Nano-indentation and laser-induced damage testing in optical multilayer-dielectric gratings [Nanomechanics and laser-induced damage in optical multilayer dielectric gratings]
Here, we demonstrate how a nanomechanical test can be used to generate metrics to complement laser-induced–damage testing (LIDT) measurements and show that differences in optical performance of the gratings (arising from changes in cleaning process and/or fabrication methods) can be related to their mechanical reliability. Data are presented on LIDT measurements in diffractive gratings of silica deposited on optical multilayers. The nano-indentation response of the diffraction gratings is measured in a new mode that allows for the extraction of a measurable metric characterizing the brittleness of the gratings, as well as their ductility. We show that lower LIDT’s are positively correlated with an increased grating brittleness, and therefore identify a nanomechanical approach to describe LIDT’s. We present extensive numerical simulations of nano-indentation tests and identify different deformation modes including stretching, shear concentration, and bending as precursors to mechanical failure in the nano-indentation test. The effects of geometrical inhomogeneities on enhanced stress generation in these gratings are specifically examined and addressed.