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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 181 records · Page 10
All sourcesNASA NTRSDOE OSTI
DOE OSTI2022

Novel light field imaging device with enhanced light collection for cold atom clouds

We present a light field imaging system that captures multiple views of an object with a single shot. The system is designed to maximize the total light collection by accepting a larger solid angle of light than a conventional lens with equivalent depth of field. This is achieved by populating a plane of virtual objects using mirrors and fully utilizing the available field of view and depth of field. Simulation results demonstrate that this design is capable of single-shot tomography of objects of size $\mathcal{O}$(1 mm 3 ), reconstructing the 3-dimensional (3D) distribution and features not accessible from any single view angle in isolation. In particular, for atom clouds used in atom interferometry experiments, the system can reconstruct 3D fringe patterns with size $\mathcal{O}$(100 μm). We also demonstrate this system with a 3D-printed prototype. The prototype is used to take images of $\mathcal{O}$(1 mm 3 ) sized objects, and 3D reconstruction algorithms running on a single-shot image successfully reconstruct $\mathcal{O}$(100 μm) internal features. The prototype also shows that the system can be built with 3D printing technology and hence can be deployed quickly and cost-effectively in experiments with needs for enhanced light collection or 3D reconstruction. Imaging of cold atom clouds in atom interferometry is a key application of this new type of imaging device where enhanced light collection, high depth of field, and 3D tomographic reconstruction can provide new handles to characterize the atom clouds.

47 OTHER INSTRUMENTATION↗
DOE OSTI2020

A pulsed-power implementation of “Laser Gate” for increasing laser energy coupling and fusion yield in magnetized liner inertial fusion (MagLIF)

Magnetized Liner Inertial Fusion (MagLIF) at Sandia National Laboratories involves a laser preheating stage,where a few-ns laser pulse passes through a few-micron-thick plastic window to preheat gaseous fusion fuel contained within the MagLIF target. Interactions with this window reduce heating e ciency and mix window and target materials into the fuel. A recently proposed idea called \Laser Gate" involves removing the window well before the preheating laser is applied. In this article, we introduce experimental proof-of-principle results for a pulsed-power implementation of Laser Gate, where a thin current-carrying wire weakens the perimeter of the window, allowing the fuel pressure to push the window open and away from the preheating laser path. For this e ort, transparent targets were fabricated and a test facility capable of studying this version of Laser Gate was developed. A 12-frame bright- eld laser schlieren/shadowgraphy imaging system captured the window opening dynamics on microsecond timescales. The images exhibit that the window remains largely intact as it opens and detaches from the target. A column of escaping pressurized gas appears to prevent the detached window from inadvertently moving into the preheating laser path.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

Monte Carlo N-Particle Transport Performance of Predicting Digital Radiographic IQI Inspection

The identification of porosity, geometric noncompliance, and other defect types are critical to the qualification of materials and components. X-ray radiographic nondestructive testing is a common industrial inspection method for process quality control and component qualification and certification. Digital radiography provides a quick and efficient alternative when compared to traditional film-based inspection. The quality of radiographic inspection is dependent on equipment specifications, such as the source spot size and detector pixel size, and the specific parameters selected for use for the radiographic technique. To evaluate if an x-ray system and technique is sufficient for a given requirement, a radiographic image quality indicator (IQI) can be used. Radiographic IQIs in hard to machine materials or hard to manufacture defects can be time consuming and expensive to manufacture. This study was conducted to evaluate current Savannah River National Laboratory (SRNL) x-ray imaging systems with a custom tantalum IQI and using Monte Carlo simulations to predict the performance of future systems. The tantalum IQI was tested using a Siefert Isovolt 420 keV x-ray tube with a Perkin Elmer XRD 1611 flat panel with 100-micron pixels. Using the Monte Carlo N-Particle transport software, the radiographic tally was used to simulate the photon flux through an identical tantalum IQI. These simulations provided a benchmark as to the best theoretical identification on a given system using our tantalum IQI. The simulations were refined to match SRNL’s current systems’ noise levels, leading to confidence in their ability to predict the performance of other systems that may be purchased and deployed in the future at the Savannah River Site. Future studies will be conducted to prove this research can be extended to artificially evaluate the ability for systems to identify critical defect sizes through x-ray radiographic inspection, drastically reducing the cost and time burdens of producing high-fidelity radiographic test articles.

digital X-ray radiography↗
DOE OSTI2021

Photon-Sparse, Poisson Light-Sheet Microscopy

Light-sheet microscopy has revolutionized bioimaging by enabling approximately an order of magnitude reduction in specimen irradiance compared to confocal imaging. Here, we introduce a light-sheet imaging system that enables an additional order of magnitude reduction in specimen irradiance by operating at the Poisson limit. To operate at this limit, we integrated classical illumination with single-photon detection and wavelet-based image reconstruction. This integration enabled brightness quantification and object recognition from fewer than one detected photon per image pixel, corresponding to more than 10-fold lower irradiance levels than modern systems. We demonstrate how such photon-sparse imaging can eradicate photobleaching and enable both dim and bright object imaging, thus, further enhancing the related gains of light-sheet microscopy.

60 APPLIED LIFE SCIENCES↗
DOE OSTI2020

Strong Lensing Model of SPT-CL J0356–5337, a Major Merger Candidate at Redshift 1.0359

We present an analysis of the mass distribution inferred from strong lensing by SPT-CL J0356-5337, a cluster of galaxies at redshift $z=1.0359$ revealed in the follow-up of the SPT-SZ clusters. The cluster has an Einstein radius of ${\theta }_{{\rm{E}}}\simeq $ 14'' for a source at z = 3 and a mass within 500 kpc of ${M}_{500\mathrm{kpc}}=4.0\pm 0.8\times {10}^{14}\,$ ${M}_{\odot }$ . Our spectroscopic identification of three multiply imaged systems ($z=2.363$, $z=2.364$, and $z=3.048$), combined with HSTF606W-band imaging allows us to build a strong lensing model for this cluster with an rms of $\leqslant 0\buildrel{\prime\prime}\over{.} 3$. Our modeling reveals a two-component mass distribution in the cluster. One mass component is dominated by the brightest cluster Galaxy and the other component, separated by ~170 kpc, contains a group of eight red elliptical galaxies confined in a ~9'' (~70 kpc) diameter circle. We estimate the mass ratio between the two components to be between 1:1.25 and 1:1.58. In addition, spectroscopic data reveal that these two near-equal mass cores have only a small velocity difference of ~300 km s-1 between the two components. This small radial velocity difference suggests that most of the relative velocity takes place in the plane of the sky, and implies that SPT-CL J0356-5337 is a major merger with a small impact parameter seen face-on. We also assess the relative contributions of Galaxy-scale halos to the overall mass of the core of the cluster and find that within 800 kpc from the brightest cluster Galaxy about 27% of the total mass can be attributed to visible and dark matter associated with galaxies, whereas only 73% of the total mass in the core comes from cluster-scale dark matter halos.

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2020

Potential of Attosecond Coherent Diffractive Imaging

Attosecond science has been transforming our understanding of electron dynamics in atoms, molecules, and solids. However, to date almost all of the attoscience experiments have been based on spectroscopic measurements because attosecond pulses have intrinsically very broad spectra due to the uncertainty principle and are incompatible with conventional imaging systems. In this paper we report an important advance towards achieving attosecond coherent diffractive imaging. Using simulated attosecond pulses, we simultaneously reconstruct the spectrum, 17 probes, and 17 spectral images of extended objects from a set of ptychographic diffraction patterns. We further confirm the principle and feasibility of this method by successfully performing a ptychographic coherent diffractive imaging experiment using a light-emitting diode with a broad spectrum. We believe this work clears the way to an unexplored domain of attosecond imaging science, which could have a far-reaching impact across different disciplines.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Characterization of a SiPM-based monolithic neutron scatter camera using dark counts

The Single Volume Scatter Camera (SVSC) Collaboration aims to develop portable neutron imaging systems for a variety of applications in nuclear non-proliferation. Conventional double-scatter neutron imagers are composed of several separate detector volumes organized in at least two planes. A neutron must scatter in two of these detector volumes for its initial trajectory to be reconstructed. As such, these systems typically have a large footprint and poor geometric efficiency. We report on the design and characterization of a prototype monolithic neutron scatter camera that is intended to significantly improve upon the geometrical shortcomings of conventional neutron cameras. The detector consists of a 50 mm×56 mm× 60 mm monolithic block of EJ-204 plastic scintillator instrumented on two faces with arrays of 64 Hamamatsu S13360-6075PE silicon photomultipliers (SiPMs). The electronic crosstalk is limited to < 5% between adjacent channels and < 0.1% between all other channel pairs. SiPMs introduce a significantly elevated dark count rate over PMTs, as well as correlated noise from after-pulsing and optical crosstalk. In this article, we characterize the dark count rate and optical crosstalk and present a modified event reconstruction likelihood function that accounts for them. We find that the average dark count rate per SiPM is 4.3 MHz with a standard deviation of 1.5 MHz among devices. The analysis method we employ to measure internal optical crosstalk also naturally yields the mean and width of the single-electron pulse height. Here, we calculate separate contributions to the width of the single-electron pulse-height from electronic noise and avalanche fluctuations. We demonstrate a timing resolution for a single-photon pulse to be (128 ± 4) ps. Finally, coincidence analysis is employed to measure external (pixel-to-pixel) optical crosstalk. We present a map of the average external crosstalk probability between 2×4 groups of SiPMs, as well as the in-situ timing characteristics extracted from the coincidence analysis. Further work is needed to characterize the performance of the camera at reconstructing single- and double-site interactions, as well as image reconstruction.

47 OTHER INSTRUMENTATION↗
DOE OSTI2024

Innovative approaches to neutron beam optimization: A case study of FP14 at LANSCE

This paper describes an experimental method to acquire high resolution energy- and spatially- resolved neutron beam spots using the time-gated neutron imaging system with Teledyne Pi-MAX4 camera. These experimental data offer a unique opportunity for benchmarking beam spot simulations. High-quality simulations depend significantly on a high-fidelity geometry model, which can be challenging for legacy facilities. We informed our MCNPX geometry model by latest metrology survey employing Leica laser tracker ATS600. It gave us a high fidelity description of our facility geometry. Such a robust integration of novel tools and methods yields a previously unattainable level of accuracy in both predicting and capturing neutron beam spots, marking a notable advancement over traditional methods reliant on static image plates. Here, to demonstrate the practical application of these tools, we are showing a non-uniform beam spot challenge at our Flight Path 14 (FP14) at the Los Alamos Neutron Science Center (LANSCE). Our precise MCNPX prediction of beam spot shifting as function of neutron energy was confirmed by experimental beam spot measured with extremely high level of detail. Results of this research demonstrate a significant leap in neutron beam optimization at LANSCE and set a new benchmark in beam spot characterization. The advanced methods presented here have potential for adoption at similar research facilities worldwide, aiming at substantial improvement in neutron beam delivery for experiments.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2023

Snapshot multispectral imaging using a diffractive optical network

Abstract Multispectral imaging has been used for numerous applications in e.g., environmental monitoring, aerospace, defense, and biomedicine. Here, we present a diffractive optical network-based multispectral imaging system trained using deep learning to create a virtual spectral filter array at the output image field-of-view. This diffractive multispectral imager performs spatially-coherent imaging over a large spectrum, and at the same time, routes a pre-determined set of spectral channels onto an array of pixels at the output plane, converting a monochrome focal-plane array or image sensor into a multispectral imaging device without any spectral filters or image recovery algorithms. Furthermore, the spectral responsivity of this diffractive multispectral imager is not sensitive to input polarization states. Through numerical simulations, we present different diffractive network designs that achieve snapshot multispectral imaging with 4, 9 and 16 unique spectral bands within the visible spectrum, based on passive spatially-structured diffractive surfaces, with a compact design that axially spans ~72 λ m , where λ m is the mean wavelength of the spectral band of interest. Moreover, we experimentally demonstrate a diffractive multispectral imager based on a 3D-printed diffractive network that creates at its output image plane a spatially repeating virtual spectral filter array with 2 × 2 = 4 unique bands at terahertz spectrum. Due to their compact form factor and computation-free, power-efficient and polarization-insensitive forward operation, diffractive multispectral imagers can be transformative for various imaging and sensing applications and be used at different parts of the electromagnetic spectrum where high-density and wide-area multispectral pixel arrays are not widely available.

36 MATERIALS SCIENCE↗
DOE OSTI2022

Tissue-mimicking phantoms for performance evaluation of photoacoustic microscopy systems

Phantom-based performance test methods are critically needed to support development and clinical translation of emerging photoacoustic microscopy (PAM) devices. While phantoms have been recently developed for macroscopic photoacoustic imaging systems, there is an unmet need for well-characterized tissue-mimicking materials (TMMs) and phantoms suitable for evaluating PAM systems. Our objective was to develop and characterize a suitable dermis-mimicking TMM based on polyacrylamide hydrogels and demonstrate its utility for constructing image quality phantoms. TMM formulations were optically characterized over 400–1100 nm using integrating sphere spectrophotometry and acoustically characterized using a pulse through-transmission method over 8–24 MHz with highly confident extrapolation throughout the usable band of the PAM system. This TMM was used to construct a spatial resolution phantom containing gold nanoparticle point targets and a penetration depth phantom containing slanted tungsten filaments and blood-filled tubes. These phantoms were used to characterize performance of a custom-built PAM system. The TMM was found to be broadly tunable and specific formulations were identified to mimic human dermis at an optical wavelength of 570 nm and acoustic frequencies of 10–50 MHz. Imaging results showed that tungsten filaments yielded 1.1–4.2 times greater apparent maximum imaging depth than blood-filled tubes, which may overestimate real-world performance for vascular imaging applications. Nanoparticles were detectable only to depths of 120–200 µm, which may be due to the relatively weaker absorption of single nanoparticles vs. larger targets containing high concentration of hemoglobin. The developed TMMs and phantoms are useful tools to support PAM device characterization and optimization, streamline regulatory decision-making, and accelerate clinical translation.

Hsu, Hsun-Chia↗
DOE OSTI2025

Angular-spectral filtering of recoil protons for optimization of fast neutron imaging employing proton converters

Fast neutron imaging is an important capability for diverse applications such as inertial confinement fusion diagnostics, cargo security, nuclear nonproliferation and arms control, and industrial inspection. Traditional phosphor image plates can be enhanced for fast neutron imaging using hydrogenous plastic converters which allow fast neutrons to scatter off hydrogen nuclei to produce energetic protons that can be recorded by the image plate. However, protons emitted by image plates are not constrained in their emission angle, which contributes to the blur of the resulting image. Here, we investigate two methods that can alter the spatial extent of converted protons that deposit energy in the image plate: reducing the converter thickness, and introducing a proton filter between the plastic converter and image plate to reduce the contribution of lower-energy, off-axis protons to the image. Here we determine the optimal plastic converter thickness for maximizing the signal intensity to be 2–3 mm through Monte Carlo simulations, and we benchmark this result against experimental measurements with a deuterium-tritium (DT) neutron generator. Next, we evaluate the image smearing and signal loss for various converters to show that solely reducing the converter thickness has the expected effect of reducing the blur from proton image smearing of the sharpness of an edge recorded on the image plate at the cost of reducing the signal intensity. The use of a proton filter is shown to achieve a similar improvement of edge sharpness as reducing the converter thickness while also sacrificing the signal intensity. We conclude that the use of proton energy filtering can improve the sharpness of fast neutron images in situations where the converter thickness cannot be reduced below some practical minimum. For more intense neutron sources, the signal intensity is of less concern, and optimizing the resolution of the image plate and therefore of the imaging system could have greater value. In these applications, proton filters may allow for improved fast neutron imaging measurements.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2020

Recent advances in computational mathematics and applications

We are honored to bring you this special issue dedicated to recent advances in computational mathematics and applications in science and engineering. The papers in this special issue were presented in ”Conference on Computational Mathematics and Applications (CCMA)” held at the University of Nevada Las Vegas (UNLV) during October 25–27, 2019. The conference has attracted about 90 attendees from six countries. The 15 papers in the special issue comprise a diverse collection of theoretical numerical analysis as well as applications in various subjects. Topics cover optimal control of PDEs, discontinuous Galerkin methods, fluid flow in porous media, turbulence flow, static and moving interface problems, complex fluids composed by the mixture of Newtonian fluid and nematic (liquid crystal) flows, modeling of ocean–atmosphere system, image segmentation algorithm, uncertainty quantification problems for turbulence model and Maxwell’s equations, iterative solver for systems resulting from mixed methods, and novel methods for solving systems of nonlinear equations. As the Guest Editors we would like to thank Dr. Leland Jameson at NSF (National Science Foundation) for kindly supporting our conference proposal which made this conference possible. We would also like to thank Darren Sugrue from Elsevier who provided partial support for our conference, and Thennarasu Gunasekaran and his production team from Elsevier who produced this nice special issue. We are grateful to many people (Dr. Zhijian Wu, Lori Ornelas, Elsa Juarez, and many Ph.D. students) at the Department of Mathematical Sciences of UNLV who provided tremendous support for the conference. Finally, we very much appreciate all authors who contributed their precious results to this special issue.

97 MATHEMATICS AND COMPUTING↗
DOE OSTI2024

Workshop on Radiographic Imaging and Applications Research and Development Recommendations for Field Radiography

The Workshop on Radiographic Imaging and Applications (WORIA) brought together subject matter experts from industry, academia, US and UK government agencies, and the national laboratories to provide a forum to liaise and share information between technology developers in government and industry, end users, and mission stakeholder to produce an “expert consensus view” regarding future research directions toward a comprehensive radiography/penetrating imaging portfolio in the Defense Nuclear Nonproliferation Research and Development Near Field Detection Portfolio. The inaugural WORIA was held at the Spallation Neutron Source at Oak Ridge National Laboratory on February 7–9, 2023. The inaugural WORIA meeting focused on field radiography applications, or situations in which a portable imaging system must be brought to an item of interest (rather than the item brought to an imaging facility). This report documents consensus views derived from the meeting and provides research and development recommendations for federal program managers.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2023

Mapping and imaging ionizing radiation in two and three dimensions

A two-dimensional imaging system and a two-dimensional or three-dimensional optical tomographic mapping system, each employing gas scintillation induced by ionizing radiation, i.e., radioluminescence, and corresponding methods, are disclosed. The systems may employ one or more cameras and corresponding UV filters (potentially solar blind filters) for imaging a radioluminescent scene. For two-dimensional or three-dimensional mapping, the resultant UV images are spatially registered with one another and then reconstructed to form a three-dimensional tomographic map of the ionizing radiation. The two-dimensional map is a plane of the three-dimensional map. The UV images may be spatially registered by using a reference source, optionally, a calibrated reference source allowing dosimetry calculations for the ionizing radiation. Molecular nitrogen is the primary candidate for the radioluminescent gas, though a controlled ambient in a chamber of nitric oxide, argon, krypton, or xenon may be employed. The reconstruction process employs an algebraic reconstruction technique or an Abel inversion.

Bentz, Brian Z.↗
DOE OSTI2022

Fully Integrated Ultra-thin Intraoperative Micro-imager for Cancer Detection Using Upconverting Nanoparticles

Abstract Purpose Intraoperative detection and removal of microscopic residual disease (MRD) remain critical to the outcome of cancer surgeries. Today’s minimally invasive surgical procedures require miniaturization and surgical integration of highly sensitive imagers to seamlessly integrate into the modern clinical workflow. However, current intraoperative imagers remain cumbersome and still heavily dependent on large lenses and rigid filters, precluding further miniaturization and integration into surgical tools. Procedures We have successfully engineered a chip-scale intraoperative micro-imager array—without optical filters or lenses—integrated with lanthanide-based alloyed upconverting nanoparticles (aUCNPs) to achieve tissue imaging using a single micro-chip. This imaging platform is able to leverage the unique optical properties of aUCNPs (long luminescent lifetime, high-efficiency upconversion, no photobleaching) by utilizing a time-resolved imaging method to acquire images using a 36-by-80-pixel, 2.3 mm $$\times$$ × 4.8 mm silicon-based electronic imager micro-chip, that is, less than 100-µm thin. Each pixel incorporates a novel architecture enabling automated background measurement and cancellation. We have validated the performance, spatial resolution, and the background cancellation scheme of the imaging platform, using resolution test targets and mouse prostate tumor sample intratumorally injected with aUCNPs. To demonstrate the ability to image MRD, or tumor margins, we evaluated the imaging platform in visualizing a single-cell thin section of the injected prostate tumor sample. Results Tested on USAF resolution targets, the imager is able to achieve a resolution of 71 µm. We have also demonstrated successful background cancellation, achieving a signal-to-background ratio of 8 when performing ex vivo imaging on aUCNP-injected prostate tumor sample, improved from originally 0.4. The performance of the imaging platform on single-cell layer sections was also evaluated and the sensor achieved a signal-to-background ratio of 4.3 in resolving cell clusters with sizes as low as 200 cells. Conclusion The imaging system proposed here is a scalable chip-scale ultra-thin alternative for bulky conventional intraoperative imagers. Its novel pixel architecture and background correction scheme enable visualization of microscopic-scale residual disease while remaining completely free of lenses and filters, achieving an ultra-miniaturized form factor—critical for intraoperative settings.

59 BASIC BIOLOGICAL SCIENCES↗
DOE OSTI2022

Advances in phosphor two-color ratio method thermography for full-field surface temperature measurements

We report thermographic phosphors can be employed for optical sensing of surface, gas phase, and bulk material temperatures through different strategies including the time-decay method, time-integrated method, and frequency-domain method. We focus on the time-integrated method, also known as the ratio method, as it can be more practical in many situations. This work advances the ratio method using two machine vision cameras with CMOS detectors for full-field temperature measurements of a solid surface. A phosphor calibration coupon is fabricated using aerosol deposition and employed for in situ determination of the temperature-versus-intensity ratio relationship. Algorithms from digital image correlation are employed to determine the stereoscopic imaging system intrinsic and extrinsic parameters, and accurately register material points on the sample to subpixel locations in each image with 0.07 px or better accuracy. Detector nonlinearity is carefully characterized and corrected. Temperature-dependent, spatial non-uniformity of the full-field intensity ratio—posited to be caused by a blue-shift effect of the bandpass filter for non-collimated light and/or a wavelength-dependent transmission efficiency of the lens—is assessed and treated for cases where a standard flat-field correction fails to correct the non-uniformity. In sum, pixel-wise calibration curves relating the computed intensity ratio to temperature in the range of T = 300–430 K are generated, with an embedded error of less than 3 K. This work offers a full calibration methodology and several improvements on two-color phosphor thermography, opening the door for full-field temperature measurements in dynamic tests with deforming test articles.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2024

Thermographic phosphor digital image correlation

The invention advances the ratio method of phosphor thermography using two machine vision cameras for full-field temperature measurements of a solid surface. As an example, algorithms from digital image correlation (DIC) can be used to determine the stereoscopic imaging system intrinsic and extrinsic parameters, and accurately register material points on the sample to subpixel locations in each image with 0.07 px or better accuracy. A phosphor calibration sample fabricated using aerosol deposition can be used for in situ determination of the temperature-versus-intensity ratio relationship. The full calibration methodology and several improvements on two-color phosphor thermography open the door for full-field temperature measurements in dynamic tests with deforming test specimens. In particular, thermographic phosphors can be combined with stereo digital image correlation in a novel diagnostic, TP+DIC, to measure time-resolved full-field surface strains and temperatures simultaneously, thereby enabling testing in combined thermo-mechanical environments.

Winters, Caroline↗
DOE OSTI2026

Binary pseudo-random array standard for extreme ultraviolet lithography tool characterization

Extreme ultraviolet (EUV) imaging tools play a crucial role in EUV lithography. Achieving high accuracy in EUV metrology is essential for advanced semiconductor manufacturing. A thorough characterization of the instrumentation in use is required. Binary pseudo-random arrays (BPRAs) are an established standard for calibrating and characterizing optical instruments in the frequency domain. Here, we expand the BPRA standard to applications in EUV imaging. To extend the technology to the EUV spectral range, a high-resolution BPRA target with the smallest feature size of 40 nm is developed. The EUV BPRA target establishes an in situ and portable calibration and alignment standard for EUV imaging. The target is patterned by means of electron-beam lithography, using a nickel absorber with a thickness of 39 nm. The substrate is a 4″ silicon wafer with a molybdenum/silicon multilayer coating. To demonstrate the efficacy of the target and develop the instrument calibration protocol, the target is imaged on the Sharp Hyper-NA Actinic Reticle Review Project EUV mask microscope. Power spectral density (PSD) data are presented. The characteristics of the imaging system are imprinted on the PSD. The modulation transfer function is extracted from the PSD data. A partially coherent imaging model is used as a reference to the experimental results.

BPRA↗