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At least 307 records · Page 17

Characterization of CO 4th Positive Radiation in CO2-Ar Mixtures

This paper presents measurements and simulations of CO 4th Positive spectra obtained in NASA Ames Research Center's Electric Arc Shock Tube (EAST) and CentraleSupelec's Plasma Torch. The experiments were aimed at measuring optically thin emission for the main band features of CO 4th Positive by using test gas mixtures of CO2 and Ar. By using mixtures of CO2 and Ar, the temperature of the flow (and consequently black-body curve) is increased compared to using pure CO2 (or CO2 / N2 mixtures). This temperature increase allows for emission spectroscopy of features that would nominally be black-body limited for conditions relevant to Mars entry. The CO 4th Positive system is the focus of this study as it accounts for a large percentage of the emitted radiation for Martian entry, and also due to the difficulties of obtaining experimental validation data due to the emission appearing in the Vacuum Ultraviolet (VUV) spectral range. The focus of this paper is to provide a comprehensive comparison between the EAST and plasma torch data along with various CO 4th Positive databases available in the literature. Previously reported VUV CO2 / N2 EAST data required a larger temperature than would be predicted based upon equilibrium shock relations. The need for the temperature increase implies that the EAST experiment did not fully equilibrate. Thus, it is presumed that the EAST data did not obtain an equilibrium condition. The plasma torch data, on the other hand, is very consistent with equilibrium assumptions. Thus, the equilibrium data obtained in the plasma torch is utilized to construct the CO 4th Positive emission model, which is then applied to the EAST data with a non-equilibrium interpretation.

A. M. Brandis↗

Sintering Behaviors of ZrC, NbC, and TaC Mono-and Binary Carbides

Nuclear Thermal Propulsion (NTP) has undergone development as an alternate in-space propulsion system to traditional chemical propulsion methods since the 1950s. In an NTP system, the energy released from fission in the core is utilized as the heat source to directly heat a propellant for propulsion, rather than chemical combustion in a traditional rocket. NTP has many desirable capabilities including flexible mission launch dates and reduced transit times due to it’s capability for high specific impulse. One of the main challenges with NTP systems is the structural integrity of the fuel. The fuel form required in the reactor core must withstand temperatures above 2700 Kelvin. Ceramic-metallic matrix fuel, ceramic-ceramic matrix fuel, and solid solution carbide fuels are the three strongest candidates for the extreme environments. Solid solution carbides have the potential to exhibit promising behavior as a fuel form in an NTP system. Of the multiple refractory metal carbides of interest, here we focus on zirconium carbide (ZrC), niobium carbide (NbC), and tantalum carbide (TaC). ZrC, NbC, and TaC powders were consolidated in monocarbide (ZrC, NbC, and TaC) and bi-carbide (ZrC-NbC, ZrC-TaC, NbC-TaC) forms using spark plasma sintering (SPS). In addition to the pure endpoint carbides, the examined compositions of the various bi-carbides ranged from 25-75 mol%. The sintering temperatures, pressures, and hold times were varied to determine the ideal sintering conditions. Grain size analysis, Archimedes’ density, scanning electron microscopy (SEM), X-ray diffraction (XRD), and energy dispersion spectroscopy (EDS) were used to determine and characterize the grain size, ideal density, porosity, phase stability, and chemical composition of each sample. The data from each sample was then used to generate a Master Sintering Curve (MSC) unique to each monocarbide or bi-carbide.

nuclear thermal propulsion↗

NASA Tech Briefs, August 2004

Topics covered include: Data Relay Board with Protocol for High-Speed, Free-Space Optical Communications; Software and Algorithms for Biomedical Image Data Processing and Visualization; Rapid Chemometric Filtering of Spectral Data; Prioritizing Scientific Data for Transmission; Determining Sizes of Particles in a Flow from DPIV Data; Faster Processing for Inverting GPS Occultation Data; FPGA-Based, Self-Checking, Fault-Tolerant Computers; Ultralow-Power Digital Correlator for Microwave Polarimetry; Grounding Headphones for Protection Against ESD; Lightweight Stacks of Direct Methanol Fuel Cells; Highly Efficient Vector-Inversion Pulse Generators; Estimating Basic Preliminary Design Performances of Aerospace Vehicles; Framework for Development of Object-Oriented Software; Analyzing Spacecraft Telecommunication Systems; Collaborative Planning of Robotic Exploration; Tools for Administration of a UNIX-Based Network; Preparing and Analyzing Iced Airfoils; Evaluating Performance of Components; Fuels Containing Methane of Natural Gas in Solution; Direct Electrolytic Deposition of Mats of MnxOy Nanowires; Bubble Eliminator Based on Centrifugal Flow; Inflatable Emergency Atmospheric-Entry Vehicles; Lightweight Deployable Mirrors with Tensegrity Supports; Centrifugal Adsorption Cartridge System; Ultrasonic Apparatus for Pulverizing Brittle Material; Transplanting Retinal Cells using Bucky Paper for Support; Using an Ultrasonic Instrument to Size Extravascular Bubbles; Coronagraphic Notch Filter for Raman Spectroscopy; On-the-Fly Mapping for Calibrating Directional Antennas; Working Fluids for Increasing Capacities of Heat Pipes; Computationally-Efficient Minimum-Time Aircraft Routes in the Presence of Winds; Liquid-Metal-Fed Pulsed Plasma Thrusters; Personal Radiation Protection System; and Attitude Control for a Solar-Sail Spacecraft.

Source record↗

Dios: The Dark Baryon Exploring Mission

DIOS (Diffuse Intergalactic Oxygen Surveyor) is a small satellite aiming for a launch around 2022 with JAXA's Epsilon rocket. Its main aim is a search for warm-hot intergalactic medium with high-resolution X-ray spectroscopy of redshifted emission lines from OVII and OVIII ions. The superior energy resolution of TES microcalorimeters combined with a wide field of view (30 diameter) will enable us to look into gas dynamics of cosmic plasmas in a wide range of spatial scales from Earths magnetosphere to unvirialized regions of clusters of galaxies. Mechanical and thermal design of the spacecraft and development of the TES calorimeter system are described. Employing an enlarged X-ray telescope with a focal length of 1.2 m and fast repointing capability, DIOS can observe absorption features from X-ray afterglows of distant gamma-ray bursts.

X-ray telescope↗

Nondestructive Testing As a Tool in the Space Shuttle Columbia Accident Investigation

Nondestructive testing (NDT) played a crucial role in determining the Columbia tragedy's cause. Over 84,000 pieces of debris were recovered; hundreds were subsequently subjected to NDT and materials analysis. Visual NDT of the debris revealed localized areas of damage such as erosion, excessive heating, knife edging and mechanical damage. Three-dimensional reconstructions were made of the left wing leading edge, utilizing a tripod-mounted laser scanning head and focused laser beam, and an advanced topometric optical scanner (ATOS) with digital white light to scan complex-shaped debris, producing monochrome 3-D models. Texture mapping provided a means to capture true colors of the debris and superimpose them on the scanned images. Uniform deposits were found over large portions of debris, obscuring underlying materials. To determine what was beneath, inverse radiography was enlisted. The radiographs guided investigators to where samples should be taken. To ascertain compositions, these samples were subjected to analytical testing, including energy dispersive X-ray spectroscopy and electron microprobe analysis. This combination of visual evidence, radiography, virtual reconstruction, and materials analysis allowed the forensic scientists to verify that a breach occurred in the leading edge of the left wing, the path the plasma followed, and the sequence of events that led to the loss.

McDanels, Steve↗

The Pinhole/Occulter facility

The outer solar atmosphere exhibits a great variety of dynamic and energetic plasma phenomena, from the catastrophic energy release of solar flares to the steady acceleration of the solar wind. The Pinhole/Occulter Facility contains the instruments necessary for broadband X-ray imaging, combined with simultaneous ultraviolet and white light spectroscopy and imaging.

Dabbs, J. R.↗

Experimental Investigation of Current Sheet Instabilities

Configuration space instabilities of propagating current sheets were studied in order to better understand acceleration mechanisms in pulsed plasma thrusters. Experiments were carried out in a parallel plate accelerator with argon as propellant. Propagating current sheets were visualized using fast framing cameras with inter-frame delays ranging between 0.05 - 2 microsecond. Schlieren photography using a pulse-burst Nd:YAG laser was used to image electron density gradients in the discharge. Magnetic field probes were used to map the magnetic field topology during the evolution of the discharge. Pressure probes were used to monitor axial pressure gradients. Emission spectroscopy was used to estimate the electron temperature in the arc. The motivation for applying all of these diagnostics was to gain an understanding of what parameters influence the macroscopic stability of a propagating current sheet. Since a stable current sheet is required for any effective snowplow-type of accelerator, an understanding of the processes which can cause current sheets to break apart into filaments is essential for the design of future pulsed plasma thrusters.

Markusic, Thomas E.↗

ESCA Study of Poly (Vinylidene Fluoride) Tetrafluoroethylene - Ethylene Copolymer and Polyethylene Exposed to Atomic Oxygen

The ESCA (electron spectroscopy for chemical analysis) spectra of films of poly(vinylidene fluoride) (PVDF), tetrafluoroethylene-ethylene copolymer (TFE/ET) and polyethylene (PE) exposed to atomic oxygen (O(P-3)), in or out of the glow of a radio-frequency O2 plasma, were compared. ESCA spectra of PE films exposed to (O(P-3)) in low Earth orbit (LEO) on the STS-8 Space Shuttle were also examined. Apart from O(P-3)-induced surface recession (etching), the various polymer films exhibited surface oxidation, which proceeded towards equilibrium saturation oxygen levels. The maximum surface oxygen uptakes for in-glow or out-of-glow exposures were in the order: PE greater than TFE/ET greater than PVDF; for PE itself, the oxygen uptakes were in the order: in glow greater than out of glow greater than LEO. Given prior ESCA data on poly(vinyl fluoride) and polytetrafluoroethylene films exposed to O(P-3), the extent of surface oxidation is seen to decrease regularly with increase in fluorine substitution in a family of ethylene-type polymers. (Keywords: ESCA; poly(vinylidene fluoride); tetrafluoroethylene ethylene copolymer; polyethylene; atomic oxygen; radio-frequency oxygen plasma; low Earth orbit)

Golub, Morton A.↗

Simulation and Experimental Measurements of Inductively Coupled CF4 and CF4/Ar Plasmas

The recently developed code SEMS (semiconductor equipment modeling software)is applied to the simulation of CF4 and CF4/Ar inductively coupled plasmas (ICP). This work builds upon the earlier nitrogen, transformer coupled plasma (TCP) SEMS research by demonstrating its accuracy for more complex reactive mixtures, moving closer to the realization of a virtual plasma reactor. Attention is given to the etching of and/or formation of carbonaceous films on the quartz dielectric window and diagnostic aperatures. The simulations are validated through comparisons with experimental measurements using FTIR (Fourier Transform Infrared) and UV absorption spectroscopy for CFx and SiFx neutral radicals, QMS (quadrupole mass spectrometry) for the ions, and Langmuir probe measurements of electron number density and temperature in an ICP GEC reference cell.

Hash, D. B.↗

Accurate VUV Laboratory Measurements of Fe III Transitions for Astrophysical Applications

We report preliminary measurements of Fe III spectra in the 1150 to 2500 A wavelength interval. Spectra have been recorded with an iron-neon Penning discharge lamp (PDL) between 1600 and 2500 A at Imperial College (IC) using high resolution Fourier (FT) transform spectroscopy. These FT spectrometer measurements were extended beyond 1600 A to 1150 A using high-resolution grating spectroscopy at the National Institute of Standards and Technology (NIST). These recorded spectra represent the first radiometrically calibrated measurements of a doubly-ionized iron-group element spectrum combining the techniques of vacuum ultraviolet FT and grating spectroscopy. The spectral range of the new laboratory measurements corresponds to recent HST/STIS observations of sharp-lined B stars and of Eta Carinae. The new improved atomic data can be applied to abundance studies and diagnostics of astrophysical plasmas.

Blackwell-Whitehead, R. J.↗

Nonthermal X-ray Spectral Flattening toward Low Energies in Early Impulsive Flares

The determination of the low-energy cutoff to nonthermal electron distributions is critical to the calculation of the nonthermal energy in solar flares. The most direct evidence for low-energy cutoffs is flattening of the power-law, nontherma1 X-ray spectra at low energies. However, because of the plasma preheating often seen in flares, the thermal emissions at low energies may hide such spectral flattening of the nonthermal component. We select a category of flares, which we call "early impulsive flares", in which the > 25 keV hard X-ray (HXR) flux increase is delayed by less than 30 s after the flux increase at lower energies. Thus, the plasma preheating in these flares is minimal, so the nonthermal spectrum can be determined to lower energies than in flares with significant preheating. Out of a sample of 33 early impulsive flares observed by the Ramaty High Energy Solar Spectroscopy Imager (RHESSI), 9 showed spectral flattening toward low energies. In these events, the break energy of the double power-law fit to the HXR spectra lies in the range of 10-50 keV, significantly lower than the value we have seen for other flares that do not show such early impulsive emissions. In particular, it correlates with the HXR flux. After correcting the spatially-integrated spectra for albedo from isotropically emitted X-rays and using RHESSI imaging spectroscopy to exclude the extended albedo halo, we find that albedo associated with isotropic or nearly isotropic electrons can only account for the spectral flattening in 3 flares near Sun center. The spectral flattening in the remaining 6 flares is found to be consistent with the existence of a low-energy cutoff in the electron spectrum, falling in the range of 15-50 keV, which also correlates with the HXR flux.

Holman, Gordon D.↗

Trace Elemental Abundances in Calcium-Aluminum-Rich Inclusions in CV Chondrites

Introduction: Calcium-aluminum-rich inclusions (CAIs), are the first formed solids that define the age of the Solar System [1,2]. CAIs are thought to have condensed from nebular gas [3,4] within the first <1 Ma of Solar System formation [5,6]. CAIs have experienced numerous early Solar System processes including condensation, evaporation, melting, recrystallization, and aqueous alteration [e.g., 7]. The chemical, mineralogical, and textural diversity among CAIs results from a range of chemical and physical processes recorded during nebular and parent body epoch. This study aims to explore the mineralogical, textural, and chemical compositions of CAIs including the trace elemental abundances in CAI phases to determine the early Solar System processes recorded in them. Samples and Analytical Methods: We analyzed one CAI each from CV3 chondrites Northwest Africa (NWA) 5508 designated as ‘Saguaro’, and Northwest Africa (NWA) 12772 designated as ‘Hoopoe’. Back-scatter electron (BSE) images were collected using a Phenom XL scanning electron microscope (SEM) at the Lunar and Planetary Institute (LPI) and the JEOL JXA-8530F electron probe microanalyzer (EPMA) at Johnson Space Center (JSC)-NASA. Additionally, energy dispersive X-ray spectrometry (EDS) elemental maps of select areas for these samples were collected using a 15.0kV beam energy and a 40µA emission current. Using the EPMA, wavelength-dispersive X-ray spectroscopy (WDS) quantitative data were collected. In-situ trace element measurements for both CAIs were determined at JSC-NASA using a Photon Machines 193nm laser ablation system and a Thermo-Scientific Element-XR inductively coupled plasma mass spectrometer (ICP-MS). Analyses consisted of 30s ablations at 10Hz, spot sizes of 20-25µm, and a fluence of 6.0 J/cm2 for anorthite and melilite, and a 3.5 J/cm2 fluence for all other phases. NIST612 was used to correct for instrument drift, while BHVO-2g was used as a primary calibration standard. BCR-2g and in-house mineral standards were regularly measured as unknowns to ensure accuracy. Results: Saguaro is a coarse-grained CAI, ~11 x 6 mm in dimensions. Saguaro contains spinel, Al-rich pyroxene, anorthite, Mg-rich melilite, and minor perovskite in its interior and is therefore classified as a Type B CAI. Individual melilite grains shows normal compositional zoning with an Ak content ranging from ~24 to 54 with no apparent trend from the core to the edge of the CAI. The spinel appears euhedral and occurs both as clusters and as spinel palisades [8]. Two rim sequences surround most of the sample: the inner rim being a Wark-Lovering (WL) rim (~10-35 µm) containing pyroxene, spinel, and melilite (or anorthite), and the outer rim is a finer-grained, thicker (~100 µm), accretionary rim (Fig. 1). The mineral phases in Saguaro record an overall flat REE pattern with an average negative Eu anomaly in pyroxene, and an average positive Eu anomaly in anorthite and melilite respectively. Anorthite, melilite, and pyroxene have a minor depletion in Tm (Fig. 2). The Hoopoe CAI is a compact, coarse-grained ~6 × 4 mm in size. The major mineralogy includes hibonite, spinel, melilite, anorthite, and perovskite. Therefore, it is classified as a compact transitional type A and B. (?)zoning was observed in some hibonites. Individual melilite grains show both reverse and normal zoning, where the Ak content ranges from ~6- to 28. Melilite shows two distinct textures. One texture consisted of smooth melilite that appeared homogenous, while the second appeared to consist of many fine fractures. The spinel also often appears clustered. The WL-rim sequence surrounding Hoopoe is ~25 µm thick and composed of spinel, perovskite, hibonite, and melilite/anorthite. It is then partially surrounded by an outer accretionary rim (~75µm). Like before, refractory metal nuggets appeared concentrated near the WL rims. Other metal assemblages rich in Fe and Ni were also observed. All major mineral phases in Hoopoe display relatively flat REE patterns, except for varying Eu and Tm between phases (Fig. 2). There is a prominent negative Eu anomaly in perovskite and an average positive Eu anomaly in spinel, anorthite, and hibonite respectively (Fig. 2, 3). The mixed phases along the rim of the CAI also display a negative Eu anomaly, and all phases the CAI were depleted in Pb. Discussion: The CV3 CAIs analyzed in this study were classified based on their mineralogy and textures into Type A versus Type B CAIs [10]. Hibonite appears to be pseudomorphically replacing the spinel, (i.e., is hibonite in composition, but appears in the shape of spinel). Spinel palisades. The presence of spinel palisades present in Saguaro are consistent with the melting and recrystallization experienced by this CAI. Trace elemental analyses. Saguaro and Hoopoe display similar trace element patterns to each other, with both appearing generally flat, with anomalies in Eu, and Tm. Melilite and anorthite display positive Eu anomalies in both CAIs, in addition to the hibonite in Hoopoe (Fig. 2). The phases that are depleted in Eu are pyroxene and perovskite in both Saguaro and Hoopoe, respectively (Fig. 3). Given that Eu is volatile in reducing environments [11], this could possibly indicate reducing conditions at the time anorthite and melilite crystallized, with the gas they formed from containing Eu. As these CAIs continued to form, this gas as a result would become depleted in Eu. This also could be supported by the propensity of anorthite and melilite to take up Eu from its surroundings and incorporate it into their structure [12]. In addition, analyzing the assemblage of the phases in the Saguaro, melilite and anorthite (Eu enriched) often surround the pyroxene (Eu depleted) as they are crystallized. This intergrowth of phases and the proximity of the phases would support that the Eu is being incorporated into some phases, preventing it from incorporating into other. Trace elemental analyses of the CAI rims will be evaluated in more detail, as they are complicated by the transient signal being composed of a mixture of mineral phases. Broadly, however, the patterns in the rims of both CAIs are comparable to each other, and for Hoopoe, to the mixed phase patterns in the core (Fig. 3). Other studies have found that CAI rims can be depleted in Ce and Yb [13], however we did not observe these anomalies in the two CAIs discussed here. Given their similarity, the trace elemental analyses of the mixed interior (i.e. core) and rim phases could be interpreted as forming from similar, if not the same, reservoirs. The REE abundance between the rim and core of Hoopoe are also similar, indicating they may have formed from a gas of the same or similar composition. Acknowledgments: We thank the ASU Center for Meteorite Studies for loaning the samples used in this work and Tabb Prissel for his assistance with the analysis. Mouti Al-Hashimi thanks Sam Crossley and Cyrena Goodrich for their help with the LPI SEM training. This work was supported by the LPI Summer Intern Program in Planetary Science and the LPI Cooperative Agreement. References: [1] Connelly J.N. (2012) Science, 338, 651-655. [2] MacPherson G. J. (2014) Treatise on Geochem., 2, 139-179. [3] Grossman L. (1972) GCA, 36, 597-619. [4] Ebel, D.S. (2006) Meteorites and the Early Solar System II (D. S. Lauretta & H. Y. McSween, Eds.) 253-277. [5] MacPherson G. J. (2012) Earth Planet. Sci. Lett., 331-332, 43-54. [6] MacPherson G.J. (2017) GCA, 201, 65-82. [7] Krot A.N. (1995) Meteoritics & Planet. Sci., 30, 748-775. [8] Wark and Lovering (1982) GCA, 46, 2595-2607. [9] Palme H. and Jones A. (2003) Treatise on Geochemistry (H. D. Holland and K. K. Turekian Eds.), 1, 41-61. [10] Grossman L. (1980) Ann. Rev. Earth Planet. Sci., 8, 559-608. [11] Floss C. et al. (1996) GCA, 60, 1975-1997. [12] Mason B. and Martin P. M. (1974) Earth Planet. Sci. Lett., 22, 141-144. [13] Wark B. and Boynton W. V. (2001) Meteoritics & Planet. Sci., 36, 1135-1166.

X Mouti↗

Laser-induced gas breakdown - Spectroscopic and chemical studies.

Discussion of the results of several experimental investigations on laser-induced gas breakdown. The experiments included time-resolved spectroscopy, direct detection of H atoms with a TiO2 probe, and chemical reactions; each of them provided insight into the behavior of the medium at different times. Chemical reactions and explosions have been initiated by the laser beam when a plasma was created. No primary multiphotonic absorption and no macroscopic chemical reactions were observed below the breakdown threshold.

De Montgolfier, PH.↗

Molecular Thermal-Electron Detectors

Low-energy electrons detected with high resolution and sensitivity by their collisions with certain molecules. In thermal-electron-detection application, ambient plasma swept into collision chamber. Chamber designed to reduce stray electric fields to negligible levels and prevent inelastic and superelastic collisions with walls of collision-chamber repeller element. Instrument based on molecular detection performs high-resolution threshold photoelectron spectroscopy. Also used to detect fluorocarbons and chlorocarbons in upper atmosphere by their interaction with thermal electrons.

Chutjian, A.↗

Discovery of the double Doppler-shifted emission-line systems in the X-ray spectrum of SS 433

We have used the CCD X-ray spectrometers on ASCA and resolved the X-ray emission line from the jet of SS 433 both into Doppler-shifted components with two distinct velocities, and into emission from different ionization states of iron, i.e., Fe XXV and Fe XXVI. This is the first direct detection of the two Doppler shifted beams in the X-ray spectra of SS 433 and allows the radial velocity of the jet along the line of sight to be determined with an accuracy comparable to the optical spectroscopy. We also found pairs of emission lines from other atomic species, such as ionized silicon and sulfur, with the Doppler shifts consistent with each other. This confirms the origin of the X-ray emission in the high temperature plasma in the jets.

Kotani, Taro↗

Twenty-First Century Research Needs in Electrostatic Processes Applied to Industry and Medicine

From the early century Nobel Prize winning (1923) experiments with charged oil droplets, resulting in the discovery of the elementary electronic charge by Robert Millikan, to the early 21st century Nobel Prize (2002) awarded to John Fenn for his invention of electrospray ionization mass spectroscopy and its applications to proteomics, electrostatic processes have been successfully applied to many areas of industry and medicine. Generation, transport, deposition, separation, analysis, and control of charged particles involved in the four states of matter: solid, liquid, gas, and plasma are of interest in many industrial and biomedical processes. In this paper, we briefly discuss some of the applications and research needs involving charged particles in industrial and medical applications including: (1) Generation and deposition of unipolarly charged dry powder without the presence of ions or excessive ozone, (2) Control of tribocharging process for consistent and reliable charging, (3) Thin film (less than 25 micrometers) powder coating and Powder coating on insulative surfaces, (4) Fluidization and dispersion of fine powders, (5) Mitigation of Mars dust, (6) Effect of particle charge on the lung deposition of inhaled medical aerosols, (7) Nanoparticle deposition, and (8) Plasma/Corona discharge processes. A brief discussion on the measurements of charged particles and suggestions for research needs are also included.

Mazumder, M. K.↗

Dry etching of beta-SiC in CF4 and CF4 + O2 mixtures

Dry etching of cubic (100) beta-SiC single-crystal thin films produced via chemical-vapor deposition (CVD) has been performed in CF4 and CF4 + O2 mixtures, in both the reactive-ion-etching (RIE) and plasma-etching modes. The latter process yielded measurable etch rates, but produced a dark surface layer which appears, from the results of secondary-ion mass spectrometry, to be residual SiC. The RIE samples had no residual layer, but Auger electron spectroscopy did reveal a C-rich surface. The optimal RIE conditions were obtained with 10 sccm of pure CF4 at 40 mtorr and a power density of 0.548 W/sq cm, giving an etch rate of 23.3 nm/min. Neither the increase of temperature between 293 and 573 K, nor the incremental addition of O2 to CF4 to 50 percent, produced any strong effect on the etch rates of SiC during RIE. Pictorial evidence of fine line structures produced by RIE of beta-SiC films are also presented.

Palmour, J. W.↗

What's needed in the UV and EUV

High spectral and spatial resolution UV and EUV spectroscopy is discussed with emphasis on the spectroscopic observations that are required in order to increase the understanding of the physics of the lower transition region. The properties of the lower transition region are reviewed, and the available lower transition region plasma diagnostics are reviewed for the wavelength range between about 1150 and 2000 A. One important conclusion is that comprehensive spectroscopic coverage over a rather broad temperature range is necessary in order to observe satisfactorily small transition region structures. This is illustrated by two examples from the recent NRL Spacelab 2 HRTS experiment.

Doschek, G. A.↗