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Environmental microbiology as related to planetary quarantine

The experimental design of a study to evaluate the effect of different cleaning methods and storage conditions on the dry heat resistance of Bacillus subtilis var. niger spores is described and the results for the first evaluation are reported. Specifically, the synergistic effect which occurs when spores are subjected simultaneously to dry heat and gamma radiation so as to be able to specify thermoradiation sterilization cycles was investigated. Attempts were made to understand the underlying mechanism(s) that lead to spore death from this combination of stresses. Data cover: (1) the survival of spores on surfaces at various temperatures in a precisely controlled environmental system, (2) the rate of destruction of these spores at ambient temperature when subjected to gamma radiation, and (3) the rate of destruction of spores when they are subjected to combined gamma radiation and thermal stresses.

Pflug, I. J.↗

Aeroacoustic Computations of a Generic Low Boom Concept in Landing Configuration: Part 3 - Aerodynamic Validation and Noise Source Identification

Wind tunnel test data were used to validate the predicted aerodynamic behavior of a 15%-scale version of a generic, low-boom aircraft. The test was conducted in the NASA Langley 14- by 22-Foot Subsonic Tunnel to determine the low-speed aerodynamic characteristics of the model. Measured steady surface pressures and global forces were used to validate predicted aerodynamic results obtained from high-fidelity simulations of the model as installed in the tunnel. Very good agreement between predicted and measured aerodynamic trends was demonstrated, providing the impetus to proceed with companion airframe noise simulations that were conducted in a free-air setting. Computed near-field flow variables acquired on a permeable data surface were used to generate synthetic pressure records for two 800-element phased microphone arrays positioned overhead and to the side of the model. The array data were beamformed to generate noise source localization maps for the clean model and several landing configurations. Primary and secondary airframe sources were identified and their relative strengths were determined. Far-field integrated noise spectra for the full aircraft, as well as individual components, were obtained from the source maps via integration of tailored regions. The analysis showed that noise produced by the landing gear was the dominant contributor to the far-field acoustic signature of the model, followed by flap noise. The effects of permeable data surface end caps, spatial resolution, array orientation, angle of attack, component interaction, velocity scaling, and numerical precision on synthetic far-field spectra were also evaluated.

low boom↗

Fabricating Radial Groove Gratings Using Projection Photolithography

Projection photolithography has been used as a fabrication method for radial grove gratings. Use of photolithographic method for diffraction grating fabrication represents the most significant breakthrough in grating technology in the last 60 years, since the introduction of holographic written gratings. Unlike traditional methods utilized for grating fabrication, this method has the advantage of producing complex diffractive groove contours that can be designed at pixel-by-pixel level, with pixel size currently at the level of 45 45 nm. Typical placement accuracy of the grating pixels is 10 nm over 30 nm. It is far superior to holographic, mechanically ruled or direct e-beam written gratings and results in high spatial coherence and low spectral cross-talk. Due to the smooth surface produced by reactive ion etch, such gratings have a low level of randomly scattered light. Also, due to high fidelity and good surface roughness, this method is ideally suited for fabrication of radial groove gratings. The projection mask is created using a laser writer. A single crystal silicon wafer is coated with photoresist, and then the projection mask, with its layer of photoresist, is exposed for patterning in a stepper or scanner. To develop the photoresist, the fabricator either removes the exposed areas (positive resist) of the unexposed areas (negative resist). Next, the patterned and developed photoresist silicon substrate is subjected to reactive ion etching. After this step, the substrate is cleaned. The projection mask is fabricated according to electronic design files that may be generated in GDS file format using any suitable CAD (computer-aided design) or other software program. Radial groove gratings in off-axis grazing angle of incidence mount are of special interest for x-ray spectroscopy, as they allow achieving higher spectral resolution for the same grating area and have lower alignment tolerances than traditional in-plane grating scheme. This is especially critical for NASA Constellation- X project that will utilize hundreds of gratings all of which need to be precisely aligned for x-ray observation of space.

Iazikov, Dmitri↗

Design and control of a macro-micro robot for precise force applications

Creating a robot which can delicately interact with its environment has been the goal of much research. Primarily two difficulties have made this goal hard to attain. The execution of control strategies which enable precise force manipulations are difficult to implement in real time because such algorithms have been too computationally complex for available controllers. Also, a robot mechanism which can quickly and precisely execute a force command is difficult to design. Actuation joints must be sufficiently stiff, frictionless, and lightweight so that desired torques can be accurately applied. This paper describes a robotic system which is capable of delicate manipulations. A modular high-performance multiprocessor control system was designed to provide sufficient compute power for executing advanced control methods. An 8 degree of freedom macro-micro mechanism was constructed to enable accurate tip forces. Control algorithms based on the impedance control method were derived, coded, and load balanced for maximum execution speed on the multiprocessor system. Delicate force tasks such as polishing, finishing, cleaning, and deburring, are the target applications of the robot.

Wang, Yulun↗

NASA Tech Briefs, June 2009

Topics covered include: Device for Measuring Low Flow Speed in a Duct, Measuring Thermal Conductivity of a Small Insulation Sample, Alignment Jig for the Precise Measurement of THz Radiation, Autoignition Chamber for Remote Testing of Pyrotechnic Devices, Microwave Power Combiners for Signals of Arbitrary Amplitude, Synthetic Foveal Imaging Technology, Airborne Antenna System for Minimum-Cycle-Slip GPS Reception, Improved Starting Materials for Back-Illuminated Imagers, Multi-Modulator for Bandwidth-Efficient Communication, Some Improvements in Utilization of Flash Memory Devices, GPS/MEMS IMU/Microprocessor Board for Navigation, T/R Multi-Chip MMIC Modules for 150 GHz, Pneumatic Haptic Interfaces, Device Acquires and Retains Rock or Ice Samples, Cryogenic Feedthrough Test Rig, Improved Assembly for Gas Shielding During Welding or Brazing, Two-Step Plasma Process for Cleaning Indium Bonding Bumps, Tool for Crimping Flexible Circuit Leads, Yb14MnSb11 as a High-Efficiency Thermoelectric Material, Polyimide-Foam/Aerogel Composites for Thermal Insulation, Converting CSV Files to RKSML Files, Service Management Database for DSN Equipment, Chemochromic Hydrogen Leak Detectors, Compatibility of Segments of Thermoelectric Generators, Complementary Barrier Infrared Detector, JPL Greenland Moulin Exploration Probe, Ultra-Lightweight Self-Deployable Nanocomposite Structure for Habitat Applications, and Room-Temperature Ionic Liquids for Electrochemical Capacitors.

Source record↗

Fabricating PFPE Membranes for Capillary Electrophoresis

A process has been developed for fabricating perfluoropolyether (PFPE) membranes that contain microscopic holes of precise sizes at precise locations. The membranes are to be incorporated into laboratory-on-a-chip microfluidic devices to be used in performing capillary electrophoresis. The present process is a modified version of part of the process, described in the immediately preceding article, that includes a step in which a liquid PFPE layer is cured into solid (membrane) form by use of ultraviolet light. In the present process, one exploits the fact that by masking some locations to prevent exposure to ultraviolet light, one can prevent curing of the PFPE in those locations. The uncured PFPE can be washed away from those locations in the subsequent release and cleaning steps. Thus, holes are formed in the membrane in those locations. The most straightforward way to implement the modification is to use, during the ultraviolet-curing step, an ultraviolet photomask similar to the photomasks used in fabricating microelectronic devices. In lieu of such a photomask, one could use a mask made of any patternable ultraviolet-absorbing material (for example, an ink or a photoresist).

Lee, Michael C.↗

Solution-Assisted Optical Contacting

A modified version of a conventional optical-contact procedure has been found to facilitate alignment of optical components. The optical-contact procedure (called simply optical contacting in the art) is a standard means of bonding two highly polished and cleaned glass optical components without using epoxies or other adhesives. In its unmodified form, the procedure does not involve the use of any foreign substances at all: components to be optically contacted are dry. The main disadvantage of conventional optical contacting is that it is difficult or impossible to adjust the alignment of the components once they have become bonded. In the modified version of the procedure, a drop of an alcohol-based optical cleaning solution (isopropyl alcohol or similar) is placed at the interface between two components immediately before putting the components together. The solution forms a weak bond that gradually strengthens during a time interval of the order of tens of seconds as the alcohol evaporates. While the solution is present, the components can be slid, without loss of contact, to perform fine adjustments of their relative positions. After about a minute, most of the alcohol has evaporated and the optical components are rigidly attached to each other. If necessary, more solution can be added to enable resumption or repetition of the adjustment until the components are aligned to the required precision.

Shaddock, Daniel↗

Ligand-Functionalized Polymer Membranes for Selective Ion Separations

Selective ion separations are central to technologies spanning water purification, resource recovery, and clean energy. Conventional polymer membranes, which rely on steric hindrance or Donnan exclusion, struggle to discriminate between chemically similar ions in high-ionic-strength environments. Ligand-functionalized membranes offer a transformative strategy by embedding molecular recognition directly into polymer matrices, enabling selective complexation and transport. Here, this Viewpoint highlights the structure–function relationships underlying ligand-mediated ion separation, emphasizing the interplay of dehydration penalties, ligand coordination, and nanoscale confinement. We discuss design principles, denticity, donor identity, rigidity, and spatial organization, alongside the permeability–selectivity trade-off, multicomponent effects, and stability challenges. Finally, we outline emerging strategies, from bioinspired ligands to computationally guided design, that chart a path toward next-generation membranes for precise and energy-efficient ion separations.

ions↗

PMU Data Quality and Sensor Health Monitoring

Phasor Measurement Units (PMUs) play a critical role in the evolution of the electric power industry by providing high-precision, real-time monitoring of essential power system metrics. However, effectively detecting abnormalities and critical events from PMU data is a complex task, complicated by intricate temporal patterns, a scarcity of labeled data for training algo- rithms, and constraints on online computational power. In this study, we apply TranAD, an innovative algorithm that combines transformer architectures with the refinement of adversarial learning, to both synthetic and real-world PMU datasets for developing a data quality and sensor online health monitoring platform for utilities. Our findings reveal that TranAD not only provides efficient detection and localization but also enhances the detail with which abnormalities are detected, marking a a significant step forward in the field of clean data acquisition processes for power system monitoring

deep neural network, machine learning (ML)↗

Data-Enabled Fusion Technology (Final Scientific/Technical Report)

Advancing Scientific Understanding in Fusion Energy and Machine Learning This research represented a significant step forward in machine learning (ML) applications for fusion energy experiments. The project integrated advanced data-driven modeling, optimization techniques, and artificial intelligence to enhance the predictive capabilities and operational efficiency of plasma-based fusion systems. Specifically, tasks focused on ML-enhanced diagnostics, operator guidance tools, and predictive modeling helped improve the ability to interpret complex fusion experiments. Key areas of advancement included: 1) data-driven plasma control, i.e., using ML algorithms to optimize experimental conditions and classify plasma behaviors based on historical data; 2) spectroscopy and diagnostics, i.e., applying AI models to extract previously inaccessible insights from experimental spectroscopy data; and 3) configuration mapping and operator guidance, i.e., developing a predictive framework to assist scientists in identifying the most effective experimental parameters, reducing reliance on manual adjustments. By refining these ML-driven techniques, the project contributed to the broader scientific community’s understanding of plasma dynamics and fusion energy viability. Technical Effectiveness and Economic Feasibility The methods investigated demonstrated high technical effectiveness, as reflected in milestones assessing the predictive accuracy, performance, and optimization of fusion configurations. The development of an Operator Guidance Tool (OGT), for example, led to more precise control of plasma conditions by learning from experimental data and offering real-time adjustments. From an economic standpoint, DeFT provided: 1) the ability to reduce trial-and-error experimentation, which lowered operational costs; 2) improved data interpretation methods, which enabled more efficient resource allocation in large-scale fusion research projects; and 3) the automation of key diagnostic tasks, which reduced manual labor and human error, increasing overall efficiency. 13 The final assessments of predictive models and optimization strategies demonstrated that these approaches were scalable and could be implemented across multiple fusion energy research programs. Public Benefit and Societal Impact This project contributed directly to the broader goal of achieving sustainable and commercially viable fusion energy, which had profound implications for clean energy production and climate change mitigation. The integration of AI-driven solutions into fusion research: 1) sped up scientific discovery, accelerating progress towards achieving energy breakthroughs; 2) reduced the cost of experimentation, making fusion research more accessible; and 3) provided a framework for future AI applications in high-energy physics, benefiting adjacent fields like space exploration, material science, and renewable energy. Additionally, by fostering collaborations between AI researchers and plasma physicists, this project promoted interdisciplinary innovation that could lead to broader applications beyond fusion research.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

Thermocouple Rakes for Measuring Boundary Layer Flows Extremely Close to Surface

Of vital interest to aerodynamic researchers is precise knowledge of the flow velocity profile next to the surface. This information is needed for turbulence model development and the calculation of viscous shear force. Though many instruments can determine the flow velocity profile near the surface, none of them can make measurements closer than approximately 0.01 in. from the surface. The thermocouple boundary-layer rake can measure much closer to the surface than conventional instruments can, such as a total pressure boundary layer rake, hot wire, or hot film. By embedding the sensors (thermocouples) in the region where the velocity is equivalent to the velocity ahead of a constant thickness strut, the boundary-layer flow profile can be obtained. The present device fabricated at the NASA Glenn Research Center microsystem clean room has a heater made of platinum and thermocouples made of platinum and gold. Equal numbers of thermocouples are placed both upstream and downstream of the heater, so that the voltage generated by each pair at the same distance from the surface is indicative of the difference in temperature between the upstream and downstream thermocouple locations. This voltage differential is a function of the flow velocity, and like the conventional total pressure rake, it can provide the velocity profile. In order to measure flow extremely close to the surface, the strut is made of fused quartz with extremely low heat conductivity. A large size thermocouple boundary layer rake is shown in the following photo. The latest medium size sensors already provide smooth velocity profiles well into the boundary layer, as close as 0.0025 in. from the surface. This is about 4 times closer to the surface than the previously used total pressure rakes. This device also has the advantage of providing the flow profile of separated flow and also it is possible to measure simultaneous turbulence levels within the boundary layer.

Hwang, Danny P.↗

An in-situ view cell system for investigating swelling behavior of elastomers upon high-pressure hydrogen exposure

The transition to hydrogen as a clean and efficient energy carrier is impeded by challenges in the compatibility of hydrogen with materials used within hydrogen infrastructure. Elastomers, crucial in sealing components, often exhibit premature failures in high-pressure hydrogen environments due to excessive swelling. This study employs an innovative in-situ view cell system to assess the swelling behavior of hydrogenated nitrile butadiene rubber (HNBR) under various hydrogen conditions. The system, designed to withstand pressures up to 96.5 MPa, incorporates Digital Image Correlation (DIC) for strain measurements and volume estimation. Results reveal non-linear volume increases during depressurization, challenging conventional assumptions. Furthermore, investigations into peak hydrogen pressures and pressure-holding scenarios during decompression highlight complex swelling trends. The introduction of a novel computer vision (CV) method enhances precision in volume estimation, overcoming DIC limitations. The study provides insights into mitigating elastomer swelling, crucial for developing robust materials to support future hydrogen-driven energy systems.

Elastomer↗

Divertor Plasma Detachment Control Neural Network

DivControlNN is a state-of-the-art software tool that leverages advanced machine learning techniques to predict and control divertor plasma behavior in fusion reactors. Plasma, a highly energetic and electrically charged gas, requires meticulous management to protect reactor components and maintain optimal energy production. Conventional simulation methods, although extremely detailed, typically demand extensive computational time-making them unsuitable for real-time control scenarios. DivControlNN addresses this challenge by learning from tens of thousands of high-fidelity simulations, thereby creating a rapid surrogate model that can deliver near-instantaneous predictions. At the core of its functionality is a sophisticated technique known as latent space mapping, which condenses complex, high-dimensional plasma data into a compact, lower-dimensional representation. This streamlined representation enables the system to quickly forecast essential plasma properties and determine the precise conditions required for effective detachment. Detachment is a crucial process in which the plasma is cooled before reaching the divertor plates, thereby reducing heat loads and mitigating material erosion. In recent experiments conducted on the KSTAR tokamak in South Korea, DivControlNN successfully guided the detachment process without any fine-tuning-even when applied to a new tungsten divertor configuration. By achieving a computational speed-up of over one hundred million times compared to traditional simulation methods while maintaining low prediction errors, DivControlNN stands to significantly enhance real-time control and diagnostic capabilities in future fusion reactors. This breakthrough paves the way for safer, more reliable reactor operation and represents a major advancement toward realizing fusion energy as a practical, sustainable, and clean power source.

Xu, Xueqiao [Lawrence Livermore National Laborator↗

The California Baseline Ozone Transport Study (CABOTS)

Ozone is one of the six “criteria” pollutants identified by the U.S. Clean Air Act Amendment of 1970 as particularly harmful to human health. Concentrations have decreased markedly across the United States over the past 50 years in response to regulatory efforts, but continuing research on its deleterious effects have spurred further reductions in the legal threshold. The South Coast and San Joaquin Valley Air Basins of California remain the only two “extreme” ozone nonattainment areas in the United States. Further reductions of ozone in the West are complicated by significant background concentrations whose relative importance increases as domestic anthropogenic contributions decline and the national standards continue to be lowered. These background concentrations derive largely from uncontrollable sources including stratospheric intrusions, wildfires, and intercontinental transport. Taken together the exogenous sources complicate regulatory strategies and necessitate a much more precise understanding of the timing and magnitude of their contributions to regional air pollution. The California Baseline Ozone Transport Study was a field campaign coordinated across Northern and Central California during spring and summer 2016 aimed at observing daily variations in the ozone columns crossing the North American coastline, as well as the modification of the ozone layering downwind across the mountainous topography of California to better understand the impacts of background ozone on surface air quality in complex terrain.

Ian C. Faloona↗

Contact Angles and Surface Tension of Germanium-Silicon Melts

Precise knowledge of material parameters is more and more important for improving crystal growth processes. Two important parameters are the contact (wetting) angle and the surface tension, determining meniscus shapes and surface-tension driven flows in a variety of methods (Czochralski, EFG, floating-zone, detached Bridgman growth). The sessile drop technique allows the measurement of both parameters simultaneously and has been used to measure the contact angles and the surface tension of Ge(1-x)Si(x) (0 less than or equal to x less than or equal to 1.3) alloys on various substrate materials. Fused quartz, Sapphire, glassy carbon, graphite, SiC, carbon-based aerogel, pyrolytic boron nitride (pBN), AIN, Si3N4, and polycrystalline CVD diamond were used as substrate materials. In addition, the effect of different cleaning procedures and surface treatments on the wetting behavior were investigated. Measurements were performed both under dynamic vacuum and gas atmospheres (argon or forming gas), with temperatures up to 1100 C. In some experiments, the sample was processed for longer times, up to a week, to investigate any changes of the contact angle and/or surface tension due to slow reactions with the substrate. For pure Ge, stable contact angles were found for carbon-based substrates and for pBN, for Ge(1-x)Si(x) only for pBN. The highest wetting angles were found for pBN substrates with angles around 170deg. For the surface tension of Ge, the most reliable values resulted in gamma(T) = (591- 0.077 (T-T(sub m)) 10(exp -3)N/m. The temperature dependence of the surface tension showed similar values for Ge(1-x)Si(x), around -0.08 x 10(exp -3)N/m K, and a compositional dependence of 2.2 x 10(exp -3)N/m at%Si.

Croell, A.↗

Genesis Solar Wind – Capture, Return, Curate and Analyze: Looking Backward and Creating a Timeline

Introduction: In 1997 NASA’S Discovery Program selected the Genesis mission proposal to return solar wind samples to Earth for laboratory analyses. Principal Investigator Donald S. Burnett and the science team defined the purity of collector materials and ability to analyze solar wind composition to the precision required for planetary science. As a small mission, focused on a well-defined science goal, yet needing careful attention to engineering details, the communication among scientists and engineers, nurtured by Don Burnett, was exceptional. Genesis Mission and Curation Legacy: Genesis, as the first U. S. spacecraft to return astromaterial samples since Apollo, not only integrated the mission planning and flight teams, but also the science and sample curation teams during the mission development period. Since Genesis is a sample return mission, the Science Team was essential in certifying the collectors (sample containers for solar atoms). From inception, Genesis established mission funding for returned sample curation. JSC was lead in contamination control during mission preparation, including establishment of an ISO 4 cleanroom facility and use of ultrapure water (UPW) for cleaning flight hardware (and, as it turned out, for cleaning collectors after the mishap). Reliable, fast communication among scientists, engineers and curators at the hands-on level established deep respect among team members and efficient decision-making. JSC’s 50-years of astromaterial sample curation provided experienced sample processors onsite during recovery in Utah (a deep bench for emergency response). Post-recovery curation included iterative collaboration with science sample users to clean or verify cleanliness of samples. The science legacy from Genesis is addressed by Burnett and Jurewicz, this volume. In The Beginning: After Apollo sample return, Burnett and Marcia Neugebauer at JPL began discussing a solar wind sample return, with Neugebauer arguing that separate collection of solar wind regimes was essential science. By 1992 a solar wind sample return mission was presented at a workshop, and by 1994 a mission was proposed named Suess-Urey. The mission was re-proposed under a new name GENESIS and selected in 1997. Susan Niebur captured the Genesis mission history and stories, from high level management documents and from many interviews with participants [2]. Her account lets readers glimpse personality of participants in quotations from interviews. Need and Scope for Detailed Technical Timeline: A timeline constructed from lower level task documents has been initiated to document the resources and skills actually used, as well as task sequence or concurrency. Timelines for high level mission events are captured in two documents [1] [2] and for detailed re-entry events in [3]. A detailed technical timeline for Genesis mission and curation activities will provide data points for lower level tasks, such as ISO 4 curation facility construction time, preparation for nominal sample field recovery, mishap recovery, and UPW expansion. Changes in technology context 1990-2024: Semiconductor technologies were easily accessible in the U.S.A. (1990-1999), and the Genesis team used those resources for cleanroom design and UPW system expansion. Image documentation was changing from film to digital during cleanroom construction and payload cleaning (1997-2001). Engineering design was done using computer aided design proprietary software, making more difficult the archiving of payload configuration and materials. Email of documents, tracked delivery service and virtual meeting capability greatly improved communication efficiency. Information sources – Pre-launch mission preparation: Examples of mission science, engineering and contamination control are collector purity testing, payload design/fabrication and ISO 4 cleanroom construction. Information on timing of these activities comes from facility readiness reviews, management reviews, shipping documents, procurement documents, test reports, travel documents, laboratory logs, Quality Assurance documents, dates on images, participant notebooks and emails. Information sources – Sample return re-entry and field recovery activities: Information comes from event timelines produced by Mid-Air Recovery team, Lockheed team lead notes and from chase video, JPL Quality Assurance. Information also comes from images and logbooks from UTTR cleanroom operations and from curatorial documents. Information sources – Resulting science and sample cleaning processes: Agendas from the annual gatherings of the science team initially trace testing for collector purity/cleanliness, and after sample recovery, include collector cleaning and cleanliness assessment. Post-recovery documents include curatorial orders and procedures, sample allocation documents and LPSC abstracts. Timeline Objectives: A simple spreadsheet timeline with headers DATE, EVENT, PEOPLE, COMMENT, INFORMATION SOURCE has been initiated and currently has over 90 entries. While this is not definitive historical research, it is a quick look at the evolution of Genesis curation with pointers to documents or people with information. Engineers for future missions may find useful points of comparison for development of facilities. References:[1] Genesis Mission Reference Document, (2011) JPL D-62382.[2] Niebur S. M., edited by Brown D. W. (2023) NASA’s Discovery Program: The First 20 Years of Competitive Planetary Exploration, NASA-SP-2023-4238.[3] Genesis Mishap Investigation Board Report, Vol. 1 (July 2005).

solar wind↗

Influence of Catalysis and Oxidation on Slug Calorimeter Measurements in Arc Jets

Arc jet tests play a critical role in the characterization and certification of thermal protection materials and systems (TPS). The results from these arc jet tests feed directly into computational models of material response and aerothermodynamics to predict the performance of the TPS in flight. Thus the precise knowledge of the plasma environment to which the test material is subjected, is invaluable. As one of the environmental parameters, the heat flux is commonly measured. The measured heat flux is used to determine the plasma enthalpy through analytical or computational models. At NASA Ames Research Center (ARC), slug calorimeters of a geometrically similar body to the test article are routinely used to determine the heat flux. A slug calorimeter is a thermal capacitance-type calorimeter that uses the temperature rise in a thermally insulated slug to determine the heat transfer rate, see Figure 1(left). Current best practices for measuring the heat flux with a slug calorimeter are described in ASTM E457 - 96. Both the calorimeter body and slug are made of Oxygen Free High Conductivity Copper, and are cleaned before each run.

Nawaz, Anuscheh↗

Making AlN(x) Tunnel Barriers Using a Low-Energy Nitrogen-Ion Beam

A technique based on accelerating positive nitrogen ions onto an aluminum layer has been demonstrated to be effective in forming thin (<2 nm thick) layers of aluminum nitride (AlN(x)) for use as tunnel barriers in Nb/Al-AlN(x)/Nb superconductor/insulator/ superconductor (SIS) Josephson junctions. AlN(x) is the present material of choice for tunnel barriers because, to a degree greater than that of any other suitable material, it offers the required combination of low leakage current at high current density and greater thermal stability. While ultra-thin AlN films with good thickness and stoichiometry control are easily formed using techniques such as reactive molecular beam epitaxy and chemical vapor deposition, growth temperatures of 900 C are necessary for the dissociative adsorption of nitrogen from either nitrogen (N2) or ammonia (NH3). These growth temperatures are prohibitively high for the formation of tunnel barriers on Nb films because interfacial reactions at temperatures as low as 200 to 300 C degrade device properties. Heretofore, deposition by reactive sputtering and nitridation of thin Al layers with DC and RF nitrogen plasmas have been successfully used to form AlN barriers in SIS junctions. However, precise control over critical current density Jc has proven to be a challenge, as is attaining adequate process reproducibility from system to system. The present ion-beam technique is an alternative to the plasma or reactive sputtering techniques as it provides a highly controlled arrival of reactive species, independent of the electrical conditions of the substrate or vacuum chamber. Independent and accurate control of parameters such as ion energy, flux, species, and direction promises more precise control of film characteristics such as stoichiometry and thickness than is the case with typical plasma processes. In particular, the background pressure during ion-beam nitride growth is 2 or 3 orders of magnitude lower, minimizing the formation of compounds with contaminants, which is critical in devices the performance of which is dictated by interfacial characteristics. In addition, the flux of incoming species can be measured in situ using ion probes so that the dose can be controlled accurately. The apparatus used in the present ion-beam technique includes a vacuum chamber containing a commercial collimated- ion-beam source, a supply of nitrogen and argon, and an ion probe for measuring the ion dose. Either argon or nitrogen can be used as the feed gases for the ion source, depending on whether cleaning of the substrate or growth of the nitride, respectively, is desired. Once the Nb base electrode and Al proximity layer have been deposited, the N2 gas line to the ion beam is vented and purged, and the ion-source is turned on until a stable discharge is obtained. The substrate is moved over the ion-beam source to expose the Al surface layer to the ion beam (see figure) for a specified duration for the formation of the nitride tunnel barrier. Next, the Nb counter-electrode layer is deposited on the nitride surface layer. The Nb/Al- AlN(x)/Nb-trilayer-covered substrate is then patterned into individual devices by use of conventional integrated-circuit processing techniques.

Kaul, Anupama↗