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At least 217 records · Page 12

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DOE OSTI2025

Cryogenic optical beam steering for superconducting device calibration

We have developed a calibration system based on a micro-electromechanical systems (MEMS) mirror that is capable of delivering an optical beam over a wavelength range of 180 -- 2000 nm (0.62 -- 6.89 eV) in a sub-Kelvin environment. This portable, integrated system can steer the beam over a $\sim$3 cm $\times$ 3 cm area on the surface of any sensor with a precision of $\sim$100 $μ$m, enabling characterization of device response as a function of position. This fills a critical need in the landscape of calibration tools for sub-Kelvin devices, including those used for dark matter detection and quantum computing. These communities have a shared goal of understanding the impact of ionizing radiation on device performance, which can be pursued with our system. This paper describes the design of the first-generation calibration system and the results from successfully testing its performance at room temperature and 20 mK.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗

NASA NTRS2000

Development of Individually Addressable Micro-Mirror-Arrays for Space Applications

We have been developing a 32 x 32 prototype array of individually addressable Micro-Mirrors capable of operating at cryogenic temperature for Earth and Space Science applications. Micro-Mirror-Array technology has the potential to revolutionize imaging and spectroscopy systems for NASA's missions of the 21st century. They can be used as programmable slits for the Next Generation Space Telescope, as smart sensors for a steerable spectrometer, as neutral density filters for bright scene attenuation etc. The, entire fabrication process is carried out in the Detector Development Laboratory at NASA, GSFC. The fabrication process is low temperature compatible and involves integration of conventional CMOS technology and surface micro-machining used in MEMS. Aluminum is used as the mirror material and is built on a silicon substrate containing the CMOS address circuit. The mirrors are 100 microns x l00 microns in area and deflect by +/- 10 deg induced by electrostatic actuation between two parallel plate capacitors. A pair of thin aluminum torsion straps allow the mirrors to tilt. Finite-element-analysis and closed form solutions using electrostatic and mechanical torque for mirror operation were developed and the results were compared with laboratory performance. The results agree well both at room temperature and at cryogenic temperature. The development demonstrates the first cryogenic operation of two-dimensional Micro-Mirrors with bi-state operation. Larger arrays will be developed meeting requirements for different science applications. Theoretical analysis, fabrication process, laboratory test results and different science applications will be described in detail.

Dutta, Sanghamitra B.↗

NASA NTRS2000

Cooperative Mission Concepts Using Biomorphic Explorers

Inspired by the immense variety of naturally curious explorers (insects, animals, and birds), their wellintegrated biological sensor-processor suites, efficiently packaged in compact but highly dexterous forms, and their complex, intriguing, cooperative behavior, this paper focuses on "Biomorphic Explorers", their defination/classification, their designs, and presents planetary exploration scenarios based on the designs. Judicious blend of bio-inspired concepts and recent advances in micro-air vehicles, microsensors, microinstruments, MEMS, and microprocessors clearly suggests that the time of small, dedicated, low cost explorers that capture some of the key features of biological systems has arrived. Just as even small insects like ants, termites, honey bees etc working cooperatively in colonies can achieve big tasks, the biomorphic explorers hold the potential for obtaining science in-accessible by current large singular exploration platforms.

Thakoor, S.↗

DOE OSTI2023

Aerosol jet printing of piezoelectric surface acoustic wave thermometer

Abstract Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the generated SAW are material dependent and influenced by external factors like temperature. By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature. Traditional fabrication of SAW sensors requires labor- and cost- intensive subtractive processes that produce large volumes of hazardous waste. This study utilizes an innovative aerosol jet printer to directly write consistent, high-resolution, silver comb electrodes onto a Y-cut LiNbO 3 substrate. The printed, two-port, 20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200 ∘ C. Sensitivities of the printed SAW thermometer are $$-96.9\times 1{0{}^{-6}}^{\circ }$$ − 96.9 × 1 0 − 6 ∘ C −1 and $$-92.0\times 1{0{}^{-6}}^{\circ }$$ − 92.0 × 1 0 − 6 ∘ C −1 when operating in pulse-echo mode and pulse-receiver mode, respectively. These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

NASA NTRS2001

Dynamic Response Assessment for the MEMS Accelerometer Under Severe Shock Loads

NASA Goddard Space Flight Center (GSFC) has evaluated the dynamic response of a commercial-off-the-shelf (COTS) microelectromechanical systems (MEMS) device made by Analog Device, Inc. The device is designated as ADXL250 and is designed mainly for sensing dynamic acceleration. It is also used to measure the tilting angle of any system or component from its original level position. The device has been in commercial use (e.g., in automobile airbag deployment system as a dual-axial accelerometer and in the electronic game play-station as a tilting sensor) with success, but NASA needs an in-depth assessment of its performance under severe dynamic shock environments. It was realized while planning this evaluation task that two assessments would be beneficial to NASA's missions: (1) severe dynamic shock response under nominal thermal environments; and (2) general dynamic performance under cryogenic environments. The first evaluation aims at obtaining a good understanding of its micromachined structure within a framework of brittle fracture dynamics, while the second evaluation focuses on the structure integrity under cryogenic temperature conditions. The information we gathered from the manufacturer indicated that the environmental stresses under NASA's evaluation program have been far beyond what the device has experienced with commercial applications, for which the device was designed. Thus NASA needs the outcome of this evaluation in order to make the selection for possible use for its missions. This paper provides details of the first evaluation the dynamic response under severe multi-axial single-pulse shock load. It was performed using finite element tools with nonlinear dynamics procedures.

Fan, Mark S.↗

NASA NTRS2014

NASA Tech Briefs, March 2014

Topics include: Data Fusion for Global Estimation of Forest Characteristics From Sparse Lidar Data; Debris and Ice Mapping Analysis Tool - Database; Data Acquisition and Processing Software - DAPS; Metal-Assisted Fabrication of Biodegradable Porous Silicon Nanostructures; Post-Growth, In Situ Adhesion of Carbon Nanotubes to a Substrate for Robust CNT Cathodes; Integrated PEMFC Flow Field Design for Gravity-Independent Passive Water Removal; Thermal Mechanical Preparation of Glass Spheres; Mechanistic-Based Multiaxial-Stochastic-Strength Model for Transversely-Isotropic Brittle Materials; Methods for Mitigating Space Radiation Effects, Fault Detection and Correction, and Processing Sensor Data; Compact Ka-Band Antenna Feed with Double Circularly Polarized Capability; Dual-Leadframe Transient Liquid Phase Bonded Power Semiconductor Module Assembly and Bonding Process; Quad First Stage Processor: A Four-Channel Digitizer and Digital Beam-Forming Processor; Protective Sleeve for a Pyrotechnic Reefing Line Cutter; Metabolic Heat Regenerated Temperature Swing Adsorption; CubeSat Deployable Log Periodic Dipole Array; Re-entry Vehicle Shape for Enhanced Performance; NanoRacks-Scale MEMS Gas Chromatograph System; Variable Camber Aerodynamic Control Surfaces and Active Wing Shaping Control; Spacecraft Line-of-Sight Stabilization Using LWIR Earth Signature; Technique for Finding Retro-Reflectors in Flash LIDAR Imagery; Novel Hemispherical Dynamic Camera for EVAs; 360 deg Visual Detection and Object Tracking on an Autonomous Surface Vehicle; Simulation of Charge Carrier Mobility in Conducting Polymers; Observational Data Formatter Using CMOR for CMIP5; Propellant Loading Physics Model for Fault Detection Isolation and Recovery; Probabilistic Guidance for Swarms of Autonomous Agents; Reducing Drift in Stereo Visual Odometry; Future Air-Traffic Management Concepts Evaluation Tool; Examination and A Priori Analysis of a Direct Numerical Simulation Database for High-Pressure Turbulent Flows; and Resource-Constrained Application of Support Vector Machines to Imagery.

Source record↗

NASA NTRS2010

Disc resonator gyroscope fabrication process requiring no bonding alignment

A method of fabricating a resonant vibratory sensor, such as a disc resonator gyro. A silicon baseplate wafer for a disc resonator gyro is provided with one or more locating marks. The disc resonator gyro is fabricated by bonding a blank resonator wafer, such as an SOI wafer, to the fabricated baseplate, and fabricating the resonator structure according to a pattern based at least in part upon the location of the at least one locating mark of the fabricated baseplate. MEMS-based processing is used for the fabrication processing. In some embodiments, the locating mark is visualized using optical and/or infrared viewing methods. A disc resonator gyroscope manufactured according to these methods is described.

Shcheglov, Kirill V.↗

NASA NTRS2011

Distributed Capacitive Sensor for Sample Mass Measurement

Previous robotic sample return missions lacked in situ sample verification/ quantity measurement instruments. Therefore, the outcome of the mission remained unclear until spacecraft return. In situ sample verification systems such as this Distributed Capacitive (DisC) sensor would enable an unmanned spacecraft system to re-attempt the sample acquisition procedures until the capture of desired sample quantity is positively confirmed, thereby maximizing the prospect for scientific reward. The DisC device contains a 10-cm-diameter pressure-sensitive elastic membrane placed at the bottom of a sample canister. The membrane deforms under the weight of accumulating planetary sample. The membrane is positioned in close proximity to an opposing rigid substrate with a narrow gap. The deformation of the membrane makes the gap narrower, resulting in increased capacitance between the two parallel plates (elastic membrane and rigid substrate). C-V conversion circuits on a nearby PCB (printed circuit board) provide capacitance readout via LVDS (low-voltage differential signaling) interface. The capacitance method was chosen over other potential approaches such as the piezoelectric method because of its inherent temperature stability advantage. A reference capacitor and temperature sensor are embedded in the system to compensate for temperature effects. The pressure-sensitive membranes are aluminum 6061, stainless steel (SUS) 403, and metal-coated polyimide plates. The thicknesses of these membranes range from 250 to 500 m. The rigid substrate is made with a 1- to 2-mm-thick wafer of one of the following materials depending on the application requirements glass, silicon, polyimide, PCB substrate. The glass substrate is fabricated by a microelectromechanical systems (MEMS) fabrication approach. Several concentric electrode patterns are printed on the substrate. The initial gap between the two plates, 100 m, is defined by a silicon spacer ring that is anodically bonded to the glass substrate. The fabricated proof-of-concept devices have successfully demonstrated tens to hundreds of picofarads of capacitance change when a simulated sample (100 g to 500 g) is placed on the membrane.

Toda, Risaku↗

DOE OSTI2020

Design optimization of semiconductor piezoresistors with Schottky diode contacts

A modeling theory is developed to predict the performance of piezoresistors which incorporate Schottky diode electrical contacts. This new theory allows the design of high performance gauges which can be fabricated using NonLithographically-Based Microfabrication (NLBM) techniques. These semiconductor piezoresistors can be designed in customizable sizes and fabricated in parallel in order to integrate position sensing into MEMS flexural positioners. Customizable nanopositioning platforms will enable advances in a range of nano-scale fabrication and metrology applications. A semiconductor piezoresistor with Schottky diode contacts was fabricated and attached to a titanium flexure. This device is shown to match predicted electrical performance within about 8% and to show a gauge factor of 116, within 2% of the predicted value. Performance limits for Schottky diode semiconductor piezoresistors are identified to be about 127dB full noise dynamic range for a quarter bridge over a 10kHz sensor bandwidth on a 600µm width titanium flexure, making them ideal for sensing on meso-/micro-scale flexural positioners. Methods of reaching these performance bound are suggested and their impact on the sensor dynamic range are studied.

42 ENGINEERING↗

NASA NTRS2001

Increasing Density and Reducing Costs of Data Acquisition

There are a number of reasons why it is important to increase the density of data acquisition functions. Sensor fusion seeks to integrate large numbers of sensors into a decision network. Addition of health monitoring functions may incur additional sensor requirements. But at the same time, it is important to reduce the per-channel costs of data acquisition systems. Often the most significant cost is the management of data acquisition networks, which incurs substantial costs associated with transducer installation, configuration, calibration, and maintenance. Alternatives that lower the cost of the transducer system and reduce the data acquisition system channel count will directly impact initial system costs. Other techniques that affect maintenance and operating costs will contribute to reducing life cycle costs. This paper describes work undertaken to explore alternative architectures for lowering the cost per transducer function using a MEMS-based accelerometer as the model.

Schmalzel, J. L.↗

DOE OSTI2021

High-Performance Piezoelectric MEMS Manufacturing & Application on Micro Power Generators (CRADA Final Report)

This project aimed to develop and characterize a micro-fabrication technology for wafer-scale heterogeneous integration of bulk piezoelectric materials on silicon substrates that could enable manufacturing of high-performance micro transducers. Typical technical challenges for piezoelectric microfabrication technologies are high-temperature processing, non-uniform film quality, and low process repeatability, which will be addressed during this project. Progress was made on preliminary research towards development of a technology platform that will enable a new micro-fabrication process to provide the highest electromechanical coupling among any other thin/thick-film deposition methods available today. This work has tested and characterized samples that we hope will further our goal of refining and enabling existing micro transducers to achieve unprecedentedly high performance. This project focused solely on the characterization of the proposed microfabrication process technology, and it did not consist of design or manufacturing of new transducers, such as sensors, actuators or energy harvesters based on this fabrication process. Future work will be aimed at the research and development of process steps specifically to enable integration of on-chip electronics with piezoelectric materials.

36 MATERIALS SCIENCE↗

NASA NTRS1999

Optical Fiber Protection

F&S Inc. developed and commercialized fiber optic and microelectromechanical systems- (MEMS) based instrumentation for harsh environments encountered in the aerospace industry. The NASA SBIR programs have provided F&S the funds and the technology to develop ruggedized coatings and coating techniques that are applied during the optical fiber draw process. The F&S optical fiber fabrication facility and developed coating methods enable F&S to manufacture specialty optical fiber with custom designed refractive index profiles and protective or active coatings. F&S has demonstrated sputtered coatings using metals and ceramics and combinations of each, and has also developed techniques to apply thin coatings of specialized polyimides formulated at NASA Langley Research Center. With these capabilities, F&S has produced cost-effective, reliable instrumentation and sensors capable of withstanding temperatures up to 800? C and continues building commercial sales with corporate partners and private funding. More recently, F&S has adapted the same sensing platforms to provide the rapid detection and identification of chemical and biological agents

Source record↗

NASA NTRS2007

NASA Tech Briefs, January 2007

Topics covered include: Flexible Skins Containing Integrated Sensors and Circuitry; Artificial Hair Cells for Sensing Flows; Video Guidance Sensor and Time-of-Flight Rangefinder; Optical Beam-Shear Sensors; Multiple-Agent Air/Ground Autonomous Exploration Systems; A 640 512-Pixel Portable Long-Wavelength Infrared Camera; An Array of Optical Receivers for Deep-Space Communications; Microstrip Antenna Arrays on Multilayer LCP Substrates; Applications for Subvocal Speech; Multiloop Rapid-Rise/Rapid Fall High-Voltage Power Supply; The PICWidget; Fusing Symbolic and Numerical Diagnostic Computations; Probabilistic Reasoning for Robustness in Automated Planning; Short-Term Forecasting of Radiation Belt and Ring Current; JMS Proxy and C/C++ Client SDK; XML Flight/Ground Data Dictionary Management; Cross-Compiler for Modeling Space-Flight Systems; Composite Elastic Skins for Shape-Changing Structures; Glass/Ceramic Composites for Sealing Solid Oxide Fuel Cells; Aligning Optical Fibers by Means of Actuated MEMS Wedges; Manufacturing Large Membrane Mirrors at Low Cost; Double-Vacuum-Bag Process for Making Resin- Matrix Composites; Surface Bacterial-Spore Assay Using Tb3+/DPA Luminescence; Simplified Microarray Technique for Identifying mRNA in Rare Samples; High-Resolution, Wide-Field-of-View Scanning Telescope; Multispectral Imager With Improved Filter Wheel and Optics; Integral Radiator and Storage Tank; Compensation for Phase Anisotropy of a Metal Reflector; Optical Characterization of Molecular Contaminant Films; Integrated Hardware and Software for No-Loss Computing; Decision-Tree Formulation With Order-1 Lateral Execution; GIS Methodology for Planning Planetary-Rover Operations; Optimal Calibration of the Spitzer Space Telescope; Automated Detection of Events of Scientific Interest; Representation-Independent Iteration of Sparse Data Arrays; Mission Operations of the Mars Exploration Rovers; and More About Software for No-Loss Computing.

Source record↗

NASA NTRS2004

Isolated post resonator mesogyroscope

A new symmetric vibratory gyroscope principle has been devised in which a central post proof mass is counter-rocked against an outer sensing plate such that the motion is isolated from the gyroscope case. Prototype gyroscopes have been designed and fabricated with micromachined silicon at mesoscale (20-cm resonator width), vs. microscale (e.g., 2-mm resonator width) to achieve higher sensitivity and machined precision. This novel mesogyro design arose out of an ongoing technical cooperation between JPL and Boeing begun in 1997 to advance the design of micro-inertial sensors for low-cost space applications. This paper describes the theory of operation of the mesogyro and relationships with other vibratory gyroscopes, the mechanical design, closed loop electronics design, bulk silicon fabrication and packaged gyroscope assembly and test methods. The initial packaged prototype test results are reported for what is believed to be the first silicon mesogyroscope.

mesogyroscope↗

NASA NTRS2011

NASA Tech Briefs, October 2011

Topics covered include: Laser Truss Sensor for Segmented Telescope Phasing; Qualifications of Bonding Process of Temperature Sensors to Deep-Space Missions; Optical Sensors for Monitoring Gamma and Neutron Radiation; Compliant Tactile Sensors; Cytometer on a Chip; Measuring Input Thresholds on an Existing Board; Scanning and Defocusing Properties of Microstrip Reflectarray Antennas; Cable Tester Box; Programmable Oscillator; Fault-Tolerant, Radiation-Hard DSP; Sub-Shot Noise Power Source for Microelectronics; Asynchronous Message Service Reference Implementation; Zero-Copy Objects System; Delay and Disruption Tolerant Networking MACHETE Model; Contact Graph Routing; Parallel Eclipse Project Checkout; Technique for Configuring an Actively Cooled Thermal Shield in a Flight System; Use of Additives to Improve Performance of Methyl Butyrate-Based Lithium-Ion Electrolytes; Li-Ion Cells Employing Electrolytes with Methyl Propionate and Ethyl Butyrate Co-Solvents; Improved Devices for Collecting Sweat for Chemical Analysis; Tissue Photolithography; Method for Impeding Degradation of Porous Silicon Structures; External Cooling Coupled to Reduced Extremity Pressure Device; A Zero-Gravity Cup for Drinking Beverages in Microgravity; Co-Flow Hollow Cathode Technology; Programmable Aperture with MEMS Microshutter Arrays; Polished Panel Optical Receiver for Simultaneous RF/Optical Telemetry with Large DSN Antennas; Adaptive System Modeling for Spacecraft Simulation; Lidar-Based Navigation Algorithm for Safe Lunar Landing; Tracking Object Existence From an Autonomous Patrol Vehicle; Rad-Hard, Miniaturized, Scalable, High-Voltage Switching Module for Power Applications; and Architecture for a 1-GHz Digital RADAR.

Source record↗

NASA NTRSDate not supplied

Fine pointing of Laser Beams by using Laser Arrays for Applications to CubeSats

A method of fine pointing of laser beams by using laser arrays has been developed. The telescope system combines a lens system and a VCSEL/Photodetector Array. It does not use moving parts. In computer simulations, it is applied to CubeSats that use body pointing. Body pointing was used by the Aerospace Corporation for CubeSats in LEO in NASA’s Optical Communications and Sensors Demonstration (OCSD) program. Computer simulations of this fine pointing capability have been applied previously to CubeSats in the OCSD program. In this paper, computer simulations of laser pointing using this telescope design are applied to CubeSats in LLO, at 100 km. These CubeSats could form part of the LunaNet, the lunar communications and navigation network, part of the NASA ARTEMIS Program. With more accurate pointing, a laser beam with smaller divergence can be used. For the case of the AeroCube-7B vehicle that was used in the OCSD program, computer simulations will show, for example, that the divergence of the output beam can be reduced from approximately 0.06° FWHM to 0.014°. For the proposed electro-optical system, reaction times to pointing changes and vibrations are on a nanosecond time scale, much faster than those for fine pointing systems that use moving parts such as fast steering mirrors, including MEMS, or that use quad-cell photodetectors to improve the body pointing of the CubeSat. Other possible applications are to Optical Multiple Access (OMA)for simultaneously communicating with ground stations at different locations and to Wavelength-Division Multiplexing (WDM)for increasing data rate transmission.

SMD↗

NASA NTRS2021

Fine Pointing of Laser Beams by Using Laser Arrays for Applications to CubeSats

HEC↗

NASA NTRS2011

Design and Performance Evaluation of Sensors and Actuators for Advanced Optical Systems

Current state-of-the-art commercial sensors and actuators do not meet many of NASA s next generation spacecraft and instrument needs. Nor do they satisfy the DoD needs for satellite missions, especially micro/nano satellite missions. In an effort to develop advanced optical devices and instruments that meet mission requirements, NASA Langley recently completed construction of a new cleanroom housing equipment capable of fabricating high performance active optic and adaptive optic technologies including deformable mirrors, reconfigurable lenses (both refractive and diffractive), spectrometers, spectro-polarimeters, tunable filters and many other active optic devices. In addition to performance, these advanced optic technologies offer advantages in speed, size, weight, power consumption, and radiation tolerance. The active optic devices described in this paper rely on birefringent liquid crystal materials to alter either the phase or the polarization of the incoming light. Design considerations and performance evaluation results for various NASA applications are presented. Applications presented will include large space telescopes, optical communications, spacecraft windows, coronagraphs, and star trackers. Keywords: Photonics, Adaptive Optics, Tunable Filters, MEMs., MOEMs, Coronagraph, Star Tracker

Clark, Natalie↗