SEARCH · Search NASA

Results for “Focused Ion Beam”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

SourceResearch connectionFrom yearThrough year

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 271 records · Page 15

All sources NASA NTRS DOE OSTI

DOE OSTI2021

Nanomechanical testing of freestanding polymer films: in situ tensile testing and Tg measurement

Abstract A method for small-scale testing and imaging of freestanding, microtomed polymer films using a push-to-pull device is presented. Central to this method was the development of a sample preparation technique which utilized solvents at cryogenic temperatures to transfer and deposit delicate thin films onto the microfabricated push-to-pull devices. The preparation of focused ion beam (FIB)-milled tensile specimens enabled quantitative in situ TEM tensile testing, but artifacts associated with ion and electron beam irradiation motivated the development of a FIB-free specimen preparation method. The FIB-free method was enabled by the design and fabrication of oversized strain-locking push-to-pull devices. An adaptation for push-to-pull devices to be compatible with an instrumented nanoindenter expanded the testing capabilities to include in situ heating. These innovations provided quantitative mechanical testing, postmortem TEM imaging, and the ability to measure the glass transition temperature, via dynamic mechanical analysis, of freestanding polymer films. Results for each of these mentioned characterization methods are presented and discussed in terms of polymer nanomechanics. Graphic Abstract

36 MATERIALS SCIENCE↗

DOE OSTI2021

Proton irradiation-induced blistering in UO2

Abstract Proton (H + ) irradiation effects in polycrystalline UO 2 have been studied. The irradiation was carried out using three ion energies and two different ion fluxes at 600 °C. Scanning electron microscopy (SEM) investigations showed that significant surface flaking took place. Focused ion beam (FIB) milling in SEM was successfully applied for extracting lamellas from uneven blistered surfaces for transmission electron microscopy (TEM) investigations allowing detailed investigations for the degradation mechanisms. High-resolution TEM for the flaked UO 2 surfaces revealed that the implanted H + formed sharp two-dimensional cavities at the peak ion-stopping region instead of diffusing to the matrix. The resulting lateral stress likely caused UO 2 surface deterioration in good agreement with previous blistering and flaking studies on crystalline materials. Graphical abstract

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2021

Multiscale Characterization of the Caney Shale — An Emerging Play in Oklahoma

From a hydrocarbon perspective, the Caney Shale has historically been evaluated as a sealing unit, which resulted in limited studies characterizing the rock properties of the Caney Shale and its suitability for hydraulic fracturing. The objective of our research is to help bridge the current knowledge gap through the integration of multiscale laboratory techniques and to characterize the macro- and microscale rock properties of the Caney Shale. We employed an integrated approach for the characterization of the Caney using 200 ft (61 m) of Caney core from a target well in southern Oklahoma. Core observation and petrographic analysis of thin sections were combined to characterize the general rock types and associated fabrics and textures. Mineralogical composition, pore system architecture, and rock fabric were analyzed using x-ray diffraction (XRD), scanning electron microscopy/energy dispersive x-ray spectroscopy (SEM/EDS), and focused ion beam (FIB)-SEM. In addition, rebound hardness and indentation testing were carried out to determine rock hardness (brittleness) and elasticity, respectively. With the integrated multiscale characterization, three mixed carbonate-siliciclastic rock types were identified — mudstone, calcareous siltstone, and silty carbonate — likely representing a spectrum of deposition from low to relatively high energy environments in the distal portions of a ramp system. Silty carbonate contains mostly interparticle pores. The calcareous siltstones and silty mudstones contain a combination of organic matter pores and interparticle pores. Each of the rock types shows unique mineralogical compositions based on XRD. The mudstone lithofacies has the highest clay content and the least carbonate content. Calcareous siltstones show moderate carbonate and clay content. Silty carbonate indicates the highest carbonate content with the least clay content. In an order of mudstone, calcareous siltstone, and silty carbonate, rebound hardness and Young’s modulus show an increasing trend. As a result of rock-fluid interactions, there are potential scaling reactions during completion and production that could ultimately affect permeability and production rates. Overall, the proposed multiscale integration approach is critical for the geologic characterization of most rocks. However, in shale reservoirs dominated by microporosity and microstructure where engineered fractures are expected to provide permeability at a reservoir scale, successful integration is essential. An optimized, integrated geological characterization of the Caney Shale that is well aligned with the engineering designs in drilling, completing, and producing wellbores will ultimately lead to optimal production while providing safe and environmentally responsible operations.

Wang, Yulun↗

DOE OSTI2020

In-situ spectroscopic ellipsometry for real-time characterization of the effects of high-flux helium plasmas on tungsten surfaces

Tungsten samples were exposed to He plasmas generated by an RF source (Γ i = 3.5 x 10 16 He cm -2 s -1 , ion energy = 92 eV.) The range of exposure conditions selected here is conducive to the growth of nearsurface He bubbles, and at higher fluence, the formation of W nanotendrils ranging between 50 — 100 nm in diameter. The evolution of these surface features was probed using a fixed-angle ellipsometer (280 — 1000 nm wavelength range) with direct line-of-sight to the sample. Over the parameter space explored here, changes in the two angles (p, S) that define the polarization of the reflected light followed a distinct trajectory with increasing plasma fluence. Ex-situ ellipsometry of 22 additional tungsten specimens tested at a wide range of plasma fluences and temperatures mapped onto these in-situ results well. We used helium ion microscopy and focused ion beam profiling to provide a direct calibration of the ellipsometry measurements. Our results indicate that for a reproducible process such as the growth helium-induced surface morphologies, ellipsometry is a practical in-situ diagnostic to study how fusion plasmas modify materials. To study more general effects of plasmas on surfaces, including co-deposition and sputtering, different approaches to modelling the optical properties of the exposed surfaces are also considered.

36 MATERIALS SCIENCE↗

DOE OSTI2019

High Conductivity and Flexible Hybrid Solid State Electrolyte (Final Report: DOE-EE0007807)

The project objective is to develop flexible hybrid electrolyte with garnet nanofibers to achieve the following: (1) flexible, with greater mechanical strength (~ 10 MPa) and thermal stability than polymer electrolytes; (2) high room-temperature ionic conductivity, ~ 0.5 mS/cm; (3) stable interface with lithium metal and effective blocking of lithium dendrites at current densities up to 3 mA/cm 2 ; and (4) battery performance with Li S chemistry with an energy density of ≥ 450 Wh/kg (and ≥ 1000 Wh/L) and maintaining ≥ 80% of capacity up to 500 cycles. We synthesized garnet nanofibers, filled the porous region with polymer electrolyte, and characterized and tuned the flexible hybrid membrane properties. The flexible hybrid SSE microstructure was analyzed by leveraging the UMD AIMLab Focused Ion Beam Scanning Electron Microscopy (FIB-SEM) tools and integrated with electrochemical methods at the UMERC Battery Fabrication Lab to investigate the properties and stability with Li metal anode. We developed a fundamental understanding of the mechanism of Li ionic diffusion in garnet nanofibers and their mechanical properties, as well as these properties for hybrid garnet-fiber/polymer hybrids. Work progressed toward the study of the electrode assembly during electrochemical cycling of the anode.

36 MATERIALS SCIENCE↗

DOE OSTI2020

Open Source Visualization and Analysis Platform for 3D Reconstructions of Materials by Transmission Electron Microscopy

Three-dimensional characterization of materials at the nano- and meso-scale has become possible with transmission and scanning transmission electron microscopes (S/TEM). Its importance has extended to a wide class of nanomaterials such as hydrogen fuel cells, solar cells, industrial catalysts, new battery materials and semiconductor devices, as well as spanning high-tech industry, universities, and national labs. While capable instrumentation is abundant, this rapidly expanding demand for high-resolution tomography is bottlenecked by software that is instead tailored for lower-dose, biological applications and not optimized for higher-resolution materials applications. Existing tomography fails to utilize the chemical information provided by S/TEM spectrometers. To address this problem, this project delivered a scalable, fully functional, freely-distributable, open Source materials tomography package with a modern user interface that enables automated acquisition, alignment, and real-time reconstruction of raw tomography data, and provides advanced segmentation, three-dimensional chemical visualization and analysis optimized for materials applications. It has established an extendable framework capable of automation for high-throughput for the tomography of materials from data acquisition to visualization. Phase I and II delivered a full-featured, cross-platform, clean and integrated application for S/TEM materials tomography. It can read projection data from the microscope, with graphical tools for alignment of data, tomographic reconstruction, segmentation, and visualization of the reconstructed 3D volume. The entire pipeline can be saved to an XML state file, enabling fully reproducible data processing and analysis with a full Python environment for the development of custom algorithms, processing, and analysis requirements. Phase IIB extended the application to provide real-time tomographic reconstruction, "live updates" as data is processed, analysis of big data, and multi-channel tomography. Here, quantitative assessment of nanomaterials can occur as data is being recorded on a 3D visualization platform that accommodates additional information from multiple channels. We provide unmatched high-throughput tomography, where the complete tomographic pipeline from measurement to 3D visualization can occur rapidly. The project was extended to offer capabilities for micro-CT, X-ray, neutron, focused ion beam, atomic electron tomography and atom probe tomography. With over 600 transmission electron microscopes worldwide and approximately 50 coming online each year, the demand and impact of an open-source tomography tool is large. Significant opportunities exist in high-tech industry, universities, and national labs to enable or enhance three-dimensional imaging at the nanoscale and bring automated high-throughput approaches that will accelerate progress in materials characterization and metrology. The project supports a service based business model by enabling lab-specific acquisition and processing customization and integration-support and development that will be provided into Phase III and beyond.

36 MATERIALS SCIENCE↗

DOE OSTI2020

ORNL Post-irradiation Examination (LAMDA) Final Report on Characterization of Irradiated Grade 92 Ferritic-Martensitic Steels

Irradiation effects on ferritic-martensitic steel Grade 92 were investigated in this project. Samples from two heats of Grade 92, i.e., G92-2b and NF616, were selected, which were irradiated in the High Flux Isotope Reactor (HFIR) and the Advanced Test Reactor (ATR), respectively. Samples from two heats of ferriticmartensitic steel T91, irradiated in the ATR, were also selected as references for the Grade 92 samples. The selected G92-2b samples were irradiated to 0.5–14.7 displacements per atom (dpa) at two temperature regimes: 400–497 °C and 683–720°C. The selection of the high irradiation temperatures up to ~720°C is to test the performance at such upper bound temperatures, which would provide insights for the upper bound applicable temperature for Grade 92. The selected NF616 and T91 samples were irradiated to 3–8.2 dpa at 292–448°C. Except for T91 heat2 samples in 3-mm diameter discs, all the other selected samples are of type SS-J2 miniature tensile specimens. Two Nuclear Science User Facilities (NSUF), i.e., the Irradiated Materials Examination and Testing (IMET) hot cell facility and the Low Activation Materials Design and Analysis (LAMDA) facility, were used in the Post-Irradiation Examination (PIE) activities for the selected samples, which include: Tensile tests at room temperature (IMET); Fractography of the tensile fracture surfaces (LAMDA: scanning electron microscopy and energy; dispersive spectroscopy); Vickers hardness measurements (LAMDA); and Microstructural characterization (LAMDA: electron backscatter diffraction, focused-ion beam, and transmission electron microscopy).

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

DOE OSTI2021

Growth and Development of Quantum Materials

Topological insulators (TIs) display a new state of quantum matter, which is broadly known as quantum materials. The TIs have a unique property of being an insulator as a bulk property and having conducting surface states, which are symmetry-protected Dirac Fermions and well isolated from the bulk valence and conduction bands. Ideally, these topological surface states and bulk electronic states should act independently. The degree to which they intermix depends on the crystalline quality, composition and defects present in the material. These materials thus demand very high-quality crystals to observe the desired quantum properties. We proposed growth of high-quality single crystals and thin films to enhance the ability to fabricate devices with unique performance attributes. Two separate approaches will be made to make the thin films, one is exfoliation of 2D monolayer from the grown single crystals and the second is thin films grown by pulsed laser deposition. Both techniques will subsequently allow for fabrication of meso structures using a Focused Ion Beam technique.

36 MATERIALS SCIENCE↗

DOE OSTI2022

Modification of a Silicon Photomultiplier for Reduced High Temperature Dark Count Rate

In this work we present a novel method for improving the high-temperature performance of silicon photomultipliers (SiPMs) via focused ion beam (FIB) modification of individual microcells. The literature suggests that most of the dark count rate (DCR) in a SiPM is contributed by a small percentage (<5%) of microcells. By using a FIB to electrically deactivate this relatively small number of microcells, we believe we can greatly reduce the overall DCR of the SiPM at the expense of a small reduction in overall photodetection efficiency, thereby improving its high temperature performance. In this report we describe our methods for characterizing the SiPM to determine which individual microcells contribute the most to the DCR, preparing the SiPM for FIB, and modifying the SiPM using the FIB to deactivate the identified microcells.

42 ENGINEERING↗

DOE OSTI2022

Capturing Carbonation: Understanding Kinetic Complexities through a New Era of Electron Microscopy

Cryogenic plasma focused ion beam (PFIB) electron microscopy analysis is applied to visualizing ex situ (surface industrial) and in situ (subsurface geologic) carbonation products, to advance understanding of carbonation kinetics. Ex situ carbonation is investigated using NIST fly ash standard #2689 exposed to aqueous sodium bicarbonate solutions for brief periods of time. In situ carbonation pathways are investigated using volcanic flood basalt samples from Schaef et al. (2010) exposed to aqueous CO 2 solutions by them. The fly ash reaction products at room temperature show small amounts of incipient carbonation, with calcite apparently forming via surface nucleation. Reaction products at 75° C show beginning stages of an iron carbonate phase, e.g., siderite or ankerite, common phases in subsurface carbon sequestration environments. This may suggest an alternative to calcite in carbonation low calcium-bearing fly ashes. Flood basalt carbonation reactions show distinct zonation with high calcium and calcium-magnesium bearing zones alternating with high iron-bearing zones. The calcium-magnesium zones are notable with occurrence of localized pore space. Oscillatory zoning in carbonate minerals is distinctly associated with far-from-equilibrium conditions where local chemical environments fluctuate via a coupling of reaction with transport. The high porosity zones may reflect a precursor phase (e.g., aragonite) with higher molar volume that then “ripens” to the high-Mg calcite phase-plus-porosity. These observations reveal that carbonation can proceed with evolving local chemical environments, formation and disappearance of metastable phases, and evolving reactive surface areas. Together this work shows that future application of cryo-PFIB in carbonation studies would provide advanced understanding of kinetic mechanisms for optimizing industrial-scale and commercial-scale applications.

36 MATERIALS SCIENCE↗

DOE OSTI2022

High-Energy X-ray Diffraction Microscopy for Nuclear Forensics FY2022 Project Report

Morphological information on nuclear material has been identified using visible light and scanning electron microscopy. These identify qualitative differences in particle morphology. Three-dimensional imaging of materials through alternating scanning electron microscopy imaging and focused ion beam milling has also been used. Unfortunately, these techniques are time- and labor-intensive, with significant sample preparation required and lengthy analysis times. Further, the resulting 3D images are qualitative, require manual identification, and do not capture statistically-representative populations. High energy X-ray 3D imaging using a direct-beam or diffracted-beam (High-Energy Diffraction Microscopy) have been developed at the Advanced Photon Source and can produce quantitative information on grains (phase, location, etc.) and pores (size distribution, sphericity) in a material. These techniques require only minutes to characterize a sample volume and are non-destructive, thus suitable for a wide range of existing samples and for confirmatory analyses to be carried out using conventional microscopy techniques. In this first year of the project, all uranium oxide samples were synthesized and characterized using conventional analyses by the analytical chemistry laboratory. Conventional analysis methods included powder x-ray diffraction, scanning electron microscopy, impurity analysis via inductively coupled plasma mass spectrometry, and infrared spectroscopy. Impurity analysis shows a drop in boron content from UO 3 to the lowest U 3 O 8 calcination temperature, but otherwise no appreciable difference in any sample. Analysis of diffraction data shows a flip of peaks from UO 3 dominated for the 600 °C calcined sample to U 3 O 8 dominated at 700 °C and 800 °C. Analysis of scanning electron microscopy images shows that with increased calcination temperature the size distribution of particles seems to increase and broaden. Both of these last findings are in line with previously published data, though this work used significantly fewer particles to simply show similar trends instead of getting truly quantitative particle analysis. Infrared analysis similarly shows ingrowth of U 3 O 8 as calcination temperature is increased, along with depression of peaks associated with UO 3 and water. Samples were prepared for analysis at the Advanced Photon Source at beamline 1-ID. It is anticipated that analysis will occur in November of 2022. AI/ML techniques to de-noise data coming out of 1-ID during the analyses was also developed during this time using previously gathered data. Preliminary results using a self-supervision technique called Noise2Selfshow good de-noising of data. Once the uranium oxide samples are analyzed, real data will be used to test the de-noising and other AI/ML techniques that may be developed in the second year of the project.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2022

Development of Single Photon Sources in GaN

The recent discovery of bright, room-temperature, single photon emitters in GaN leads to an appealing alternative to diamond best single photon emitters given the widespread use and technological maturity of III-nitrides for optoelectronics (e.g. blue LEDs, lasers) and high-speed, high-power electronics. This discovery opens the door to on-chip and on-demand single photon sources integrated with detectors and electronics. Currently, little is known about the underlying defect structure nor is there a sense of how such an emitter might be controllably created. A detailed understanding of the origin of the SPEs in GaN and a path to deterministically introduce them is required. In this project, we develop new experimental capabilities to then investigate single photon emission from GaN nanowires and both GAN and AlN wafers. We ion implant our wafers with the ion implanted with our focused ion beam nanoimplantation capabilities at Sandia, to go beyond typical broad beam implantation and create single photon emitting defects with nanometer precision. We've created light emitting sources using Li + and He + , but single photon emission has yet to be demonstrated. In parallel, we calculate the energy levels of defects and transition metal substitutions in GaN to gain a better understanding of the sources of single photon emission in GaN and AlN. The combined experimental and theoretical capabilities developed throughout this project will enable further investigation into the origins of single photon emission from defects in GaN, AlN, and other wide bandgap semiconductors.

36 MATERIALS SCIENCE↗

DOE OSTI2023

Abstract for CRADA between NETL and the University of Massachusetts Lowell (AGMT-1275)

The demand for printed electronics over conventional electronics is growing each year due to their low costs, low material waste during manufacturing, and compatibility with flexible substrates. The development of inks for printed electronics is a challenge because each printing technology requires different viscosities and curing behaviors to create devices with controlled structures at the micron scale, or smaller. Carbon is a great candidate for fabricating printed electronics devices because it is inexpensive and earth abundant, easily functionalized to impart miscibility with solvent systems, and has electrical properties that can be tuned from insulating to conducting. Despite these advantages, carbons are rarely used for printed electronics because there is a scarcity of inks available for non-contact printing technologies. To address these challenges, the National Energy Technology Laboratory (NETL) will collaborate with the University of Massachusetts Lowell (Participant) through its Printed Electronics Research Collaborative (PERC) to develop engineered carbons and ink formulations optimized specifically for printing radio- and microwave-frequency electronic devices using ink jet, aerosol jet, syringe dispensing, and other additive manufacturing techniques. NETL will process coal, petroleum, and other carbon feedstocks to make engineered carbons with the appropriate composition, microstructure, surface functionalization, and particle morphologies needed to stabilize ink suspensions and impart useful electronic properties to printed devices. The University of Massachusetts Lowell will utilize these engineered carbons to determine which solvent systems and ink additives are needed to achieve the appropriate viscosity, stability, and printability to make useful ink formulations. The University of Massachusetts Lowell will then utilize these inks to manufacture printed resistors and conductors using inkjet, aerosol jet, and syringe dispensing printing methods and will characterize device performance using four-point probe resistivity measurements, contact angle measurements to assess wettability, adhesion evaluation to various substrates, and focused ion beam and scanning electron microscopy for surface and density investigations of printed devices.

36 MATERIALS SCIENCE↗

DOE OSTI2023

High-Energy X-ray Diffraction Microscopy for Nuclear Forensics (FY23 Project Report)

36 MATERIALS SCIENCE↗

DOE OSTI2024

Characterization of Stress-Corrosion-Cracking in Plutonium-Bearing Storage Containers

Introduction • The Integrated Surveillance Program, under the Department of Energy, is responsible for the periodic surveillance of storage containers containing plutonium-bearing materials. • The container-packages are designed to isolate the materials for 50 to 100 years with minimal surveillance. • During monitoring, corrosion-pitting and stress-corrosion-cracking (SCC) has been identified in some of the inner-cans near the weld regions. • SCC through wall penetration would result in an undesired increased risk of leakage. • An investigation is in progress to identify and characterize corrosion events to determine the prevalence of corrosion features and the likelihood of a throughwall breach. • Here, we discuss the characterization efforts carried out by Scanning Electron Microscopy (SEM), including 3D-tomography by Focused Ion Beam (FIB) methods.

Perez, Emmanuel E.↗

DOE OSTI2023

Measuring Multicomponent Adsorption of Tracer Gases on Natural Zeolites

A natural clinoptilolite sample near the Nevada National Security Site was obtained to study adsorption and retardation on gas transport. Of interest is understanding the competition for adsorption sites that may reduce tracer gas adsorption relative to single-component measurements, which may be affected by the multi-scale pore structure of clinoptilolite. Clinoptilolite has three distinct domains of pore size distributions ranging from nanometers to micrometers: micropores with 0.4–0.7 nm diameters, measured on powders by CO2 adsorption at 273 K, representing the zeolite cages; mesopores with 4–200 nm diameters, observed using liquid nitrogen adsorption at 77 K; and macropores with 300–1000 nm diameters, measured by mercury injection on rock chips (~ 100 mesh), likely representing the microfractures. These pore size distributions are consistent with X-ray computed tomography (CT) and focused ion beam scanning electron microscope (FIB-SEM) images, which are used to construct the three-dimensional (3D) pore network to be used in future gas transport modeling. To quantify tracer gas adsorption in this multi-scale pore structure and multicomponent gas species environment, natural zeolite samples initially in equilibrium in air were exposed to a mixture of tracer gases. As the tracer gases diffuse and adsorb in the sample, the remaining tracer gases outside the sample fractionate. Using a quadrupole mass spectrometer to quantify this fractionation, the degree of adsorption of tracer gases in the multicomponent gas environment and multi-scale pore structure is assessed. The major finding is that Kr reaches equilibrium much faster than Xe in the presence of ambient air, which leads to more Kr uptake than Xe over limited exposure periods. When the clinoptilolite chips were exposed to humid air, the adsorption capability decreases significantly for both Xe and Kr with relative humidity (RH) as low as 3%. Both Xe and Kr reaches equilibrium faster at higher RH. The different, unexpected, adsorption behavior for Xe and Kr is due to their kinetic diameters similar to the micropores in clinoptilolite which makes it harder for Xe to access compared to Kr.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2023

Atom Probe characterization of neutron irradiated commercial ZIRLO® and AXIOM X2® alloys

As part of the Mechanistic Understanding of ZIrconium Corrosion (MUZIC) program, this team has been instrumental to obtain EPRI and Westinghouse sponsorships to prepare the neutron irradiated ZIRLO® and X2® from Vogtle nuclear power plant and ship them from Studsvik’s (Sweden) hot cells to Idaho National Laboratory (INL) to be part of the NSUF library. The uniqueness of these sets of neutron irradiated alloys is that they are at the same two extremes of the fuel cycles, allowing us to study the microchemistry evolution as a function of irradiation doses, exposure time and solute content. Advanced commercial Zirconium-Niobium (Zr-Nb) alloys, such as ZIRLO® and AXIOM®, have been developed by Westinghouse to enhance the corrosion resistance of fuel cladding material for longer service time. This study specifically aims at investigating the neutron irradiation induced Nb redistribution in AXIOM® X2® to understand the effect of neutron irradiation induced microchemistry changes and the irradiation enhanced corrosion resistance observed in ZrNb alloys. The detailed sample information on chemical composition and irradiation is given in shown in Table 1a and 1b respectively. To study the neutron IIP/nanoclusters and Nb concentration in the solid solution, atom probe tomography (APT) is the primary tool to obtain reliable chemical information. APT specimens were prepared in shielded focused ion beam (FIB) at the Irradiated Materials Characterization Laboratory (IMCL) at INL followed by APT analysis at CAES facility using LEAP 4000XR

36 MATERIALS SCIENCE↗

DOE OSTI2024

Advancing the Understanding of Manufacturing Tools for Hardware Security

This project’s goal was to explore new methods and tools to evaluate the focused ion beam (FIB) effect on active electrical devices, which is becoming increasingly challenged by the continual decrease in transistor geometry. Novel hole transfer methods leveraging FIB patterning were demonstrated utilizing selective area atomic layer deposition (ALD) and metal assisted chemical etching. A FIB damage electrical tester device was fabricated, and the effects of FIB beams were characterized by examining change in performance of damaged transistors. Detailed characterization of end-of-range damage for common FIB ions were correlated to modeling methods. Finally, undamaged and damaged devices were simulated by Charon to begin understanding the FIB effects on active devices. This test platform along with modeling methods give a powerful way to assess FIB damage in materials and devices, and with more development can help establish methods to predict FIB damage effects on electrical devices.

42 ENGINEERING↗