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At least 199 records · Page 11

High-precision monitoring of outgassing species in model extreme ultraviolet photoresists with a cavity ring-down spectrometer

Background Extreme ultraviolet (EUV) photoresists play a pivotal role in advancing nanopatterning technologies by balancing image quality and sensitivity. The outgassing behavior of photoresist thin films under EUV and deep ultraviolet (DUV) exposure reveals chemical details relevant to their performance. Aim Here, we focus on utilizing an analytical technique not previously used in photolithography, the tabletop cavity ring-down spectrometer, to investigate outgassing dynamics in EUV photoresists, enabling precise chemical identification and deeper insights into resist processing. Approach The spectrometer’s enhanced laser path length (∼ 20 km) and broadband absorption capabilities in the C–H overtone region allow for sensitive and temporally resolved detection of mixtures of outgassed species. Using a model resist comprising a polymer matrix with a photoacid generator and quencher, we analyzed the influence of time delays between exposure and post-exposure bake (PEB) as well as storage under varying environmental conditions. Results Suppression of isobutylene outgassing and thickness loss was observed with extended delays between exposure and PEB, potentially linked to water absorption and acid deactivation. The technique proved highly effective in distinguishing subtle chemical differences between processing stages. Conclusions Delay times and their environmental conditions, particularly humidity, reduce outgassing and thickness loss of photoresists during PEB, suggesting decreased acid-driven deprotection. This can potentially impact sensitivity, defectivity, and roughness of resist patterns, necessitating precise monitoring and control.

Extreme ultraviolet photoresists↗

Dynamics of the Transition Corona

Magnetic reconnection between the open and closed magnetic fields in the corona is believed to play a crucial role in the corona/heliosphere coupling. At large scale, the exchange of open/closed connectivity is expected to occur in pseudo-streamer (PS) structures. However, there is neither clear observational evidence of how such coupling occurs in PSs, nor evidence for how the magnetic reconnection evolves. Using a newly developed technique, we enhance the off-limb magnetic fine structures observed with the Atmospheric Imaging Assembly and identify a PS-like feature located close to the northern coronal hole. We first identify that the magnetic topology associated with the observation is a PS, null-point (NP) related topology bounded by the open field. By comparing the magnetic field configuration with the extreme ultraviolet (EUV) emission regions, we determined that most of the magnetic flux associated with plasma emission are small loops below the PS basic NP and open field bounding the PS topology. In order to interpret the evolution of the PS, we referred to a three-dimensional MHD interchange reconnection modeling the exchange of connectivity between small closed loops and the open field. The observed PS fine structures follow the dynamics of the magnetic field before and after reconnecting at the NP obtained by the interchange model. Moreover, the pattern of the EUV plasma emission is the same as the shape of the expected plasma emission location derived from the simulation. These morphological and dynamical similarities between the PS observations and the results from the simulation strongly suggest that the evolution of the PS, and in particular the opening/closing of the field, occurs via interchange/slipping reconnection at the basic NP of the PS. Besides identifying the mechanism at work in the large-scale coupling between the open and closed fields, our results highlight that interchange reconnection in PSs is a gradual physical process that differs from the impulsive reconnection of the solar-jet model.

magnetic fields↗

Mechanism of Vapor-Phase Infiltration of Organometallic Hf in Poly(Methyl Methacrylate) for Hybrid Resist Applications

Inorganic–organic hybrid thin films synthesized by vapor-phase infiltration (VPI) of metal oxides into organic photoresists, such as poly(methyl methacrylate) (PMMA), have recently demonstrated their utility in extreme ultraviolet lithography, critical for angstrom-era semiconductor device miniaturization. Hafnium oxide infiltration has been reported recently for this purpose, but its detailed VPI mechanism has remained largely unexplored. In this study, we investigated the VPI characteristics and mechanisms of tetrakis(dimethylamido)hafnium (TDMAHf)─the hafnium precursor predominantly used for VPI in the field─into PMMA and examined its impact on electron-beam lithography (EBL) exposure behavior. VPI was performed at temperatures ranging from 85 to 150 °C, with chemical interactions characterized using infrared reflection-absorption spectroscopy, and resist patterning performance was evaluated through EBL dose-sensitivity assessments. The results indicate that TDMAHf forms a reversible adduct with PMMA at temperatures up to 120 °C, whereas at 150 °C, covalent bond formation occurs, most likely via dealkylation that leads to acetate formation. EBL studies reveal that resist sensitivity is influenced by both infiltration temperature and developer selection, with aqueous isopropyl alcohol development demonstrating enhanced sensitivity compared to organic solvent-based development. The optimized infiltration protocol at 120 °C ensures a uniform inorganic distribution without compromising resist dissolution. These findings not only help refine hybrid resist patterning performance but also offer insights potentially applicable to the VPI of other homoleptic metal-amide organometallic VPI precursors that include TDMA ligands.

36 MATERIALS SCIENCE↗

A spectroscopic study of the high excitation nebula NGC 6302

The wonderfully intricate irregular gaseous nebula NGC 6302 shows a great range of excitation from the S I to Fe VII forbidden lines. Data obtained with the International Ultraviolet Explorer (IUE) covering the spectral range of wavelengths 1200-3203 and with the image-photon counting system at the Anglo-Australian telescope emphasizing the region of wavelengths 3200-4880 are used for a new determination of the chemical composition of this object. No simple theoretical model can represent the observed intensities. Helium and nitrogen are enhanced in abundance, as noted by previous observers, but the enrichment of nitrogen is a whole order of magnitude. Carbon and oxygen are decreased in abundance, neon and heavier elements show a 'normal' abundance pattern, but calcium and possibly silicon are depleted; presumably they are concentrated in grains.

Aller, L. H.↗

Sol-Gel Glass Holographic Light-Shaping Diffusers

Holographic glass light-shaping diffusers (GLSDs) are optical components for use in special-purpose illumination systems (see figure). When properly positioned with respect to lamps and areas to be illuminated, holographic GLSDs efficiently channel light from the lamps onto specified areas with specified distributions of illumination for example, uniform or nearly uniform irradiance can be concentrated with intensity confined to a peak a few degrees wide about normal incidence, over a circular or elliptical area. Holographic light diffusers were developed during the 1990s. The development of the present holographic GLSDs extends the prior development to incorporate sol-gel optical glass. To fabricate a holographic GLSD, one records a hologram on a sol-gel silica film formulated specially for this purpose. The hologram is a quasi-random, micro-sculpted pattern of smoothly varying changes in the index of refraction of the glass. The structures in this pattern act as an array of numerous miniature lenses that refract light passing through the GLSD, such that the transmitted light beam exhibits a precisely tailored energy distribution. In comparison with other light diffusers, holographic GLSDs function with remarkably high efficiency: they typically transmit 90 percent or more of the incident lamp light onto the designated areas. In addition, they can withstand temperatures in excess of 1,000 C. These characteristics make holographic GLSDs attractive for use in diverse lighting applications that involve high temperatures and/or requirements for high transmission efficiency for ultraviolet, visible, and near-infrared light. Examples include projectors, automobile headlights, aircraft landing lights, high-power laser illuminators, and industrial and scientific illuminators.

Yu, Kevin↗

Satellites as Shared Resources for Caribbean Climate and Health Studies

Remotely-sensed data and observations are providing powerful new tools for addressing climate and environment-related human health problems through increased capabilities for monitoring, risk mapping, and surveillance of parameters useful to such problems as vector-borne and infectious diseases, air and water quality, harmful algal blooms, UV (ultraviolet) radiation, contaminant and pathogen transport in air and water, and thermal stress. Remote sensing, geographic information systems (GIS), global positioning systems (GPS), improved computational capabilities, and interdisciplinary research between the Earth and health science communities are being combined in rich collaborative efforts resulting in more rapid problem-solving, early warning, and prevention in global health issues. Collaborative efforts among scientists from health and Earth sciences together with local decision-makers are enabling increased understanding of the relationships between changes in temperature, rainfall, wind, soil moisture, solar radiation, vegetation, and the patterns of extreme weather events and the occurrence and patterns of diseases (especially, infectious and vector-borne diseases) and other health problems. This increased understanding through improved information and data sharing, in turn, empowers local health and environmental officials to better predict health problems, take preventive measure, and improve response actions. This paper summarizes the remote sensing systems most useful for climate, environment and health studies of the Caribbean region and provides several examples of interdisciplinary research projects in the Caribbean currently using remote sensing technologies. These summaries include the use of remote sensing of algal blooms, pollution transport, coral reef monitoring, vectorborne disease studies, and potential health effects of African dust on Trinidad and Barbados.

Maynard, Nancy G.↗

Extinction and Scattering Properties of Soot Emitted from Buoyant Turbulent Diffusion Flames

Extinction and scattering properties at wavelengths of 250-5200 nm were studied for soot emitted from buoyant turbulent diffusion flames in the long residence time regime where soot properties are independent of position in the overfire region and characteristic flame residence times. Flames burning in still air and fueled with gas (acetylene, ethylene, propane, and propylene) and liquid (benzene, toluene, cyclohexane, and n-heptane) hydrocarbon fuels were considered Measured scattering patterns and ratios of total scattering/absorption cross sections were in good agreement with predictions based on the Rayleigh-Debye-Gans (RDG) scattering approximation in the visible. Measured depolarization ratios were roughly correlated by primary particle size parameter, suggesting potential for completing RDG methodology needed to make soot scattering predictions as well as providing a nonintrusive way to measure primary soot particle diameters. Measurements of dimensionless extinction coefficients were in good agreement with earlier measurements for similar soot populations and were independent of fuel type and wavelength except for reduced values as the near ultraviolet was approached. The ratios of the scattering/absorption refractive index functions were independent of fuel type within experimental uncertainties and were in good agreement with earlier measurements. The refractive index function for absorption was similarly independent of fuel type but was larger than earlier reflectometry measurements in the infrared. Ratios of total scattering/absorption cross sections were relatively large in the visible and near infrared, with maximum values as large as 0.9 and with values as large as 0.2 at 2000 nm, suggesting greater potential for scattering from soot particles to affect flame radiation properties than previously thought.

Krishnan, S. S.↗

Extinction and Scattering Properties of Soot Emitted from Buoyant Turbulent Diffusion Flames

Extinction and scattering properties at wavelengths of 250-5200 nm were studied for soot emitted from buoyant turbulent diffusion flames in the long residence time regime where soot properties are independent of position in the overfire region and characteristic flame residence times. Flames burning in still air and fueled with gas (acetylene, ethylene, propane, and propylene) and liquid (benzene, toluene, cyclohexane, and n-heptane) hydrocarbon fuels were considered. Measured scattering patterns and ratios of total scattering/absorption cross sections were in good agreement with predictions based on the Rayleigh-Debye-Gans (RDG) scattering approximation in the visible. Measured depolarization ratios were roughly correlated by primary particle size parameter, suggesting potential for completing RDG methodology needed to make soot scattering predictions as well as providing a nonintrusive way to measure primary soot particle diameters. Measurements of dimensionless extinction coefficients were in good agreement with earlier measurements for similar soot populations and were independent of fuel type and wavelength except for reduced values as the near ultraviolet was approached. The ratios of the scattering/absorption refractive index functions were independent of fuel type within experimental uncertainties and were in good agreement with earlier measurements. The refractive index junction for absorption was similarly independent of fuel type but was larger than earlier reflectometry measurements in the infrared. Ratios of total scattering/absorption cross sections were relatively large in the visible and near infrared, with maximum values as large as 0.9 and with values as large as 0.2 at 2000 nm, suggesting greater potential for scattering from soot particles to affect flame radiation properties than previously thought.

Krishnan, S. S.↗

Internal and External reconnection in a Series of Homologous Solar Flares

Using data from the Extreme Ultraviolet Telescope (EIT) on SOHO and the Soft X-ray Telescope (SXT) on Yohkoh, we examine a series of morphologically homologous solar flares occurring in NOAA AR 8210 over May 1-2, 1998. An emerging flux region (EFR) impacted against a sunspot to the west and next to a coronal hole to the east is the source of the repeated flaring. An SXT sigmoid parallels the EFR's neutral line at the site of the initial flaring in soft X-rays. In EIT, each flaring episode begins with the formation of a crinkle pattern external to the EFR. These EIT crinkles move out from, and then in toward, the EFR with velocities approximately 20 km/s. A shrinking and expansion of the width of the coronal hole coincides with the crinkle activity, and generation and evolution of a postflare loop system begins near the. time of crinkle formation. Using a schematic based on magnetograms of the region, we suggest that these observations are consistent with the standard reconnection-based model for solar eruptions, but modified by the presence of the additional magnetic fields of the sunspot and coronal hole. In the schematic, internal reconnection begins inside of the EFR-associated fields, unleashing a flare, postflare loops, and a CME. External reconnection, first occurring between the escaping CME and the coronal hole field, and second occurring between fields formed as a result of the first external reconnection, results in the EIT crinkles and changes in the coronal hole boundary. By the end of the second external reconnection, the initial setup is reinstated; thus the sequence can repeat, resulting in morphologically homologous eruptions. Our inferred magnetic topology is similar to that suggested in the "breakout model" of eruptions [Antiochos, 1998], although we cannot determine if our eruptions are released primarily by the breakout mechanism (external reconnection) or, alternatively, are released primarily by the internal reconnection.

Sterling, Alphonse C.↗

Medicine Delivery Device with Integrated Sterilization and Detection

Sterile delivery devices can be created by integrating a medicine delivery instrument with surfaces that are coated with germicidal and anti-fouling material. This requires that a large-surface-area template be developed within a constrained volume to ensure good contact between the delivered medicine and the germicidal material. Both of these can be integrated using JPL-developed silicon nanotip or cryo-etch black silicon technologies with atomic layer deposition (ALD) coating of specific germicidal layers. Nanofabrication techniques that are used to produce a microfluidics device are also capable of synthesizing extremely hig-hsurface-area templates in precise locations, and coating those surfaces with conformal films to manipulate their surface properties. This methodology has been successfully applied at JPL to produce patterned and coated silicon nanotips (also known as black silicon) to manipulate the hydrophilicity of surfaces to direct the spreading of fluids in microdevices. JPL s ALD technique is an ideal method to produce the highly conformal coatings required for this type of application. Certain materials, such as TiO2, have germicidal and anti-fouling properties when they are illuminated with UV light. The proposed delivery device contacts medicine with this high-surface-area black silicon surface coated with a thin-film germicidal deposited conformally with ALD. The coating can also be illuminated with ultraviolet light for the purpose of sterilization or identification of the medicine itself. This constrained volume that is located immediately prior to delivery into a patient, ensures that the medicine delivery device is inherently sterile.

Sheam, Michael J.↗

Medicine Delivery Device with Integrated Sterilization and Detection

Sterile delivery devices can be created by integrating a medicine delivery instrument with surfaces that are coated with germicidal and anti-fouling material. This requires that a large-surface-area template be developed within a constrained volume to ensure good contact between the delivered medicine and the germicidal material. Both of these can be integrated using JPL-developed silicon nanotip or cryo-etch black silicon technologies with atomic layer deposition (ALD) coating of specific germicidal layers. The application of semiconductor processing techniques and technologies to the problems of fluid manipulation and delivery has enabled the integration of chemical, electrical, and mechanical manipulation of samples all within a single microfluidic device. This approach has been successfully applied at JPL to the automated processing, detection, and analysis of minute quantities (parts per trillion level) of biomaterials to develop instruments for in situ exploration or extraterrestrial bodies. The same nanofabrication techniques that are used to produce a microfluidics device are also capable of synthesizing extremely high-surface-area templates in precise locations, and coating those surfaces with conformal films to manipulate their surface properties. This methodology has been successfully applied at JPL to produce patterned and coated silicon nanotips (also known as black silicon) to manipulate the hydrophilicity of surfaces to direct the spreading of fluids in microdevices. JPL's ALD technique is an ideal method to produce the highly conformal coatings required for this type of application. Certain materials, such as TiO2, have germicidal and anti-fouling properties when they are illuminated with UV light. The proposed delivery device contacts medicine with this high-surface-area black silicon surface coated with a thin-film germicidal deposited conformally with ALD. The coating can also be illuminated with ultraviolet light for the purpose of sterilization or identification of the medicine itself. This constrained volume that is located immediately prior to delivery into a patient, ensures that the medicine delivery device is inherently sterile. An additional benefit to integrating a high-surface-area template within the fluid channel of a medicine delivery device is that one can envision a number of different functional coatings that could facilitate the capture and analysis of either microbial contaminants or the medicine itself. For example, one could attach antibodies or some other binding agent with a specific affinity to the silicon nanotip template. Once a target molecule or microbe is bound to the high-surface- area template, one could use an optical analytical technique such as fluorescence or adsorption to determine the identity and potentially the concentration of the species of interest. By illuminating the bound species from the back, it may also be possible to probe only the molecules with an evanescent wave, making detection of the species from the front side of the device much simpler.

Shearn, Michael J.↗

The distribution and annual cycle of ozone in the upper stratosphere

Study of the global distribution of upper stratospheric ozone derived from backscatter ultraviolet (BUV/SBUV) instruments on the Nimbus 4 and 7 satellites reveals the following characteristics for the period June 1970 May 1972 plus portions of 1978 and 1979. At pressures less than 5 mbar a local midlatitude maximum in the ozone mixing ratio develops in autumn and persists through the winter season in both hemispheres. However, by a pressure of 10 mbar the seasonal trend has reversed, with midlatitude summer values exceeding those in winter. The largest ozone mixing ratios in a global sense occur at tropical latitudes between pressures of 7 and 9 mbar. The general character of this pattern repeats from year to year, although differences in detail exist, especially in winter. This interannual variability in ozone increases the difficulty in extracting small long-term trends from the available data base. The overall seasonal pattern revealed by the measurements is in accord with photochemical model predictions which include the annual variation in temperature and solar illumination.

Frederick, J. E.↗

Internal and External Reconnection Series Homologous Solar Flares

Using data from the extreme ultraviolet imaging telescope (EIT) on SOHO and the soft X-ray telescope (SXT) on Yohkoh, we examine a series of morphologically homologous solar flares occurring in National Oceanic and Atmospheric Administration (NOAA) active region 8210 over May 1-2, 1998. An emerging flux region (EFR) impacted against a sunspot to the west and next to a coronal hole to the east is the source of the repeated flaring. An SXT sigmoid parallels the EFR's neutral line at the site of the initial flaring in soft X rays. In EIT each flaring episode begins with the formation of a crinkle pattern external to the EFR. These EIT crinkles move out from, and then in toward, the EFR with velocities approx. 20 km/ s. A shrinking and expansion of the width of the coronal hole coincides with the crinkle activity, and generation and evolution of a postflare loop system begins near the time of crinkle formation. Using a schematic based on magnetograms of the region, we suggest that these observations are consistent with the standard reconnection-based model for solar eruptions but are modified by the presence of the additional magnetic fields of the sunspot and coronal hole. In the schematic, internal reconnection begins inside of the EFR-associated fields, unleashing a flare, postflare loops, and a coronal mass ejection (CME). External reconnection, first occurring between the escaping CME and the coronal hole field and second occurring between fields formed as a result of the first external reconnection, results in the EIT crinkles and changes in the coronal hole boundary. By the end of the second external reconnection, the initial setup is reinstated; thus the sequence can repeat, resulting in morphologically homologous eruptions. Our inferred magnetic topology is similar to that suggested in the "breakout model" of eruptions although we cannot determine if our eruptions are released primarily by the breakout mechanism (external reconnection) or, alternatively, primarily by the internal reconnection.

Sterling, Alphonse C.↗

Atmospheric Ozone Response to the Disrupted 2015-2016 Quasi-Biennial Oscillation

The quasi-biennial oscillation (QBO) - a quasi-periodic alternation between easterly and westerly zonal winds in the tropical stratosphere - is a main driver of inter-annual ozone variability in the stratosphere. During the late-2015 through 2016 time period, the QBO experienced a major disruption unlike any observed since wind measurements began in 1953. We examined the ozone response to this QBO disruption using profile ozone measurements from the Aura Microwave Limb Sounder (MLS) and Ozone Mapping and Profiler Suite Limb Profiler and total column measurements from the Solar Backscatter Ultraviolet (SBUV) Merged Ozone Data Set (MOD). Positive anomalies in stratospheric equatorial O3 developed between 50 and 30 hPa in May-September of 2016, and negative ozone anomalies were observed in the subtropics of both hemispheres. As a consequence of this QBO disruption, extratropical total ozone values during the spring-summer 2016 were at or near seasonal record lows over the more than 40 years of the total ozone record, resulting in an increase of surface UV index during northern hemisphere summer. We found very consistent responses in all considered ozone observations in terms of time, amplitude and spatial patterns. We will show the ozone changes associated with this disrupted QBO throughout the winter and spring 2017.

Kramarova, N. A.↗

Satellite observations of the nitric oxide dayglow Implications for the behavior of mesospheric and lower-thermospheric odd nitrogen

The solar backscattered ultraviolet spectral radiometer on the Nimbus 7 satellite routinely measures fluorescence emissions from the nitric oxide (1, 4) gamma band that are imposed on the large Rayleigh-scattered signal in the wavelength range 255-256 nm. The gamma band feature, when isolated from the background radiance, provide information on the seasonal and latitudinal variations in the nitric oxide column abundance over the altitude region from 40 to 45 km upward through the thermosphere. At latitudes from 30 deg to 45 deg in the Northern Hemisphere the measurements show an annual cycle with maximum nitric oxide abundance in summer. The Southern Hemisphere pattern is qualitatively similar to this, although the amplitude of the seasonal variation is substantially smaller. The most prominent feature of the data base is a large maximum in nitric oxide emission that develops poleward of 45 deg latitude in both Hemispheres during late autumn and early winter. These maxima dissipate rapidly as spring approaches and are no longer evident in the data for Northern Hemisphere March and Southern Hemisphere September.

Frederick, J. E.↗

Continuing Studies in Support of Ultraviolet Observations of Planetary Atmospheres

This program was a one-year extension of an earlier Planetary Atmospheres program grant, covering the period 1 August 1996 through 30 September 1997. The grant was for supporting work to complement an active program observing planetary atmospheres with Earth-orbital telescopes, principally the Hubble Space Telescope (HST). The recent concentration of this work has been on HST observations of Jupiter's upper atmosphere and aurora, but it has also included observations of Io, serendipitous observations of asteroids, and observations of the velocity structure in the interplanetary medium. The observations of Jupiter have been at vacuum ultraviolet wavelengths, including imaging and spectroscopy of the auroral and airglow emissions. The most recent HST observations have been at the same time as in situ measurements made by the Galileo orbiter instruments, as reflected in the meeting presentations listed below. Concentrated efforts have been applied in this year to the following projects: The analysis of HST WFPC 2 images of Jupiter's aurora, including the Io footprint emissions. We have performed a comparative analysis of the lo footprint locations with two magnetic field models, studied the statistical properties of the apparent dawn auroral storms on Jupiter, and found various other repeated patterns in Jupiter's aurora. Analysis and modeling of airglow and auroral Ly alpha emission line profiles from Jupiter. This has included modeling the aurora] line profiles, including the energy degradation of precipitating charged particles and radiative transfer of the emerging emissions. Jupiter's auroral emission line profile is self-absorbed, since it is produced by an internal source, and the resulting emission with a deep central absorption from the overlying atmosphere permits modeling of the depth of the emissions, plus the motion of the emitting layer with respect to the overlying atmospheric column from the observed Doppler shift of the central absorption. By contrast the airglow emission line, which is dominated by resonant scattering of solar emission, has no central absorption, but displays rapid time variations and broad wings, indicative of a superthermal component (or corona) in Jupiter's upper atmosphere. Modeling of the observed motions of the plumes produced after the impacts of the fragments of Comet S/L-9 with Jupiter in July 1994, from the HST WFPC 2 imaging series.

Clark, John↗

Delay line anodes for microchannel-plate spectrometers

A photon-counting readout system for microchannel-plate spectrometers is described that uses a delay line and timing circuit for the wavelength coordinate and a wedge-wedge charge division system for the orthogonal spatial coordinate. A novel zigzag layout allows these two anode patterns to coexist on a common planar substrate and share the charge from each photoevent, thereby simultaneously localizing the photon in each of its two dimensions. Unlike wedge-and-strip or resistive anode encoders, the delay line offers a spatial resolution that is relatively independent of the format length. Unlike discrete anode systems, the delay line readout system's complexity is also independent of the field of view size. These facts make the delay line readout system advantageous in large format detectors. A testbed detector having a delay line propagation speed of 2.2 mm/ns and a time resolution of 33 ps FWHM has been assembled. Ultraviolet testing shows a Gaussian event distribution having a 70-micron FWHM width; the readout system blur contribution is less than 50-micron FWHM.

Lampton, M.↗

Thermodynamic Spectrum of Solar Flares Based on SDO/EVE Observations: Techniques and First Results

The Solar Dynamics Observatory (SDO)/EUV Variability Experiment (EVE) provides rich information on the thermodynamic processes of solar activities, particularly on solar flares. Here, we develop a method to construct thermodynamic spectrum (TDS) charts based on the EVE spectral lines. This tool could potentially be useful for extreme ultraviolet (EUV) astronomy to learn about the eruptive activities on distant astronomical objects. Through several cases, we illustrate what we can learn from the TDS charts. Furthermore, we apply the TDS method to 74 flares equal to or greater than the M5.0 class, and reach the following statistical results. First, EUV peaks are always behind the soft X-ray (SXR) peaks and stronger flares tend to have faster cooling rates. There is a power-law correlation between the peak delay times and the cooling rates, suggesting a coherent cooling process of flares from SXR to EUV emissions. Second, there are two distinct temperature drift patterns, called Type I and Type II. For Type I flares, the enhanced emission drifts from high to low temperature like a quadrilateral, whereas for Type II flares the drift pattern looks like a triangle. Statistical analysis suggests that Type II flares are more impulsive than Type I flares. Third, for late-phase flares, the peak intensity ratio of the late phase to the main phase is roughly correlated with the flare class, and the flares with a strong late phase are all confined. We believe that the re-deposition of the energy carried by a flux rope, which unsuccessfully erupts out, into thermal emissions is responsible for the strong late phase found in a confined flare. Furthermore, we show the signatures of the flare thermodynamic process in the chromosphere and transition region in the TDS charts. These results provide new clues to advance our understanding of the thermodynamic processes of solar flares and associated solar eruptions, e.g., coronal mass ejections.

Wang, Yuming↗