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DOE OSTI2024

Enhancing predictive capabilities in fusion burning plasmas through surrogate-based optimization in core transport solvers

Abstract This work presents the PORTALS framework (Rodriguez-Fernandez et al 2022 Nucl. Fusion 62 076036), which leverages surrogate modeling and optimization techniques to enable the prediction of core plasma profiles and performance with nonlinear gyrokinetic simulations at significantly reduced cost, with no loss of accuracy. The efficiency of PORTALS is benchmarked against standard methods, and its full potential is demonstrated on a unique, simultaneous 5-channel (electron temperature, ion temperature, electron density, impurity density and angular rotation) prediction of steady-state profiles in a DIII-D ITER Similar Shape plasma with GPU-accelerated, nonlinear CGYRO (Candy et al 2016 J. Comput. Phys. 324 73–93). This paper also provides general guidelines for accurate performance predictions in burning plasmas and the impact of transport modeling in fusion pilot plants studies.

Physics↗

DOE OSTI2020

Innovative rail transport of a supersized land-based wind turbine blade

Wind turbine blade logistic providers are being challenged with escalating costs and routing complexities as one-piece blade approach lengths of 75 m in various regions of the U.S. land-based market. New lower cost solutions are needed to enable further reductions in the levelized cost of energy (LCOE) and continued market expansion. In this paper, a novel method of using existing U.S. rail infrastructure to deploy 100-m, one-piece blades to U.S. land-based wind sites is numerically investigated. The study removes the constraint that blades must be kept rigid during transport, and it allows bending to keep blades within a clearance profile while navigating horizontal and vertical curvatures. Novel system optimization and blade design processes consider blade structural constraints and rail logistic constraints in parallel to develop a highly flexible, rail-transportable blade. Results indicate maximum deployment potential in the Interior region of the United States and limited deployment potential in other regions. The study concludes that innovative rail transportation solutions combined with advanced rotor technologies can provide a feasible alternative to segmentation and support continued LCOE reductions in the U.S. land-based wind energy market.

17 WIND ENERGY↗

DOE OSTI2023

Multiscale Electrothermal Design of a Modular Multilevel Converter for Medium-Voltage Grid-Tied Applications

As a key feature of modular multilevel converters (MMCs), a large number of semiconductor devices are employed in the converter and distributed over a stack of submodules. Each submodule has a strict temperature limit that imposes constraints on the operating range of the converter. Different loading conditions/losses in the submodules lead to unavoidable temperature variations inside the MMC, which consequently affect the system-level performance and reliability. This paper is focused on the electrothermal analysis and design of a medium-voltage silicon carbide (SiC)-based MMC system, from submodule power semiconductors to the overall MMC system integration of multiple submodules, for grid-connected applications. Loss calculations are performed to estimate the cooling requirements and aid thermal design at different levels. The performance of a forced-air cooling approach is analyzed within a numerical modeling framework. Maximum temperature of the SiC power modules is predicted using numerical tools. Thermal design of the MMC cabinet with various arrangements of air inlet(s) and outlet(s) is investigated and compared from a cooling performance perspective. A fully resolved model of the arrangement that yields optimal results is developed to accurately predict the temperature profile of the essential components in the submodules.

computational fluid dynamics↗

DOE OSTI2022

Friction Stir Processed Repair Welding of Dry Storage Canisters and Mitigation Strategies: Effect of Engineered Barrier Layer on Environmental Degradation

The proposed project aims to develop a friction sir based repair technique to heal cracks of stainless steel dry storage canisters (DSCs), created by the effect of stress corrosion cracking (SCC). In real service conditions, the welded parts of the canisters become prone to SCC under exposure to aggressive chemical environment. The focus of the project is on developing a mitigation strategy that can be implemented for countering SCC in DSCs following a two-pronged approach: (i) apply friction stir processing (FSP) as a crack repair technique while creating compressive residual stresses at the canister material surface, thus improving resistance against SCC; (ii) add molybdenum and/or nitrogen by friction stir based alloying process to create compositions that improve pitting resistance and thus enhance resistance against SCC. The specific project objectives are listed below: • Investigate FSW of 304L SS a potential repair welding technique of dry storage canisters; • Optimize the FSW parameters to introduce surface compressive stress profiles in the weldments; • Develop a FSP method to surface alloy the 304L with nitrogen and Mo by adding CrN and Mo powders; • Evaluate the surface compressive residual stress profile during FSW and FSP processes; • Evaluate the localized corrosion resistance of the FSW and FSP samples as a function of temperature, chloride concentration, and surface alloy composition; • Evaluate the SCC behavior of the FSW and FSP samples as a function of stress, chloride concentration, and temperature at different surface chemistries and induced residual stress profiles.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2025

Optimizing Energy For Delivery Drones - A Comprehensive Tool Set For Drone Energy Calculation And Drone Fleet Optimization

This tool is intended to be deployed for potential customers to compare the energy profiles across various drone types/classes. The primary factors considered were design of the drone, the weight of the drone, the weight of the payload, and how the drone is flown. It has energy comparison metrics like "Drone (A) vs Drone (B) ", "Drone vs Ground Vehicle", "Drone Energy from delivery via landing versus hovering". It also includes the ability to determine the number of drones and batteries needed to optimally deliver goods from a chosen location to a set of destinations.

Mendadhala, Rohit [Idaho National Laboratory (INL)↗

DOE OSTI2026

Routes to high-performance operation in Wendelstein 7-X: turbulence suppression with shaping of the density profile

Steep density gradients generally lead to improved plasma performance in the neoclassically optimized stellarator W7-X. This is evident in the global energy confinement time as well as in the ion temperature and can be explained by a strong reduction of the ion temperature gradient turbulence. Such conditions can experimentally be realized by several methods: injection of cryogenic hydrogen pellets, appropriate combination of neutral beam and electron cyclotron resonance heating (ECRH) and, in some cases, with low power of ECRH after preconditioning of the first wall. The duration of the improved phases is determined by the ability to sustain the steep density gradient, by technical limitations of the involved systems and, eventually, by the plasma stability. This paper gives an overview of relevant experimental results and presents example discharges where the improved confinement conditions could be extended to multiple seconds: up to 4 s using neutral beam injection and from 14 to 40 s with steady state pellet injection. In these plasmas the turbulent thermal diffusivity is reduced by a factor of 3 to 4 in a broad radial range, which allows high ion temperatures of up to 3 keV at the densities of about 1.5 • 10 20 m −3 .

high performance plasma↗

DOE OSTI2022

Layer Time Control for Large Scale Additive Manufacturing Using High Performance Computing

This work proposes to optimize an additive manufacturing AM process to reduce energy and printing cost. The polymer AM process is inherently dependent on the time-temperature history of each layer to maintain geometric tolerances and mechanical integrity. Our preliminary study shows that regression-based layer time control model using thermal images could result in up to 30% build time reduction for simple geometries. This proposed work would use high-performance computing (HPC) to couple the data-driven model with thermal simulation for better predicting layer temperature profiles, improving throughput of large-scale additive manufacturing, and reducing its energy cost. We have developed a method to optimize a layer deposition time (a.k.a. layer time) for large-scale AM via physics-based simulations. A long layer time leads to an over-cooled surface on which a new layer is deposited, and therefore, it may result in a weak bonding or debonding between layers, cracking, or warping. A short layer time leads to a high temperature of the structure due to insufficient cooling, and therefore, the structure may not be stiff enough and may collapse during manufacturing. Therefore, it is important to estimate the optimal layer time in additive manufacturing for a high-quality product. The temperature of a top layer right before deposition is recommended to be slightly higher than the glass temperature of the material. A temperature cooling was approximated to an exponential function of time, and the optimized layer time was obtained based on a target temperature while maintaining a minimal printing time. The material used is carbon fiber-reinforced polycarbonate (CF/PC), and the large-scale deposition system used is LSAM TM from Thermwood Corporation. Three different layer time cases were used for experiments, and a series of thermal images were obtained via an infra-red (IR) camera during the entire AM processes. AM process simulations were performed using a finite element method and the temperature profiles from the simulation were in good agreements with those from experiments. The layer time optimization was performed based on the temperature profiles from the simulations. A layer temperature with the optimal layer time was confirmed as the target temperature through simulation. In addition to the development of a layer time optimization method, we have developed a numerical framework for AM simulation with element activations in sync with toolpath, based on an open source finite element framework, DEAL.II. A major portion of this work was presented at SAMPE 2022 Conference and Exhibition on May 2022, and published in Proceedings of SAMPE 2022.

42 ENGINEERING↗

DOE OSTI2026

Relaxations of the steady optimal gas flow problem for a non-Ideal gas

Natural gas ranks second in U.S. primary energy consumption. Because most production sites are remote, gas must be transported through pipeline networks equipped with compressors, valves, and other components. For both economic efficiency and system reliability, it is desirable to operate these networks optimally. The governing physics across pipeline components entails nonlinear, non-convex equality and inequality constraints, and the most general steady-flow operations problem is a Mixed-Integer Nonlinear Program (MINLP).This work focuses on one such steady-flow problem-the Optimal Gas Flow (OGF) for a natural gas pipeline network-which minimizes production cost subject to the steady-flow physics. For day-to-day operations, the ability to quickly compute a globally optimal solution and a strong lower bound for varying demand profiles is crucial. A promising strategy is to build tight relaxations of the OGF’s nonlinear constraints. However, many nonlinearities arising from non-ideal equations of state either lack relaxations or have relaxations that do not scale to realistic network sizes. We address this gap by combining recent advances in polyhedral relaxations for univariate functions to construct tight, computationally efficient relaxations of the OGF with a non-ideal equation of state. These relaxations solve within seconds on a standard laptop. In conclusion, we demonstrate their quality through extensive numerical experiments on very large-scale test networks from the literature and find that the proposed approach proves optimality in 92% of tested instances.

03 NATURAL GAS↗

DOE OSTI2026

Harnessing Ocean Thermal Gradients Using Thermoelectric Based Submersibles for Ocean Power Applications

The urgent need for energy solutions in marine environments has accelerated the development of innovative technologies capable of leveraging natural resources for power generation. This study introduces a buoyancy-driven submersible system designed to harness ocean thermal gradients using thermoelectric generators (TEGs) and phase change materials (PCMs). The technology aims to provide autonomous power to offshore aquaculture farms, unmanned underwater vehicles (UUVs), offshore platform illumination, and ocean sensors, significantly reducing dependence on fossil fuels. Ocean thermal gradients, especially prevalent in mid-latitude regions, exhibit temperature differences between surface and deep waters ranging from 7 degrees Celsius to 30 degrees Celsius depending on seasonal variations. The proposed submersible technology utilizes TEGs to convert thermal energy from these gradients into electrical power, generating between 0.2 and 0.5 watts, while PCMs are employed to store and regulate this energy, ensuring a stable and continuous power supply. The buoyancy-driven mechanism of the submersible enhances its capability to navigate through varying depths, optimizing its exposure to different thermal gradients and maximizing energy harvesting. The performance of this submersible system is analyzed through detailed thermodynamic assessments and computational fluid dynamics (CFD) modeling focused on heat transfer. These analyzes consider real-world ocean temperature profiles and seek to refine the interaction between TEGs and PCMs to optimize energy extraction. The evaluation encompasses several key performance metrics, including power output and energy efficiency. Results confirm the potential of this innovative technology to provide a continuous and reliable power source for marine applications. By demonstrating the feasibility of using ocean thermal gradients for energy generation, this study contributes to the broader efforts of innovation in energy technologies for harsh, remote marine environments. The implementation of such promises is significant advancements in the autonomy of marine operations. The ongoing research will further investigate scalability ensuring that the system can be effectively adapted to various marine settings and operational demands.

16 TIDAL AND WAVE POWER↗

DOE OSTI2023

Coupled Target-Beam-Moderator Optimization for the Second Target Station

This report describes the results for a coupled target-beam-moderator optimization analysis for the Second Target Station (STS) at ORNL's Spallation Neutron Source. This study is a continuation of the optimization analysis for the moderators in the preliminary design of STS performed in 2022. In the 2022 analysis the dimensions of the moderators are parameterized, while the target and the proton beam profile are kept constant. In this analysis the target height and the proton beam profile are added as parameters. This allows to study the coupled effects of changing target, moderator and beam dimensions. Similar to the 2022 analysis, this work is performed with an automated optimization workflow that uses the optimization toolbox DAKOTA, parameterized geometries in CREO and SpaceClaim, the unstructured mesh generation in Attila4MC, and the particle transport code MCNP6.2©. This workflow enables an efficient optimization using high-fidelity geometries. The main conclusions of this analysis are the following: • Coupled beam-target-moderator optimization provides a few additional percent performance gain over stand-alone moderator optimization. • The moderator performance is not very sensitive to the target height (between ≈60 and ≈80 mm) as long as the beam profile is chosen adequately. • The moderator performance is sensitive to the choice of beam spatial standard deviations, even when the footprint is kept constant. • The optimal moderator radius is the same for a beam footprint of 30 cm 2 , 62.5 cm 2 , and 90 cm 2 . Also the slope of the super-gaussian beam profile does not significantly impact the optimal moderator radius. • The optimal parameters and sensitivities are very similar to the 2022 optimization analysis. These results only indicate a a difference in the optimal radius of the cylindrical moderator, however, this has been corrected in the final design moderator optimization. The main purpose of this report is to document the simulations, results and lessons learned. The most impactful results are summarized in. We also note that the target geometry used in this work is not the final design.

43 PARTICLE ACCELERATORS↗

DOE OSTI2022

Simulation and Optimization of Volatile Fatty Acid Upgrading Strategies for Sustainable Transportation Fuel Production

Underutilized wet waste is a promising feedstock for production of carbon-neutral or carbon-negative liquid transportation fuels. Arrested methanogenesis of wet wastes by microbes, which produces mixtures of C2-C8 carboxylic acids (volatile fatty acids, VFAs), is practiced industrially at a pilot scale and the VFA products can be catalytically upgraded to molecules suitable for use as transportation fuels (alcohols and alkanes) via sequential ketonization and hydrogenation, both steps of which have been demonstrated with high (>90%) yield at the lab scale. We present in this work a simulation-based decision-making framework which evaluates upgrading strategies of VFAs to alcohol- and hydrocarbon-based neat and blended diesel, jet, and gasoline fuels. The processes utilize sequential upgrading steps (ketonization and hydrogenation) accompanied by one distillation step (either separating VFAs before ketonization or alcohols after ketone hydrogenation) to form two liquid streams: a light alcohol stream best suited as a light-duty fuel and a heavy alcohol or hydrocarbon stream best suited as a diesel or jet fuel. Suitability of the liquid products as transportation fuels and maximum blending levels with petrofuels comes from simulation of critical fuel properties (boiling point, flash point, lower heating value, viscosity, melting point, water solubility, and cetane/octane number). Catalytic upgrading steps and fuel property mixing models used by the simulation are experimentally validated. We demonstrate the flexibility of the decision-making algorithm by evaluating processing scenarios for experimentally-observed VFA profiles with varied carbon chain length distributions. Processing scenarios are optimized for either maximum total renewable carbon utilization or production of heavy-duty (jet or diesel) fuels. We evaluate the economic viability and CO2 emissions of each proposed upgrading scenario using techno-economic and life cycle analyses. The decision-making framework developed in this work can also be used to down-select promising strategies for upgrading of other bio-based feedstocks to sustainable fuels and chemicals.

aviation fuel↗

DOE OSTI2020

Optimal Energy Storage Schedules for Load Leveling and Ramp Rate Control in Distribution Systems

Continued integration of distributed energy resources (DERs) into the grid, such as solar PVs, at a large-scale, contributes into the famous Duck Curve. New DER management algorithms are therefore deemed necessary to alleviate rapid variations within net load profiles of distribution systems. Herein this paper proposes a process to determine the optimal energy storage schedules for leveling the distribution circuit feederhead net load. A series of sensitivity analyses shows how the proposed method can be used to determine the optimal energy storage schedules with different capacities, state of charge requirements, and net load ramp rate limitations.

25 ENERGY STORAGE↗

DOE OSTI2024

Nuclear Thermal Energy Storage Configurations for Industrial Combined Heat and Power Supply: Conceptual Study and Engineering Designs

The industries examined in this report primarily rely on moderate-temperature heat provided by gas- or coal-fired boilers and combined heat and power (CHP) plants, delivered through standard process steam systems. High-temperature energy demands are often industry-specific and typically exceed the capabilities of high-temperature gas-cooled reactors (HTGRs). While it is technically feasible to replace process steam from fossil-based heat sources with nuclear energy, certain industries, such as methanol production and pulp and paper, face technoeconomic challenges in integrating nuclear energy without major changes or a technological shift. This is mainly due to the limited external energy demand remaining after the use of internal byproducts, waste heat recovery, and simple efficiency improvements. Achieving full decarbonization of these processes with nuclear energy would require significant technological advancements, involving experimental technology and substantial investments, making widespread adoption in existing industrial plants unlikely in the near term. This study reviews TES options in the context of enabling a flexible CHP supply while maintaining a steady nuclear heat input. Heat storage systems that interface between the reactor primary fluid and the CHP system offer superior performance and flexibility. Specifically, steam extraction downstream of the reheater with a two-tank molten-salt TES appears as the best solution regarding thermodynamic system benefits and system drawbacks. Using selected system configurations, a conceptual design of an industrial energy park was developed for industries with varying energy demands, such as steel production plants utilizing electric arc furnaces (EAFs) and chemical plants, as well as for those with constant energy demands, like petroleum refineries. This design highlights the capabilities of TES and explores its potential business cases. The study also conceptually develops the potential for integrating additional energy sources with nuclear systems through the implementation of TES. The potential of the HTGR-TES-CHP system was also evaluated considering key uncertainties such as industrial demand profiles, external grid access availability, and eligible tax credit levels, using the Holistic Energy Resource Optimization Network. Sensitivity of net present value to these uncertainties was analyzed to determine the optimal number of nuclear reactors (and CHP systems) and the suitable TES capacity. The results were interpreted from a decision-maker’s perspective, focusing on three key areas: deployment strategy (oversized units vs. undersized units with TES support), industrial process characteristics (thermal-intensive single profiles vs. electricity-intensive combined profiles), and operational goals (maximizing profits vs. minimizing natural gas (NG) consumption or external grid dependence). The optimization results indicate that the HTGR-TES-CHP system significantly reduces reliance on NG boilers for individual industrial processes by 9-60% (in NG capacity factor), with an average reduction of 38%, compared to standalone NG boiler operation case (Business As Usual [BAU]). For combined industrial processes, the reduction ranges from 37-77%, with an average of 60%. Additionally, the system greatly reduces dependence on external grids. In meeting industrial electrical demands, a 33-100% self-sufficient internal electricity supply is achieved for single industrial process, with an average of 74%, compared to the BAU scenario, where 100% of electricity is imported. For combined processes, 35-100% of internal electricity demands are met by the reactor, with an average of 73%. At last, the relative NG price levels at which the proposed HTGR-TES-CHP system can cost-effectively enter the market currently dominated by existing NG boilers were estimated. For a moderate HTGR CAPEX level ($\$$2500/kWth, $\$$6329/kWe), the analysis suggests that NG prices must be 2.5 to 7 times higher than HTGR variable operating and maintenance costs for single industrial process, and 5.5 to 9.5 times higher for a combined process scenario. Tax credit modeling shows that the Investment Tax Credit significantly reduces the price threshold needed to break even, making the system competitive with NG boilers in certain cases.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

DOE OSTI2022

Estimate of the Mass and Radial Profile of the Orphan–Chenab Stream's Dwarf-galaxy Progenitor Using MilkyWay@home

We fit the mass and radial profile of the Orphan–Chenab Stream's (OCS) dwarf-galaxy progenitor by using turnoff stars in the Sloan Digital Sky Survey and the Dark Energy Camera to constrain N-body simulations of the OCS progenitor falling into the Milky Way on the 1.5 PetaFLOPS MilkyWay@home distributed supercomputer. We infer the internal structure of the OCS's progenitor under the assumption that it was a spherically symmetric dwarf galaxy composed of a stellar system embedded in an extended dark matter halo. We optimize the evolution time, the baryonic and dark matter scale radii, and the baryonic and dark matter masses of the progenitor using a differential evolution algorithm. The likelihood score for each set of parameters is determined by comparing the simulated tidal stream to the angular distribution of OCS stars observed in the sky. We fit the total mass of the OCS's progenitor to (2.0 ± 0.3) × 10 7 M ⊙ with a mass-to-light ratio of γ = 73.5 ± 10.6 and (1.1 ± 0.2) × 10 6 M ⊙ within 300 pc of its center. Within the progenitor's half-light radius, we estimate a total mass of (4.0 ± 1.0) × 10 5 M ⊙ . We also fit the current sky position of the progenitor's remnant to be (α, δ) = ((166.0 ± 0.9)°, (–11.1 ± 2.5)°) and show that it is gravitationally unbound at the present time. The measured progenitor mass is on the low end of previous measurements and, if confirmed, lowers the mass range of ultrafaint dwarf galaxies. Our optimization assumes a fixed Milky Way potential, OCS orbit, and radial profile for the progenitor, ignoring the impact of the Large Magellanic Cloud.

79 ASTRONOMY AND ASTROPHYSICS↗

DOE OSTI2019

Scalable flexibility control of distributed loads in a power grid

The technology described herein is generally directed towards a distributed optimization technology for the control of aggregation of distributed flexibility resource nodes that operates iteratively until a commanded power profile is produced by aggregated loads. The technology uses a distributed iterative solution in which each node solves a local optimization problem with local constraints and states, while using a global Lagrange multiplier that is based upon information from each other node. The global Lagrange multiplier is determined at an aggregation level using load-specific information that is obtained in a condensed form (e.g., a scalar) from each node at each iteration. The global Lagrange multiplier is broadcasted to the nodes for each new iteration. The technology provides an iterative, distributed solution to the network optimization problem of power tracking of aggregated loads.

29 ENERGY PLANNING, POLICY, AND ECONOMY↗

DOE OSTI2021

Real-Time and Adaptive Reservoir Computing With Application to Profile Prediction in Fusion Plasma

Nuclear fusion is a promising alternative to address the problem of sustainable energy production. The tokamak is an approach to fusion based on magnetic plasma confinement, constituting a complex physical system with many control challenges. Here we study the characteristics and optimization of reservoir computing (RC) for real-time and adaptive prediction of plasma profiles in the DIII-D tokamak. Our experiments demonstrate that RC achieves comparable results to state-of-the-art (deep) convolutional neural networks (CNNs) and long short-term memory (LSTM) models, with a significantly easier and faster training procedure. This efficient approach allows for fast and frequent adaptation of the model to new situations, such as changing plasma conditions or different fusion devices.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2023

Demonstrating Load-Shaping Capabilities of Cost Minimizing Heat Pump Water Heater Controls with Varying Price Profiles

Increased penetration of photovoltaics and electrification of traditionally gas appliances are exacerbating existing challenges in cost-effectively balancing electricity grid supply and demand. Decarbonization without incurring expensive transmission and distribution system capacity increases requires shifting building loads from peak demand times to peak renewable production times. Grid operators are evaluating new ways of encouraging load shifting, including using time-varying price structures to provide a financial incentive. If devices incorporate price-responsive controls, a price profile could be designed to yield a wide variety of load curves as needed to optimize grid functionality. Heat pump water heaters (HPWHs) are an ideal device for price-responsive controls because the storage tank enables them to optimize the timing of electricity consumption without impacting hot water delivery service. This paper presents work demonstrating how price-responsive controls for HPWHs can provide different load profiles, as needed to stabilize the grid, in response to different price profiles. HPWH manufacturers now include web API and CTA-2045 communication capabilities which enable sending load shaping control signals. Pilot studies and preliminary programs have utilized these capabilities with uniform control strategies to reduce 4-9 PM electricity consumption. However, no studies have developed flexible controls capable of both a) responding to constantly varying price profiles and b) customizing logic to match the needs of each HPWH. Berkeley Lab's CalFlexHub project is pioneering price-driven load flexibility by developing and deploying cost-minimizing controls utilizing setpoint setting signals for fleets of HPWHs in response to varying price profiles. Control development is based on simulations using the Flexible Heat Pump Water Heater Performance Predictor which captures the control decisions of a residential, integrated HPWH manufacturer’s on-board controller. The proposed cost-reducing controls respond to constantly changing price profiles, providing the ability to change the price profile to generate load curves as needed to maintain grid stability. Preliminary simulations studying the load shaping capabilities of price-responsive controls on a fleet of 60 HPWHs have demonstrated an average of a) 135.4% increases in load during low-price periods, b) >36.8% reductions in electricity peak-price period, and c) 6.2% electricity cost savings.

24 POWER TRANSMISSION AND DISTRIBUTION↗

DOE OSTI2024

Characterization of latent image of electron beam resist via critical-dimension resonant soft X-ray scattering

Metrology plays a crucial role in semiconductor manufacturing by providing accurate and precise measurement and characterization of critical parameters. With the development of high-resolution extreme ultraviolet lithography (EUVL) processes, critical dimensions are shrinking to sub-10 nm. Resist materials encounter the challenge of providing heightened sensitivity and a handle on exacerbating stochastic variations. A comprehensive understanding of the chemical profile of the latent image is pivotal for mitigating stochastic effects and optimizing pattern quality. However, the subtle differences in chemistry between the exposed and unexposed regions of the resists make it extremely challenging to characterize the latent images with sub-nanometer precision. Here, we develop the metrology with critical-dimension resonant soft X-ray scattering (CD-RSoXS) to probe the chemical profiles of latent images stored in resist after exposure. The combination of absorption spectroscopy and enhanced scattering contrast makes it possible to characterize the subtle structural and chemical variations in the latent image. Moreover, the results of the measurements are compared with the simulations with a finite element method–based Maxwell solver to extract a detailed profile of the latent and developed images. We demonstrate that the CD-RSoXS technique can provide valuable insights into the high spatial resolution and local chemical sensitivity simultaneously, which is crucial to understanding the resolution limits and stochastic effects in EUVL processes.

36 MATERIALS SCIENCE↗