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At least 271 records · Page 15

Sputtering and native oxide formation on (110) surfaces of Cd(1-x)Mn(x)Te

Native oxides on the surface of Cd(1-x)Mn(x)Te (X between 0 and 0.7) have been analyzed on the basis of X-ray photoemission spectroscopy measurements. Depth profile analysis revealed a significant increase in the thickness at higher Mn concentrations and a strong Mn segregation to the surface, respectively. Sputter-induced damage on cleaved (110)-oriented surfaces was analyzed by photoreflectance and photoluminescence measurements. The damage was found to be larger on CdTe than on the alloy. Thermal annealing showed nearly complete restoration for the surface of the alloy, while CdTe revealed irreversible modifications in the near-surface regime upon sputtering and post annealing.

Neff, H.

Influence of process parameter variation on the reflectivity of sputter-deposited W-C multilayer diffraction gratings

Multilayer W-C diffraction gratings with nominal d spacings of 35 A have been fabricated by magnetron sputter deposition. The peak and integrated reflectivities of these films have been measured with Al K-alpha X-rays and compared to theoretical values. The rms surface roughness has been evaluated. The influence of several sputtering-system process parameters on the reflectivities has been investigated.

Sager, B.

Towards an optimised sputtered MoS2 lubricant film

It is shown that the tribological quality of MoS2 lubricant films formed by magnetron sputtering is determined by the choice of sputtering conditions. By selecting the appropriate conditions, films of extremely high lubricity and endurance (in vacuum), which are well suited to many space applications, are obtained. Such MoS2 films, when applied to precision ball hearings, give rise to the lowest torques (for the given test conditions) yet seen in our laboratory. While a remarkably good performance is obtained in vacuum, tests in air show a marked deterioration in lubricating qualities. It is demonstrated that this is attributable to the adsorption of water vapor on MoS2 surfaces and that the degree of deterioration is related to the partial pressure of water vapor present. Analysis of results indicates that the factors relevant to obtaining optimum films are deposition rate and film composition.

Roberts, E. W.

A sputtering derived atomic oxygen source for studying fast atom reactions

A technique for the generation of fast atomic oxygen was developed. These atoms are created by ion beam sputtering from metal oxide surfaces. Mass resolved ion beams at energies up to 60 KeV are produced for this purpose using a 150 cm isotope separator. Studies have shown that particles sputtered with 40 KeV Ar(+) on Ta2O5 were dominantly neutral and exclusively atomic. The atomic oxygen also resided exclusively in its 3P ground state. The translational energy distribution for these atoms peaked at ca 7 eV (the metal-oxygen bond energy). Additional measurements on V2O5 yielded a bimodal distribution with the lower energy peak at ca 5 eV coinciding reasonably well with the metal-oxygen bond energy. The 7 eV source was used to investigate fast oxygen atom reactions with the 2-butene stereoisomers. Relative excitation functions for H-abstraction and pi-bond reaction were measured with trans-2-butene. The abstraction channel, although of minor relative importance at thermal energy, becomes comparable to the addition channel at 0.9 eV and dominates the high-energy regime. Structural effects on the specific channels were also found to be important at high energy.

Ferrieri, Richard A.

The production and sputtering of S2 by keV ion bombardment

The ion bombardment of S-containing molecules in comets is simulated experimentally. Mass-analyzed 30-keV beams of Ar(+) and He(+) are directed at solid S, H2S, and CS2 targets at temperatures 15 K, and the neutral molecular species produced are ionized and analyzed using a quadrupole mass spectrometer. The dominant species detected are S1 and S2 for the S target, H2S and S2 for the H2S target, and S, CS, S2, and CS2 for the CS2 target. In the latter case, it is found that after about 10 to the 14th He(+) ions/sq cm have struck the target, further sputtering is prevented by formation of a dark brown deposit which is stable at room temperature; the residue forms more slowly when Ar(+) ions are used. These results, indicating relatively efficient S2 production by ion bombardment, are applied to theoretical models of S2 production and/or ejection by solar-wind, solar-flare, or cosmic-ray ions striking comets. It is found that direct solar-wind production of S2 by sputtering is unlikely at realistic bombardment rates, but that H2S-S2 conversion by energetic ions could be significant, with less stringent ice-temperature and irradiation-flux constraints than in the case of S2 production by photons.

Boring, J. W.

Sputtering of sodium on the planet Mercury

It is shown here that ion sputtering cannot account for the observed neutral sodium vapor column density on Mercury, but that it is an important loss mechanism for Na. Photons are likely to be the dominant stimulus, both directly through photodesorption and indirectly through thermal desorption of absorbed Na. It is concluded that the atmosphere produced is characterized by the planet's surface temperature, with the ion-sputtered Na contributing to a lesser, but more extended, component of the atmosphere.

Mcgrath, M. A.

Sputtering of sulfur by kiloelectronvolt ions - Application to the magnetospheric plasma interaction with Io

Accurate measurements of the yields, mass spectra, and energy spectra of ejected sulfur are presented based on vapor deposits of sulfur at temperatures and ion energies relevant to the plasma interaction with the surface of Io. The measured sputtering yields are much lower than previous estimates for room temperature sulfur films, but are comparable to previous measurements of low-temperature keV ion sputtering of SO2. Results suggest that if ions reach the surface of Io its atmosphere will have a nonnegligible sulfur component which is primarily S2. Comparison of injection rates determined for sulfur with those for SO2 indicates that injection from sulfur deposits contributes 13 percent to the total mass injection rate of about 2-3 x 10 to the 29th amu/sec.

Chrisey, D. B.

Optical properties of sputtered aluminum on graphite/epoxy composite material

Solar absorptance, emittance, and coating thickness were measured for a range of coating thicknesses from about 400 A to 2500 A. The coatings were sputtered from an aluminum target onto 1-inch-diameter substrates of T300/5209 graphite/epoxy composite material with two different surface textures. Solar absorptance and emittance values for the specimens with the smooth surface finish were lower than those for the specimens with the rough surface finish. The ratio of solar absorptance to emittance was higher for the smooth specimens, increasing from 2 to 4 over the coating thickness range, than for the rough ones, which had a constant ratio of about 1. The solar absorptance and emittance values were dependent on the thickness of the sputtered coating.

Witte, William G., Jr.

Development of sputter coatings for the gravity probe B gyroscope housings

Cu/Ti coatings have been applied by sputter deposition to fused quartz housings to serve as the electrodes and lands of electrostatically supported gyroscopes. Niobium-coated fused quartz gyro rotors have been successfully suspended and spun up in those housings. The Cu/Ti bilayer coating and alternative multilayer coatings (Cu/Mo, Mo/Cu/Ti and Mo/Cu/Mo) with 2-micron thickness produced by sputter deposition on flat, fused quartz substrates have been examined with scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and four-point resistivity measurement techniques. The multilayer coatings with a molybdenum bonding layer appear to produce smoother surfaces than those with a titanium bonding layer. All multilayer coatings survived thermal cycling to 77 K without adhesion failure.

Zhou, P.

Study of the polyoxymethylene and its sputtered fragments: Implications for comets

Laboratory mass spectra of sputtered polyoxymethylene (POM) reveals a fragmentation pattern consistent with observed peaks in the PICCA experiment on board the Giotto spacecraft. Both commercially available POM and radiation synthesized POM have been used in the studies. Synthesized POM was identified using infrared absorption spectra after proton irradiation of H2CO ice on silicate grains at 20 K. Laboratory results suggest that similar type sputtering is a possible mechanism for removing species from comet grains.

Moore, Marla H.

Sputter-produced plasma as a measure of satellite surface composition - The Cassini mission

Measurements of the co-orbiting neutral cloud or the plasma produced by sputtering of the icy Saturnian satellites can be used to determine the relative abundance of a minority surface species which would be difficult to determine from reflectance spectra. This is due to the fact that the sputter source rates, hence the plasma supply rates, are directly proportional to the bulk concentrations of mixed solids or clathrates, although the surface grains may be depleted in the most volatile species.

Johnson, R. E.

Mass spectra of sputtered polyoxymethylene - Implications for comets

Laboratory mass spectra of sputtered polyoxymethylene, POM, reveal a mass pattern similar to that detected by the PICCA experiment on board the Giotto spacecraft. Both commercially available POM and radiation-synthesized POM have been used in the studies. Synthesized POM was identified by its infrared absorption spectra after proton irradiation of H2CO condensed on silicate grains at 20 K. Laboratory results suggest that a similar type of sputtering is a possible mechanism for removing species from cometary grains.

Moore, Marla H.

In-situ sputtering of YBCO films for microwave applications

RF magnetron sputtering from a single YBCO target onto a heated substrate (700 C) was used to obtain c-axis-oriented 1-2-3 films that are superconducting without a subsequent annealing or oxygenation step, with Tc(R = 0) as high as 88 K on MgO and LaAlO3 substrates. This process uses an 8-in-diameter target in the sputter-up configuration, with a central grounded shield to eliminate negative ion bombardment. It can reproducibly and uniformly cover substrates as large as 3-in across at rates exceeding 1 A/s. Maintaining film composition very close to stoichiometry is essential for obtaining films with good superconducting properties and surface morphology. Optimum films have critical currents of 1 MA/sq cm at 77 K. Measurements of microwave surface resistance based on a stripline resonator indicate low surface resistance for unpatterned YBCO ground planes, but excess loss and a strong power dependence in a patterned center strip.

Ballentine, P. H.

Sputtering of ions from Cu and Al by low energy oxygen ion bombardment

The sputtering of Cu(+) and Al(+) ions from copper and aluminum while the target surface is bombarded with low energy oxygen ions (20 to 500 eV), is investigated. Both the ion yield, as a function of oxygen ion energy, and the kinetic energy distribution of the sputtered ions at a given oxygen ion energy are determined.

Eck, T. G.

Deposition of adherent Ag-Ti duplex films on ceramics in a multiple-cathode sputter deposition system

The adhesion of Ag films deposited on oxide ceramics can be increased by first depositing intermediate films of active metals such as Ti. Such duplex coatings can be fabricated in a widely used three target sputter deposition system. It is shown here that the beneficial effect of the intermediate Ti film can be defeated by commonly used in situ target and substrate sputter cleaning procedures which result in Ag under the Ti. Auger electron spectroscopy and wear testing of the coatings are used to develop a cleaning strategy resulting in an adherent film system.

Honecy, Frank S.

Multilayer Badges Indicate Depths Of Ion Sputter Etches

Multilayer badges devised to provide rapid, in-place indications of ion sputter etch rates. Badges conceived for use in estimating ion erosion of molybdenum electrodes used in inert-gas ion thrustors. Concept adapted to measure ion erosion in industrial sputter etching processes used for manufacturing of magnetic, electronic, and optical devices. Badge etched when bombarded by energetic ions. Badge layers exposed using mask. Contrast between layers facilitates counting of layers to determine etch depth.

Beattie, J. R.

Mars atmosphere loss and isotopic fractionation by solar-wind-induced sputtering and photochemical escape

The effects of loss of Mars atmospheric constituents by solar-wind-induced sputtering and by photochemical escape during the last 3.8 b.y. were examined. Sputtering is capable of efficiently removing all species from the upper atmosphere, including the light noble gases; N also is removed by photochemical processes. Due to the diffusive separation by mass above the homopause, removal from the top of the atmosphere will fractionate the isotopes of each species, with the lighter mass being preferentially lost. For C and O, this allows us to determine the size of nonatmospheric reservoirs that mix with the atmosphere; these reserviors can be accounted for by exchange with CO2 adsorbed in the regolith and with H2O in the polar ice deposits. Both simple analytical models and time-dependent models of the loss of volatiles from and supply to the Martian atmosphere were constructed. Both Ar and Ne require continued replenishment from outgassing over geologic time.

Jakosky, B. M.

Preliminary far-field plume sputtering characterization of the Stationary Plasma Thruster (SPT-100)

For electric propulsion devices to be considered for use on communications satellites, integration impacts must be examined in detail. Two phenomena of concern associated with highly energetic plumes are contamination via sputtered material from the thruster and sputter erosion of downstream surfaces. In order to characterize the net effect of both phenomena, an array of witness plates were mounted in several types of holders and were exposed to the SPT-100 thruster plume for 50 hours. Surface analysis of the witness plates revealed that in the most energetic regions of the plume, there was a net removal of material from the samples facing the thruster. In the peripheral regions, net deposits were observed and characterized by the changes in optical properties of these samples. Changes in surface properties of samples located in collimators were within experimental uncertainty.

Pencil, Eric J.