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NASA NTRS2019

Prototype Magnetic Calorimeter Arrays with Buried Wiring for the Lynx X-Ray Microcalorimeter

Metallic magnetic calorimeter (MMC) technology is a leading contender for detectors for the Lynx X-ray Microcalorimeter, which is an imaging spectrometer consisting of an array of greater than 100,000 pixels. The fabrication of such large arrays presents a challenge when attempting to route the superconducting wiring from the pixels to the multiplexed readout. If the wiring is designed to be planar, then an aggressive, submicron scale wiring pitch has to be employed, which is technically challenging to design and fabricate on account of the requirements of low inductance, low cross-talk, high critical currents and high yield. An alternative way to achieve large scale, high density wiring is through the use of multiple buried metal layers, planarized by Chemical Mechanical Planarization. This approach is well-suited for connecting thousands of pixels on a large focal plane to readout chips, and also for fabricating sensor meander coils with narrow line widths, which helps in increasing the sensor inductance and thus alleviates stray inductance issues associated with the wiring in large size arrays. In this work we describe the fabrication of high sensor inductance MMC arrays implementing Lynx concepts and incorporating multiple layers of buried Nb wiring. The detector array is composed of three sub-arrays with pixels optimized to meet the different science driven performance requirements of Lynx. In two of the sub-arrays we adopt a thermal multiplexing scheme to read out pixels by coupling 25 absorbers to a single sensor through thermal links of varied thermal conductance. We demonstrate the successful fabrication of multi-absorber MMCs with fine pitch pixels in very large size arrays.

Solid-State Physics↗
NASA NTRS2020

Proton Radiation Effects on HgCdTe Avalanche Photodiode Detectors

Space radiation damage and proton induced transient effects were evaluated on 4.4 μm cutoff HgCdTe avalanche photodiode (APD) arrays developed by Leonardo DRS. Device performances as a function of total dose up to 100 krad (Si) were measured with ~60 MeV protons on 3 types of APD samples: 4x4 pixel APD fanout arrays with and without connection to a read-out integrated circuit (ROIC), and a 2x8 pixel photon counting APD focal plane array (FPA). A gamma-ray test was also conducted to study ionization effects. Both APD arrays exhibited a small decrease in the quantum efficiency and a linear increase in the dark current with the proton fluence. The 2x8 pixel photon counting FPA also exhibited an increase in the dark count rate with proton dose. After the proton irradiation and an overnight room temperature warm-up, the APD dark currents at 80 K increased significantly in both types of APD arrays. All radiation damage to these HgCdTe APD arrays annealed out after baking them at >85 °C for several hours. Transient protons through the devices were found to cause large pulses at the detector output but recover within 1 μs.

Xiaoli Sun↗
NASA NTRSDate not supplied

X-Ray Missions Based on LTD Technologies

Microcalorimeter arrays used as imaging spectrometers will enable ground-breaking science in X-ray astrophysics. Their development has been one of the driving applications of the low temperature detector community since the early 1980s. While their application in space remains in relative infancy, we are on the verge of an era in which microcalorimeter spectrometers are likely to dominate instrumentation for high-energy astrophysics missions. NASA sounding rocket experiments such as the X-ray Quantum Calorimeter (XQC) and Micro-X have now paved the way for orbital observatories. JAXA’s Astro-H gave us a glimpse of this fantastic new capability before its unfortunate demise. The launch of XRISM later this year should finally demonstrate the sort of large suite of observations that X-ray microcalorimeter arrays will make major contributions to. In the mid-2030s, we will see the launch of ESA’s flagship Athena mission, that will further advance the imaging and spectroscopic capabilities for the high-energy X-ray community enormously. Numerous other potential new mission concepts using X-ray microcalorimeters have been studied in detail such as NASA’s Lynx and the Light Element Mapper (LEM), JAXA’s Super-DIOS, and China’s Hot Universe Baryon Surveyor (HUBS). In the first half of this presentation, I will review the development and desired requirements of the X-ray microcalorimeter missions and concepts, and describe the current progress and status missions being implemented and proposed. In the second half of this presentation, I will focus on The Line Emission Mapper (LEM) which is a probe-class mission concept under study by NASA that is designed to provide unprecedented insight into the physics of galaxy formation, including stellar and black-hole feedback and flows of baryonic matter into and out of galaxies. LEM incorporates a light-weight X-ray optic with 10” angular resolution and a large-format microcalorimeter array with a 15” pixel pitch over a 29’ field of view (FOV). The main microcalorimeter array and readout design takes advantage of mature technology that has been developed for Athena X-IFU. The central 7’ region of the array consists of ~ 800 transition-edge sensors (TESs), optimized for a bandpass of 0.3-2 keV and with an energy resolution of 1.2 eV at 1 keV. The rest of the FOV is covered by 4-pixel TES hydras with 2.5 eV energy resolution at 1 keV. Hydras are position-sensitive (‘thermally multiplexed’) detectors that enable extremely large numbers of effective pixels in an array, without a commensurate increase in the number of wires, bias circuit, and readout components. In total the array will have ~ 4k TESs with ~ 14k imaging elements on a 290 micron-pitch. The array will be read out with state-of-the-art time-division multiplexing (TDM), implement with 59 pixels (and 1 dark pixel) in each of the 69 TDM columns. Here we present a detailed overview of the baseline microcalorimeter detector design and present first results from both single pixel TESs and 4-pixel hydras. Our prototype LEM pixels utilize 15um x 50um Mo/Au TESs with a transition temperature of around 58 mK. These pixels incorporate high-fill-factor Au absorbers of thickness 0.54um. We have demonstrated an energy resolution of 0.90+/-0.02 eV and 1.90 +/-0.02 eV at 1.5 keV for single pixel and 4-pixel hydras, respectively, meeting the performance requirements of LEM. We show how the position discrimination in the hydra pixels can be achieved, down to energies of a few 100 eV, using the measured pulse rise-times. Finally, we will show that the properties of the LEM pixels are well optimized for the proposed TDM read out architecture.

Simon Richard Bandler↗
NASA NTRS2005

CdZnTe Image Detectors for Hard-X-Ray Telescopes

Arrays of CdZnTe photodetectors and associated electronic circuitry have been built and tested in a continuing effort to develop focal-plane image sensor systems for hard-x-ray telescopes. Each array contains 24 by 44 pixels at a pitch of 498 m. The detector designs are optimized to obtain low power demand with high spectral resolution in the photon- energy range of 5 to 100 keV. More precisely, each detector array is a hybrid of a CdZnTe photodetector array and an application-specific integrated circuit (ASIC) containing an array of amplifiers in the same pixel pattern as that of the detectors. The array is fabricated on a single crystal of CdZnTe having dimensions of 23.6 by 12.9 by 2 mm. The detector-array cathode is a monolithic platinum contact. On the anode plane, the contact metal is patterned into the aforementioned pixel array, surrounded by a guard ring that is 1 mm wide on three sides and is 0.1 mm wide on the fourth side so that two such detector arrays can be placed side-by-side to form a roughly square sensor area with minimal dead area between them. Figure 1 shows two anode patterns. One pattern features larger pixel anode contacts, with a 30-m gap between them. The other pattern features smaller pixel anode contacts plus a contact for a shaping electrode in the form of a grid that separates all the pixels. In operation, the grid is held at a potential intermediate between the cathode and anode potentials to steer electric charges toward the anode in order to reduce the loss of charges in the inter-anode gaps. The CdZnTe photodetector array is mechanically and electrically connected to the ASIC (see Figure 2), either by use of indium bump bonds or by use of conductive epoxy bumps on the CdZnTe array joined to gold bumps on the ASIC. Hence, the output of each pixel detector is fed to its own amplifier chain.

Chen, C. M. Hubert↗
NASA NTRS1990

Scientific grade CCDs from EG & G Reticon

The design and performance of three scientific grade CCDs are summarized: a 1200 x 400 astronomical array of 27 x 27 sq micron pixels, a 512 x 512 scientific array of 27 x 27 sq micron pixels and a 404 x 64 VNIR array of 52 x 52 sq micron pixels. Each of the arrays is fabricated using a four phase, double poly, buried n-channel, multi-pinned phase CCD process. Performance data for each sensor is presented.

Cizdziel, Philip J.↗
NASA NTRS2003

An Array of Frequency Selective Bolometers (FSB) for the Spectral Energy Distribution (SPEED) Camera

The SPEED camera is being developed to study the spectral energy distributions of high redshift galaxies using the Heinrich Hertz Telescope (HHT) in Arizona. SPEED requires a small cryogenic detector array of 2x2 pixels with each pixel having four frequency bands in the 150-350 GHz range. Here we describe the development of the detector array of these high efficiency FSBs. The FSB design provides the multi-pixel multi-spectral band capability required for SPEED in a compact stackable array. The SPEED bolometers will use proximity effect superconducting transition edge sensors as their temperature-sensing element allowing for higher levels of multiplexing in future applications.

Silverberg, R. F.↗
NASA NTRS2011

Design and Development of 256x256 Linear Mode Low-Noise Avalanche Photodiode Arrays

A larger format photodiode array is always desirable for many LADAR imaging applications. However, as the array format increases, the laser power or the lens aperture has to increase to maintain the same flux per pixel thus increasing the size, weight and power of the imaging system. In order to avoid this negative impact, it is essential to improve the pixel sensitivity. The sensitivity of a short wavelength infrared linear-mode avalanche photodiode (APD) is a delicate balance of quantum efficiency, usable gain, excess noise factor, capacitance, and dark current of APD as well as the input equivalent noise of the amplifier. By using InA1As as a multiplication layer in an InP-based APD, the ionization coefficient ratio, k, is reduced from 0.40 (lnP) to 0.22, and the excess noise is reduced by about 50%. An additional improvement in excess noise of 25% was achieved by employing an impact-ionization-engineering structure with a k value of 0.15. Compared with the traditional InP structure, about 30% reduction in the noise-equivalent power with the following amplifier can be achieved. Spectrolab demonstrated 30-um mesa APD pixels with a dark current less than 10 nA and a capacitance of 60 fF at gain of 10. APD gain uninformity determines the usable gain of most pixels in an array, which is critical to focal plane array sensitivity. By fine tuning the material growth and device process, a break-down-voltage standard deviation of 0.1 V and gain of 30 on individual pixels were demonstrated in our 256x256 linear-mode APD arrays.

Yuan, Ping↗
NASA NTRS2008

Implementation of Complex Signal Processing Algorithms for Position-Sensitive Microcalorimeters

We have recently reported on a theoretical digital signal-processing algorithm for improved energy and position resolution in position-sensitive, transition-edge sensor (POST) X-ray detectors [Smith et al., Nucl, lnstr and Meth. A 556 (2006) 2371. PoST's consists of one or more transition-edge sensors (TES's) on a large continuous or pixellated X-ray absorber and are under development as an alternative to arrays of single pixel TES's. PoST's provide a means to increase the field-of-view for the fewest number of read-out channels. In this contribution we extend the theoretical correlated energy position optimal filter (CEPOF) algorithm (originally developed for 2-TES continuous absorber PoST's) to investigate the practical implementation on multi-pixel single TES PoST's or Hydras. We use numerically simulated data for a nine absorber device, which includes realistic detector noise, to demonstrate an iterative scheme that enables convergence on the correct photon absorption position and energy without any a priori assumptions. The position sensitivity of the CEPOF implemented on simulated data agrees very well with the theoretically predicted resolution. We discuss practical issues such as the impact of random arrival phase of the measured data on the performance of the CEPOF. The CEPOF algorithm demonstrates that full-width-at- half-maximum energy resolution of < 8 eV coupled with position-sensitivity down to a few 100 eV should be achievable for a fully optimized device.

Smith, Stephen J.↗
NASA NTRS1999

Fabrication of Pop-up Detector Arrays on Si Wafers

High sensitivity is a basic requirement for a new generation of thermal detectors. To meet the requirement, close-packed, two-dimensional silicon detector arrays have been developed in NASA Goddard Space Flight Center. The goal of the task is to fabricate detector arrays configured with thermal detectors such as infrared bolometers and x-ray calorimeters to use in space fliGht missions. This paper focuses on the fabrication and the mechanical testing of detector arrays in a 0.2 mm pixel size, the smallest pop-up detectors being developed so far. These array structures, nicknamed "PUDS" for "Pop-Up Detectors", are fabricated on I pm thick, single-crystal, silicon membranes. Their designs have been refined so we can utilize the flexibility of thin silicon films by actually folding the silicon membranes to 90 degrees in order to obtain close-packed two-dimensional arrays. The PUD elements consist of a detector platform and two legs for mechanical support while also serving as electrical and thermal paths. Torsion bars and cantilevers connecting the detector platform to the legs provide additional flexures for strain relief. Using micro-electromechanical structure (MEMS) fabrication techniques, including photolithography, anisotropic chemical etching, reactive-ion etching, and laser dicing, we have fabricated PLTD detector arrays of fourteen designs with a variation of four parameters including cantilever length, torsion bar length and width, and leg length. Folding tests were conducted to test mechanical stress distribution for the array structures. We obtained folding yields and selected optimum design parameters to reach minimal stress levels. Computer simulation was also employed to verify mechanical behaviors of PUDs in the folding process. In addition, scanning electron microscopy was utilized to examine the flatness of detectors and the alignment of detector pixels in arrays. The fabrication of thermistors and heaters on the pop-up detectors is under way, preparing us for the next step of the experiment, the thermal test.

Li, Mary J.↗
NASA NTRS2020

Thermal crosstalk measurements and simulations for an X-ray microcalorimeter array

Arrays of high-density microcalorimeters require careful heat sinking in order to minimize the thermal crosstalk between nearby pixels. For the array of microcalorimeters developed for the Athena X-ray Integral Field Unit instrument, which has more than 3000 pixels on a 275 µm pitch, it is essential to address this problem in order to meet the energy-resolution requirements. The instrument’s energy-resolution budget requires that the impact of the thermal crosstalk on the energy resolution be a contribution that, added in quadrature to other energy-resolution contributions, is less than 0.2 eV. This value results in a derived requirement that the ratio between the amplitude of the crosstalk signal to an X-ray pulse (for example at 6 keV) is less than 1 × 10(exp −3) (for the first neighbor), less than 4 × 10(exp −4) (for the diagonal neighbor) and less than 8 × 10(exp −5) (for the second nearest neighbor). We have measured the thermal crosstalk levels between pixels in various geometries and configurations. The results show a crosstalk ratio which is at least a factor of 4 lower than the derived requirement. We also developed a finite element (FEM) 2D thermal model to predict the thermal behavior of large-scale arrays. This model successfully simulates the measured data in terms of pulse amplitude and time constants.

Antoine R. Miniussi↗
NASA NTRS1989

Centroid position measurements and subpixel sensitivity variations with the MAMA detector

Initial measurements of the position sensitivity of a visible-light multianode microchannel array detector show that centroid calculations for image spots are accurate to better than 0.04 pixels even with sources that are essentially delta functions at the photocathode.Subpixel sensitivity variations of 10-15 percent are typically found for pixels in the array. Variations as large as 30 percent are possible in the worst conditions. These variations limit the photometric accuracy of the detector when very small scale features are observed. The photometric accuracy and the position sensitivity of the detector appear to be limited by cross-coupling effects within the anode array. Initial measurements with more recent designs of the detector show that most or all of this cross-coupling has been eliminated.

Morgan, Jeffrey S.↗
NASA NTRS2007

Practical Considerations for Optimizing Position Sensitivity in Arrays of Position-sensitive TES's

We are developing Position-Sensitive Transitions-Edge Sensors (PoST's) for future X-ray astronomy missions such as NASA's Constellation-X. The PoST consists of one or more Transitions Edge Sensors (TES's) thermally connected to a large X-ray absorber, which through heat diffusion, gives rise to position dependence. The development of PoST's is motivated by the desire to achieve the largest the focal-plan coverage with the fewest number of readout channels. In order to develop a practical array, consisting of an inner pixellated core with an outer array of large absorber PoST's, we must be able to simultaneously read out all (-1800) channels in the array. This is achievable using time division multiplexing (TDM), but does set stringent slew rate requirements on the array. Typically, we must damp the pulses to reduce the slew rate of the input signal to the TDM. This is achieved by applying a low-pass analog filter with large inductance to the signal. This attenuates the high frequency components of the signal, essential for position discrimination in PoST's, relative to the white noise of the readout chain and degrades the position sensitivity. Using numerically simulated data, we investigate the position sensing ability of typical PoST designs under such high inductance conditions. We investigate signal-processing techniques for optimal determination of the event position and discuss the practical considerations for real-time implementation.

Smith, Stephen J.↗
NASA NTRS1995

Active-Pixel Image Sensor With Analog-To-Digital Converters

Proposed single-chip integrated-circuit image sensor contains 128 x 128 array of active pixel sensors at 50-micrometer pitch. Output terminals of all pixels in each given column connected to analog-to-digital (A/D) converter located at bottom of column. Pixels scanned in semiparallel fashion, one row at time; during time allocated to scanning row, outputs of all active pixel sensors in row fed to respective A/D converters. Design of chip based on complementary metal oxide semiconductor (CMOS) technology, and individual circuit elements fabricated according to 2-micrometer CMOS design rules. Active pixel sensors designed to operate at video rate of 30 frames/second, even at low light levels. A/D scheme based on first-order Sigma-Delta modulation.

Fossum, Eric R.↗
NASA NTRS2004

Rapid Chemometric Filtering of Spectral Data

A method of rapid, programmable filtering of spectral transmittance, reflectance, or fluorescence data to measure the concentrations of chemical species has been proposed. By programmable is meant that a variety of spectral analyses can readily be performed and modified in software, firmware, and/or electronic hardware, without need to change optical filters or other optical hardware of the associated spectrometers. The method is intended to enable real-time identification of single or multiple target chemical species in applications that involve high-throughput screening of multiple samples. Examples of such applications include (but are not limited to) combinatorial chemistry, flow cytometry, bead assays, testing drugs, remote sensing, and identification of targets. The basic concept of the proposed method is to perform real-time crosscorrelations of a measured spectrum with one or more analytical function(s) of wavelength that could be, for example, the known spectra of target species. Assuming that measured spectral intensities are proportional to concentrations of target species plus background spectral intensities, then after subtraction of background levels, it should be possible to determine target species concentrations from cross-correlation values. Of course, the problem of determining the concentrations is more complex when spectra of different species overlap, but the problem can be solved by use of multiple analytical functions in combination with computational techniques that have been developed previously for analyses of this type. The method is applicable to the design and operation of a spectrometer in which spectrally dispersed light is measured by means of an active-pixel sensor (APS) array. The row or column dimension of such an array is generally chosen to be aligned along the spectral-dispersion dimension, so that each pixel intercepts light in a narrow spectral band centered on a wavelength that is a known function of the pixel position. The proposed method admits of two hardware implementations for computing cross-correlations in real time.

Beaman, Gregory↗
NASA NTRS2019

Method for the Absolute Calibration of the Location and Orientation of Large-Format Detectors Using Laser Radar

A method of mapping pixel locations of a detector array includes measuring a location on the detector array, initiating a frame readout of the detector array, measuring a location of one or more metrology targets on the detector array, analyzing the frame readout to identify a pixel at the location on the detector array, and defining a location of the identified pixel with respect to the location of the one or more metrology targets. Subsequent measurement of the metrology targets alone by another metrology system allows one to infer the six degree of freedom alignment of the detector array in space.

Coulter, Phillip↗
NASA NTRS1986

Imaging by time-tagging photons with the multi-anode microchannel array detector system

The capability and initial use of the Multi-Anode Microchannel Array (MAMA) detector in the time-tag mode is reported. The detector hardware currently in use consists of a visible-light detector tube with a semitransparent photocathode proximity-focused to a high-gain curved-channel microchannel plate MCP. The photoevents are detected by a (256 x 1024)-pixel coincidence-anode array with pixel dimensions of 25 x 25 microns connected to charge-sensitive amplifiers and event-detection circuitry. In the time-lag mode, the detector delivers the pixel address and the time of arrival for each detected photon to an accuracy of 10 microns. The maximum count rate is limited by the speed of data-acquisition hardware. The MAMA detector in the time-lag mode is currently being evaluated in programs of astrometry and speckle imaging.

Timothy, J. G.↗
NASA NTRS2008

Performance of the JWST/MIRI Si:As Detectors

The Mid-Infrared Instrument (MIRI) is a 5 to 28 micron imager and spectrometer that is slated to fly aboard the JWST in 2013. Each of the flight arrays is a 1024x1024 pixel Si:As impurity band conductor detector array, developed by Raytheon Vision Systems. JPL, in conjunction with the MIRI science team, has selected the three flight arrays along with their spares. We briefly summarize the development of these devices, then describe the measured performance of the flight arrays along with supplemental data from sister flight-like parts.

arsenic-doped silicon↗