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DOE OSTI2021

Machine Learning Augmented Predictive and Generative Model for Rupture Life in Ferritic and Austenitic Steels

The Larson-Miller parameter (LMP) offers an efficient and fast scheme to estimate the creep rupture life of alloy materials for high temperature applications. However, owing to poor generalizability and dependence on the constant C, which is typically not known a-priori, estimations using the Larson-Miller parameter often result in suboptimal performance for a wide range of materials. At best it is useful in comparing alloys of similar composition. In this work, three machine learning (ML) schemes were developed for rupture life prediction for 9-12% Cr ferritic-martensitic steels and austenitic stainless steels, i.e., a hierarchical model to parameterize LMP using the LMP constant C to compute rupture life, a hierarchical model to parameterize both C and LMP to compute rupture life, and a direct prediction of rupture life. Specifically, we show that the third scheme, using a gradient boosting algorithm, can be used to train ML models for very accurate prediction of rupture life in a variety of alloys (Pear-son Correlation Coefficient > 0.9 for 9-12% Cr and > 0.8 for austenitic stainless steels). In addition, the Shapley value was used to quantify feature importance, making the model interpretable by identifying the effect of various features on the model performance. Furthermore, a variational autoencoder-based generative model was built by conditioning on the experimental dataset to sample hypothetical synthetic candidate alloys from the learnt joint distribution not existing in both 9-12 % Cr ferritic-martensitic steel and austenitic stainless steel datasets. Finally, based on the predictive and generative model, a reinforcement learning strategy has been proposed to guide experimentalists into designing better heat resistant alloys.

Mamun, Md Osman G.↗

DOE OSTI2022

In-situ investigation of the vibrational properties of H 2 O CO 2 -bearing and dry K-rich basaltic glasses at high pressure by mid infrared spectroscopy

Here, the vibrational properties of CO 2 –H 2 O-bearing and dry synthetic K-rich basaltic glasses were investigated at room temperature and pressures between 0.0001–5.5 GPa using the diamond anvil cell combined with in situ reflectance and transmittance Fourier Transform infrared micro-spectroscopy. The absorption coefficient a(v) calculated from the Kramers-Kronig relation shows that glasses are dominated by the Q 2 aluminosilicate unit followed by Q 1 , Q 3 . The variation in Q n concentration upon compression suggests that glasses undergo polymerization from ambient pressure to 2 GPa followed by less marked structural changes up to 4 GPa, above which the structure is further polymerized. Once decompressed, glasses retained a polymerized structure. Our results show that 1.03 wt% CO 2 -1.42 wt% H 2 O in a glass with 3.10 wt% K 2 O and 46.77 wt% SiO 2 prevent the formation of fully polymerized connections when cold-compressed. Our results can be used to explain the effect of volatiles and alkali on the rheology of natural basaltic magmas.

36 MATERIALS SCIENCE↗

DOE OSTI2025

Incorporating the Acclimation of Photosynthesis and Leaf Respiration in the Noah‐MP Land Surface Model: Model Development and Evaluation

Abstract Realistic simulation of leaf photosynthetic and respiratory processes is needed for accurate prediction of the global carbon cycle. These two processes systematically acclimate to long‐term environmental changes by adjusting photosynthetic and respiratory traits (e.g., the maximum photosynthetic capacity at 25°C ( V cmax,25 ) and the leaf respiration rate at 25°C ( R 25 )) following increasingly well‐understood principles. While some land surface models (LSMs) now account for thermal acclimation, they do so by assigning empirical parameterizations for individual plant functional types (PFTs). Here, we have implemented an Eco‐Evolutionary Optimality (EEO)‐based scheme to represent the universal acclimation of photosynthesis and leaf respiration to multiple environmental effects, and that therefore requires no PFT‐specific parameterizations, in a standard version of the widely used LSM, Noah MP. We evaluated model performance with plant trait data from a 5‐year experiment and extensive global field measurements, and carbon flux measurements from FLUXNET2015. We show that observed R 25 and V cmax,25 vary substantially both temporally and spatially within the same PFT ( C.V. >20%). Our EEO‐based scheme captures 62% of the temporal and 70% of the spatial variations in V cmax,25 (73% and 54% of the variations in R 25 ). The standard scheme underestimates gross primary production by 10% versus 2% for the EEO‐based scheme and generates a larger spread in r (correlation coefficient) across flux sites (0.79 ± 0.16 vs. 0.84 ± 0.1, mean ± S.D.). The standard scheme greatly overestimates canopy respiration (bias: ∼200% vs. 8% for the EEO scheme), resulting in less CO 2 uptake by terrestrial ecosystems. Our approach thus simulates climate‐carbon coupling more realistically, with fewer parameters.

Ren, Yanghang [Department of Earth System Science ↗

DOE OSTI2021

Fabrication and Testing of Two Passively Actuated Creep-Fatigue Surveillance Test Articles

This report describes the fabrication, testing, and analysis of two families of passively-actuated creep-fatigue test articles. These test articles induce cyclic mechanical load in a test section actuated solely through a mismatch in the thermal expansion coefficient of two materials and driven by a change in the specimen temperature. Test articles of this type could provide material degradation data for a materials surveillance program in future operating molten salt reactors, where variations in the reactor temperature caused by normal or upset cycles would provide the temperature change in the sample. The purpose of the current experimental campaign is to demonstrate the feasibility of fabricating realistically-sized test articles, test the articles under repeated thermal cycling to assess their robustness, particularly the reliability of the bimetallic welds, and collect strain data from instrumented samples to validate the methods used to size the test articles to match key features of the mechanical response of operating reactor components. The thermal cycling tests are ongoing but the test data to date suggests the current test article design is viable, robust, and can be successfully designed to match a target mechanical response. Finally, the report describes preliminary work on welding refractory alloys to 316H stainless steel. Replacing the test article driver material, currently Alloy 617, with a refractory would increase the coefficient of thermal expansion mismatch and support further miniaturization of the test articles.

21 SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS↗

DOE OSTI2020

Variations of Stress Parameters in the Southern California Plate Boundary Around the South Central Transverse Ranges

We examine the stress field in Southern California with a focus on the region near the South Central Transverse Ranges (SCTR), using a refined stress inversion methodology. We independently invert declustered and aftershocks focal mechanisms from the years 1981 to 2017. Comparisons between the stress field orientations and the stress ratios from these inversions provide information on local sources of the stress field. Regionally, the SHmax tends to be toward NNE and the stress ratios vary from transtensional stress regime near the Eastern California Shear Zone (ECSZ), to strike-slip faulting near the SCTR, and toward transpression near the Western Transverse Ranges. Detailed analysis of stress parameters near the SCTR indicates deviations from the regional strike-slip faulting including the following: (1) The San Bernardino Mountain area shows S Hmax direction toward NNW and transpressional stress components likely associated with the motions of the San Andreas Fault and ECSZ; (2) the Cajon Pass and San Gorgonio Pass show transpressional stress regime near the bottom of the seismogenic zone likely associated with the elevated topography; and (3) in Crafton Hills, rotation of the principal stress plunges and SHmax direction and transtensional stress regime below ~10 km, along with lower estimated apparent friction coefficient, suggest a weak fault possibly associated with deep creep. The performed multiscale analysis resolves effects of regional and local loadings. The average stress parameters in the analyzed 37 years do not show significant temporal variations of stress field near the SCTR region.

58 GEOSCIENCES↗

DOE OSTI2025

Silicon wafer fracture stress for tracking sensors in particle physics experiments

For the construction of the ATLAS Inner Tracker strip detector, silicon strip sensor modules are glued directly onto carbon fibre support structures using a soft silicone gel. During tests at temperatures below -35°C, several of the sensors were found to crack due to a mismatch in coefficients of thermal expansion between polyimide circuit boards with copper metal layers (glued onto the sensor) and the silicon sensor itself. While module assembly procedures were developed to minimise variations between modules, cold tests showed a wide range of temperatures at which supposedly comparable modules failed. The observed variance (fracture temperatures between -35°C and -70°C) for supposedly comparable modules suggests an undetected variation between modules suspected to be intrinsic to the silicon wafer itself. Therefore, a test programme was developed to investigate the fracture stress of representative sensor wafer cutoffs. This paper presents results for the fracture stress of silicon sensors used in detector modules.

Detector design and construction technologies and ↗

DOE OSTI2022

The Influence of Temperature Inversion on the Vertical Distribution of Aerosols

Temperature inversion plays an important role in the accumulation and diffusion of aerosols. In this study, the relationship between temperature inversion and the vertical distribution of aerosols is investigated based on Raman lidar observations taken from January 2010 to September 2015 at the Atmospheric Radiation Measurement site in the Southern Great Plains, USA. First, the diurnal and seasonal variations of the surface-based inversion (SBI) and elevated temperature inversion (EI) are investigated. The results indicate that the occurrence frequency of SBI and EI have different seasonal trends. SBI has the highest frequency in summer, while EI has the highest frequency in winter. The diurnal variation of SBI is obvious, with a higher frequency in nighttime and a lower frequency in daytime. The inversion intensity (ΔT) and inversion depth (ΔZ) of SBI and EI have consistent diurnal and seasonal trends. The effects of SBI and EI on the vertical distribution of aerosols are then analyzed. The mean aerosol optical depth (AOD) below the SBI height shows a clear seasonal variation, which is consistent with the seasonal trends of ΔT and ΔZ. This phenomenon also occurs on the AOD below EI top height. The sensitivity analysis shows that the mean AOD below SBI height or EI top height increases with an increase of the ΔT and ΔZ of SBI (EI). It indicates that ΔT and ΔZ are the key factors affecting the vertical distribution of aerosols. In addition, the variation of AOD below and above EI top height is opposite to that of AOD below and above EI bottom height under different ΔT and ΔZ conditions. The correlation coefficients between ΔT (ΔZ) of EI with AOD in EI were 0.62 (0.65). These results indicate that the space between EI bottom height and EI top height can store aerosols. The larger the ΔZ of EI, the more aerosols are stored. These findings contribute to our understanding of the effect of temperature inversion on the vertical distribution of aerosols.

54 ENVIRONMENTAL SCIENCES↗

DOE OSTI2022

Temperature and illumination dependence of silicon heterojunction solar cells with a wide range of wafer resistivities

Abstract Recently, the significant improvements in the surface and contact passivation of silicon (Si) solar cells as well as their bulk quality have shifted their operating point to higher injections. Hence, they are less dependent on wafer doping. This shift opens an opportunity of using high‐resistivity wafers for practical photovoltaic applications, introducing a promising approach to push the cell efficiency towards the intrinsic limit and to improve the module reliability by increasing the cell breakdown voltage. Therefore, insights into the performance of Si solar cells using high‐resistivity wafers at various operating temperatures are of significant interest. In this study, we investigate the temperature‐ and illumination‐dependent performance of Si heterojunction (SHJ) solar cells using a wide range of wafer resistivities (between 3 and 1000 Ω⋅cm). Although a reduction in the passivation quality of the passivating contacts is observed at elevated temperature, the impact on the temperature coefficient of the open‐circuit voltage (TC V oc )—the dominant contributor to the temperature coefficient (TC) of the cell efficiency—is very limited. Their TC V oc are still dominated by the temperature dependence of the effective intrinsic carrier concentration. Furthermore, we also find that the investigated cells are more sensitive to temperature variation at lower illumination intensities. It is noteworthy that the efficiency of the cells fabricated using high‐resistivity wafers is comparable to that of the reference cells at any given temperature, highlighting the potential of using high‐resistivity wafers for solar cells.

14 SOLAR ENERGY↗

DOE OSTI2022

Off-design performance of an organic Rankine-vapor compression cooling cycle using R1234ze(E)

In this study, a 264 kW th organic Rankine-vapor compression cycle (ORVC) was experimentally tested over a range of conditions to quantify the individual impact of off-design external conditions. The ORVC was designed to recover waste heat at 91 °C, reject heat to a liquid condenser stream at 30 °C, and produce chilled water at 7 °C. Here, the condenser heat rejection temperature was varied from 16.6 °C to 32.6 °C, the chilled water delivery temperature was varied between 2.1 °C and 13.1 °C, and the heat input temperature was varied from 91 °C to 120 °C. As the condenser heat rejection temperature decreased, the coefficient of performance (COP) of the ORVC improved from 0.558 at 30 °C to 0.682 at 16.6 °C, despite a reduction in compressor isentropic efficiency. Although the chilled water temperature variation had almost no impact on the organic Rankine cycle performance, the compressor efficiency decreased when the delivery temperature was below 7 °C. At the highest chilled water temperature, 13.1 °C, the COP of the ORVC was 0.643. Compressor stall was noted when the condenser heat rejection temperature was greater than 32.6 °C and the chilled water delivery temperature was below 2.1 °C. Increasing the driving heat source inlet temperature improved the COP of the ORVC and the thermal efficiency of the organic Rankine power cycle, while decreasing the efficiency of the compressor and the COP of vapor compression cycle. In addition, the integrated part load value of the system was determined through experimentation to be 0.682, which provides a realistic estimate of real-world performance.

30 DIRECT ENERGY CONVERSION↗

DOE OSTI2025

Global Simulations of Phase State and Equilibration Time Scales of Secondary Organic Aerosols with GEOS-Chem

The phase state of secondary organic aerosols (SOA) can range from liquid through amorphous semisolid to glassy solid, which is important to consider as it influences various multiphase processes including SOA formation and partitioning, multiphase chemistry, and cloud activation. In this study, we simulate the glass transition temperature and viscosity of SOA over the globe using the global chemical transport model, GEOS-Chem. The simulated spatial distributions show that SOA at the surface exist as liquid over equatorial regions and oceans, semisolid in the midlatitude continental regions, and glassy solid over lands with low relative humidity. The predicted SOA viscosities are mostly consistent with the available measurements. In the free troposphere, SOA particles are mostly predicted to be semisolid at 850 hPa and glassy solid at 500 hPa, except over tropical regions including Amazonia, where SOA are predicted to be low viscous. Phase state also exhibits seasonal variation with a higher frequency of semisolid and solid particles in winter compared to warmer seasons. We calculate equilibration time scales of SOA partitioning (τ eq ) and effective mass accommodation coefficient (α eff ), indicating that τ eq is shorter than the chemical time step of GEOS-Chem of 20 min and αeff is close to unity for most locations at the surface level, supporting the application of equilibrium SOA partitioning. However, τ eq is prolonged and α eff is lowered over drylands and most regions in the upper troposphere, suggesting that kinetically limited growth would need to be considered for these regions in future large-scale model studies.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2024

Implementing Superresolution of Nonstationary Tides with Wavelets: An Introduction to CWT_Multi

Abstract Tides are often nonstationary due to nonastronomical influences. Investigating variable tidal properties implies a trade-off between separating adjacent frequencies (using long analysis windows) and resolving their time variations (short analysis windows). Previous continuous wavelet transform (CWT) tidal methods resolved tidal species. Here, we present CWT_Multi, a MATLAB code that 1) uses CWT linearity (via the “response coefficient method”) to implement superresolution, i.e., resolving tidal constituents beyond the Rayleigh criterion; 2) provides a Munk–Hasselmann constituent selection criterion appropriate for superresolution; and 3) introduces an objective, time-variable form of inference (“dynamic inference”) based on time-varying data properties. CWT_Multi resolves tidal species on time scales of days, and multiple constituents per species with fortnightly filters. It outputs astronomical phase lags and admittances, analyzes multiple records, and provides power spectra of the signal(s), residual(s), and reconstruction(s); confidence limits; and signal-to-noise ratios. Artificial data and water levels from the Lower Columbia River Estuary (LCRE) and San Francisco Bay Delta (SFBD) are used to test CWT_Multi and compare it to harmonic analysis programs NS_Tide and UTide. CWT_Multi provides superior reconstruction, detiding, dynamic analysis utility, and time resolution of constituents (but with broader confidence limits). Dynamic inference resolves closely spaced constituents (like K 1 , S 1 , and P 1 ) on fortnightly time scales, quantifying impacts of diel power peaking (with a 24-h period, like S 1 ) on water levels in the LCRE. CWT_Multi also helps quantify the impacts of high flows and a salt barrier closing on tidal properties in the SFBD. On the other hand, CWT_Multi does not excel at prediction, and results depend on analysis details, as for any method applied to nonstationary data. Significance Statement Ocean tides, especially in coastal and estuarine systems, are often nonstationary, in the sense that the mean and standard deviation of tidal properties vary over time, usually in response to some nontidal process. We introduce here a MATLAB code, CWT_Multi, that uses wavelet transforms to resolve both tidal species and constituents on time scales from a few days to months. Our code accommodates multiple scalar time series and has typical tidal analysis features like constituent selection and inference, plus two forms of uncertainty analyses. It is flexible, allowing the user to adapt analysis properties to diverse datasets. CWT_Multi is applicable to many problems involving time-variable tides, including sea level rise, compound flooding, sediment transport, and wetland habitat analyses. Application to vector data is a straightforward extension, but further development of our uncertainty analysis is merited. Because nonstationary tidal analysis is rapidly advancing, we also define the features of a “well-formed” analysis code.

Lobo, Matthew↗

DOE OSTI2023

Resolving experimental biases in the interpretation of diffusion experiments with a user-friendly numerical reactive transport approach

The reactive transport code CrunchClay was used to derive effective diffusion coefficients (D e ), clay porosities (ε), and adsorption distribution coefficients (K D ) from through-diffusion data while considering accurately the influence of unavoidable experimental biases on the estimation of these diffusion parameters. These effects include the presence of filters holding the solid sample in place, the variations in concentration gradients across the diffusion cell due to sampling events, the impact of tubing/dead volumes on the estimation of diffusive fluxes and sample porosity, and the effects of O-ring-filter setups on the delivery of solutions to the clay packing. Doing so, the direct modeling of the measurements of (radio)tracer concentrations in reservoirs is more accurate than that of data converted directly into diffusive fluxes. While the above-mentioned effects have already been described individually in the literature, a consistent modeling approach addressing all these issues at the same time has never been described nor made easily available to the community. A graphical user interface, CrunchEase, was created, which supports the user by automating the creation of input files, the running of simulations, and the extraction and comparison of data and simulation results. While a classical model considering an effective diffusion coefficient, a porosity and a solid/solution distribution coefficient (D e –ε–K D ) may be implemented in any reactive transport code, the development of CrunchEase makes it easy to apply by experimentalists without a background in reactive transport modeling. CrunchEase makes it also possible to transition more easily from a D e –ε–K D modeling approach to a state-of-the-art process-based understanding modeling approach using the full capabilities of CrunchClay, which include surface complexation modeling and a multi-porosity description of the clay packing with charged diffuse layers.

58 GEOSCIENCES↗

DOE OSTI2025

Dual modulation of the anion-driven thermodynamic properties of aqueous choline halide-based deep eutectic solvents

Deep eutectic solvents (DESs) are considered tunable solvents because their specific properties can be achieved based on the choice of components and their relative concentrations in a mixture. In this article, we investigate the influence of the variation in halide ions (F − , Cl − , Br − , I − ) of choline salts used on the thermodynamic and physicochemical properties of choline halide-based DESs. Our findings show that the density of choline halide-based DESs decreases nonlinearly with an increasing mole fraction of water, following a trend based on the size of the halides, with choline iodide showing the highest density. Temperature-dependent density data reveal that the thermal expansion coefficient decreases slightly with increasing water content, indicating a more stable volume at a higher mole fraction of water. The excess molar volume (V E ) of the DES mixtures exhibits complex behavior depending on the choline halide used, with both negative and positive V E values observed across different water mole fractions. These variations are linked to the hydrogen bonding interactions between the DES components and water molecules. In addition, viscosities decrease with increasing water content, suggesting the disruption of hydrogen bonding networks and enhanced mobility of the ions, which contributes to the observed increase in conductivity. The excess molar Gibbs energies, enthalpies, and entropies of activation have also been determined.

Choline halide↗

DOE OSTI2020

Probing local electrochemistry via mechanical cyclic voltammetry curves

Understanding the mechanical response of an electrode during electrochemical cycling and its correlation to the device electrochemical performance is crucial to improving the performance of insertion-type energy storage devices, electrochemical actuators, water purification, ion separation and neuromorphic computing applications. Here, we visualized the electro-chemo-mechanical coupling behaviors during charge storage of anhydrous and hydrated WO 3 electrodes via in situ atomic force microscopy (AFM) and developed the concept of mechanical cyclic voltammetry (mCV) curves. The relationship between electrochemical current and strain was investigated with simplified models and the results revealed that the proton insertion/deinsertion process could be described through potential-dependent electro-chemo-mechanical coupling coefficients which might indicate changes in insertion processes during electrode cycling. The mCV mapping results highlight the local heterogeneity and show that the charging processes varied across the electrode. These local variations could be further correlated to local morphology, crystal orientations or chemical compositions with proper electrode designs.

36 MATERIALS SCIENCE↗

DOE OSTI2025

Optimizing energy yield of monolithic perovskite/silicon tandem solar cells in real-world Conditions: The impact of luminescent coupling

Efficient light management is key to maximizing power conversion efficiency (PCE) in monolithic perovskite/silicon tandem solar cells. Achieving peak efficiency requires closely matched current generation in all junctions, especially in integrated configurations. However, real-world conditions vary significantly due to factors such as sunlight spectrum, diffuse-to-direct sunlight ratio, angular distribution of light, subcell temperature coefficients, and ground reflection. This study introduces a comprehensive optical and device simulation to optimize perovskite/silicon tandem cells, considering experimental luminescent coupling (LC) efficiency and its dependence on working conditions, alongside variations in radiative recombination, effect of temperature on absorptivity spectra, and cloud cover. Our results show potential energy yield improvements of up to 1.4 % with LC, based on current perovskite radiative recombination records, and up to 4 % with direct bandgap materials. Although radiative recombination's dependence on excitation intensity reduces output power and requires thicker absorbers, LC compensates for these losses. LC also lowers the optimized bandgap for the perovskite top cell from 1.72 eV to 1.64–1.68 eV, or even lower in regions with redshifted irradiance. Additionally, optimization revealed that thinner silicon bottom cells require a higher perovskite top cell bandgap, impacting the balance between fabrication cost and cell stability.

14 SOLAR ENERGY↗

DOE OSTI2024

A Characteristics Approach to the Finite Element Method

Herein, we present a new method for solving the linear Boltzmann transport equation. Two commonly used and well-understood methods for solving partial differential equations are the method of characteristics (MOC) and the finite element method (FEM). We propose a new method that combines the fundamental concept of the FEM with the analytic solution from the MOC to obtain coefficients for the FEM basis function expansion. Traditionally, coefficients for the FEM basis function expansion are obtained via matrix inversion. Instead, we solve for the coefficients with the MOC and represent the underlying fields with the basis function expansion using these coefficients. We provide a convergence study for our method with results from two sets of FEM basis functions: Gauss-Legendre and Gauss-Lobatto sets. We also compare two different variations of our method categorized as short characteristics and intermediate characteristics.

42 ENGINEERING↗

DOE OSTI2023

Divergent urbanization-induced impacts on global surface urban heat island trends since 1980s

Urbanization experiences different speeds and forms under diverse development stages across the globe. However, urbanization-induced impacts on long-term surface urban heat island intensity (I s ) trends across global cities and the regulators of such impacts remain understudied. Here we estimate interannual trends in daytime I s (i.e., urban-rural differences in surface temperatures) across 511 major cities for 1985 –2020 using annual averages calculated by using reconstructed land surface temperature data derived from more than >250,000 Landsat thermal images. Our study reveals that the global mean I s growth rate is 0.156 °C/decade. We further examine I s change associated with per 1% impervious land growth (denoted as ß) in each city throughout the research period and during different periods. The global mean ß is 0.018 ± 0.025 °C/% (mean ± 1 standard deviation) for the whole period, with greater values in humid than in arid climates; and the ß may change during different periods, e.g., it has more than tripled when urban impervious land exceeds 30%, indicating the spatiotemporally divergent impacts of urbanization on Is trends across global cities. The spatial variations in ß across global cities are well correlated with rural vegetation abundance and precipitation but not with urban population. Among these three factors, rural vegetation abundance possesses the greatest standardized regression coefficient of partial least-squares model, signifying the critical role of biome background in regulating ß. Furthermore, the finding implies that future urbanization over densely vegetated regions should be more carefully and strategically planned due to the greater urbanization-induced surface warming effect.

54 ENVIRONMENTAL SCIENCES↗

DOE OSTI2021

Residual stress analysis of aluminum nitride piezoelectric micromachined ultrasonic transducers using Raman spectroscopy

In this study, the Raman biaxial stress coefficients K II and strain-free phonon frequencies ω 0 have been determined for the E 2 (low), E 2 (high), and A 1 (LO) phonon modes of aluminum nitride, AlN, using both experimental and theoretical approaches. The E 2 (high) mode of AlN is recommended for the residual stress analysis of AlN due to its high sensitivity and the largest signal-to-noise ratio among the studied modes. The E 2 (high) Raman biaxial stress coefficient of ₋3.8 cm₋1/GPa and strain-free phonon frequency of 656.68 cm ₋1 were then applied to perform both macroscopic and microscopic stress mappings. For macroscopic stress evaluation, the spatial variation of residual stress was measured across an AlN-on-Si wafer prepared by sputter deposition. A cross-wafer variation in residual stress of ~150 MPa was observed regardless of the average stress state of the film. Microscopic stress evaluation was performed on AlN piezoelectric micromachined ultrasonic transducers (pMUTs) with submicrometer spatial resolution. These measurements were used to assess the effect of device fabrication on residual stress distribution in an individual pMUT and the effect of residual stress on the resonance frequency. At ~20 μm directly outside the outer edge of the pMUT electrode, a large lateral spatial variation in residual stress of ~100 MPa was measured, highlighting the impact of metallization structures on residual stress in the AlN film.

36 MATERIALS SCIENCE↗