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At least 235 records · Page 13

Diamond film deposition using microwave plasmas under low pressures

Microwave plasma depositions of diamond films have been investigated under low pressures of 10 mTorr to 10 Torr, at low substrate temperatures of 400 to 750 C, using high methane concentrations of 5 to 15 percent and oxygen concentrations of 5 to 10 percent in hydrogen plasmas. The deposition system consists of a microwave plasma chamber, a downstream deposition chamber, and a RF induction-heated sample stage. The deposition system can be operated in either high-pressure microwave or electron cyclotron resonance (ECR) modes by varying the sample stage position. Cathodoluminescence (CL) studies on diamond films deposited at 10 Torr pressure show that CL emissions at 430, 480, 510, 530, 560, 570 and 740 nm can be employed to characterize the quality of diamond films. High-quality, well-faceted diamond films have been deposited at 10 Torr and 600 C using 5 percent CH4 and 5 percent O2 in H2 plasmas; CL measurements on these films show very low N impurities and no detectable Si impurities. Diamond nucleation on SiC has been demonstrated by depositing well-faceted diamond crystallites on SiC-coated Si substrates.

Shing, Y. H.↗

An experimental study on sub-cooled flow boiling CHF of R134a at low pressure condition with atmospheric pressure (AP) plasma assisted surface modification

In this study, sub-cooled flow boiling critical heat flux tests at low pressure were conducted in a rectangular flow channel with one uniformly heated surface, using simulant fluid R-134a as coolant. The experiments were conducted under the following conditions: (1) inlet pressure (P) of 400-800 kPa, (2) mass flux (G) of 124-248 kg/m 2 s, (3) inlet sub-cooling enthalpy (ΔH i ) of 12~ 26 kJ/kg. Parametric trends of macroscopic system parameters (G, P, H i ) were examined by changing inlet conditions. Those trends were found to be generally consistent with previous understandings of CHF behavior at low pressure condition (i.e. reduced pressure less than 0.2). A fluid-to-fluid scaling model was utilized to convert the test data obtained with the simulant fluid (R-134a) into the prototypical fluid (water). The comparison between the converted CHF of equivalent water and CHF look-up table with same operation conditions were conducted, which showed good agreement. Furthermore, the effect of surface wettability on CHF was also investigated by applying atmospheric pressure plasma (AP-Plasma) treatment to modify the surface characteristic. With AP-Plasma treatment, the change of microscopic surface characteristic was measured in terms of static contact angle. The static contact angle was reduced from 80° on original non-treated surface to 15° on treated surface. An enhancement of 18% on CHF values under flow boiling conditions were observed on AP-Plasma treated surfaces compared to those on non-treated heating surfaces.

42 ENGINEERING↗

Collaborative Research. Fundamental Science of Low Temperature Plasma-Biological Material Interactions

Low temperature plasma (LTP) treatment of biological tissue is a promising path toward sterilization of bacteria due to its versatility and ability to operate under well-controlled and relatively mild conditions. The present collaborative research of an interdisciplinary team of investigators at University of Maryland, College Park (UMD), and University of California, Berkeley (UCB) focused on establishing our knowledge based with regard to low temperature plasma-induced chemical modifications in biomolecules that result in inactivation due to various plasma species, including ions, reactive radicals, and UV/VUV photons. The overall goals of the project were to identify and quantify the mechanisms by which low and atmospheric pressure plasma deactivates endotoxic biomolecules. Additionally, we wanted to understand the mechanism by which atmospheric pressure plasmas (APP) modify surfaces and how these modifications depend on the interaction of APP with the environment. Various low pressure plasma sources, a vacuum beam system and several atmospheric pressure plasma sources were used to accomplish this. In our work we elucidated for the first time the role of ions, VUV photons and radicals in biological deactivation of representative biomolecules, both in a UHV beam system and an inductively coupled, low pressure plasma system, and established the associated atomistic biomolecule changes. While we showed that both ions and VUV photons can be very efficient in deactivation of biomolecules, significant etching and/or deep modification (~200 nm) accompanied these biological effects. One of the most important findings in this work is the significant radical-induced deactivation and surface modification can occur with minimal etching. However, if radical fluxes and corresponding etch rates are relatively high, for example at atmospheric pressure, endotoxic biomolecule film inactivation may require near-complete removal of the film. These findings motivated further work at atmospheric pressure using several types of low temperature plasma sources, for which radical induced interactions generally dominate due to short mean free paths of ions and VUV photons. For these conditions we demonstrated the importance of environmental interactions when atmospheric pressure plasma sources are used to modify biomolecules. This is evident from both gas phase characterization data and in-situ surface characterization of treated biomolecules. Environmental interactions can produce unexpected outcomes due to the complexity of reactions of reactive species with the atmosphere which determines the composition of reactive fluxes and atomistic changes of biomolecules. Overall, this work clarified a richer spectrum of scientific opportunities and challenges for the field of low temperature plasma-biomolecule surface interactions than initially anticipated, in particular for plasma sources operating at atmospheric pressure. The insights produced in this work, e.g. demonstration of the importance of environmental interactions, are generally important for applications of APP to materials modifications. Thus one major contributions of this research has been the establishment of methodologies to more systematically study the interaction of plasma with bio-molecules. In particular, our studies of atmospheric pressure plasma sources using very well-defined experimental conditions enabled to combine atomistic surface modifications of biomolecules with changes in their biological function. The clarification of the role of ions, VUV photons and radicals in deactivation of biomolecules during low pressure and atmospheric pressure plasma-biomolecule interaction has broad implications, e.g. for the emerging field of plasma medicine. The development of methods to detect the effects of plasma treatment on immune-active biomolecules will be helpful in many future studies.

36 MATERIALS SCIENCE↗

Selective deposition of a crystalline Si film by a chemical sputtering process in a high pressure hydrogen plasma

The selective deposition of Si films was demonstrated using a chemical sputtering process induced by a high pressure hydrogen plasma at 52.6 kPa (400 Torr). In this chemical sputtering process, the initial deposition rate (R{sub d}) is dependent upon the substrate type. At the initial stage of Si film formation, R{sub d} on glass substrates increased with elapsed time and reached to a constant value. In contrast, R{sub d} on Si substrates remained constant during the deposition. The selective deposition of Si films can be achieved by adjusting the substrate temperature (T{sub sub}) and hydrogen concentration (C{sub H2}) in the process atmosphere. For any given deposition time, it was found that an optimum C{sub H2} exists for a given T{sub sub} to realize the selective deposition of a Si film, and the optimum T{sub sub} value tends to increase with decreasing C{sub H2}. According to electron diffraction patterns obtained from the samples, the selectively prepared Si films showed epitaxial-like growth, although the Si films contained many defects. It was revealed by Raman scattering spectroscopy that some of the defects in the Si films were platelet defects induced by excess hydrogen incorporated during Si film formation. Raman spectrum also suggested that Si related radicals (SiH{sub 2}, SiH, Si) with high reactivity contribute to the Si film formation. Simple model was derived as the guideline for achieving the selective growth.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Does the ballooning instability trigger substorms in the near-Earth magnetotail?

The stability of the near-Earth magnetotail against ballooning (or configurational) instability is examined in the framework of the MHD approximation. It is emphasized that a change in plasma pressure induced by a meriodional electric field drift delta u(sub n) is an important factor that determines the stability. We have to consider two ways in which plasma pressure changes, that is, a convective change -delta u(sub n) grad(P(sub 0)), where P(sub 0) is background plasma pressure, and plasma expansion/compression -P(sub 0) dive (delta u(sub n)). Since delta u(sub n) is perpendicular to the magnetic field and its magnitude is inversely proportional to the magnetic field strength, delta u(sub n) diverges/converges in usual tail magnetic field configurations. For the instability, the convective change must overwhelm the effects of the plasma expansion/compression. However, near the equator in the near-Earth tail, the latter may overcompensate for the former. We describe the ballooning instability in terms of a coupling between the Alfven and slow magnetosonic waves in an inhomogeneous plasma and derive instability conditions. The result shows that the excessive curvature stabilizes, rather than destabilizes, perturbations. It is also found that the field-aligned flow stabilizes perturbations, as well as the field-aligned current. We infer that under quiet conditions, the plasma pressure gradient in the near-Earth tail is not sharp enough to trigger the instability. The plasma sheet is expected to become more stable during the substorm growth phase because of an increase in the field line curvature associated with the plasma sheet thinning. In the region closer to the Earth, including the ring current, the plasma pressure gradient may be localized in a limited range of the radial distance during the growth phase. However, recently reported plasma and magnetic field parameters before substorm onsets do not provide very convincing evidence that the ballooning instability is the triggering mechanism of substorms.

Ohtani, Shin-Ichi↗

STS-3/OSS-1 Plasma Diagnostics Package (PDP) measurements of the temperature pressure and plasma

Designed to withstand the thermal extremes of the STS-3 mission through the use of heaters and thermal blankets, the plasma diagnostics package sat on the release/engagement mechanism on the OSS-1 payload pallet without a coldplate and was attached to the RMS for two extended periods. Plots show temperature versus mission elapsed time for two temperature sensors. Pressure in the range of 10 to the -3 power torr and 10 to the -7 power torr, measured 3 inches from the skin of the package is plotted against GMT during the mission. The most distinctive feature of the pressure profile is the modulation at the obit period. It was found that pressure peaks when the atmospheric gas is rammed into the cargo bay. Electric and magnetic noise spectra and time variability due to orbiter systems, UHF and S-band transmitter field strengths, and measurements of the ion spectra obtained both in the cargo bay and during experiments are plotted.

Shawhan, S. D.↗

Empirical modeling of the quiet time nightside magnetosphere

Empirical modeling of plasma pressure and magnetic field for the quiet time nightside magnetosphere is investigated. Two models are constructed for this study. One model, referred to here as T89R, is basically the magnetic field model of Tsyganenko (1989) but is modified by the addition of an inner eastward ring current at a radial distance of approximately 3 RE as suggested by observation. The other is a combination of the T89R model and the long version of the magnetic field model of Tsyganenko (1987) such that the former dominates the magnetic field in the inner magnetosphere while the latter prevails in the distant tail. The distribution of plasma pressure which is required to balance the magnetic force for each of these two field models is computed along the tail axis in the midnight meridian. The occurrence of pressure anisotropy in the inner magnetospheric region is also taken into account by determining an empirical fit to the observed plasma pressure anisotropy. This represents the first effort to obtain the plasma pressure distribution in force equilibrium with magnetic stresses from an empirical field model with the inclusion of pressure anisotropy. The inclusion of pressure anisotropy alters the plasma pressure by as much as a factor of approximately 3 in the inner magnetosphere. The deduced plasma pressure profile along the tail axis is found to be in good agreement with the observed quiet time plasma pressure for geocentric distances between approximately 2 and approximately 35 RE.

Lui, A. T. Y.↗

Analysis and experimental study on formation conditions of large-scale barrier-free diffuse atmospheric pressure air plasmas in repetitive pulse mode

Atmospheric air diffuse plasmas have enormous application potential in various fields of science and technology. Without dielectric barrier, generating large-scale air diffuse plasmas is always a challenging issue. This paper discusses and analyses the formation mechanism of cold homogenous plasma. It is proposed that generating stable diffuse atmospheric plasmas in open air should meet the three conditions: high transient power with low average power, excitation in low average E-field with locally high E-field region, and multiple overlapping electron avalanches. Accordingly, an experimental configuration of generating large-scale barrier-free diffuse air plasmas is designed. Based on runaway electron theory, a low duty-ratio, high voltage repetitive nanosecond pulse generator is chosen as a discharge excitation source. Using the wire-electrodes with small curvature radius, the gaps with highly non-uniform E-field are structured. Experimental results show that the volume-scaleable, barrier-free, homogeneous air non-thermal plasmas have been obtained between the gap spacing with the copper-wire electrodes. The area of air cold plasmas has been up to hundreds of square centimeters. The proposed formation conditions of large-scale barrier-free diffuse air plasmas are proved to be reasonable and feasible.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Life modeling of atmospheric and low pressure plasma-sprayed thermal-barrier coating

The cycles-to-failure vs cycle duration data for three different thermal barrier coating systems, which consist of atmospheric pressure plasma-sprayed ZrO2-8 percent Y2O3 over similarly deposited or low pressure plasma sprayed Ni-base alloys, are presently analyzed by means of the Miller (1980) oxidation-based life model. Specimens were tested at 1100 C for heating cycle lengths of 1, 6, and 20 h, yielding results supporting the model's value.

Miller, R. A.↗

Empirical modeling of the quiet time nightside magnetosphere

Empirical modeling of plasma pressure and magnetic field for the quiet time nightside magnetosphere is investigated. Two models are constructed for this study. One model, referred to here as T89R, is basically the magnetic field model of Tsyganenko (1989) but is modified by the addition of an inner eastward ring current at a radial distance of approximately 3 R(sub E) as suggested by observation. The other is a combination of the T89R model and the long version of the magnetic field model of Tsyganenko (1987) such that the former dominates the magnetic field in the inner magnetosphere, whereas the latter prevails in the distant tail. The distribution of plasma pressure, which is required to balance the magnetic force for each of these two field models, is computed along the tail axis in the midnight meridian. The occurrence of pressure anisotropy in the inner magnetospheric region is also taken into account by determining an empirical fit to the observed plasma pressure anisotropy. This effort is the first attempt to obtain the plasma pressure distribution in force equilibrium with magnetic stresses from an empirical field model with the inclusion of pressure anisotropy. The inclusion of pressure anisotropy alters the plasma pressure by as much as a factor of approximately 3 in the inner magnetosphere. The deduced plasma pressure profile along the tail axis is found to be in good agreement with the observed quiet time plasma pressure for geocentric distances between approximately 2 and approximately 35 R(sub E).

Lui, A. T. Y.↗

Low-pressure microwave plasma nucleation and deposition of diamond films

Low-pressure microwave plasma nucleation and deposition of diamond films were investigated in the pressure range 10-mtorr to 10 torr, at substrate temperatures 400-750 C and with CH4 and O2 concentrations in H2 plasma of 2-15 percent and 2-10 percent, respectively. The experiments were performed in a microwave plasma system consisting of a microwave plasma chamber, a downstream deposition chamber, and an RF induction heated sample stage. Scanning electron microscopy of diamond films deposited at 600 C with 5 percent CH4 and 5 percent O2 in H2 plasmas showed high-quality well faceted crystallites of 1/2 micron size. Cathodoluminescence measurements of these films showed very few nitrogen impurities and no detectable silicon impurities.

Shing, Y. H.↗

Final Report of “Collaborative research: Fundamental science of low temperature plasma-biological material interactions” (Award# DE-SC0005105)

Low temperature plasma (LTP) treatment of biological tissue is a promising path toward sterilization of bacteria due to its versatility and ability to operate under well-controlled and relatively mild conditions. The present collaborative research of an interdisciplinary team of investigators at University of Maryland, College Park (UMD), and University of California, Berkeley (UCB) focused on establishing our knowledge on low temperature plasma-induced chemical modifications in biomolecules that result in inactivation due to various plasma species, including ions, reactive radicals, and UV/VUV photons. The overall goals of the project were to identify the mechanisms by which low and atmospheric pressure plasma (APP) deactivates endotoxic biomolecules. Additionally, we wanted to understand how deactivation processes depend on the interaction of APP with the environment. Various low pressure plasma sources, a vacuum beam system and several atmospheric pressure plasma sources were used to accomplish these objectives. In our work we elucidated for the first time the role of ions, VUV photons and radicals in biological deactivation of model endotoxic biomolecules, both in a UHV beam system and an inductively coupled, low pressure plasma system, and established the associated atomistic modifications in biomolecules. While we showed that both ions and VUV photons can be very efficient in deactivation of biomolecules, significant etching and/or deep modification (~200 nm) were accompanied by these biological effects. One of the most important findings in this work is that the significant deactivation and surface modification can occur with minimal etching using radical species. However, if radical fluxes and corresponding etch rates are relatively high, for example, at atmospheric pressure, inactivation of endotoxic biomolecule film may require near-complete removal of the film. These findings motivated further work at atmospheric pressure using several types of low temperature plasma sources with modified geometry where radical induced interactions generally dominate due to short mean free paths of ions and VUV photons. In these conditions we demonstrated the importance of environmental interactions of plasma species when APP sources are used to modify biomolecules. This is evident from both gas phase characterization data and in-situ surface characterization of treated biomolecules. Environmental interactions can produce unexpected outcomes due to the complex reactions of reactive species with the atmosphere which determine the composition of reactive fluxes and atomistic changes in biomolecules. Overall, this work elucidated a richer spectrum of scientific opportunities and challenges for the field of low temperature plasma-biomolecule surface interactions than initially anticipated, in particular, for plasma sources operating at atmospheric pressure. The insights produced in this work, e.g. demonstration of the importance of environmental interactions, are generally important for applications of APP to materials modifications. Thus one major contributions of this research has been the establishment of methodologies to study the interaction of plasma with bio-molecules in a systemic and rigorous manner. In particular, our studies of atmospheric pressure plasma sources using very well-defined experimental conditions enabled us to correlate atomistic surface modifications of biomolecules with changes in their biological function. The clarification of the role of ions, VUV photons and radicals in deactivation of biomolecules during low pressure and atmospheric pressure plasma-biomolecule interaction has broad implications, e.g. for the emerging field of plasma medicine. The development of methods to detect the effects of plasma treatment on immune-active biomolecules will lay a fundamental foundation to enhance our understanding of the effect of plasma on biological systems. be helpful in many future studies.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Infrared studies of gas phase and surface processes of the enhancement of catalytic methane decomposition by low temperature plasma

Catalyst enhancement by atmospheric pressure plasma is a recently emerging field of research that embodies a complex system of reactive species and how they interact with surfaces. In this work we use an atmospheric pressure plasma jet integrated with a nickel on Al 2 O 3 /SiO 2 support catalyst material to decompose methane gas by partial oxidation reaction. We use Fourier-transform Infrared spectroscopy (FTIR) analysis of the gas phase post reaction to measure the loss of methane and the production of CO, CO 2 , and H 2 O and diffuse reflectance Fourier-transform Infrared spectroscopy (DRIFTs) in situ analysis of the catalyst surface as a function of both catalyst temperature and plasma operating parameters. We find reduction of methane by both plasma alone, catalyst alone, and an increase when both plasma and catalyst were simultaneously used. The production of CO appears to be due primarily to the plasma source as it only appears above 2.5 W plasma dissipated power and decreases as catalyst temperature increases. CO 2 production is enhanced by having the catalyst at high temperature and H 2 O production depends on both plasma power and temperature. Using DRIFTs we find that both heating and plasma treatment remove absorbed water on the surface of the catalyst. Plasma treatment alone however leads to the formation of CO and another IR spectral feature at 1590 cm -1 , which may be attributed to carboxylate groups, bonded to the catalyst surface. These species exhibit a regime of plasma treatment where they are formed on the surface and where they are significantly removed from the catalyst surface. We see the formation of a new spectral feature at 995 cm -1 and discuss the behavior and possible origins of this feature. Furthermore, this research highlights the potential for plasma regeneration of catalyst materials as well as showing enhancement of the catalytic behavior under low temperature plasma treatment.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

An investigation of transient pressure and plasma properties in a pinched plasma column

The transient pinched plasma column generated in a linear Z-pinch was studied experimentally and analytically. The plasma column was investigated experimentally with the following plasma diagnostics: a special rapid response pressure transducer, a magnetic field probe, a voltage probe and discharge luminosity. Axial pressure profiles on the discharge chamber axis were used to identify three characteristic regions of plasma column behavior; they were in temporal sequence: strong axial pressure asymmetry noted early in plasma column lifetime followed by plasma heating in which there is a rapid rise in static pressure and a slight decrease static pressure before plasma column breakup. Plasma column lifetime was approximately 5 microseconds. The axial pressure asymmetry was attributed to nonsimultaneous pinching of the imploding current sheet along the discharge chamber axis. The rapid heating is attributed in part to viscous effects introduced by radial gradients in the axial streaming velocity. Turbulent heating arising from discharge current excitation of the ion acoustic wave instability is also considered a possible heating mechanism.

Stover, E. K.↗

High pressure laser plasma studies

The operation of a nuclear pumped laser, operating at a wavelength of 1.79 micron m on the 3d(1/2-4p(3/2) transition in argon with helium-3 as the majority gas is discussed. The energy pathways in He-Ar gas were investigated by observing the effects of varying partial pressures on the emissions of levels lying above the 4p level in argon during a pulsed afterglow. An attempt is made to determine the population mechanisms of the 3d level in pure argon by observing emission from the same transition in a high pressure plasma excited by a high energy electron beam. Both collisional radiative and dissociative recombination are discussed.

Wells, W. E.↗

An investigation of transient pressures and plasma properties in a pinched plasma column

The transient pinched plasma column generated in a linear Z-pinch was studied experimentally and analytically. The plasma column was investigated experimentally with several plasma diagnostics; they were: a rapid response pressure transducer, a magnetic field probe, a voltage probe, and discharge luminosity. Axial pressure profiles on the discharge chamber axis were used to identify three characteristic regions of plasma column behavior: (1) strong axial pressure asymmetry noted early in plasma column lifetime, (2) followed by plasma heating in which there is a rapid rise in static pressure, and (3) a slight decrease static pressure before plasma column breakup. Plasma column lifetime was approximately 5 microseconds. The axial pressure asymmetry was attributed to nonsimultaneous pinching of the imploding current sheet along the discharge chamber axis. The rapid heating could be attributed in part to viscous effects introduced by radial gradients in the axial streaming velocity.

Stover, E. K.↗

Estimation of mean electron energy in helium surface ionization waves on dielectric substrates

Abstract The determination of basic plasma parameters in atmospheric pressure discharges is critical to advancing their use in applications. Atmospheric pressure plasma jets have found use in the fields of medicine, agriculture, material modification and others. Atmospheric pressure plasma jets often generate plasma surface ionization waves (SIW) which interact with and propagate over surfaces. Electrical diagnostics are challenging in SIW due to high collision frequencies and small scale of the plasma discharge. This work employs a passive optical emission line ratio technique to estimate the mean electron energy in SIW over planar dielectric substrates. The method uses an intensity ratio of two helium triplet lines: He( 3 3 S ) at 706.5 nm and He( 3 3 D ) at 587.56 nm. A collisional-radiative model is used to correlate line ratio to mean electron energy and determine dependencies on electron density and He/air gas mixture. Mean electron energies ranging from 3–8 eV are determined in He/air mixtures and are found to remain constant as the surface wave propagates radially. This work provides a 2D, time-resolved, mean electron energy diagnostic for surface ionization wave propagation and validation of numerical modeling in atmospheric pressure systems with spatially varying He/air gas mixtures. The model in question is designed for use with any He line ratio in the n = 3 excitation level.

Morsell, Joshua (ORCID:0000000331073002)↗

Analysis by oxygen atom number density measurement of high-speed hydrophilic treatment of polyimide using atmospheric pressure microwave plasma

This paper describes the fundamental experimental data of the plasma surface modification of the polyimide using atmospheric pressure microwave plasma source. The experimental results were discussed from the point of view of the radical’s behavior, which significantly affects the modification mechanism. The purpose of the study is to examine how the value of the oxygen atom density will affect the hydrophilic treatment in the upstream region of the plasma where gas temperature is very high. The surface modification experiments were performed by setting the polyimide film sample in the downstream region of the plasma. The degree of the modification was measured by a water contact angle measurement. The water contact angle decreased less than 30 degrees within 1 second treatment time in the upstream region. Very high speed modification was observed. The reason of this high speed modification seems that the high density radical which contributes the surface modification exist in the upstream region of the plasma. This tendency is supposed to the measured relatively high electron density (~10{sup 15}cm{sup −3}) at the center of the plasma. We used the electric heating catalytic probe method for oxygen radical measurement. An absolute value of oxygen radical density was determined by catalytic probe measurement and the results show that ~10{sup 15}cm{sup −3} of the oxygen radical density in the upstream region and decreases toward downstream region. The experimental results of the relation of the oxygen radical density and hydrophilic modification of polyimide was discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗