of oxygen into the alloy was observed and the diffusivity seemed to be dependent on the microstructure of the metal. A model was presented to explain the oxidation behavior of the alloy in terms of the reduction in the oxygen diffusivity in the oxide caused by the modification of the defect structure of TiO2 by Nb ions.

Sankaran, Sankara N.↗
NASA NTRS1988

Determination of the SSME high pressure oxidizer turbopump bearing temperature

The SSME high pressure liquid oxygen turbopump (HPOTP) bearings sometimes wear and experience heating and oxidation of the ball and raceway surfaces. So far it has been impossible to measure the temperature of the bearings directly during operation of the turbopumps. However, a method was developed for determining the surface temperature of the bearings from the composition of the oxides using oxidation samples for calibration and Auger Electron Spectroscopy (AES) for chemical analysis.

Naerheim, Y.↗
NASA NTRS1991

LDEF impact craters formed by carbon-rich impactors

Two small craters (number 74, 119 microns, and number 31, 158 microns in diameter) with depth to diameter ratios of about 0.59 and 0.8, respectively, were found in Al from the Long Duration Exposure Facility (LDEF) experiment tray A11EOOF). Both craters have residues concentrated in the crater bottoms, along the walls, and on top of the overturned rims. Low voltage scanning electron electron microscopy, Auger electron spectroscopy, time of flight secondary ion mass spectroscopy and energy dispersive x-ray spectroscopy were used to obtain high resolution imagery and elemental analysis. Analyses indicate that the impactor for both craters was carbon-rich, as the residues contain mostly C. Silicon, S, and F in low concentrations are present on the Al surface away from the craters and may be, in part, contaminants.

Bunch, T. E.↗
NASA NTRS1991

Optical performance of exposed solar cell covers

The characterization results of samples flown on the Long Duration Exposure Facility (LDEF) are discussed. These samples included both coated and uncoated fused silica and ceria glass substrates used in the manufacture of solar cell covers. The coatings comprised a single-layer magnesium fluoride antireflection coating and an all-dielectric high-reflector multilayer coating centered at 350 nm. Samples were mounted on both the leading and trailing surfaces of the LDEF for exposure to the environment of space. The optical properties of the coatings will be compared to control samples which were stored on the ground during the LDEF Mission. Results of Auger Electron Spectroscopy and Rutherford Backscatter Spectroscopy measurements made on several of the coatings are presented to explain the effects of space on the chemical composition of the coatings.

Hichwa, Bryant P.↗
NASA NTRS1991

Plasma-deposited germanium nitride gate insulators for indium phosphide metal-insulator-semiconductor field-effect transistors

Plasma-deposited germanium nitride was investigated for the first time as a possible gate insulator for InP compound semiconductor metal-insulator-semiconductor FET (MISFET) technology. The germanium nitride films were successfully deposited in a capacitively coupled parallel plate reactor at 13.56 MHz operation using GeH4/N2/NH3 and GeH4/N2 mixtures as reactant gases. The former process produced better quality films with enhanced uniformity, increased deposition rates, and increased resistivity. The breakdown field strength of the films was greater than 10 to the 6th V/cm. Auger electron spectroscopy did not indicate significant chemical composition differences between the two processes. For MISFETs with 2-micron channel lengths fabricated on InP, the device transconductance and threshold voltage for the GeH4/N2/NH3 process were 17 mS/mm and -3.6 V, respectively. The drain-source breakdown voltages were greater than 10 V.

Johnson, Gregory A.↗
NASA NTRS1991

Imaging analysis of LDEF craters

Two small craters in Al from the Long Duration Exposure Facility (LDEF) experiment tray A11E00F (no. 74, 119 micron diameter and no. 31, 158 micron diameter) were analyzed using Auger electron spectroscopy (AES), time-of-flight secondary ion mass spectroscopy (TOF-SIMS), low voltage scanning electron microscopy (LVSEM), and SEM energy dispersive spectroscopy (EDS). High resolution images and sensitive elemental and molecular analysis were obtained with this combined approach. The result of these analyses are presented.

Radicatidibrozolo, F.↗
NASA NTRS1992

Deposition of adherent Ag-Ti duplex films on ceramics in a multiple-cathode sputter deposition system

The adhesion of Ag films deposited on oxide ceramics can be increased by first depositing intermediate films of active metals such as Ti. Such duplex coatings can be fabricated in a widely used three target sputter deposition system. It is shown here that the beneficial effect of the intermediate Ti film can be defeated by commonly used in situ target and substrate sputter cleaning procedures which result in Ag under the Ti. Auger electron spectroscopy and wear testing of the coatings are used to develop a cleaning strategy resulting in an adherent film system.

Honecy, Frank S.↗
NASA NTRS1992

Optical performance of exposed solar cell covers

This paper discusses the characterization results of samples flown on the Long Duration Exposure Facility (LDEF). These samples included both coated and uncoated fused silica and ceria glass substrates used in the manufacture of solar cell covers. The coatings comprised a single-layer magnesium fluoride antireflection coating and an all-dielectric high-reflector multilayer coating centered at 350 nm. Samples were mounted on both the leading and trailing surfaces of the LDEF for exposure to the environment of space. The optical properties of the coatings will be compared to control samples which were stored on the ground during the LDEF Mission. Results of Auger Electron Spectroscopy and Rutherford Backscatter Spectroscopy measurements made on several of the coatings will be presented to explain the effects of space on the chemical composition of the coatings.

Thomas H Allen↗
NASA NTRS1993

The interaction of atomic oxygen with copper: An XPS, AES, XRD, optical transmission, and stylus profilometry study

The University of Alabama in Huntsville (UAH) experiment A-0114 was designed to study the reaction of material surfaces with low earth orbits (LEO) atmospheric oxygen. The experiment contained 128 one-inch circular samples; metals, polymers, carbons, and semiconductors. Half of these samples were exposed on the front of the Long Duration Exposure Facility (LDEF) and remaining on the rear. Among metal samples, copper has shown some interesting new results. There were two forms of copper samples: a thin film sputter-coated on fused silica and a solid piece of OFHC copper. They were characterized by x-ray and Auger electron spectroscopies, x-ray diffraction, and high resolution profilometry. Cu 2p core level spectra were used to demonstrate the presence of Cu2O and CuO and to determine the oxidation states.

Raikar, Ganesh N.↗
NASA NTRS1992

Thermal oxidation of single-crystal silicon carbide - Kinetic, electrical, and chemical studies

This paper presents kinetic data from oxidation studies of the polar faces for 3C and 6H SiC in wet and dry oxidizing ambients. Values for the linear and parabolic rate constants were obtained, as well as preliminary results for the activation energies of the rate constants. Examples are presented describing how thermal oxidation can be used to map polytypes and characterize defects in epitaxial layers grown on low tilt angle 6H SiC substrates. Interface widths were measured using Auger electron spectroscopy (AES) with Ar ion beam depth profiling and variable angle spectroscopic ellipsometry (VASE) with effective medium approximation (EMA) models. Preliminary electrical measurements of MOS capacitors are also presented.

Petit, J. B.↗
NASA NTRS1993

Hydrogen partitioning and transport in titanium aluminides

This report gives the final summary of the research work perfomed from March 1, 1990 to August 28, 1993. Brief descriptions of the research findings are given on the surface variation of Ti-14Al-21Nb as a function of temperature under ultrahigh vacuum conditions; titanium aluminides: surface composition effects as a function of temperature; Auger electron intensity variation in oxygen-charged silver; and segregation of sulfur on a titanium surface studied by Auger electron spectroscopy. Each description details one or more of the attached corresponding figures. Published journal documents are provided as appendices to give further detail.

Han, Kwang S.↗
NASA NTRS1993

Surface compositional variations of Mo-47Re alloy as a function of temperature

Molybdenum-rhenium alloys are candidate materials for the National Aero-Space Plane (NASP) as well as for other applications in generic hypersonics. These materials are expected to be subjected to high-temperature (above 1200 C) casual hydrogen (below 50 torr), which could potentially degrade the material strength. Since the uptake of hydrogen may be controlled by the contaminant surface barriers, a study of Mo-47Re was conducted to examine the variations in surface composition as a function of temperature from 25 C to 1000 C. Pure molybdenum and rhenium were also examined and the results compared with those for the alloy. The analytical techniques employed were Auger electron spectroscopy, electron energy loss spectroscopy, ion scattering spectroscopy, and x ray photoelectron spectroscopy. The native surface was rich in metallic oxides that disappeared at elevated temperatures. As the temperature increased, the carbon and oxygen disappeared by 800 C and the surface was subsequently populated by the segregation of silicon, presumably from the grain boundaries. The alloy readily chemisorbed oxygen, which disappeared with heating. The disappearance temperature progressively increased for successive dosings. When the alloy was exposed to 800 torr of hydrogen at 900 C for 1 hour, no hydrogen interaction was observed.

Hoekje, S. J.↗
NASA NTRS1993

Comprehensive investigation of HgCdTe metalorganic chemical vapor deposition

The principal objective of this experimental and theoretical research program was to explore the possibility of depositing high quality epitaxial CdTe and HgCdTe at very low pressures through metalorganic chemical vapor deposition (MOCVD). We explored two important aspects of this potential process: (1) the interaction of molecular flow transport and deposition in an MOCVD reactor with a commercial configuration, and (2) the kinetics of metal alkyl source gas adsorption, decomposition and desorption from the growing film surface using ultra high vacuum surface science reaction techniques. To explore the transport-reaction issue, we have developed a reaction engineering analysis of a multiple wafer-in-tube ultrahigh vacuum chemical vapor deposition (UHV/CVD) reactor which allows an estimate of wafer or substrate throughput for a reactor of fixed geometry and a given deposition chemistry with specified film thickness uniformity constraints. The model employs a description of ballistic transport and reaction based on the pseudo-steady approximation to the Boltzmann equation in the limit of pure molecular flow. The model representation takes the form of an integral equation for the flux of each reactant or intermediate species to the wafer surfaces. Expressions for the reactive sticking coefficients (RSC) for each species must be incorporated in the term which represents reemission from a wafer surface. The interactions of MOCVD precursors with Si and CdTe were investigated using temperature programmed desorption (TPD) in ultra high vacuum combined with Auger electron spectroscopy (AES). These studies revealed that diethyltellurium (DETe) and dimethylcadmium (DMCd) adsorb weakly on clean Si(100) and desorb upon heating without decomposing. These precursors adsorb both weakly and strongly on CdTe(111)A, with DMCd exhibiting the stronger interaction with the surface than DETe.

Raupp, Gregory B.↗