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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 307 records · Page 17
All sourcesNASA NTRSDOE OSTI
DOE OSTI2021

A Hybrid Energy System Workflow for Energy Portfolio Optimization

This manuscript develops a workflow, driven by data analytics algorithms, to support the optimization of the economic performance of an Integrated Energy System. The goal is to determine the optimum mix of capacities from a set of different energy producers (e.g., nuclear, gas, wind and solar). A stochastic-based optimizer is employed, based on Gaussian Process Modeling, which requires numerous samples for its training. Each sample represents a time series describing the demand, load, or other operational and economic profiles for various types of energy producers. These samples are synthetically generated using a reduced order modeling algorithm that reads a limited set of historical data, such as demand and load data from past years. Numerous data analysis methods are employed to construct the reduced order models, including, for example, the Auto Regressive Moving Average, Fourier series decomposition, and the peak detection algorithm. All these algorithms are designed to detrend the data and extract features that can be employed to generate synthetic time histories that preserve the statistical properties of the original limited historical data. The optimization cost function is based on an economic model that assesses the effective cost of energy based on two figures of merit: the specific cash flow stream for each energy producer and the total Net Present Value. An initial guess for the optimal capacities is obtained using the screening curve method. The results of the Gaussian Process model-based optimization are assessed using an exhaustive Monte Carlo search, with the results indicating reasonable optimization results. The workflow has been implemented inside the Idaho National Laboratory’s Risk Analysis and Virtual Environment (RAVEN) framework. The main contribution of this study addresses several challenges in the current optimization methods of the energy portfolios in IES: First, the feasibility of generating the synthetic time series of the periodic peak data; Second, the computational burden of the conventional stochastic optimization of the energy portfolio, associated with the need for repeated executions of system models; Third, the inadequacies of previous studies in terms of the comparisons of the impact of the economic parameters. The proposed workflow can provide a scientifically defendable strategy to support decision-making in the electricity market and to help energy distributors develop a better understanding of the performance of integrated energy systems.

29 ENERGY PLANNING, POLICY, AND ECONOMY↗
DOE OSTI2022

Temperature-Dependent Carrier Extraction and the Effects of Excitons on Emission and Photovoltaic Performance in Cs0.05FA0.79MA0.16Pb(I0.83Br0.17)3 Solar Cells

The photovoltaic parameters of triple cation perovskite [Cs0.05FA0.79MA0.16Pb(I0.83Br0.17)3] solar cells are investigated focusing on the electro-optical properties and differences in performance at low and high temperatures. The signature of a parasitic barrier to carrier extraction is observed at low temperatures, which results in a loss of performance at T < 200 K. Intensity-dependent measurements indicate extraction across this parasitic interface is limited by a combination of the exciton binding energy and thermionic emission. However, the photovoltaic performance of the device is recovered at low intensity - where the photocarrier generation rate threshold is lower than the thermionic extraction rate. Loss of solar cell performance is also observed to be strongly correlated to an increase in photoluminescence intensity, indicating inhibited carrier extraction results in strong radiative recombination and that these systems do not appear to be limited by significant thermally activated non-radiative processes. Evidence of limited carrier extraction due to excitonic effects is also observed with a strong anti-correlation in photoluminescence and carrier extraction observed at lower temperatures.

barrier↗
DOE OSTI2023

Regional and Teleconnected Impacts of Solar Radiation‐Topography Interaction Over the Tibetan Plateau

Abstract Solar radiation‐topography interaction plays an important role in surface energy balance over the Tibetan Plateau (TP). However, the impacts of such interaction over the TP on climate locally and in the Asian regions remain unclear. This study uses the Energy Exascale Earth System Model (E3SM) to evaluate the regional and teleconnected impacts of solar radiation‐topography interaction over the TP. Land‐atmosphere coupled experiments show that topography regulates the surface energy balance, snow processes, and surface climate over the TP across seasons. Accounting for solar radiation‐topography interaction improves E3SM simulation of surface climate. The winter cold bias in air temperature decreases from −4.57 to −3.79 K, and the wet bias in summer precipitation is mitigated in southern TP. The TP's solar radiation‐topography interaction further reduces the South and East Asian summer precipitation biases. Our results demonstrate the topographic roles in regional climate over the TP and highlight its teleconnected climate impacts.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2023

Toward Solar Photovoltaic Storm Resilience: Learning from Hurricane Loss and Rebuilding Better

This case study report focuses on the rebuild of a 469 kW ground array located at the Almeric L. Christian Federal Building in Christiansted, St. Croix, in the U.S. Virgin Islands. The General Service Administration (GSA) suffered extensive damage to its solar arrays located throughout the Caribbean from Hurricanes Irma and Maria in 2017. While the damage that occurred was unfortunate, there are excellent lessons learned that can be gained and utilized on new systems. The St. Croix site provides a particularly high-value opportunity for lessons learned due to the innovative rebuilding process utilized by GSA managers and the in-depth analysis performed by the project engineers.

14 SOLAR ENERGY↗
DOE OSTI2022

Initiating a Roadmap for Solar Fuels R&D: Imagining Beyond Thermochemical Cycles

Sandia National Laboratories in collaboration with the National Renewable Energy Laboratory outline a framework for developing a solar fuels roadmap based on novel concepts for hybridizing gas-splitting thermochemical cycle s with high-temperature electro chemical steps. We call this concept SoHyTEC, a Solar Hybrid Thermochemical-Electrochemical Cycle. The strategy focuses on transforming purely thermochemical cycles that split water (H 2 O) and carbon dioxide (CO 2 ) to produce hydrogen (H 2 ) and carbon monoxide (CO) , respectively, the fundamental chemical building blocks for diverse fuels and chemicals , by substituting thermochemical reactions with high-temperature electrochemical steps. By invoking high-temperature electrochemistry, the energy required to complete the gas-splitting cycle is divided into a thermal component (process temperature) and an electrical component (applied voltage). These components, sourced from solar energy, are independently variable knobs to maximize overall process efficiency. Furthermore, a small applied voltage can reduce cycle process temperature by hundreds of degrees , opening the door to cost-effective solar concentrators and practical receiver/reactor de signs. Using the SoHyTEC concept as a backdrop, we outline a framework that advocates developing methods for automating information gathering, critically evaluating thermochemical cycles for adapting into SoHyTEC, establishing requirements based on thermodynamic analysis, and developing a model-based approach to benchmarking a SoHyTEC system against a baseline concentrating solar thermal integrated electrolysis plant. We feel these framework elements are a necessary precursor to creating a robust and adaptive technology development roadmap for producing solar fuels using SoHyTEC. In one example, we introduce high-temperature electrochemistry as a method to manipulate a fully stoichiometric two-step metal oxide cycle that circumvents costly separation processes and ultra-high cycle temperatures. We also identify and group water-splitting chemistries that are conceptually amenable to hybridization.

14 SOLAR ENERGY↗
DOE OSTI2022

Manufacturing Supply Chain Development for Modular Solar-Thermochemical Conversion Platform - CRADA 387 (Final Report)

Modular chemical process intensification (MCPI) is an emerging field where chemical processing is performed using small-scale modular equipment instead of conventional large centralized chemical plants. Conventional chemical plants benefit from economies of scale that encourage scale-up to ever larger plants. A goal of MCPI is to develop technology that intensifies processing so that equipment can be dramatically smaller and integrated into modular systems. Scale-up occurs by adding more modules in parallel rather than making the equipment larger. A key concept is that equipment and modules can ultimately be cheaper by leveraging economies of mass production, analogous to the automotive industry, in manufacturing the equipment. This project made significant progress toward this outcome by meeting the RAPID institute metric to reduce equipment cost by 20% for each doubling in manufacturing volume. The MCPI application was thermochemical technology that is being commercialized by STARS Technology Corporation, one of the CRADA partners. The technology converts solar and renewable power to chemical energy to produce renewable hydrogen, fuels, and chemicals. The benefit to the public is reduction in greenhouse gases that are contributing to climate change. The project transitioned the steam methane reforming (SMR) reactor from conventional fabrication methods to additive manufacturing (AM) direct metal laser sintering (DMLS) process. This is projected to reduce the cost of making a reactor by 58% when producing 100 reactors per year. Innovations in the DMLS process produced a patented design that reduces reactor weight by 60%. Reductions in material costs and processing time extend the DMLS advantage to higher production volumes. The new design promises to be 38% cheaper than the conventional processes at 1000 units per year. The resulting 87% reduction in the steam methane reforming (SMR) module cost in scaling from current costs meets the RAPID metric. The project was successful in producing and testing the first ever additively manufactured SMR reactors. A reactor achieved over 82% efficiency in converting electric power to chemical energy, which is a world record for an inductively heated SMR. The project has contributed to the design and assembly of a first demonstration plant that is headed to a hydrogen bus filling station in Thousand Palms, CA.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

Supercritical Treatment Technology for Water Purification (Annual Final Report)

This project continued the development of the Supercritical Water Extraction – Enhanced Targeted Recovery (SWEETR™) technology, a novel desalination process for treating hypersaline brines. The overall objective is to demonstrate the technical and economic feasibility of an innovative, energy efficient, and robust supercritical desalination technology to treat hypersaline solutions and separating saltwater into a pure water stream and valuable recovered solids, resulting in zero liquid discharge (ZLD). The proposed technology, focuses on innovative methods of applying supercritical water to treat highly concentrated brine solutions without incurring a high energy penalty. Integrating the technology with solar energy reduces the energy cost for the system. The results obtained during the proof-of-concept testing demonstrate that the SWEETR™ concept is technically feasible and that supercritical water treatment is a viable option with strong merit for treating high salinity waters. The strategic design of the system provides the opportunity to localize the supercritical zone, which helps reduce the overall energy cost associated with the desalination process. The process can be tuned to remove only the amount of salts required to make the treated water “fit for purpose”, providing further opportunities to minimize energy costs. The ability to destroy organic compounds associated with the water while simultaneously being able to desalinate makes SWEETR™ uniquely fitted for treating aqueous streams such as produced water from oil and gas extraction which contain small amounts of organics. Such mixed contaminant streams pose an extreme challenge for other treatment options. Future work will further develop the SWEETR™ technology to take it from the bench-scale to the pilot-scale, and ready the technology for commercial application.

04 OIL SHALES AND TAR SANDS↗
DOE OSTI2023

Accelerating Nature: Induced Atomic Order in Equiatomic FeNi

Abstract The production of locally atomically ordered FeNi (known by its meteoric mineral name, tetrataenite) is confirmed in bulk samples by simultaneous conversion X‐ray and backscattered γ‐ray 57 Fe Mössbauer spectroscopy. Up to 22 volume percent of the tetragonal tetrataenite phase is quantified in samples thermally treated under simultaneous magnetic‐ and stress‐field conditions for a period of 6 weeks, with the remainder identified as the cubic FeNi alloy. In contrast, all precursor samples consist only of the cubic FeNi alloy. Data from the processed alloys are validated using Mössbauer parameters derived from natural meteoritic tetrataenite. The meteoritic tetrataenite exhibits a substantially higher degree of atomic order than do the processed samples, consistent with their low uniaxial magnetocrystalline anisotropy energy of ≈1 kJ·m −3 . These results suggest that targeted refinements to the processing conditions of FeNi will foster greater atomic order and increased magnetocrystalline anisotropy, leading to an enhanced magnetic energy product. These outcomes also suggest that deductions concerning paleomagnetic conditions of the solar system, as derived from meteoritic data, may warrant re‐examination and re‐evaluation. Additionally, this work strengthens the argument that tetrataenite may indeed become a member of the advanced permanent magnet portfolio, helping to meet rapidly escalating green energy imperatives.

36 MATERIALS SCIENCE↗
DOE OSTI2023

Design of a Geothermal Power Plant With Solar Thermal Topping Cycle

Geothermal power plants are a reliable source of low-carbon power generation. However, modern electricity markets comprise relatively large proportions of variable renewable energy generation that may require power plants to flexibly dispatch energy. The power output, efficiency, and dispatch flexibility of a geothermal plant can be enhanced by integrating solar thermal energy into the system, as well as possibly compensating against ambient temperature variations. Concentrating solar thermal (CST) can generate temperatures much higher than conventional geothermal systems. Using a solar topping cycle is one way to efficiently convert high-temperature solar heat to electricity while also cascading lower-temperature heat to the geothermal power cycle, thereby increasing its power output and possibly its efficiency. A hybrid power cycle design is proposed and simulated using SimTech IPSEpro process modeling software. The design configuration depends on the expected temperature of the geothermal resource and the quantity of solar heat added at the design point. These design considerations are described and expected performance is calculated. The solar heat addition varies throughout the day and year; therefore, off-design models are necessary to assess the impact of solar availability (and ambient temperature) on the power plant performance. Off-design models are developed and combined with hourly weather data to facilitate an evaluation of annual system performance.

concentrating solar power↗
DOE OSTI2020

Luminescent Enhancement for Combined Solar and Commercial Agriculture. Final Report

This proposal will develop a new racking / mounting system combined with a new agriculture-tuned luminescent solar panel for low cost high tunnel implementation to produce both crops and electricity for small local farms. Crop trials performed under this specialized panel/racking system can be extended to open field agriculture with standard utility scale racking system in phase II. The US agricultural industry uses about 300 billion KW-hr of energy / year. Of this energy consumption, roughly 20% goes towards food production and 20% goes towards food processing. This proposal will allow farm land to simultaneously generate electricity, food AND provide jobs. Employment is one of the largest hurdles for the introduction of solar into rural areas. The ability to provide agricultural jobs in addition to solar energy from a plot of land will pave the way for greater adoption of photovoltaics in rural areas. A cost effective and highly durable hybrid power generating high tunnel greenhouse will be developed that generates electricity at less than $2.50/watt INSTALLED cost and can be used for crop production of high values crops. The high tunnel will use a new design of Soliculture greenhouse integrated luminescent solar panels to selectively absorb the green portion of the solar spectrum that is not used by plants and convert the light to red light with higher photosynthetic efficiency and to enhance power output of solar cells. Green light is selectively downshifted to red light using luminescent materials that match the photosythetically active region for plants and the efficiency maximum of Si photovoltaic cells. The color tuning associated with converting green light to red light has been shown to facilitate fruit production in commercial greenhouses growing cucumbers, lettuce and herbs.

14 SOLAR ENERGY↗
DOE OSTI2023

Design of a Geothermal Power Plant With Solar Thermal Topping Cycle: Preprint

Geothermal power plants are a reliable source of low-carbon power generation. However, modern electricity markets comprise relatively large proportions of variable renewable energy generation that may require power plants to dispatch energy flexibly. The power output, efficiency, and dispatch flexibility of a geothermal plant can be enhanced by integrating solar thermal energy into the system, as well as possibly compensating against ambient temperature variations. Concentrating Solar Thermal (CST) can generate temperatures much higher than conventional geothermal systems. Using a solar topping cycle is one way to efficiently convert high-temperature solar heat to electricity while also adding lower-temperature heat to the geothermal power cycle, thereby increasing its power output and possibly its efficiency. A hybrid power cycle design is proposed and is simulated using SimTech IPSEpro process modelling software. The design configuration depends upon the expected temperature of the geothermal resource and the quantity of solar heat added at the design point. These design considerations are described and expected performance is calculated. The solar heat addition varies throughout the day and year, therefore off-design models are necessary to assess the impact of solar availability (and ambient temperature) on the power plant performance. Off-design models are developed and combined with hourly weather data to facilitate an evaluation of annual system performance.

concentrating solar power↗
DOE OSTI2023

Titanium and chromium isotopic compositions of calcium-aluminum-rich inclusions: Implications for the sources of isotopic anomalies and the formation of distinct isotopic reservoirs in the early Solar System

As the earliest-dated solids in our Solar System, calcium-aluminum-rich inclusions (CAIs) provide a record of their formation environment near the young Sun and hold clues to the formation of planetary-scale isotopic reservoirs in the solar protoplanetary disk. Although CAIs from several CV, CK, CM, CO, and ordinary chondrites have been analyzed previously for their Ti isotopic compositions, CAIs from just three CV chondrites have been analyzed for their Cr isotopic compositions, and only a handful of CAIs have been measured for both their Ti and Cr isotopic compositions. We report mass-independent Ti and Cr isotopic anomalies in several CAIs from CV and CK chondrites; this is the first report of the Cr isotopic composition of a CAI from a CK chondrite. With this data, we aim to better constrain the compositional range of CAIs in ε 50 Ti versus ε 54 Cr space, thereby facilitating the isotopic characterization of the material inherited by the solar protoplanetary disk and the role of CAIs in the formation of distinct planetary-scale isotopic reservoirs in our early Solar System. The narrow range in isotopic anomalies in CAIs when compared to other early-formed refractory inclusions such as platy hibonite crystals (PLACs) and spinel-hibonite inclusions (SHIBs) suggests that CAIs record the mixing of these precursor materials and the averaging of their larger isotopic anomalies. The isotopic composition of CAIs is therefore likely the result of a combination of factors, including mixing of material inherited from their formation region, heterogeneous carrier phase distribution, and thermal processing in the disk. The ε 50 Ti and ε 54 Cr isotopic compositions of CAIs are not correlated, further demonstrating that these isotopic anomalies have different carrier phases. The Ti and Cr isotopic compositions of CAIs additionally show that CAIs alone cannot be responsible for the compositional difference between the non-carbonaceous chondritic (NC) and carbonaceous chondritic (CC) isotopic reservoirs but nevertheless do play a role in the formation of these large-scale isotopic reservoirs in the early Solar System.

58 GEOSCIENCES↗
DOE OSTI2021

Data-Driven Multi-agent Deep Reinforcement Learning for Distribution System Decentralized Voltage Control with High Penetration of PVs

This paper proposes a novel model-free/data-driven centralized training and decentralized execution multi-agent deep reinforcement learning (MADRL) framework for distribution system voltage control with high penetration of PVs. The proposed MADRL can coordinate both the real and reactive power control of PVs with existing static var compensators and battery storage systems. Unlike the existing DRL-based voltage control methods, our proposed method does not rely on a system model during both the training and execution stages. This is achieved by developing a new interaction scheme between the surrogate modeling of the original system and the multi-agent soft actor critic (MASAC) MADRL algorithm. In particular, the sparse pseudo-Gaussian process with a few-shots of measurements is utilized to construct the surrogate model of the original environment, i.e., power flow model. This is a data-driven process and no model parameters are needed. Furthermore, the MASAC enabled MADRL allows to achieve better scalability by dividing the original system into different voltage control regions with the aid of real and reactive power sensitivities to voltage, where each region is treated as an agent. This also serves as the foundation for the centralized training and decentralized execution, thus significantly reducing the communication requirements as only local measurements are required for control. Comparative results with other alternatives on the IEEE 123-nodes and 342-nodes systems demonstrate the superiority of the proposed method.

14 SOLAR ENERGY↗
DOE OSTI2026

An Educational Program on Concentrated Solar Power and Heliostats for Power Generation and Industrial Processes

The objective of this project was to design and implement a comprehensive educational and applied research program in Concentrated Solar Thermal Power (CSTP) and heliostat technologies at Northeastern University. In alignment with the U.S. Department of Energy's Heliostat Consortium (HelioCon) goals, the project aimed to expand student and public understanding of CSTP systems while simultaneously contributing to workforce development and the broader decarbonization strategy. A particular emphasis was placed on integrating hands-on student design projects and publicly disseminating educational content relevant to CSTP systems. The project addressed a critical gap in renewable energy education: CSTP and heliostats, despite their importance in utility-scale solar energy, are rarely included in standard mechanical engineering programs. This project established new pathways for students to engage with the topic through the creation of a 4-credit graduate/senior elective course, development of five industry-facing short courses, and the inclusion of CSTP-based capstone design projects. Over two academic years, 36 students across six senior design teams developed and tested technologies such as deformable heliostats, beacon-based tracking systems, and solar-powered pyrolizers for biomass-to-biochar conversion. Concurrently, 30 undergraduate and graduate students were enrolled in the new academic course centered around CSTP principles. To ensure the relevance and accessibility of the short course content, the project team engaged with industry professionals, technical policy stakeholders, and potential course participants through structured surveys and informal consultations. Feedback from 28 respondents guided the structure, length, and delivery format of the courses - resulting in a modular design broken into five workshops. The feedback emphasized the need for flexible, asynchronous delivery and practical case studies, particularly in areas such as heliostat control, thermal storage, and solar fuel production. This engagement helped align the courses with the evolving knowledge demands of the renewable energy workforce and ensured that participants from both technical and policy backgrounds could meaningfully benefit from the material. The research and educational activities advanced the understanding of heliostat control systems, optical performance under misalignment, and thermal system integration in solar-driven pyrolysis applications. Methods and designs explored in this project proved to be both technically effective and economically feasible at the lab scale. Prototypes were constructed using commercially available components and custom-fabricated elements, demonstrating that meaningful performance improvements can be achieved with modest material and fabrication costs, supporting the feasibility of student-led research in this field. The public benefit of this project is twofold. First, it cultivates a pipeline of engineers trained to be familiar with CSTP principles, an essential workforce need identified by the Department of Energy for achieving its 2030 cost and deployment targets. Second, it contributes openly accessible educational materials, course content, and experimental frameworks to the broader community, enabling other institutions to adopt or adapt similar programming. Through outreach activities, curriculum integration, and technical exposure, this project contributes to a more informed and capable renewable energy workforce while supporting innovation in heliostat and CSTP system design. A new technical report is being prepared to document the development of the course and its outcomes, with plans to publish it in the ASME Open Access Journal of Engineering to ensure global accessibility, free of cost.

14 SOLAR ENERGY↗
DOE OSTI2025

Semiconductor‐Electrocatalyst Contacts: Theory, Experiment, and Applications to Solar Water Photoelectrolysis

The goal of the work supported by this program was to use new types of photoelectrochemical experiments, supported by simulation and theory, to develop an improved microscopic picture of electron transfer in combined semiconductor|catalyst|solution (sem|cat|sol) systems. An emphasis was placed on developing techniques which can directly characterize electronic interfacial phenomena without first assuming a junction model. We then aimed to illustrate the design principles that enhance interfacial processes and enable high-efficiency devices. Our work thus provides deep insight into the processes that, in general, use light to drive chemical reactions.

14 SOLAR ENERGY↗
DOE OSTI2026

Photocatalytic Ammonia Synthesis using Fe-Based MOFs: The Role of Ligand Functionalization

Photocatalytic ammonia (NH 3 ) synthesis offers a carbon-neutral alternative to the Haber−Bosch process, which generates 42 million metric tons of CO 2 equivalent emissions annually. However, solar-to-ammonia conversion with contemporary photocatalysts remains far from practical requirements, and understanding the limiting factors in systems with well-defined active sites is crucial. Here, we show how the μ 3 -oxo-centered trinuclear Fe cluster in MIL-101(Fe) functions as the catalytic motif for N 2 -to-NH 3 conversion through combined experimental and computational investigations. Comparative studies with a molecular analogue demonstrate that the cluster is stabilized within the MOF framework, sustaining redox cycling and maintaining high catalytic activity. We systematically functionalized the dicarboxylate ligands of MIL-101(Fe) with −NH 2 , −Br, −NO 2 , −F, and −CF 3 to probe how ligand chemistry modulates Fe electron density, N 2 adsorption capacity, and proton availability, correlating these properties with catalytic performance using spectroscopic and surface characterization techniques alongside timeresolved infrared to assess excited-state lifetimes. F-functionalization optimally balances N 2 activation, proton availability at Fe active sites, and excited-state lifetimes, boosting NH 3 production by ∼ 60% relative to unmodified MIL-101(Fe). This study of ligandfunctionalized MIL-101(Fe) MOFs uncovers the underlying structure-activity relationships and advances design principles for solardriven NH 3 synthesis.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2022

Modeling Vapor Transport Deposition of Metal-halide Perovskite Thin Films for Photovoltaic and Optoelectronic Devices

Over the past decade, metal halide perovskites (MHPs) have emerged as a promising materials platform for high-efficiency solar cells and low-cost optoelectronics. However, there are challenges that frustrate the large-scale manufacturing of MHP devices, including difficulty in controlling film composition, interface formation and their device instability under ambient conditions. Vapor processing offers an attractive path to manufacturability, while also opening the door to new opportunities in device design that could favorably impact ultrahigh efficiency tandem solar cells or overall stability. Emphasis here is on the use of an alternate processing methodology, vapor transport deposition (VTD), to deposit the MHP layer. In experimental work, we found that our deposition system had significant run-to-run variations in film thickness and composition. To understand and resolve these issues, we use COMSOL Multiphysics software to model the precursor deposition rate numerically, trying to guide the broad range of parameters in the system. The result can be matched with experimental data and provides insight into system hydrodynamics and molar transport effects. Finally, we show that chamber pressure is a key factor to scale up the VTD technique.

Hsu, Wan-Ju↗