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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 289 records · Page 16
All sourcesNASA NTRSDOE OSTI
NASA NTRSDate not supplied

Effect of Injection Dynamics on Detonation Wave Propagation in a Linear Detonation Combustor

Injector response to self-excited and sustained detonation wave propagation in an optically-accessible nonpremixed natural gas-oxygen linear detonation combustor is investigated. 100 kHz measurements of planar laser induced fluorescence (PLIF) of trace quantities of acetone injected into the fuel supply and simultaneous OH∗ chemiluminescence measurements were used to correlate the effect on injection dynamics on detonation wave structure and propagation. Measurements over a range of equivalence ratios (0.61-1.48) revealed wave propagation through regions of high fuel stratification in the axial and transverse direction of reactant injection. Consequently, the propagation of the detonation wave along the channel is through a flow-field with significant variation in fuel mass fraction, reactivity, and sound speeds. At lean conditions, wave propagation frequency is generally lower (∼6 kHz) resulting in longer time between wave passages for mixing and pre-heat resulting in steeper detonation wave-fronts anchored near the injector exit plane. Conversely, at rich equivalence ratios the wave frequency is higher (∼10 kHz) resulting in shorter intra-cycle period for reactant fill and mixing resulting waves lifted from the injection plane that are more compact. Higher chemiluminescence intensity in the post-wave region with deflagrative combustion is observed in these cases. Phase averaged representation of the acetone-PLIF measurements indicate that the fraction of time between wave passages available for reactant fill, mixing and pre-heat is consistent across all equivalence ratios.

Propulsion↗
DOE OSTI2026

TRIZ-Based Design Improvement for Facilitating Transmission Control Unit Remanufacturing

Design for Remanufacturing (DfRem) centers on enhancing product design and operations to facilitate remanufacturing while increasing both economic and environmental sustainability. DfRem requires a comprehensive understanding of product characteristics, production conditions, and operational constraints. Thus, DfRem requires a systematic methodology to identify and implement alternative designs. Among many critical steps in remanufacturing, disassembly is essential because it directly supports remanufacturing by separation of product components for cleaning, inspection, and other subsequent process steps. This study proposes a TRIZ-based framework to improve product design for disassembly in support of remanufacturing. The framework is applied to a transmission control unit (TCU) case study. The current TCU design prevents remanufacturing due to the sealant-based component joinery, which complicates disassembly and risks damaging the printed circuit board (PCB). After defining technical contradictions for the TCU product design and reviewing the suggested TRIZ principles to solve the conflicts, a cantilever snap-fit design alternative is developed. The economic feasibility of the snap-fit design is assessed by comparing the current and snap-fit design costs for three life cycles. The cost analysis demonstrates that the cost of the snap-fit design remains the same as the current design. Additionally, the snap-fit design offers substantial cost savings for three life cycles compared to the current design. We demonstrate how snap-fit design supports both environmental and economic sustainability.

42 ENGINEERING↗
DOE OSTI2020

Optical Investigation of Catalyst Heating Operation in a Light-Duty Compression-Ignition Engine

It is well known that cold start engine operation contributes a majority of tail-pipe emissions during a vehicle drive cycle. Aftertreatment catalysts have poor conversion efficiency during this period due to low conversion efficiency at temperatures less than their light-off temperature. A late post injection strategy, with a delayed injection to increase exhaust enthalpy, can help decrease the time required to heat-up the catalyst. However, late injections into conditions with decreasing temperature and density can result in high emissions and combustion instability. In this study a three-injection strategy with a late-post injection was investigated in an optically-accessible engine. For the first two injections (pilot and main) timing and duration were held constant as the post injection timing was swept and duration varied to hold load constant, at a relevant light-load catalyst heating operating condition. Simultaneous double-pass schlieren and OH chemiluminescence data were acquired in an optically-accessible 0.4 L single-cylinder engine to understand spray characteristics and combustion behavior for #2 diesel fuel. Optical images analysis revealed higher liquid penetration and lower vaporization of the liquid fuel jet as post injection is retarded. It is also observed that retarding post injection timing to +25 CAD resulted in lower observed soot concentration in the piston bowl.

99 GENERAL AND MISCELLANEOUS↗
DOE OSTI2024

Pre-equilibrium reactions involving pendent relays improve CO 2 reduction mediated by molecular Cr-based electrocatalysts

Homogeneous earth abundant transition-metal electrocatalysts capable of carbon dioxide (CO 2 ) reduction to generate value-added chemical products are a possible strategy to minimize rising anthropogenic CO 2 emissions. Previously, it was determined that Cr-centered bipyridine-based N 2 O 2 complexes for CO 2 reduction are kinetically limited by a proton-transfer step during C–OH bond cleavage. Therefore, it was hypothesized that the inclusion of pendent relay groups in the secondary coordination sphere of these molecular catalysts could increase their catalytic activity. Here, it is shown that the introduction of a pendent methoxy group favorably impacts a pre-equilibrium protonation prior to the catalytic resting state, resulting in a significant increase in catalytic activity without a loss of product selectivity for generating carbon monoxide (CO) from CO 2 . Interestingly, combining the pendent methoxy group with a cationic acid causes a positive shift of the catalytic reduction potential of the system, while maintaining increased activity and quantitative selectivity. This work suggests that tuning the secondary coordination sphere with respect to cationic proton sources can result in activity improvements by modifying the kinetic and thermodynamic aspects of proton transfer in the catalytic cycle.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2026

Generation of 3.3-mJ, 2.45-µm, sub-2-cycle laser pulses via hollow-core fiber pulse compression

We demonstrate nonlinear compression of mid-infrared pulses from a Cr:ZnSe chirped-pulse amplifier using a gas-filled stretched hollow-core fiber followed by bulk-material compression. Starting from 90 fs, 2.45 µm pulses with 5.3 mJ energy, spectral broadening in the gas-filled capillary combined with optimized dispersion management enables compression to 15 fs, less than two optical cycles at 2.45 µm, with 3.3 mJ pulse energy, corresponding to a peak power of approximately 0.12 TW. The simplicity of the approach, based on a single hollow-core fiber stage and bulk dispersion compensation, makes it scalable to higher energies and establishes a robust route to mid-infrared drivers for high harmonic generation and attosecond applications.

Britton, Mathew [SLAC National Accelerator Laborat↗
DOE OSTI2023

Radiolytic Evaluation of 3,4,3-LI(1,2-HOPO) in Aqueous Solutions

We report the octadentate hydroxypyridinone ligand 3,4,3-LI(1,2-HOPO) (abbreviated as HOPO) has been identified as a promising candidate for both chelation and f-element separation technologies, two applications that require optimal performance in radiation environments. However, the radiation robustness of HOPO is currently unknown. Here, we employ a combination of time-resolved (electron pulse) and steady-state (alpha self-radiolysis) irradiation techniques to elucidate the basic chemistry of HOPO and its f-element complexes in aqueous radiation environments. Chemical kinetics were measured for the reaction of HOPO and its Nd(III) ion complex ([Nd III (HOPO)] - ) with key aqueous radiation-induced radical transients (eaq - , H · atom, and · OH and NO 3 · radicals). The reaction of HOPO with eaq - is believed to proceed via reduction of the hydroxypyridinone moiety, while transient adduct spectra indicate that reactions with the H · atom and · OH and NO 3 · radicals proceeded by addition to HOPO's hydroxypyridinone rings, potentially allowing for the generation of an extensive suite of addition products. Complementary steady-state 241 Am(III)-HOPO complex ([ 241 Am III (HOPO)] - ) irradiations showed the gradual release of 241 Am(III) ions with increasing alpha dose up to 100 kGy, although complete ligand destruction was not observed.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2025

Sorbent Regeneration via Radiofrequency-Assisted Dielectric Heating for Direct Air Capture of CO 2

Direct air capture (DAC) of CO 2 is a negative emission technology that utilizes sorbents requiring a regeneration step for repeated ab(/d)sorption–desorption cycles. Here we report an unconventional approach to desorb captured CO 2 from a porous sorbent using radiofrequency (RF) irradiation for dielectric heating and targeted energy transfer, thus enabling modularity and promoting renewable energy input. Regeneration of composites of functional ionic liquid and metal–organic framework with high CO 2 capacity and enhanced transport is demonstrated under conditions relevant to DAC. RF-assisted dielectric heating at the megahertz frequency range shows effective absorption of electromagnetic energy and consequently rapid release of the captured CO 2 .

Ionic liquids↗
DOE OSTI2025

Ammonium Looping with Membrane Absorber and Distributed Stripper for Enhanced Algae Growth

The objective of this project is to conduct a comprehensive investigation to develop and demonstrate a practical, reliable, and cost-effective integrated carbon dioxide (CO 2 ) capture and biofixation process for algae production. This process utilizes a chemical hindered ammonium solution (NH 4 OH) as both a capture reagent and an algae nutrient. The membrane absorber employed in the system ensured minimal ammonia (NH 3 ) emissions in the treated flue gas. Additionally, distributed solar-energy powered strippers located near the bioreactor modules facilitate solvent regeneration and enable just-in-time delivery of CO 2 and NH 3 to the algae, thereby minimizing the pH swing for enhanced productivity. The proposed membrane CO 2 absorber and solar-powered stripper is designed and seamlessly integrated with the existing 0.1 MWth bench-scale CO 2 capture system (CCS) and open raceway ponds (ORPs) at the University of Kentucky Center for Applied Energy (UK CAER) campus. The entire integrated process has undergone construction, operation, testing, and analysis. Furthermore, technology has been evaluated with a techno-economic analysis (TEA), technology gap analysis (TGA), life-cycle analysis (LCA), and a technology maturation plan (TMP). This project was performed within two budget periods, 54 months in duration. There are fourteen Project Tasks, twelve Milestones and four Success Criteria.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
NASA NTRS2010

Process for Making a Noble Metal on Tin Oxide Catalyst

To produce a noble metal-on-metal oxide catalyst on an inert, high-surface-area support material (that functions as a catalyst at approximately room temperature using chloride-free reagents), for use in a carbon dioxide laser, requires two steps: First, a commercially available, inert, high-surface-area support material (silica spheres) is coated with a thin layer of metal oxide, a monolayer equivalent. Very beneficial results have been obtained using nitric acid as an oxidizing agent because it leaves no residue. It is also helpful if the spheres are first deaerated by boiling in water to allow the entire surface to be coated. A metal, such as tin, is then dissolved in the oxidizing agent/support material mixture to yield, in the case of tin, metastannic acid. Although tin has proven especially beneficial for use in a closed-cycle CO2 laser, in general any metal with two valence states, such as most transition metals and antimony, may be used. The metastannic acid will be adsorbed onto the high-surface-area spheres, coating them. Any excess oxidizing agent is then evaporated, and the resulting metastannic acid-coated spheres are dried and calcined, whereby the metastannic acid becomes tin(IV) oxide. The second step is accomplished by preparing an aqueous mixture of the tin(IV) oxide-coated spheres, and a soluble, chloride-free salt of at least one catalyst metal. The catalyst metal may be selected from the group consisting of platinum, palladium, ruthenium, gold, and rhodium, or other platinum group metals. Extremely beneficial results have been obtained using chloride-free salts of platinum, palladium, or a combination thereof, such as tetraammineplatinum (II) hydroxide ([Pt(NH3)4] (OH)2), or tetraammine palladium nitrate ([Pd(NH3)4](NO3)2).

Davis, Patricia↗
DOE OSTI2021

Vibrational spectroscopy of uranium tetrafluoride hydrates

Uranium tetrafluoride (UF 4 ) is an important intermediate in the production of UF6 and nuclear fuel. Historical characterization of UF 4 with Raman spectroscopy was plagued with ambiguity until the first accurate Raman spectrum was published by our group in 2016. Although generally considered to be relatively stable, UF 4 can hydrolyze to form numerous UF 4 hydrates that may play a role in future uranium waste forms. In contrast to anhydrous UF 4 , the hydrates, with their OH stretch and HOH bending modes, can be spectroscopically characterized by the type and degree of water bonding in the crystal lattice, which can yield additional information about their crystal structure. Herein, vibrational spectroscopy (Raman and infrared) was used to characterize three different UF 4 hydrates: UF 4 (H 2 O) 0.33 , U 3 F 12 (H 2 O), and UF 4 (H 2 O) 2.5 . Spectra show the different hydrates vary in the number of observed bands, full-width half-maximum of the bands, and band intensity. These differences are due to varying interactions between the OH stretch and HOH bending modes with UF 4 and the polymeric UF 4 structure in the crystal lattice. These vibrational data, in combination with spectral fitting and crystallographic structures measured with powder X-ray diffraction and single crystal X-ray diffraction, provide unique details on the location of water molecules in the crystal lattice of hydrated UF 4 , and provide an interesting contrast to the vibrational spectra of anhydrous UF 4 .

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2026

Towards dislocation-driven quantum interconnects

A central problem in the deployment of quantum technologies is the realization of robust architectures for quantum interconnects. We propose to engineer interconnects in semiconductors and insulators by patterning spin qubits at dislocations, thus forming quasi one-dimensional lines of entangled point defects. To gain insight into the feasibility and control of dislocation-driven interconnects, we investigate the optical cycle and coherence properties of nitrogen-vacancy (NV) centers in diamond, in proximity of dislocations, using a combination of advanced first-principles calculations. We show that one can engineer spin defects with properties similar to those of their bulk counterparts, including charge stability and a favorable optical cycle, and that NV centers close to dislocations have much improved coherence properties. Finally, we predict optically detected magnetic resonance spectra that may facilitate the experimental identification of specific defect configurations. Our results provide a theoretical foundation for the engineering of one-dimensional arrays of spin defects in the solid state.

Materials science↗
DOE OSTI2020

Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS 2 by Atomic Layer Deposition

We introduce here the synthesis of hybrid nanostructures comprised of ZnO nanocrystals (NCs) decorating nanosheets and nanowires (NWs) of MoS 2 prepared by atomic layer deposition (ALD). The concentration, size, and surface-to-volume ratio of the ZnO NCs can be systematically engineered by controlling both the number of ZnO ALD cycles and the properties of the MoS 2 substrates, which are prepared by sulfurizing ALD MoO 3 . Analysis of the chemical composition combined with electron microscopy and synchrotron X-ray techniques as a function of the number of ZnO ALD cycles, together with the results of quantum chemical calculations, help elucidate the ZnO growth mechanism and its dependence on the properties of the MoS 2 substrate. The defect density and grain size of MoS 2 nanosheets are controlled by the sulfurization temperature of ALD MoO 3 , and the ZnO NCs in turn nucleate selectively at defect sites on MoS 2 surface and enlarge with increasing ALD cycle numbers. At higher ALD cycle numbers, the coalescence of ZnO NCs contributes to an increase in areal coverage and NC size. Furthermore, the geometry of the hybrid structures can be tuned by changing the dimensionality of the MoS 2 , by employing vertical NWs of MoS 2 as the substrate for ALD ZnO NCs, which in turn leads to improvement of the relevant surface-to-volume ratio. Such materials are expected to find use in newly expanded applications, especially those such as sensors or photo-devices based on a p-n heterojunction which relies on coupling transition metal dichalcogenides (TMDCs) with NCs.

36 MATERIALS SCIENCE↗
NASA NTRS2008

MEMS Microshutter Array System for James Webb Space Telescope

A complex MEMS microshutter array system has been developed at NASA Goddard Space Flight Center (GSFC) for use as a multi-object aperture array for a Near-Infrared Spectrometer (NIRSpec). The NIRSpec is one of the four major instruments carried by the James Webb Space Telescope (JWST), the next generation of space telescope after the Hubble Space Telescope retires. The microshutter arrays (MSAs) are designed for the selective transmission of light with high efficiency and high contrast. It is demonstrated in Figure 1 how a MSA is used as a multiple object selector in deep space. The MSAs empower the NIRSpec instrument simultaneously collect spectra from more than 100 targets therefore increases the instrument efficiency 100 times or more. The MSA assembly is one of three major innovations on JWST and the first major MEMS devices serving observation missions in space. The MSA system developed at NASA GSFC is assembled with four quadrant fully addressable 365x171 shutter arrays that are actuated magnetically, latched and addressed electrostatically. As shown in Figure 2, each MSA is fabricated out of a 4' silicon-on-insulator (SOI) wafer using MEMS bulk-micromachining technology. Individual shutters are close-packed silicon nitride membranes with a pixel size close to 100x200 pm (Figure 3). Shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. In order to prevent light leak, light shields are made on to the surrounding frame of each shutter to cover the gaps between the shutters and the Game (Figure 4). Micro-ribs and sub-micron bumps are tailored on hack walls and light shields, respectively, to prevent sticktion, shown in Figures 4 and 5. JWST instruments are required to operate at cryogenic temperatures as low as 35K, though they are to be subjected to various levels of ground tests at room temperature. The shutters should therefore maintain nearly flat in the entire temperature range between 35K and 300K. Through intensive numerical simulations and experimental studies, an optically opaque and electrically conductive metal-nitride thin film was selected as a coating material deposited on the shutters with the best thermal-expansion match to silicon nitride - the shutter blade thin film material. A shutter image shown in Figure 6 was taken at room temperature, presenting shutters slightly bowing down as expected. Shutters become flat when the temperature decreases to 35K. The MSAs are then bonded to silicon substrates that are fabricated out of 6" single-silicon wafers in the thickness of 2mm. The bonding is conducted using a novel single-sided indium flip-chip bonding technology. Indium bumps fabricated on a substrate are shown in Figure 7. There are 180,000 indium bumps for bonding a flight format MSA array to its substrate. Besides a MSA, each substrate houses five customer-designed ASIC (Application Specific Integrated Circuit) multiplexer/address chips for 2-dimensional addressing, twenty capacitors, two temperature sensors, numbers of resistors and all necessary interconnects, as shown in Figure 8. Complete MSA quadrant assemblies have been successfully manufactured and fully functionally tested. The assemblies have passed a series of critical reviews required by JWST in satisfying all the design specifications. The qualification tests cover programmable 2-D addressing, life tests, optical contrast tests, and environmental tests including radiation, vibration, and acoustic tests. A 2-D addressing pattern with 'ESA' letters programmed in a MSA is shown in Figure 9. The MSAs passed 1 million cycle life tests and achieved high optical contrast over 10,000. MSA teams are now making progress in final fabrication, testing and assembly (Figure 10). The delivery of flight-format MSA system is scheduled at the end of 2008 for being integrated to the focal plane of the NIRSpec detectors.

Li, Mary J.↗
DOE OSTI2025

Tandem CO 2 valorisation to polycarbonate vitrimer and ethylene carbonate

The need for renewably sourced polymers has intensified with the worsening of global challenges such as emissions and plastic pollution. Here, we report a CO 2 -based poly(cyclohexene carbonate) (PCHC) vitrimer cured with zinc stearate that directly addresses both issues. Enhanced zinc dispersion within the network enabled faster curing and reprocessing than possible with zinc acetate systems, while maintaining consistent T g and mechanical integrity across multiple cycles. The vitrimer undergoes rapid glycolysis in ethylene glycol, valorisation into ethylene carbonate with up to 97% yield without additional catalyst. When applied to carbon fibre-reinforced polymers (CFRPs), applying this strategy enabled the development of sustainable CO 2 -based CFRP that can undergo full resin valorisation and recovery of clean, damage-free fibres. Collectively, this tandem CO 2 valorisation strategy—from vitrimer synthesis to fibre-reinforced composites and subsequent chemical valorisation—establishes multiple recycling and valorisation pathways and provides a promising routte for carbon capture and utilization as well as material recycling.

36 MATERIALS SCIENCE↗
NASA NTRS2020

2020 IEEE Paper on Psyche margin management, Draft

In January 2017, the mission concept Psyche: Journey to a Metal World was one of two concepts selected by NASA for implementation as part of the 14th Discovery mission competition. Over the course of the past year, the Psyche team has actively worked to refine and mature the technical design, culminating in a successful completion of the Project Preliminary Design review and approval to proceed to Phase C in mid-2019. Psyche is a deep space mission utilizing solar electric propulsion (SEP), consisting of SPT-140 Hall thrusters which have been successfully employed on multiple commercial spacecraft. When launched, Psyche will carry over 1000 kg of Xenon, and will represent the farthest usage of electric propulsion usage from the Sun – a distance of over 3.3 AU. The use of solar electric propulsion in deep space has resulted in challenges unique to other missions. Spacecraft designs typically balance margins across two main elements – mass and power – that are independent of one another. Utilizing a low thrust trajectory through the application of electric propulsion introduces more elements - namely flight time, missed thrust percentage and thruster duty cycle. Moreover, these elements become connected, presenting additional relationships that must be considered. This paper will present an overview of the margin management process for Psyche, and how it has evolved from the early proposal stage to its current state. It will discuss the elements that are margined, their relationship with one another, and key uncertainties that must be addressed. It discusses challenges and mitigations obtained during the refinement of the Psyche project, culminating in a new margin strategy that enables optimization across many of the system elements, and will serve as a template for future deep space SEP missions.

Hart, William↗
DOE OSTI2025

Performance of wind assessment datasets in United States coastal areas

The atmospheric dynamics that occur near the intersection of land and water offer exciting and challenging opportunities for wind energy deployment in coastal locations. New models and tools are continually being developed in support of wind resource assessment, and three recent products are explored in this work for their performance in representing characteristics of the wind resource at coastal locations: the Global Wind Atlas 3 (GWA3), the 2023 National Offshore Wind dataset (NOW-23), and the wind climate simulations that are a component of the Wind Integration National Dataset (WIND) Toolkit Long-Term Ensemble Dataset (WTK-LED Climate). These relatively new products are freely available and user-friendly so that anyone – from a utility-scale developer to a resident or business owner – can evaluate the potential for wind energy generation at their location of interest. The validations in this work provide guidance on the accuracy of wind resource assessments for coastal customers interested in installing small or midsize wind turbines (≤ 1 MW in capacity) to support energy needs at the residential, business, or community scale, such as the island and remotely located participants of the U.S. Department of Energy's Energy Transitions Initiative Partnership Project. At 23 coastal locations across the United States, dataset performance varies according to different evaluation metrics. All three recent datasets tend to overestimate the observed coastal wind resource. GWA3 produces the smallest annual average wind speed relative errors, whereas WTK-LED Climate is in best agreement in terms of representing diurnal wind speed cycles. NOW-23 is the highest performing of the datasets for representing seasonal and interannual trends in the coastal wind resource. While GWA3 and WTK-LED Climate are relatively insensitive to the dataset output heights selected for wind resource assessment at small and midsize wind turbine hub heights (20–60 m), significant variation in the NOW-23 representation of wind shear across the wind profile in the lowest 100 m of the atmosphere leads to notable differences in wind speed estimates according to the dataset output heights selected for evaluation. GWA3 exhibits challenges in the representation of observed wind speed diurnal cycles at small and midsize turbine hub heights, likely due to the dataset's consistent treatment of hourly wind speed trends regardless of altitude.

17 WIND ENERGY↗
DOE OSTI2026

Coupled Roles of Surface Chemistry and Hydrogen-Assisted Cycling in Ruthenium Atomic Layer Deposition on Silicon Oxides

Ruthenium (Ru) is a promising interconnect material for advanced semiconductor technologies due to its favorable scaling characteristics, including a short electron mean free path and strong electromigration resistance. In semiconductor integration, silicon oxide-based dielectrics serve as dominant insulating materials and constitute ubiquitous interfaces for metallization; however, their formation-dependent surface chemistry and its impact on Ru growth remain insufficiently explored. Here, we investigate Ru ALD on native oxide SiO x (N-SiO x ) and thermally grown SiO 2 (T-SiO 2 ) as model substrates using bis(ethylcyclopentadienyl)ruthenium(II) [Ru(EtCp) 2 ] under two distinct reactant-sequence environments: AB-type (Ru(EtCp) 2 /O 2 ) and hydrogenassisted ABC-type (Ru(EtCp) 2 /O 2 /H 2 ). Under the AB-type process, both N-SiO x and T-SiO 2 exhibit pronounced nucleation delay. N-SiO x shows earlier nucleation and higher nucleation density than T-SiO 2 , plausibly attributed to differences in surface hydroxyl populations. Similar temperature-dependent phase evolution is observed on both substrates, with mixed Ru and RuO 2 phases at 250 °C and predominantly metallic Ru at 300 °C accompanied by increased morphological roughening. In contrast, incorporating an H 2 subpulse (ABC-type) mitigates nucleation delay, particularly on hydroxyl-deficient T-SiO 2 , thereby reducing the substratedependent disparity observed under AB cycling. Moreover, RuO 2 formation is suppressed even at 250 °C on both substrates, shifting growth toward more metallic Ru with reduced resistivity (∼20 μΩ·cm at ∼ 20 nm on N-SiO x ). These trends suggest that H 2 influences the surface reaction pathway, contributing to enhanced metallic stabilization and altered early stage growth kinetics. Overall, this work clarifies the coupled roles of substrate chemistry and reactant-sequence design in governing Ru nucleation and early stage film evolution, providing insight relevant to next-generation interconnect integration and future area-selective deposition strategies.

36 MATERIALS SCIENCE↗