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At least 307 records · Page 17

A Reactive-Ion Etch for Patterning Piezoelectric Thin Film

Reactive-ion etching (RIE) under conditions described below has been found to be a suitable means for patterning piezoelectric thin films made from such materials as PbZr(1-x)Ti(x)O3 or Ba(x)Sr(1.x)TiO3. In the original application for which this particular RIE process was developed, PbZr(1-x)Ti(x)O3 films 0.5 microns thick are to be sandwiched between Pt electrode layers 0.1 microns thick and Ir electrode layers 0.1 microns thick to form piezoelectric capacitor structures. Such structures are typical of piezoelectric actuators in advanced microelectromechanical systems now under development or planned to be developed in the near future. RIE of PbZr(1-x)Ti(x)O3 is usually considered to involve two major subprocesses: an ion-assisted- etching reaction, and a sputtering subprocess that removes reactive byproducts. RIE is favored over other etching techniques because it offers a potential for a high degree of anisotropy, high-resolution pattern definition, and good process control. However, conventional RIE is not ideal for patterning PbZr(1-x)Ti(x)O3 films at a thickness as great as that in the original intended application. In order to realize the potential benefits mentioned above, it is necessary to optimize process conditions . in particular, the composition of the etching gas and the values of such other process parameters as radio-frequency power, gas pressure, gas-flow rate, and duration of the process. Guidelines for determining optimum conditions can be obtained from experimental determination of etch rates as functions of these parameters. Etch-gas mixtures of BCl3 and Cl2, some also including Ar, have been found to offer a high degree of selectivity as needed for patterning of PbZr(1-x)Ti(x)O3 films on top of Ir electrode layers in thin-film capacitor structures. The selectivity is characterized by a ratio of approx.10:1 (rate of etching PbZr(1-x)Ti(x)O3 divided by rate of etching Ir and IrO(x)). At the time of reporting the information for this article, several experiments on RIE in BCl3 and Cl2 (and sometimes Ar) had demonstrated the 10:1 selectivity ratio, and further experiments to enhance understanding and obtain further guidance for optimizing process conditions were planned.

Yang, Eui-Hyeok↗

NASA Tech Briefs, March 2010

Topics covered include: Software Tool Integrating Data Flow Diagrams and Petri Nets; Adaptive Nulling for Interferometric Detection of Planets; Reducing the Volume of NASA Earth-Science Data; Reception of Multiple Telemetry Signals via One Dish Antenna; Space-Qualified Traveling-Wave Tube; Smart Power Supply for Battery-Powered Systems; Parallel Processing of Broad-Band PPM Signals; Inexpensive Implementation of Many Strain Gauges; Constant-Differential-Pressure Two-Fluid Accumulator; Inflatable Tubular Structures Rigidized with Foams; Power Generator with Thermo-Differential Modules; Mechanical Extraction of Power From Ocean Currents and Tides; Nitrous Oxide/Paraffin Hybrid Rocket Engines; Optimized Li-Ion Electrolytes Containing Fluorinated Ester Co-Solvents; Probabilistic Multi-Factor Interaction Model for Complex Material Behavior; Foldable Instrumented Bits for Ultrasonic/Sonic Penetrators; Compact Rare Earth Emitter Hollow Cathode; High-Precision Shape Control of In-Space Deployable Large Membrane/Thin-Shell Reflectors; Rapid Active Sampling Package; Miniature Lightweight Ion Pump; Cryogenic Transport of High-Pressure-System Recharge Gas; Water-Vapor Raman Lidar System Reaches Higher Altitude; Compact Ku-Band T/R Module for High-Resolution Radar Imaging of Cold Land Processes; Wide-Field-of-View, High-Resolution, Stereoscopic Imager; Electrical Capacitance Volume Tomography with High-Contrast Dielectrics; Wavefront Control and Image Restoration with Less Computing; Polarization Imaging Apparatus; Stereoscopic Machine-Vision System Using Projected Circles; Metal Vapor Arcing Risk Assessment Tool; Performance Bounds on Two Concatenated, Interleaved Codes; Parameterizing Coefficients of a POD-Based Dynamical System; Confidence-Based Feature Acquisition; Algorithm for Lossless Compression of Calibrated Hyperspectral Imagery; Universal Decoder for PPM of any Order; Algorithm for Stabilizing a POD-Based Dynamical System; Mission Reliability Estimation for Repairable Robot Teams; Processing AIRS Scientific Data Through Level 3; Web-Based Requesting and Scheduling Use of Facilities; AutoGen Version 5.0; Time-Tag Generation Script; PPM Receiver Implemented in Software; Tropospheric Emission Spectrometer Product File Readers; Reporting Differences Between Spacecraft Sequence Files; Coordinating "Execute" Data for ISS and Space Shuttle; Database for Safety-Oriented Tracking of Chemicals; Apparatus for Cold, Pressurized Biogeochemical Experiments; Growing B Lymphocytes in a Three-Dimensional Culture System; Tissue-like 3D Assemblies of Human Broncho-Epithelial Cells; Isolation of Resistance-Bearing Microorganisms; Oscillating Cell Culture Bioreactor; and Liquid Cooling/Warming Garment.

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An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process

This paper reports an all-silicon fully symmetrical z-axis micro-g accelerometer that is fabricated on a single-silicon wafer using a combined surface and bulk fabrication process. The microaccelerometer has high device sensitivity, low noise, and low/controllable damping that are the key factors for attaining micro g and sub-micro g resolution in capacitive accelerometers. The microfabrication process produces a large proof mass by using the whole wafer thickness and a large sense capacitance by utilizing a thin sacrificial layer. The sense/feedback electrodes are formed by a deposited 2-3 microns polysilicon film with embedded 25-35 microns-thick vertical stiffeners. These electrodes, while thin, are made very stiff by the thick embedded stiffeners so that force rebalancing of the proof mass becomes possible. The polysilicon electrodes are patterned to create damping holes. The microaccelerometers are batch-fabricated, packaged, and tested successfully. A device with a 2-mm x 1-mm proof mass and a full bridge support has a measured sensitivity of 2 pF/g. The measured sensitivity of a 4-mm x 1-mm accelerometer with a cantilever support is 19.4 pF/g. The calculated noise floor of these devices at atmosphere are 0.23 micro g/sqrt(Hz) and 0.16 micro g/sqrt(Hz), respectively.

Non-NASA Center↗

High-resolution land/ice imaging using Seasat scatterometer measurements

A new method for obtaining high-resolution images (to 4 km) of the land backscatter from low-resolution Seasat-A scatterometer (SASS) measurements is introduced. The method utilizes the measurement cell overlap in multiple spacecraft passes over the region of interest and signal processing techniques to generate high-resolution images of the radar backscatter. The overlap is exploited to estimate the underlying high-resolution surface radar backscatter characteristics using a robust multivariate image reconstruction algorithm. The algorithm has been designed to operate in the high-noise environment typical of scatterometer measurements. The ultimate resolution obtainable is a function of the number of measurements and the measurement overlap. Sample results based on SASS data are provided.

Long, D. G.↗

Processing techniques for software based SAR processors

Software SAR processing techniques defined to treat Shuttle Imaging Radar-B (SIR-B) data are reviewed. The algorithms are devised for the data processing procedure selection, SAR correlation function implementation, multiple array processors utilization, cornerturning, variable reference length azimuth processing, and range migration handling. The Interim Digital Processor (IDP) originally implemented for handling Seasat SAR data has been adapted for the SIR-B, and offers a resolution of 100 km using a processing procedure based on the Fast Fourier Transformation fast correlation approach. Peculiarities of the Seasat SAR data processing requirements are reviewed, along with modifications introduced for the SIR-B. An Advanced Digital SAR Processor (ADSP) is under development for use with the SIR-B in the 1986 time frame as an upgrade for the IDP, which will be in service in 1984-5.

Leung, K.↗

Laser Sounder for Global Measurement of CO2 Concentrations in the Troposphere from Space

Measurements of tropospheric CO2 abundance with global-coverage, a few hundred km spatial and monthly temporal resolution are needed to quantify processes that regulate CO2 storage by the land and oceans. The Orbiting Carbon Observatory (OCO) is the first space mission focused on atmospheric CO2 for measuring total column CO, and O2 by detecting the spectral absorption in reflected sunlight. The OCO mission is an essential step, and will yield important new information about atmospheric CO2 distributions. However there are unavoidable limitations imposed by its measurement approach. These include best accuracy only during daytime at moderate to high sun angles, interference by cloud and aerosol scattering, and limited signal from CO2 variability in the lower tropospheric CO2 column. We have been developing a new laser-based technique for the remote measurement of the tropospheric CO2 concentrations from orbit. Our initial goal is to demonstrate a lidar technique and instrument technology that will permit measurements of the CO2 column abundance in the lower troposphere from aircraft. Our final goal is to develop a space instrument and mission approach for active measurements of the CO2 mixing ratio at the 1-2 ppmv level. Our technique is much less sensitive to cloud and atmospheric scattering conditions and would allow continuous measurements of CO2 mixing ratio in the lower troposphere from orbit over land and ocean surfaces during day and night. Our approach is to use the 1570nm CO2 band and a 3-channel laser absorption spectrometer (i.e. lidar used an altimeter mode), which continuously measures at nadir from a near polar circular orbit. The approach directs the narrow co-aligned laser beams from the instrument's lasers toward nadir, and measures the energy of the laser echoes reflected from land and water surfaces. It uses several tunable fiber laser transmitters which allowing measurement of the extinction from a single selected CO2 absorption line in the 1570 nm band. This band is free from interference from other gases and has temperature insensitive absorption lines. During the measurement the lasers are tuned on- and off- a selected CO2 line near 1572 nm and a selected O2 line near 768 nm in the Oxygen A band at kHz rates. The lasers use tunable diode seed lasers followed by fiber amplifiers, and have spectral widths much narrower than the gas absorption lines. The receiver uses a 1-m diameter telescope and photon counting detectors and measures the background light and energies of the laser echoes from the surface. The extinction and column densities for the CO2 and O2 gases are estimated from the ratio of the on and offline surface echo via the differential optical absorption technique. Our technique rapidly alternates between several on-line wavelengths set to the sides of the selected gas absorption lines. It exploits the atmospheric pressure broadening of the lines to weight the measurement sensitivity to the atmospheric column below 5 km. This maximizes sensitivity to CO2 in the boundary layer, where variations caused by surface sources and sinks are largest. Simultaneous measurements of O2 column will use an identical approach with an O2 line. Thee laser frequencies are tunable and have narrow (MHz) line widths. In combination with sensitive photon counting detectors these enables much higher spectral resolution and precision than is possible with passive spectrometer. 1aser backscatter profiles are also measured, which permits identifying measurements made to cloud tops and through aerosol layers. The measurement approach using lasers in common-nadir-zenith path allows retrieving CO2 column mixing ratios in the lower troposphere irrespective of sun angle. Pulsed laser signals, time gated receiver and a narrow receiver field-of-view are used to isolate the surface laser echo signals and to exclude photons scattered from clouds and aerosols. Nonetheless, the optical absorption change due to a change of a few ppO2 is small, <1 % which makes achieving the needed measurement sensitivities and stabilities quite challenging. Measurement SNRs and stabilities of >600:1 are needed to estimate CO2 mixing ratio at the 1-2 ppm level. We have calculated characteristics of the technique and have demonstrated aspects of the laser, detector and receiver approaches in th e laboratory We have also measured O2 in an absorption cell, and made C02 measurements over a 400 m long (one way) horizontal path using a sensor breadboard. We will describe these and more details of our approach in the paper.

Abshire, James B.↗

Applications of massively parallel computers in telemetry processing

Telemetry processing refers to the reconstruction of full resolution raw instrumentation data with artifacts, of space and ground recording and transmission, removed. Being the first processing phase of satellite data, this process is also referred to as level-zero processing. This study is aimed at investigating the use of massively parallel computing technology in providing level-zero processing to spaceflights that adhere to the recommendations of the Consultative Committee on Space Data Systems (CCSDS). The workload characteristics, of level-zero processing, are used to identify processing requirements in high-performance computing systems. An example of level-zero functions on a SIMD MPP, such as the MasPar, is discussed. The requirements in this paper are based in part on the Earth Observing System (EOS) Data and Operation System (EDOS).

El-Ghazawi, Tarek A.↗

Examples of current radar technology and applications, chapter 5, part B

Basic principles and tradeoff considerations for SLAR are summarized. There are two fundamental types of SLAR sensors available to the remote sensing user: real aperture and synthetic aperture. The primary difference between the two types is that a synthetic aperture system is capable of significant improvements in target resolution but requires equally significant added complexity and cost. The advantages of real aperture SLAR include long range coverage, all-weather operation, in-flight processing and image viewing, and lower cost. The fundamental limitation of the real aperture approach is target resolution. Synthetic aperture processing is the most practical approach for remote sensing problems that require resolution higher than 30 to 40 m.

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NASA to Survey Earth's Resources

A wide variety of the natural resources of earth and man's management of them will be studied by an initial group of foreign and domestic scientists tentatively chosen by the National Aeronautics and Space Administration to analyze data to be gathered by two earth-orbiting spacecraft. The spacecraft are the first Earth Resources Technology Satellite (ERTS-A) and the manned Skylab which will carry an Earth Resources Experiment Package (EREP). In the United States, the initial experiments will study the feasibility of remote sensing from a satellite in gathering information on ecological problems. The objective of both ERTS and EREP aboard Skylab is to obtain multispectral images of the surface of the earth with high resolution remote sensors and to process and distribute the images to scientific users in a wide variety of disciplines. The ERTS-A, EREP, and Skylab systems are described and their operation is discussed.

Mittauer, R. T.↗

Land Use and Mapping

From the standpoint of technology, the most encouraging thing about ERTS has been the level of land-use identification. Land-use detail has exceeded the expectations of the Interagency Steering Committee and the requirements of land-use classification proposed by the Department of Interior. Whereas in the latter instance it was anticipated that only nine classes of land use would probably be identifiable, in fact some 14 to 18 classes have been identified. The success in the level of land-use identification results primarily from the various attributes of the ERTS system. These include the ability to provide repetitive coverage, and in particular seasonal coverage; the ability to image in four bands of the electromagnetic spectrum (green, red, and two near-infrared), which allows for manipulation of various combinations of bands; and the provision by the ERTS system of computer-compatible tapes for machine processing of data. Furthermore, the resolution of ERTS imagery has been better than expected. Although there is some question as to its exact resolving power, it is safe to say objects as small as 100 meters (300 feet) in diameter have been identified. Linear features as narrow as 16 meters (50 feet) can be detected (Figure 1).

Lindgren, D. T.↗

Studies on lasers and laser devices

The goal of this grant was to study lasers, laser devices, and uses of lasers for investigating physical phenomena are studied. The active projects included the development of a tunable, narrowband XUV light source and its application to the spectroscopy of core excited atomic states, and the development of a technique for picosecond time resolution spectroscopy of fast photophysical processes.

Harris, S. E.↗

Imaging spectrometer technologies for advanced Earth remote sensing

A major requirement of multispectral imaging systems for advanced Earth remote sensing is the provision for greater spectral resolution and more versatile spectral band selection. The imaging spectrometer instrument concept provides this versatility by the combination of pushbroom imaging and spectrally dispersing optics using area array detectors in the focal plane. The shuttle imaging spectrometer concept achieves 10- and 20-meter ground instantaneous fields of view with 20-nanometer spectral resolution from Earth Orbit. Onboard processing allows the selection of spectral bands during flight; this, in turn, permits the sensor parameters to be tailored to the experiment objectives. Advances in optical design, infrared detector arrays, and focal plane cooling indicate the feasibility of the instrument concept and support the practicability of a validation flight experiment for the shuttle in the late 1980s.

Wellman, J. B.↗

LANDSAT 4 band 6 data evaluation

A series of images of a portion of a TM frame of Lake Ontario are presented. The top left frame is the TM Band 6 image, the top right image is a conventional contrast stretched image. The bottom left image is a Band 5 to Band 3 ratio image. This image is used to generate a primitive land cover classificaton. Each land cover (Water, Urban, Forest, Agriculture) is assigned a Band 6 emissivity value. The ratio image is then combined with the Band 6 image and atmospheric propagation data to generate the bottom right image. This image represents a display of data whose digital count can be directly related to estimated surface temperature. The resolution appears higher because the process cell is the size of the TM shortwave pixels.

Source record↗

Imaging spectrometer technologies for advanced earth remote sensing

A major requirement of multispectral imaging systems for advanced earth remote sensing is the provision for greater spectral resolution and more versatile spectral band selection. The imaging spectrometer instrument concept provides this versatility by the combination of pushbroom imaging and spectrally dispersing optics using area array detectors in the focal plane. The shuttle imaging spectrometer concept achieves 10- and 20-meter ground instantaneous fields of view with 20-nanometer spectral resolution from earth orbit. Onboard processing allows the selection of spectral bands during flight; this, in turn, permits the sensor parameters to be tailored to the experiment objectives. Advances in optical design, infrared detector arrays, and focal plane cooling indicate the feasibility of the instrument concept and support the practicability of a validation flight experiment for the shuttle in the late 1980s. Previously announced in STAR as N83-28542

Wellman, J. B.↗

Jet Stream Errors and Tropospheric-stratospheric Interactions in the GLAS General Circulation Model

This project used the Goddard Laboratory for Atmospheric Sciences general circulation model (GCM) to explore the causes of erroneously weak shears above the subtropicl jet in GCMs. This problem was seen over the past 15 years of general circulation modeling both as a weak vertical shear and as a cold polar stratosphere. Although recent models now have closed zonal wind contours in their monthly Northern Hemisphere winter climatologies, the weak shears are still present in both winter, summer, Northern, and Southern hemispheres. Numerous hypotheses have been advanced to explain this failure including the rigid top, poor vertical resolution, incorrect modeling of radiative processes, and incorrect model generation of tropospheric waves. Although the Community Climate Model, attempted to deal with many of these causes, especially radiative processes, the problem is still present.

Tenenbaum, J.↗

Recycling isotachophoresis - A novel approach to preparative protein fractionation

The concept of automated recycling isotachophoresis (RITP) as a purification methodology is discussed, in addition to a description of the apparatus. In the present automated RITP, the computer system follows the achievement of steady state using arrays of universal and specific sensors, monitors the position of the front edge of the zone structure, activates the counterflow if the leading boundary passes a specified position along the separation axis, or changes the applied current, accordingly. The system demonstrates high resolution, in addition to higher processing rates than are possible in zone electrophoresis or isoelectric focusing.

Sloan, Jeffrey E.↗