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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 307 records · Page 17

Gage accurately controls force for placing chips on substrates

Device is developed to control the force used in manually placing chips on substrates. It controls the compression load between 2 small members at loads as low as 25 grams by means of a force control gage that is preset by varying the spring deflection.

Benzie, W. P.↗

Improved process for epitaxial deposition of silicon on prediffused substrates

Process for fabricating integrated circuits uniformly deposits silicon epitaxially on prediffused substrates without affecting the sublayer diffusion pattern. Two silicon deposits from different sources, and deposited at different temperatures, protect the sublayer pattern from the silicon tetrachloride reaction.

Clarke, M. G.↗