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At least 289 records · Page 16

On the importance of excited state species in low pressure capacitively coupled plasma argon discharges

In the past three decades, first principles-based fully kinetic particle-in-cell Monte Carlo collision (PIC/MCC) simulations have been proven to be an important tool for the understanding of the physics of low pressure capacitive discharges. However, there is a long-standing issue that the plasma density determined by PIC/MCC simulations shows quantitative deviations from experimental measurements, even in argon discharges, indicating that certain physics may be missing in previous modeling of the low pressure radio frequency (rf) driven capacitive discharges. In this work, we report that the energetic electron-induced secondary electron emission (SEE) and excited state atoms play an important role in low pressure rf capacitive argon plasma discharges. The ion-induced secondary electrons are accelerated by the high sheath field to strike the opposite electrode and produce a considerable number of secondary electrons that lead to additional ionizing impacts and further increase of the plasma density. Importantly, the presence of excited state species even further enhances the plasma density via excited state neutral and resonant state photon-induced SEE on the electrode surface. The PIC/MCC simulation results show good agreement with the recent experimental measurements in the low pressure range (1–10 Pa) that is commonly used for etching in the semiconductor industry. At the highest pressure (20 Pa) and driving voltage amplitudes 250 and 350 V explored here, the plasma densities from PIC/MCC simulations considering excited state neutrals and resonant photon-induced SEE are quantitatively higher than observed in the experiments, requiring further investigation on high pressure discharges.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Plasma observations near Neptune - Initial results from Voyager 2

The plasma science experiment on Voyager 2 made observations of the plasma environment in Neptune's magnetosphere and in the surrounding solar wind. Because of the large tilt of the magnetic dipole and fortuitous timing, Voyager entered Neptune's magnetosphere through the cusp region, the first cusp observations at an outer planet. Thus the transition from the magnetosheath to the magnetosphere observed by Voyager 2 was not sharp but rather appeared as a gradual decrease in plasma density and temperature. The maximum plasma density observed in the magnetosphere is inferred to be 1.4 per cubic centimeter (the exact value depends on the composition), the smallest observed by Voyager in any magnetosphere. The plasma has at least two components; light ions (mass, 1 to 5) and heavy ions (mass, 10 to 40), but more precise species identification is not yet available. Most of the plasma is concentrated in a plasma sheet or plasma torus and near closest approach to the planet. A likely source of the heavy ions is Triton's atmosphere or ionosphere, whereas the light ions probably escape from Neptune. The large tilt of Neptune's magnetic dipole produces a dynamic magnetosphere that changes configuration every 16 hours as the planet rotates.

Belcher, J. W.↗

Multi-cathode unbalanced magnetron sputtering systems

Ion bombardment of a growing film during deposition is necessary in many instances to ensure a fully dense coating, particularly for hard coatings. Until the recent advent of unbalanced magnetron (UBM) cathodes, reactive sputtering had not been able to achieve the same degree of ion bombardment as other physical vapor deposition processes. The amount of ion bombardment of the substrate depends on the plasma density at the substrate, and in a UBM system the amount of bombardment will depend on the degree of unbalance of the cathode. In multi-cathode systems, the magnetic fields between the cathodes must be linked to confine the fast electrons that collide with the gas atoms. Any break in this linkage results in electrons being lost and a low plasma density. Modeling of the magnetic fields in a UBM cathode using a finite element analysis program has provided great insight into the interaction between the magnetic fields in multi-cathode systems. Large multi-cathode systems will require very strong magnets or many cathodes in order to maintain the magnetic field strength needed to achieve a high plasma density. Electromagnets offer the possibility of independent control of the plasma density. Such a system would be a large-scale version of an ion beam enhanced deposition (IBED) system, but, for the UBM system where the plasma would completely surround the substrate, the acronym IBED might now stand for Ion Blanket Enhanced Deposition.

Sproul, William D.↗

Investigation of plasma instabilities in the Polar cusp

During the last six months, our efforts concentrated on studying the excitation of electromagnetic waves in the whistler frequency range by an anisotropic electron beam. A paper entitled 'Electron Cyclotron Wave Generation by Relativistic Electrons' was submitted to Journal of Geophysical Research and was accepted for publication. This paper is in collaboration with Dr. M. L. Goldstein at Goddard Space Flight Center. It was shown that an anisotropic electron beam (or gyrating electron beam) is capable of generating electron cyclotron waves with frequency from above to below the electron plasma frequency in a low density plasma. This instability may account for the observed Z mode and the electromagnetic component of auroral hiss in the Earth's polar region. The abstract of this paper is enclosed. For a high density plasma in which the electron plasma frequency is considerably higher than the electron cyclotron frequency, a new left-hand electromagnetic wave at whistler frequencies, which is also driven unstable by an anisotropic electron beam, was found. The basic notion of this new instability is the significant change of the dispersion equation due to the contribution of the beam component, which can shift the usual right hand whistler waves into left hand waves.

Wong, H. K.↗

Transpolar Pc1 Wave Ducting: Swarm, DMSP, and Ground Observations

Alfvén mode Pc1 waves undergo mode conversion to the fast mode due to induced Hall current in the ionosphere. The fast mode Pc1 waves are trapped and propagate across the magnetic field through the ionospheric waveguide. This process is called Pc1 wave ducting (PWD). Ducting is expected to be in any direction, but most of the existing literature investigated only PWDs toward the equator. In this paper, we report the rare observations of PWD propagating from sub-auroral latitudes and pervading the polar cap using Swarm satellites, ground magnetometers, and Defense Meteorological Satellite Program (DMSP) satellites. We first identify the injection region of Pc1 wave where localized broadband transverse waves, isolated aurora, and energetic proton precipitations are concurrently observed. Then, we compare ducting characteristics in the ionosphere between the two hemispheres. For the three events investigated here, PWDs in the Southern Hemisphere (SH) pervaded the polar cap while Pc1 waves in the Northern Hemisphere (NH) did not. This hemispheric asymmetry is attributed to the plasma density in the SH sufficient to form the Pc1 waveguide. However, a sharp plasma density gradient on the propagation path still interrupts the ducting even in higher plasma density (> 10 5 cm -3 ) regions. The observation of two intersecting Swarm satellites indicates the PWD is not only elongated meridionally, but also can have a significant zonal extent beyond that of the injection region.

Hyangpyo Kim↗

Predictive Modeling in Plasma Reactor and Process Design

Research continues toward the improvement and increased understanding of high-density plasma tools. Such reactor systems are lauded for their independent control of ion flux and energy enabling high etch rates with low ion damage and for their improved ion velocity anisotropy resulting from thin collisionless sheaths and low neutral pressures. Still, with the transition to 300 mm processing, achieving etch uniformity and high etch rates concurrently may be a formidable task for such large diameter wafers for which computational modeling can play an important role in successful reactor and process design. The inductively coupled plasma (ICP) reactor is the focus of the present investigation. The present work attempts to understand the fundamental physical phenomena of such systems through computational modeling. Simulations will be presented using both computational fluid dynamics (CFD) techniques and the direct simulation Monte Carlo (DSMC) method for argon and chlorine discharges. ICP reactors generally operate at pressures on the order of 1 to 10 mTorr. At such low pressures, rarefaction can be significant to the degree that the constitutive relations used in typical CFD techniques become invalid and a particle simulation must be employed. This work will assess the extent to which CFD can be applied and evaluate the degree to which accuracy is lost in prediction of the phenomenon of interest; i.e., etch rate. If the CFD approach is found reasonably accurate and bench-marked with DSMC and experimental results, it has the potential to serve as a design tool due to the rapid time relative to DSMC. The continuum CFD simulation solves the governing equations for plasma flow using a finite difference technique with an implicit Gauss-Seidel Line Relaxation method for time marching toward a converged solution. The equation set consists of mass conservation for each species, separate energy equations for the electrons and heavy species, and momentum equations for the gas. The sheath is modeled by imposing the Bohm velocity to the ions near the walls. The DSMC method simulates each constituent of the gas as a separate species which would be analogous in CFD to employing separate species mass, momentum, and energy equations. All particles including electrons are moved and allowed to collide with one another with the stipulation that the electrons remain tied to the ions consistent with the concept of ambipolar diffusion. The velocities of the electrons are allowed to be modified during collisions and are not confined to a Maxwellian distribution. These benefits come at a price in terms of computational time and memory. The DSMC and CFD are made as consistent as possible by using similar chemistry and power deposition models. Although the comparison of CFD and DSMC is interesting, the main goal of this work is the increased understanding of high-density plasma flowfields that can then direct improvements in both techniques. This work is unique in the level of the physical models employed in both the DSMC and CFD for high-density plasma reactor applications. For example, the electrons are simulated in the present DSMC work which has not been done before for low temperature plasma processing problems. In the CFD approach, for the first time, the charged particle transport (discharge physics) has been self-consistently coupled to the gas flow and heat transfer.

Hash, D. B.↗

Arcing and discharges in high-voltage subsystems of Space Station

Arcing and other types of electrical discharges are likely to occur in high-voltage subsystems of the Space Station. Results from ground and space experiments on the arcing of solar cell arrays are briefly reviewed, showing that the arcing occurs when the conducting interconnects in the arrays are at negative potential above a threshold, which decreases with the increasing plasma density. Furthermore, above the threshold voltages the arcing rate increases with the plasma density. At the expected operating voltages (approximately 200 V) in the solar array for the space station, arcing is expected to occur even in the ambient ionospheric plasma. If the ionization of the contaminants increases the plasma density near the high-voltage systems, the adverse effects of arcing on the solar arrays and the space station are likely to be enhanced, In addition to arcing other discharge processes are likely to occur in high-voltage subsystems. For example, Paschen discharge is likely to occur when the neutral density N sub n greater that 10 to the 12th cu cm, the corresponding neutral pressure P greater than 3 x 10 to the -5 Torr.

Singh, N.↗

First impurity powder injection experiments in LHD

Injection of impurities in the form of sub-millimeter powder grains is performed for the first time in the Large Helical Device (LHD) plasma, employing the Impurity Powder Dropper (IPD) [A. Nagy et al., RSI 2018], developed and built by PPPL. Controlled amounts of boron (B) and boron nitride (BN) powder are injected into the helical plasma. Visible camera imaging, UV and charge exchange spectroscopy measurements show that the injected impurities effectively penetrate into the plasma in two different magnetic configurations.The prompt effects of the impurities on the plasma are characterized as the injection rate is scanned. The injected impurities provide a supplemental electron source, causing the plasma density to increase, together with the radiated power. Beneficial effects on the confined plasma temperature are observed at low plasma densities, due to an increased efficiency in NBI power absorption. For $n_{e,av}<10^{19}m^{-3}$ the powder grains penetrate deeper into the plasma, as they can be less effectively deflected by the plasma flow in the divertor leg, which they have to cross first as they are injected from the top of the machine.In this case, the created B ions are observed to move outwards from UV spectroscopy and charge exchange measurements, due to the outwards direction of the radial electric field. This makes low density plasmas a better candidate for powder boronization techniques.

Boron↗

Lightning driven EMP in the upper atmosphere

Large lightning discharges can drive electromagnetic pulses (EMP) that cause breakdown of the neutral atmosphere between 80 and 95 km leading to order of magnitude increases in the plasma density. The increase in the plasma density leads to increased reflection and absorption, and limits the pulse strength that propagates higher into the ionosphere.

Rowland, H. L.↗

Initial Results of DC Electric Fields, Associated Plasma Drifts, Magnetic Fields, and Plasma Waves Observed on the C/NOFS Satellite

Initial results are presented from the Vector Electric Field Investigation (VEFI) on the Air Force Communication/Navigation Outage Forecasting System (C/NOFS) satellite, a mission designed to understand, model, and forecast the presence of equatorial ionospheric irregularities. The VEFI instrument includes a vector DC electric field detector, a fixed-bias Langmuir probe operating in the ion saturation regime, a flux gate magnetometer, an optical lightning detector, and associated electronics including a burst memory. Compared to data obtained during more active solar conditions, the ambient DC electric fields and their associated E x B drifts are variable and somewhat weak, typically < 1 mV/m. Although average drift directions show similarities to those previously reported, eastward/outward during day and westward/downward at night, this pattern varies significantly with longitude and is not always present. Daytime vertical drifts near the magnetic equator are largest after sunrise, with smaller average velocities after noon. Little or no pre-reversal enhancement in the vertical drift near sunset is observed, attributable to the solar minimum conditions creating a much reduced neutral dynamo at the satellite altitude. The nighttime ionosphere is characterized by larger amplitude, structured electric fields, even where the plasma density appears nearly quiescent. Data from successive orbits reveal that the vertical drifts and plasma density are both clearly organized with longitude. The spread-F density depletions and corresponding electric fields that have been detected thus far have displayed a preponderance to appear between midnight and dawn. Associated with the narrow plasma depletions that are detected are broad spectra of electric field and plasma density irregularities for which a full vector set of measurements is available for detailed study. Finally, the data set includes a wide range of ELF/VLF/HF oscillations corresponding to a variety of plasma waves, in particular banded ELF hiss, whistlers, and lower hybrid wave turbulence triggered by lightning-induced sferics. The VEFI data represents a new set of measurements that are germane to numerous fundamental aspects of the electrodynamics and irregularities inherent to the Earth's low latitude ionosphere.

Pfaff, R.↗

Proton imaging of high-energy-density laboratory plasmas

Proton imaging has become a key diagnostic for measuring electromagnetic fields in high-energy-density (HED) laboratory plasmas. Compared to other techniques for diagnosing fields, proton imaging is a measurement that can simultaneously offer high spatial and temporal resolution and the ability to distinguish between electric and magnetic fields without the protons perturbing the plasma of interest. Consequently, proton imaging has been used in a wide range of HED experiments, from inertial-confinement fusion to laboratory astrophysics. An overview is provided on the state of the art of proton imaging, including a discussion of experimental considerations like proton sources and detectors, the theory of proton-imaging analysis, and a survey of experimental results demonstrating the breadth of applications. As a result, topics at the frontiers of proton-imaging development are also described, along with an outlook on the future of the field.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DC Electric Fields, Associated Plasma Drifts, and Irregularities Observed on the C/NOFS Satellite

Results are presented from the Vector Electric Field Investigation (VEFI) on the Air Force Communication/Navigation Outage Forecasting System (C/NOFS) satellite, a mission designed to understand, model, and forecast the presence of equatorial ionospheric irregularities. The VEFI instrument includes a vector DC electric field detector, a fixed-bias Langmuir probe operating in the ion saturation regime, a flux gate magnetometer, an optical lightning detector, and associated electronics including a burst memory. Compared to data obtained during more active solar conditions, the ambient DC electric fields and their associated E x B drifts are variable and somewhat weak, typically < 1 mV/m. Although average drift directions show similarities to those previously reported, eastward/outward during day and westward/downward at night, this pattern varies significantly with longitude and is not always present. Daytime vertical drifts near the magnetic equator are largest after sunrise, with smaller average velocities after noon. Little or no pre-reversal enhancement in the vertical drift near sunset is observed, attributable to the solar minimum conditions creating a much reduced neutral dynamo at the satellite altitude. The nighttime ionosphere is characterized by larger amplitude, structured electric fields, even where the plasma density appears nearly quiescent. Data from successive orbits reveal that the vertical drifts and plasma density are both clearly organized with longitude. The spread-F density depletions and corresponding electric fields that have been detected thus far have displayed a preponderance to appear between midnight and dawn. Associated with the narrow plasma depletions that are detected are broad spectra of electric field and plasma density irregularities for which a full vector set of measurements is available for detailed study. The VEFI data represents a new set of measurements that are germane to numerous fundamental aspects of the electrodynamics and irregularities inherent to the Earth s low latitude ionosphere.

Pfaff, R.↗

Hysteresis between gas breakdown and plasma discharge

In direct-current (DC) discharge, it is well known that hysteresis is observed between the Townsend (gas breakdown) and glow regimes. Forward and backward voltage sweep is performed using a one-dimensional particle-in-cell Monte Carlo collision (PIC-MCC) model considering a ballast resistor. When increasing the applied voltage after reaching the breakdown voltage (V b ), transition from Townsend to glow discharges is observed. When decreasing the applied voltage from the glow regime, the discharge voltage (V d ) between the anode–cathode gap can be smaller than the breakdown voltage, resulting in a hysteresis, which is consistent with experimental observations. Next, the PIC-MCC model is used to investigate the self-sustaining voltage (V s ) in the presence of finite initial plasma densities between the anode and cathode gap. It is observed that the self-sustaining voltage coincides with the discharge voltage obtained from the backward voltage sweep. In addition, the self-sustaining voltage decreases with increased initial plasma density and saturates above a certain initial plasma density, which indicates a change in plasma resistivity. The decrease in self-sustaining voltage is associated with the electron heat loss at the anode for the low pd (rarefied) regime. In the high pd (collisional) regime, the ion energy loss toward the cathode due to the cathode fall and the inelastic collision loss of electrons in the bulk discharge balance out. Finally, it is demonstrated that the self-sustaining voltage collapses to a singular value, despite the presence of a initial plasma, for microgaps when field emission is dominant, which is also consistent with experimental observations.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Characterisation of divertor detachment onset in JET-ILW hydrogen, deuterium, tritium and deuterium–tritium low-confinement mode plasmas

Measurements of the ion currents to and plasma conditions at the low-field side (LFS) divertor target plate in low-confinement mode plasmas in the JET ITER-like wall materials configuration show that the core plasma density required to detach the LFS divertor plasma is independent of the hydrogenic species protium, deuterium and tritium, and a 40 %/60 % deuterium–tritium mixture. This observation applies to a divertor plasma configuration with the LFS strike line connected to the horizontal part of the LFS divertor chosen because of its superior diagnostic coverage. The finding is independent of the operational status of the JET cryogenic pump. The electron temperature (T e ) at the LFS strike line was markedly reduced from 25 eV to 5 eV over a narrow range of increasing core plasma density, and observed to be between 2 eV and 3 eV at the onset of detachment. The electron density (n e ) peaks across the LFS plasma when T e at the target plate is 1 eV, and spatially moves to the X-point for higher core densities. The density limit was found approximately 20 % higher in protium than in tritium and deuterium–tritium plasmas.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Investigation of possible lower hybrid emission from the NASA Lewis bumpy torus plasma

Radio frequency emission has been detected near the power hybrid frequency of a bumpy torus plasma by using a responsive detection system that consists of a spectrum analyzer and a 50 ohm miniature coaxial antenna concentrically located in a re-entrant quartz tube. The frequency shift of a broad emission peak was monitored as a function of background pressure, electrode voltage, and the strength of the dc magnetic field. Simultaneous measurements of the average plasma density were made with a polarization diplexing microwave interferometer. The information derived from the experiment is discussed with particular reference to the following: (1) whether the emissions are dominated by atomic or molecular species of deuterium; (2) the strength of the dc magnetic field in the emitting region; (3) the geometric location of the emitting region of the plasma; (4) comparison of the lower hybrid plasma density with the average plasma density; and (5) relation of ion spoke geometry to lower hybrid emission.

Mallavarpu, R.↗

Electric field measurements of DC and long wavelength structures associated with sporadic-E layers and QP radar echoes

Electric field and plasma density data gathered on a sounding rocket launched from Uchinoura Space Center, Japan, reveal a complex electrodynamics associated with sporadic-E layers and simultaneous observations of quasiperiodic radar echoes. The electrodynamics are characterized by spatial and temporal variations that differed considerably between the rocket's up-leg and down-leg traversals of the lower ionosphere. Within the main sporadic-E layer (95- 110 km) on the up-leg, the electric fields were variable, with amplitudes of 2 4 mV1m that changed considerably within altitude intervals of 1-3 km. The identification of polarization electric fields coinciding with plasma density enhancements and/or depletions is not readily apparent. Within this region on the down-leg, however, the direction of the electric field revealed a marked change that coincided precisely with the peak of a single, narrow sporadic-E plasma density layer near 102.5 km. This shear was presumably associated with the neutral wind shear responsible for the layer formation. The electric field data above the sporadic-E layer on the upleg, from 110 km to the rocket apogee of 152 km, revealed a continuous train of distinct, large scale, quasi-periodic structures with wavelengths of 10-15 km and wavevectors oriented between the NE-SW quadrants. The electric field structures had typical amplitudes of 3-5 mV/m with one excursion to 9mV/m, and in a very general sense, were associated with perturbations in the plasma density. The electric field waveforms showed evidence for steepening and/or convergence effects and presumably had mapped upwards along the magnetic field from the sporadic-E region below.

Pfaff, R.↗

Effects of the Wavelength of the Plasma Waves on Cross-Field Electron Transport in Partially Magnetized Plasmas

In this article, the effects of increasing plasma density on the cross-field electron transport driven by kinetic instabilities are investigated. A 2-D collisionless particle-in-cell (PIC) simulation is performed on cases with only singly charged ions and with a mixture of singly and doubly charged ions, at different levels of plasma density. It is observed using the PIC simulations that the level of plasma density affects the plasma waves that are driven by the microinstabilities, including the electron cyclotron drift instability (ECDI) and ion–ion two-stream instability (IITSI). Here, the simulation results suggest that the enhancement of cross-field electron transport is correlated with the excitation of smaller wavelength modes and the increased amplitude of the plasma waves.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗