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At least 199 records · Page 11

Origins of wear-induced tungsten corrosion defects in semiconductor manufacturing during tungsten chemical mechanical polishing

During chemical mechanical polishing (CMP) process optimization, a unique corrosion defect was identified in the tungsten (W) contact plugs, which were investigated to develop practical solutions to improve CMP mass productivity. The corrosion defect occurred in the absence of external incident energy and was observed to occur only at the W plugs connected to the P + /n-well close to the wafer edge. To examine the root cause of the corrosion, a series of experiments was carried out at each W CMP step, using in-line defect inspection. Additional experiments were conducted using on-line inductively coupled plasma mass spectrometry (ICP-MS) to understand pH- and potential-dependent electrochemical dissolution behaviors of W. Experimentally, W corrosion was confirmed to be exacerbated if the surface oxide of the W plugs is removed by the deionized water (DIW) rinsing step under wafer pressurization, then exposed to DIW and alkaline cleaning solution. Although the DIW rinsing step is commonly performed to clean polishing pads right after the main polishing, a small amount of applied pressure (0.5 psi) without slurry supply can lead to corrosion defects. Finally, this wear-induced corrosion of the W plugs can be prevented by removing the applied pressure during the post DIW rinsing step of W CMP.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Approaches to investigate the role of chelation in the corrosivity of biomass-derived oils

The need to provide the U.S. market with a renewable liquid fuel energy source from a non-food feedstock stream has gained considerable traction due to benefits such as improved energy efficiency, reduced environmental impacts, and enhanced national security. Practical achievement of these goals via biomass and bio-waste utilization involves production of liquid intermediates containing corrosive, reactive species like carboxylic acids, ketones, aldehydes, and hydroxyaldehydes. Such mixtures challenge materials of containment, processing, and transport. It is widely recognized that the smaller organic acids, such as acetic and formic, are corrosive and can remove protective surface oxides on alloys used in bio-oil processing infrastructure, and ketones can swell sealing polymers. However, literature shows, and findings herein confirm, larger carboxylic acids and bidentate alcohols are present. This highlights the potential for synergistic, detrimental effects of constituents in bio-oil corrosion, including direct reactivity of small acids compounded with the possibility of mobilization of protective metal oxide layers via chelation by larger acids and oxygenates. The question of whether species beyond small acids can significantly contribute to corrosion requires analytical approaches previously not applied to bio-oil corrosion studies and certainly not previously applied corroboratively. As such, this work introduces a combination of optical, mass spectral, and electrochemical impedance spectroscopies with an incubation approach to study metal mobilization, to facilitate elucidating chelation's role in bio-oil corrosive pathways. To enable systematic study of these oxygenates' material compatibility individually and in combination, a model matrix of bio-oil constituents was also developed based on identification of key components of real bio-oils.

09 BIOMASS FUELS↗

Fractal coatings of Ni and NiYSZ for high-temperature corrosion mitigation in solar salt

This paper introduces a novel approach to corrosion mitigation using electrodeposited, fractal Ni and NiYSZ coatings. Highly adherent, durable multiscale coatings with fractal dimensions above 1.80 were fabricated. Corrosion characteristics of coated plain and etched surfaces of In800H, SS310, SS316 and SS347, in comparison to Ha230, were studied in molten 60% NaNO 3 + 40% KNO 3 at 600 °C. The corrosion rate of coated Fe-based alloys reduced by up to 68% compared to uncoated alloys and was on par with or lower than the corrosion rate of Ha230. Furthermore, the corrosion-resistant coatings provide for use of low-cost alloys in high temperature corrosive environments.

36 MATERIALS SCIENCE↗

Discovering the nanoscale origins of localized corrosion in additive manufactured stainless steel 316L by liquid cell transmission electron microscopy

Here, we use liquid cell scanning transmission electron microscopy (STEM) to directly characterize the nanoscale origins of corrosion initiation in Additive manufacturing (AM) 316 L stainless steel. Under applied anodic potentials, we found that the dislocation cellular boundaries were preferentially corroded and that regions of localize corrosion occurred along the cellular boundaries. We directly observed the earliest stages of corrosion by controlling the biasing parameters to decelerate the corrosion processes. The results show that highly localized corrosion occurs via inclusion dissolution along dislocation cell boundaries. More widespread corrosion initiates at the dislocation cell boundaries and spreads throughout the dislocation networks.

36 MATERIALS SCIENCE↗

Mechanistic transition of stainless steel 304L corrosion in MgCl 2 phase change material under thermal cycling

Magnesium chloride (MgCl 2 )-based molten salt phase change materials (PCMs) are promising candidates for thermal energy storage (TES) owing to their advantageous thermophysical properties, however, their high corrosivity in the molten state limits material compatibility. In this study, the corrosion behavior of 304?L stainless steel (SS304L) exposed to MgCl2 PCM was investigated as a function of thermal cycling (up to 9000 cycles) relevant to PCM-based TES systems. Microstructural changes and elemental redistribution at the alloy-salt interface under thermal cycling conditions were characterized using synchrotron-based X-ray fluorescence (XRF) and scanning electron microscopy coupled with energy dispersive X-ray spectroscopy (SEM-EDS). Results show that corrosion is governed by selective Cr-dissolution and elemental diffusion near the interface and grain boundaries. A clear transition in the dominant corrosion mechanism is observed with increasing thermal cycles. Surface corrosion is the dominant mechanism up to 1000 cycles, whereas intergranular corrosion becomes the primary degradation mode beyond 2000 cycles. These mechanistic changes are interpreted in terms of evolving interfacial chemistry, microstructure and the diffusion-driven redistribution of alloying elements.

36 MATERIALS SCIENCE↗

First steps toward predicting corrosion behavior of structural materials in molten salts

To address the need for physics-based models to predict corrosion behavior of materials in molten salts, here we propose potential methods to aid in selection of optimum materials for structural components in molten salt powered technologies. In the present work, the role of alloy thermodynamics and kinetics on governing corrosion rates of Ni-based alloys will be discussed combining experimental and computational methods. A few strategies are presented to quantify corrosion rates of Ni-based materials isothermally exposed in purified KCl-MgCl 2 salts at 600° C-800° C. The influence of capsule material, potential corrosion products and role of alloy composition on the observed corrosion rates was discussed with coupled thermodynamic-kinetic models. Larger depths of corrosion attack were observed in alloy 230 specimens compared to other alloys under similar conditions was attributed to the much higher chemical activity of Cr in the alloy that results in a larger Cr chemical potential gradient.

36 MATERIALS SCIENCE↗

Corrosion of Ferrous Structural Alloys in Biomass Derived Fuels and Organic Acids

This work investigated the corrosivity of biomass-derived liquid fuels and organic acids associated with bio-oils and conducted a corrosion compatibility evaluation of several structural ferrous alloys in the fuels and acids. Here, the acidity parameters and solution conductivity values were higher in raw pyrolysis bio-oils than postprocessed oils with significant corrosion attack for carbon steel and Fe-2.25Cr-1Mo. However, higher-grade stainless steels, ferritic Fe-15Cr (15Cb) and austenitic types 304L and 316L, showed negligible corrosion loss, whereas lower-Cr ferritic grades 409, 410, and 416 were attacked. Metal leaching tests and electrochemical impedance spectroscopy measurements revealed superior corrosion resistance of 316 over 410 stainless steels in solutions of formic and oxalic acids that can be present in bio-oils. The corrosion evaluation methods utilized in this work provide effective screening tools to identify the compatible structural alloys for bio-oils.

09 BIOMASS FUELS↗

One dimensional wormhole corrosion in metals

Corrosion is a ubiquitous failure mode of materials. Often, the progression of localized corrosion is accompanied by the evolution of porosity in materials previously reported to be either three-dimensional or two-dimensional. However, using new tools and analysis techniques, we have realized that a more localized form of corrosion, which we call 1D wormhole corrosion, has previously been miscategorized in some situations. Using electron tomography, we show multiple examples of this 1D and percolating morphology. To understand the origin of this mechanism in a Ni-Cr alloy corroded by molten salt, we combined energy-filtered four-dimensional scanning transmission electron microscopy and ab initio density functional theory calculations to develop a vacancy mapping method with nanometer-resolution, identifying a remarkably high vacancy concentration in the diffusion-induced grain boundary migration zone, up to 100 times the equilibrium value at the melting point. Deciphering the origins of 1D corrosion is an important step towards designing structural materials with enhanced corrosion resistance.

36 MATERIALS SCIENCE↗

Directly monitoring the shift in corrosion mechanisms of a model FeCrNi alloy driven by electric potential

Abstract Stainless steels are used in a myriad of engineering applications, including construction, automobiles, and nuclear reactors. Developing accurate, predictive mechanistic models for corrosion and electrochemical corrosion kinetics of stainless steels has been a topic of research studies over many decades. Herein, we quantified the aqueous corrosion kinetics of a model austenitic Fe–18Cr–14Ni (wt%) alloy in the presence and absence of applied potential using systematic in situ electrochemical atomic force microscopy (EC-AFM) and transmission electron microscopy (TEM). Without an applied bias, vertical dissolution of corrosion pits is controlled by the surface kinetics/diffusion hybrid mechanism, whereas lateral dissolution is diffusion controlled. When an electric bias is applied, the increase in corrosion rate is dominated by the nucleation of new pits. These insights gained by the in situ EC-AFM will allow applications of this method for a quantitative understanding of corrosion of a wider class of materials.

36 MATERIALS SCIENCE↗

Effect of Soluble Corrosion Products on Electrical Double Layer in LiCl-KCl Molten Salts

Corrosion in molten salts greatly hampers the application for renewable energy applications like molten salt reactors. To develop effective strategies for corrosion mitigation, understanding the interfacial structures and properties such as specific ion adsorption and electrical double layer capacitance are crucial. Using cyclic voltammetry and electrochemical impedance spectroscopy, we systematically studied the interfaces on various model electrodes including W (solid), Bi (liquid), and the stainless steel 316 in LiCl-KCl eutectic molten salts with the addition of corrosion species CrCl 2 and FeCl 2 . Both Cr 2+ and Fe 2+ ions increased electrical double layer capacitance, with Cr 2+ showing specific adsorption behavior and shifting the potential of zero charge, while Fe 2+ had minimal effect on point of zero charge. Two-working electrode measurements revealed increasing open-circuit potential and electrical double layer capacitance during the exposure of stainless steel 316, indicating its progressive corrosion and ion accumulation at the interface. X-ray photoelectron spectroscopy and Raman confirmed Cr enrichment at the interface. This work highlights the strong correlation between electrical double layer behavior and corrosion dynamics in molten salts and suggests electrical double layer capacitance as a sensitive, in situ indicator for corrosion monitoring.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

Corrosion Control in Carbon Fiber Reinforced Plastic (CFRP) Composite-Aluminum Closure Panel Hem Joints

This project targeted the implementation of CFRP/Al closure panels as a drop-in replacement for all-aluminum closures used in automobile production today. The project focused on the development of corrosion fundamentals involving CFRP materials and the use of those materials in mixed-material joints. Numerous studies were completed to benchmark current materials and test mixed metal joints. Good correlation was found between outdoor exposures and laboratory cyclic corrosion testing. The insights from the corrosion testing fundamentals and benchmarking phases informed the development of low-cure adhesive and electrocoats and conductive primers for the CFRP. Adhesive and electrocoat materials were successfully developed meeting low-cure targets for bake (150C/10min). These materials were scaled-up and used to produce 5 prototype liftgates to further evaluate CFRP/Al joints in a full-scale part. The lower cure materials enabled mitigation of CTE mismatch and reduced the required bake temperature, resulting in reduced part distortion. Corrosion testing of the liftgates revealed unexpected increases in corrosion relative to the standard bake materials. While rigorous evaluation of the parts was not possible due to numerous complexities associated with prototype testing, the results provided significant insights into the material behavior of CFRP/Al joints. Key learnings from the project included a better understanding of the system complexity (interplay of substrate/primer conductivity, production of full-scale prototypes), advances in coating/adhesive design for low-cure applications involving CFRP, and advancement of corrosion test protocols for CFRP.

36 MATERIALS SCIENCE↗

Refinement of Pitting Factor Basis to Support the Corrosion Control Program (Interim Report)

At Savannah River Site (SRS), High-Level Waste is stored in below-grade tanks constructed of carbon steel. This waste is composed of sludge, salt cake, and/or supernate. In part, preparation of this waste for future processing involves dissolution of the salt cake layer. The salt dissolution process can create conditions that leave the carbon steel tanks susceptible to a number of corrosion processes. The salt to be dissolved contains high concentrations of nitrate, that once released, create an environment that may be conducive to pitting corrosion or stress corrosion cracking (SCC) of carbon steel. Additionally, during the salt dissolution process, in the absence of mixing, stratification of the supernatant liquid may occur. This can result in less dense, more dilute waste layers occurring higher in the tank. In these more dilute waste layers, the susceptibility to localized corrosion could potentially differ from that of the more concentrated salt solutions evaluated in previous testing, as the amount of inhibiting and aggressive species, not just the ratios, can affect susceptibility. Evaluation of the susceptibility to localized corrosion in these more dilute waste chemistries could provide insight into the amount of inhibitors required to effectively mitigate pitting corrosion in stagnant salt dissolution environments, as well as other tank farm operations involving dilute waste streams.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

Electrochemical Control for Corrosion in Molten Chlorides During CSP Plant Operation

The Liquid Pathway of the Concentrating Solar Power Generation 3 (CSP Gen3) program proposed low-cost molten chloride salt for energy storage. However, online corrosion control was identified as a remining major risk of the Liquid Pathway approach. This project addressed that risk. Electrochemical solutions for corrosion mitigation during CSP plant operation were investigated and their feasibility and scalability were evaluated. The leading cause of corrosion in molten chloride salt systems was identified as corrosive impurities that form within the salt upon exposure to trace amounts of air and moisture. Leveraging electrochemistry, reduction/oxidation reactions can be employed to remove these corrosive impurities. In Phase 1 of this project, a bench-scale batch electrochemical reactor was designed, fabricated, and used to assess the kinetics and thermodynamics of electrochemical salt purification. In Phase 2, a laboratory-scale flow reactor was designed, fabricated, and used to assess the efficacy of the electrochemical method under flowing conditions. Results show that under proposed operating conditions for the Liquid Pathway Gen3 Pilot Plant, the electrochemical method is significantly more effective at removing impurities than alternative chemical and thermal methods, and that the electrochemical method produces less harmful byproducts. A key advance made in the course of this project was the development of a 2-electrode method for electrochemical purification that is more scalable than previously developed 3 electrode methods. This novel method is based on Magnesium (Mg) electrowinning. A provisional patent based on this invention has been submitted (USPTO Application No. 63/480,355). Additional key advances made during this project include assessment of the effect of dissimilar alloys on corrosion, kinetic and thermodynamic evaluation of thermolysis reactions of impurities within the molten salt, characterization of byproducts of purification reactions, and generation of IP focused on isolating value-added products using molten salt-based electrochemistry that could be deployed to valorize the process (USPTO Application No. 63/478,806). Ultimately, this project represented a step toward feasibility of Liquid Pathway Gen3 CSP. The method developed under this project could significantly reduce capital expenses and operating costs and increase plant profitability by enabling use of less expensive alloys, decreasing maintenance, and increasing plant longevity. Key focus areas for follow-on work have been identified as 1) evaluation of the efficacy of the electrochemical method under turbulent conditions in a larger flow system, such as the FASTR loop, 2) development of methods for removal of purification byproducts, 3) modeling pilot and industrial scale performance of electrochemical salt purification during plant operation and 4) further assessment of the effect of impurities on salt vapor phase.

14 SOLAR ENERGY↗

Corrosion Behavior of Laser-Interference Structured AA2024 Coated with a Chromate-Containing Epoxy Primer

In this study, the corrosion behavior of laser-interference treated AA2024-T3 specimens, which are coated with a primer, is presented. The surface of as-received AA2024-T3 specimens were laser-interference structured by splitting the primary beam of a Q-switched Nd:YAG pulsed nanosecond laser into two beams and focusing them to the same spot on the specimen surface. After being stored in plastic cases for up to 70 d, without any additional cleaning, the specimens were spray painted with a chromate-containing epoxy primer, CA7233, compliant to MIL-PRF-23377 Type I Class C2 specification. The corrosion behavior of laser-interference specimens was assessed against that of specimens prepared by chromated conversion coating and sulfuric acid anodizing treatments. After the ASTM B117 corrosion exposure, it was found that the laser processed specimens exhibited only few blisters. On one hand, most specimens prepared at a laser fluence of 1.78 J/cm 2 , without any additional chemical cleaning, were found to develop one very small blister after only 96 h of exposure. However, the growth of these blisters was not significant even after 1,000 h of salt spray exposure. On the other hand, only a fraction of the specimens prepared at a laser fluence of 1.24 J/cm 2 and acetone wiped right after the laser structuring were found to develop several tiny blisters after 790 h and longer exposure. Overall, it was found that the corrosion damage was minimized at a laser rastering speed of 4 mm/s, a condition for which only 33% of specimens developed very minor corrosion damage. Furthermore, the ASTM D1654 creepage ratings, which was used to evaluate the corrosion damage along the scribe lines, were found to be at least nine for all coated panels. These results indicate that the laser-interference technique with the additional acetone wiping has the potential to be further developed as a nonchemical surface preparation technique for chromate-containing epoxy primers coating systems.

36 MATERIALS SCIENCE↗

Determining the Efficiency of Nitrogen Blanketing to Mitigate Corrosion in Hanford’s Transfer Line System

The Hanford site stores large quantities of radioactive waste in underground, carbon-steel, double-shell tanks. The waste is transferred between the tanks using piping that consists of carbon-steel pipes and carbon-steel encasements. The transfer lines have shown extensive corrosion on both the interior of the casing and exterior of the carrier pipes. Nitrogen blanketing, used to displace the oxygen in the transfer lines, was hypothesized to reduce the corrosion of the transfer lines. Experimental studies were conducted to investigate the effect of oxygen concentration on the corrosion rate and the initiation of pitting on carbon steel. The results indicated that controlling the oxygen concentration to 0% effectively mitigates corrosion. However, at 5 vol% oxygen, a significant increase in the general corrosion rate and pitting corrosion is observed.

Atmospheric Corrosion↗

In-Situ TEM Molten Salt Corrosion

Molten salt reactors (MSRs) offer a compelling pathway for next-generation nuclear energy, with advantages in thermal efficiency, inherent safety, and flexible fuel management. Yet, halide-based molten salts introduce significant materials challenges, particularly alloy corrosion. Alloy performance in these environments ultimately depends on understanding how corrosion initiates and progresses at the nanoscale, however most existing models rely on post-exposure characterization, leaving degradation mechanisms largely inferred rather than directly observed. NiCr alloys have garnered interest in MSRs applications as the Ni-based matrix provides strength and creep resistance, while Cr content offers oxidation resistance in air. However, NiCr corrosion resistance in chloride salts has proven poor due to preferential chromium dissolution, the formation of Cr-depleted pathways, and grain-boundary attack. This work aims to directly visualize corrosion of Ni-20Cr exposed to LiCl-KCl using in-situ Transmission Electron Microscopy (TEM) to capture real-time microstructural evolution during corrosion. Experiments will be performed at ~800 °C under controlled pressure conditions while utilizing Energy-Dispersive X-ray Spectroscopy (EDS) to analyze elemental redistribution. Observation of chromium depletion fronts, associated surface restructuring, and localized chloride enrichment are expected. Ultimately, this study is expected to provide a link between microscale processes and the macroscopic degradation behaviors relevant to MSR operation in advanced reactor environments. Simultaneously, this approach enables future in-situ investigations regarding alloy composition, salt chemistry, and their influence on corrosion pathways and long-term stability.?

36 - MATERIALS SCIENCE↗

Suppressing Chemical Corrosions of Lithium Metal Anodes

In this study, the lithium metal anode is essential for next-generation high-energy-density rechargeable Li-metal batteries. Although extensive studies have been performed to prolong the cycle life of Li-metal batteries, the calendar life, which associates with the chemical corrosion of Li metal in liquid electrolytes, has not been quantitatively understood. Here, by combing the titration gas chromatography method and cryogenic focused ion beam, a quantitative relationship between the chemical corrosion rate and electrochemically deposited Li morphology in various liquid electrolyte systems is established. It has been identified that the corrosion rate is dominated by the porosity of the deposited Li. The larger the porosity of deposited Li has, the faster the corrosion rate will be. Strategies to mitigate the chemical corrosion on Li thus to extend the calendar life of Li-metal batteries are further proposed. By strictly controlling the stacking pressure during Li plating, Li deposits with ultra-low porosity can be achieved, suppressing the corrosion rate to 0.08 ± 0.16%/day compared with 1.71 ± 0.19%/day of the high-porosity Li.

25 ENERGY STORAGE↗

Investigation of Corrosion Behavior of Carbide Phase Strengthened Nickel‐Based Alloy in Molten Fluoride Salt

The corrosion behavior of a high creep strength carbide-phase strengthened Ni-based alloy in molten FLiNaK (LiF-NaF-KF: 46.5-11.5-42 mol%) salt in the temperature range of 700°C–750°C has been investigated as a part of the development of structural alloys for fluoride salt-based molten salt reactors (MSRs). The alloy composition was designed based on Hastelloy-N, but with the goal of improving creep strength. Cr depletion depth, a measure of corrosion, was observed to be single micrometers after several hundred hours of corrosion testing. Sequential corrosion testing involving testing of pre-tested samples in fresh salt coupled with SEM-EDS, scanning transmission electron microscopy (STEM) examinations and thermodynamic and kinetic modeling, suggest that the corrosion rate at the alloy-salt interface is governed by diffusion of elements from the alloy bulk to the surface. The carbide phases in the corrosion-tested sample microstructure were identified to be largely M 6 C-type Mo-rich carbides and MC-type mixed carbides. Atom probe tomography (APT) showed some partitioning of Cr and Ti to the carbide phase and showed the carbide phases to be stable at the salt-facing surface.

Gordon, Ryan [Univ. of Wisconsin, Madison, WI (Uni↗