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At least 343 records · Page 19
All sourcesNASA NTRSDOE OSTI
NASA NTRS1994

Magnetite: What it reveals about the origin of the banded iron formations

Magnetite, Fe3O4 is produced abiotically and biotically. Abiotically, magnetite is a late magmatic mineral and forms as a consequence of the cooling of iron rich magma. Biotically, magnetite is produced by several organisms, including magnetotactic bacteria. Hematite, Fe2O3, is also produced abiotically and biotically. Abiotically, hematite rarely occurs as a primary mineral in igneous rocks, but is common as an alteration product, fumarole deposit, and in some metamorphosed Fe-rich rocks. Biotically, hematite is produced by several types of microorganisms. Biologically-produced magnetite and hematite are formed under the control of the host organism, and consequently, have characteristics not found in abiotically produced magnetite and hematite crystals. To determine if the magnetite and hematite in the Banded Iron Formation was biologically or abiotically produced, the characteristics of biologically-produced magnetite and hematite (concentrated from Aquaspirillum magnetotacticum) and abiotically-produced magnetite and hematite obtained from Wards Scientific Supply Company, were compared with characteristics of magnetite and hematite concentrated from the Gunflint Banded Iron Formation (Ontario, Canada) using thermal and crystallographic analytical techniques. Whole rock analysis of the Gunflint Banded Iron Formation by x-ray diffraction (XRD) and differential thermal analysis (DTA) revealed the presence of quartz, hematite, siderite and dolomite as the major minerals, and magnetite, greenalite, pyrite, pyrrhotite and apatite as the minor minerals. Analysis of a crude magnetic fraction of the Gunflint showed the minerals quartz, hematite, siderite, dolomite, and magnetite. Analysis of the crude magnetic fraction from Aquaspirillum magnetotacticum revealed organic compounds plus hematite and magnetite. The mineral identification and particle size distribution data obtained from the DTA along with XRD data indicate that the magnetite and hematite from the Gunflint BIF share some similarities with biologically formed magnetite and hematite.

Schwartz, D. E.↗
NASA NTRS1995

Thermal emission from particulate surfaces: A comparison of scattering models with measured spectra

Emissivity spectra of particulate mineral samples are highly dependent on particle size when that size is comparable to the wavelength of light emitted (5-50 micrometers for the midinfrared). Proper geologic interpretation of data from planetary infrared spectrometers will require that these particle size effects be well understood. To address this issue, samples of quartz powders were produced with narrow, well-characterized particle size distributions. Mean particle diameters in these samples ranged from 15 to 227 micrometers. Emission spectra of these powders allow the first detailed comparison of the complex spectral variations with particle size observed in laboratory data with the predictions of radiative transfer models. Four such models are considered here. Hapke's relectance theory (converted to emissivity via Kirchoff's law) is the first model tested. Hapke's more recently published emission theory is also employed. The third model, the 'Mie/Conel' model, uses Mie single scattering with a two-stream approximation for multiple scattering. This model, like the first, is a converted reflec- tance model. Mie scattering assumes particles are both spherical and well separated, which is not true for the quartz powders, but includes diffraction effects. The fourth model uses the Mie solution for single scattering by spheres and inputs those results into the multiple scattering formalism of Hapke's emission theory. The results of the four models are considered in relation to the values of the optical constants n and k. We have grouped these as class 1 (k large), class 2 (k moderate, n is approximately 2), class 3 (k small, n is approximately 2), and class 4 (k small, n is approximately 1). In general, the Mie/Hapke hybrid model does best at predicting variations with grain size. In particular, it predicts changes of the correct pattern, although incorrect magnitude, for class 1 bands, where large increases in emissivity with decreasing grain size are observed. This model also does an excellent job on moderate (class 2) and very weak and intraband (class 3) regions, and correctly predicts the emission maximum and its invariance with grain size near the Christiansen frequency (class 4). The Mie/Hapke hybrid model also has the fewest free parameters of the four models examined, while maintaining the most physical treatment of the radiative transfer. The Mie/Conel model performs as well as the Mie/Hapke hybrid model in strong bands (class 1) but does not accurately model the behavior of moderate (class 2) and very weak (class 3) bands.

Moersch, J. E.↗
NASA NTRS1995

NSTAR Ion Thruster Plume Impact Assessments

Tests were performed to establish 30-cm ion thruster plume impacts, including plume characterizations via near and farfield ion current measurements, contamination, and sputtering assessments. Current density measurements show that 95% of the beam was enclosed within a 22 deg half-angle and that the thrust vector shifted by less than 0.3 deg during throttling from 2.3 to 0.5 kW. The beam flatness parameter was found to be 0.47, and the ratio of doubly charged to singly charged ion current density decreased from 15% at 2.3 kW to 5% at 0.5 kW. Quartz sample erosion measurements showed that the samples eroded at a rate of between 11 and 13 pm/khr at 25 deg from the thruster axis, and that the rate dropped by a factor of four at 40 deg. Good agreement was obtained between extrapolated current densities and those calculated from tantalum target erosion measurements. Quartz crystal microbalance and witness plate measurements showed that ion beam sputtering of the tank resulted in a facility material backflux rate of -10 A/hr in a large space simulation chamber.

Myers, Roger M.↗
NASA NTRS1995

Polarization errors associated with birefringent waveplates

Although zero-order quartz waveplates are widely used in instrumentation that needs good temperature and field-of-view characteristics, the residual errors associated with these devices can be very important in high-resolution polarimetry measurements. How the field-of-view characteristics are affected by retardation errors and the misalignment of optic axes in a double-crystal waveplate is discussed. The retardation measurements made on zero-order quartz and single-order 'achromatic' waveplates and how the misalignment errors affect those measurements are discussed.

West, Edward A.↗
NASA NTRS1996

Pulsed Plasma Thruster Contamination

Pulsed Plasma Thrusters (PPT's) are currently baselined for the Air Force Mightysat II.1 flight in 1999 and are under consideration for a number of other missions for primary propulsion, precision positioning, and attitude control functions. In this work, PPT plumes were characterized to assess their contamination characteristics. Diagnostics included planar and cylindrical Langmuir probes and a large number of collimated quartz contamination sensors. Measurements were made using a LES 8/9 flight PPT at 0.24, 0.39, 0.55, and 1.2 m from the thruster, as well as in the backflow region behind the thruster. Plasma measurements revealed a peak centerline ion density and velocity of approx. 6 x 10(exp 12) cm(exp -3) and 42,000 m/s, respectively. Optical transmittance measurements of the quartz sensors after 2 x 10(exp 5) pulses showed a rapid decrease in plume contamination with increasing angle from the plume axis, with a barely measurable transmittance decrease in the ultraviolet at 90 deg. No change in optical properties was detected for sensors in the backflow region.

Myers, Roger M.↗
NASA NTRS1995

Interfacial Force Field Characterization in a Constrained Vapor Bubble Thermosyphon

Isothermal profiles of the extended meniscus in a quartz cuvette were measured in the earth's gravitational field using an image-analyzing interferometer that is based on computer-enhanced video microscopy of the naturally occurring interference fringes. These profiles are a function of the stress field. Experimentally, the augmented Young-Laplace equation is an excellent model for the force field at the solid-liquid-vapor interfaces for heptane and pentane menisci on quartz and tetradecane on SFL6. The effects of refractive indices of the solid and liquid on the measurement techniques were demonstrated. Experimentally obtained values of the disjoining pressure and dispersion constants were compared to those predicted from the Dzyaloshinskii - Lifshitz - Pilaevskii theory for an ideal surface and reasonable agreements were obtained. A parameter introduced gives a quantitative measurement of the closeness of the system to equilibrium. The nonequilibrium behavior of this parameter is also presented

DasGupta, Sunando↗
NASA NTRS1993

Diacetylene and Polydiacetylene Derivatives of 2-Methyl-4-Nitroaniline for Second-Harmonic Generation

A novel diacetylene derivative of 2-Methyl-4-NitroAniline (MNA), a well-known material for Second-Harmonic Generation (SHG), is synthesized. This monomer DiAcetylene MethylNitroAniline, (DAMNA) is characterized by means of the Kurtz technique at 1064 nm and is found to have an SHG powder efficiency 62.5 % that of MNA itself. Thin crystalline films of DAMNA are grown onto quartz, Teflon, and Kapton substrates by means of vapor deposition in vacuum. These films are then polymerized in the solid state by exposure to long-wavelength UV radiation to give crystalline polydiacetylene thin films (PDAMNA). The films are next characterized for SHG, using an unpolymerized DAMNA film as a reference. Interestingly, films grown onto Teflon exhibit greater orientation and significantly greater SHG than those grown onto quartz and Kapton. This result is promising in that it demonstrates the potential of PDAMNA as both a crystalline and polymeric material for SHG applications, in which highly oriented thin films are desired. Computational modeling (usingAM1) is also carried out on DAMNA and is compared to the experimental results.

Paley, M. S.↗
NASA NTRS1996

A Model of the Chicxulub Impact Basin Based on Evaluation of Geophysical Data, Well Logs, and Drill Core Samples

Abundant evidence now shows that the buried Chicxulub structure in northern Yucatan, Mexico, is indeed the intensely sought-after source of the ejecta found world-wide at the Cretaceous-Tertiary (K/T) boundary. In addition to large-scale concentric patterns in gravity and magnetic data over the structure, recent analyses of drill-core samples reveal a lithological assemblage similar to that observed at other terrestrial craters. This assemblage comprises suevite breccias, ejecta deposit breccias (Bunte Breccia equivalents), fine-grained impact melt rocks, and melt-matrix breccias. All these impact-produced lithologies contain diagnostic evidence of shock metamorphism, including planar deformation features in quartz, feldspar, and zircons; diaplectic glasses of quartz and feldspar; and fused mineral melts and whole-rock melts. In addition, elevated concentrations of Ir, Re, and Os, in meteoritic relative proportions, have been detected in some melt-rock samples from the center of the structure. Isotopic analyses, magnetization of melt-rock samples, and local stratigraphic constraints identify this crater as the source of K/T boundary deposits.

Sharpton, Virgil L.↗
NASA NTRS1997

Mass Loading Characteristics of Crystal Clock Oscillators

The 10-MHz piezoelectric quartz-crystal microbalance (QCM) has been used extensively for stratospheric aerosol sampling. We have undertaken laboratory studies of the QCM response to mass loading by trace gases. However, this device requires dual oscillator circuitry and the mass sensitivity can often be affected by the electronics. The coatings on the quartz crystals are sometimes difficult to remove after they have reacted with a particular gas and a disposable crystal system would be desirable. The cost of the dual oscillator-based QCM makes this a prohibitive option. Since our goal is to develop a cost-effective microbalance system with stable electronics we have begun testing of crystal clock oscillators, which are assembled with their own circuitry. We have been using chemically specific coatings for ozone to determine if the sensitivity and mass-frequency ratios are comparable to that of the 10-MHz QCM.

Cobb, Janel↗
NASA NTRS1997

Calibration of the QCM/SAW Cascade Impactor for Measurement of Ozone in the Stratosphere

The Quartz Crystal Microbalance Surface Acoustic Wave (QCM/SAW) cascade impactor collects size-fractionated distributions of aerosols on a series of 10 MHz quartz crystals and employs SAW devices coated with chemical sensors for gas detection. Presently, we are calibrating the ER-2 certified QCM/SAW cascade impactor in the laboratory for the detection of ozone. Experiments have been performed to characterize the QCM and SAW mass loading, saturation limits, mass frequency relationships, and sensitivity. We are also characterizing sampling efficiency by measuring the loss of ozone on different materials. There are parallel experiments underway to measure the variations in the sensitivity and response of the QCM/SAW crystals as a function of temperature and pressure. Results of the work to date will be shown.

Wright, Cassandra K.↗
NASA NTRS1999

Morphology and Structure of ZnO Films Synthesized by Off-Axis Sputtering Deposition

ZnO is a wide-band-gap oxide material that has many applications. A new potential application of ZnO material is for light emitting devices since its structure and electrical properties are similar to that of the GaN material (a blue laser candidate). It also is a good substrate for fabricating GaN-based devices. Off-axis sputtering technique has revealed great potential in synthesizing excellent oxide materials because the negative ion bombardment is greatly reduced when adatoms condense on substrates. The surface of films grown by off-axis sputtering will be much smoother than that produced in a regular sputtering configuration. A growth mechanism is studied by investigating the morphology and structure of ZnO films under different growth conditions and orientations. ZnO films are deposited on (0001) sapphire and quartz substrates by off- axis sputtering deposition at various oxygen/argon mixture ratios and pressures and at different temperatures. All films reveal highly textured structures on quartz substrates and epitaxial growth on sapphire substrates. Two off-axis configurations, vertical and horizontal orientations are conducted to study the process of film growth, surface morphology, and film structure. X-ray diffraction, scanning probe microscopy, and electrical measurements are used to characterize these films. Detailed results will be discussed in the presentation. Keywords: ZnO, Photonic material, Off-axis sputtering, Growth mechanism

Zhu, Shen↗
NASA NTRS1999

Orientation Effects in ZnO Films Using Off-Axis Sputtering Deposition

ZnO is a wide-band-gap oxide material and has been used in numerous applications. It is also a good substrate for fabricating GaN-based (a blue laser candidate) devices. Off-axis sputtering technique is one of the best techniques in synthesizing oxide materials because negative ion bombardment and particle kinetic energy is greatly reduced when adatoms condense on substrates. Since the sputtered material from the target arrive on the substrate surface at a 90 deg. configuration, which differs from the normal sputtering geometry, it is expected that the film uniformity and composition distributions will be affected. However, the details of these properties and mechanisms have not been well studied. ZnO films are synthesized on (0001) sapphire and quartz substrates by off-axis sputtering deposition in various oxygen/argon mixture ratios and pressures at different temperatures. Substrates and sputtering sources are placed at three different orientations that are orthogonal to each other. The normal direction of a substrate is parallel to the gravity vector and the other is perpendicular to it. Film thickness profiles at different growth orientations are determined using a profimeter. All films grown at high temperatures have highly textured structures on quartz substrates and epitaxially grow on sapphire substrates. Because of this process, the film surface is very smooth. X-ray diffraction, scanning probe microscopy, and Fourier transfer infrared spectroscopy, and electrical measurements will be used to characterize these films. Detailed results will be discussed in the presentation.

Zhu, Shen↗
NASA NTRS1999

The Mars Environmental Compatibility Assessment (MECA)

The Mars Environmental Compatibility Assessment (MECA) will evaluate the Martian environment for soil and dust-related hazards to human exploration as part of the Mars Surveyor Program 2001 Lander. Sponsored by the Human Exploration and Development of Space (HEDS) enterprise, MECA's goal is to evaluate potential geochemical and environmental hazards that may confront future martian explorers, and to guide HEDS scientists in the development of high fidelity Mars soil simulants. In addition to objectives related to human exploration, the MECA data set will be rich in information relevant to basic geology, paleoclimate, and exobiology issues. The integrated MECA payload contains a wet-chemistry laboratory, a microscopy station, an electrometer to characterize the electrostatics of the soil and its environment, and arrays of material patches to study the abrasive and adhesive properties of soil grains. MECA is allocated a mass of 10 kg and a peak power usage of 15 W within an enclosure of 35 x 25 x 15 cm (figures I and 2). The Wet Chemistry Laboratory (WCL) consists of four identical cells that will accept samples from surface and subsurface regions accessible to the Lander's robotic arm, mix them with water, and perform extensive analysis of the solution. Using an array of ion-specific electrodes (ISEs), cyclic voltammetry, and electrochemical techniques, the chemistry cells will wet soil samples for measurement of basic soil properties of pH, redox potential, and conductivity. Total dissolved material, as well as targeted ions will be detected to the ppm level, including important exobiological ions such as Na, K+, Ca++, Mg++, NH4+, Cl, S04-, HC03, as well as more toxic ions such as Cu++, Pb++, Cd++, Hg++, and C104-. MECA's microscopy station combines optical and atomic-force microscopy (AFM) to image dust and soil particles from millimeters to nanometers in size. Illumination by red, green, and blue LEDs is augmented by an ultraviolet LED intended to excite fluorescence in the sample. Substrates were chosen to allow experimental study of size distribution, adhesion, abrasion, hardness, color, shape, aggregation, magnetic and other properties. To aid in the detection of potentially dangerous quartz dust, an abrasion tool measures sample hardness relative to quartz and a hard glass (Zerodur).

Meloy, Thomas P.↗
NASA NTRS1999

The Enigmatic Longevity of Granular Materials on Mars: The Case for Geologically Episodic Dune Formation

Martian sand dunes are concentrated in vast sand seas in the circumpolar belt of the planet's northern hemisphere, but they are also pervasive over the whole planet. Their occurrence is to be expected on a super-arid planetary surface subjected to boundary layer drag from a continually active atmosphere. Whilst their occurrence is to be expected, their survival is enigmatic. But the enigma only arises if the martian system is considered similar to Earth's --where sand is moved highly frequently, more or less on a seasonal basis. Experimentally it is readily demonstrated that active sand will soon wear down to small grains and eventually diminish to below the critical sand size required to sustain dune formation. According to conventional wisdom, sand moves at higher speeds on Mars than on Earth, and if it were to move as frequently as it does on Earth, then the dune-forming sand population should have long since disappeared, given the great longevity of the martian aeolian system (Sagan coined the term "kamikaze" grains to express this disappearance). No supply of sand could keep pace with this depletion, especially in light of the fact that Mars does not have very active weathering, nor significant crustal differentiation. On Earth, plate tectonics, magmatic activity, and general crustal differentiation over geological time have produced great concentrations of quartz crystals in the continental crustal masses. Not only are these quartz grains chemically and mechanically resilient, they are about the right size for being transported by either wind or water. Add to this, the geologically recent contribution of glacial grinding, and it is easy to see why there are dune field on Earth. So what are the martian dunes composed of, and how does the material survive the eons of attrition? In addition to experimental demonstrations of sand comminution in laboratory aeolian simulations, the problem can be approached from first principles. Sagan showed that by simple considerations of material strength versus mechanical work applied to the material, comminution to sub-sand size would be inevitable. Another semi-analytical approach might be taken by considering that the archetypal aeolian sand surface texture is an irregularly pitted ("frosted") surface composed of chipping hollows approximately 10 microns in diameter, 5 microns deep. Their volume = about 250 cubic microns, or about 1/25000 of the volume of a 100 micron diameter dune grain. Because a saltating grain always strikes another grain, then two surfaces are impacted. Thus each grain undergoes two impacts for every one saltation leap, when the impact statistics are considered for a closed dune system (it can be calculated that a grain can never undergo <1 impact, and never >2 per saltation leap). Hence, if we conservatively assume that there is damage to a grain each time it bounces, but with the minimum damage of only 2 microscopic craters per impact, then approximately 12,500 impacts are required to completely eliminate the grain. Of course, it would require only a fraction of this amount to reduce the grain to below sand size. A grain will make only several tens of saltation leaps on the stoss side of a dune before becoming buried on the lee slope. The dune then has to move its full length before the grain is exhumed again for abrasion. Even with this hiatus in transport, it is easy to see that terrestrial dunes need resupplying with sand in order to survive. In recent theoretical work it has been shown that martian aeolian transport may be initiated with high-speed grains, but this converts to a lower energy dynamic transport equilibrium in which a reptation population dominates grain transport (on Earth, at least half of the flux is by reptation and creep). On Mars, therefore, average grain speeds may be lower than those on Earth, or at least comparable. This would permit greater longevity for martian sands, but it would not go far enough to solve the survival problem. It may, however, explain why martian dunes are about the same size as terrestrial dunes. If martian saltation leaps were significantly longer than on Earth (as usually assumed), then a dune's lee slope would have to be correspondingly longer in order to trap the sand; this would scale up the whole dune structure. But with shorter trajectories in a reptation population, larger dunes would be unnecessary. Additional information is contained in the original.

Marshall, J.↗
NASA NTRS1997

New Potential Sources for Black Onaping Carbon

One intriguing and important issue of the Sudbury Structure concerns the source of the relatively large amount of C in the Onaping Formation Black member. This dilemma was recently addressed, and the conclusion was reached that an impactor could not have delivered all of the requisite C. Becker et al. have suggested that much of the C came from the impactor and reported the presence of interstellar He "caged" inside some fullerenes that may have survived the impact. So, conceivably, the C inventory in the Sudbury Structure comes from both target and impactor materials, although the known target rocks have little C. We discuss here the possibility of two terrestrial sources for at least some of the C: (1) impact evaporation/dissociation of C from carbonate target rocks and (2) the presence of heretofore-unrecognized C-rich (up to 26 wt%) siliceous "shale," fragments, which are found in the upper, reworked Black member. Experimental: Hypervelocity impact of a 0.635-diameter Al projectile into dolomite at 5.03 km/s (performed at the Ames Research Center vertical gun range) produced a thin, black layer (= 0.05 mm thick) that partially lined the crater and coated impactor remnants. Scanning electronic microscope (SEM) imagery shows this layer to be spongelike on a submicron scale and Auger spectroscopic analyses yield: 33% C, 22% Mg, 19% 0, and 9% Al (from the projectile). Elemental mapping shows that all of the available 0 is combined with Ca and Mg, Al is not oxidized, and C is in elemental form. Dissociation efficiency of C from CO2 is estimated to be <10% of crater volume. Raman spectroscopy indicates that the C is highly disorganized graphite. Another impact experiment [4] also produced highly disordered graphite from a limestone target (reducing collector), in addition to small amounts of diamond/lonsdaleite/chaoite (oxidizing collector). These experiments confirm the reduction of C from carbonates in impact vapor plumes. Observational: SEM observations and microprobe analyses of small, black shalelike inclusions in the upper Black Onaping indicate high C contents (7-26 wt% avg. = 16%). They contain mostly quartz and carbonaceous matter with small amounts of altered K-feldspar, clays, Fe oxide, and a sulfide. No evidence of shock is seen in quartz, and overall characteristics indicate a natural, lightly metamorphosed carbonaceous shale or mudstone that probably existed as a preimpact rock in the target region and distal fragments washed in during early crater filling. Fragments range in size from tens of microns to cm and increase in abundance in the upper Black toward the Onwatin contact, although their distribution is highly irregular. This increase corresponds to an increase in "organic" C with increasingly negative delta-13 C values and S, together with a decrease in fullerene abundance. In addition, we have found soot in acid-demineralized residues of the Onwatin but not in the Onaping samples. These data could be consistent with impact plume and atmospheric chemical processes, with possible diageneric ovedays. We are analyzing carbonaceous fractions of the Onaping and Onwatin to determine diagnostic C isotopic signatures Analyses by Whitehead et al. on bulk samples revealed no definitive source or processes, although delta-13 C values for "organic" C overlapped those for some meteorites. Discussion: If impact evaporation of Sudbury target carbonates did occur, then where are the carbonates? Distal carbonate (limestone/dolostone) exposures of the Espanola Formation (Huronian Supergroup) are generally thin-bedded, although remnants that partially encompass the Sudbury Crater are variable in thickness and may locally reach 250 m . If a carbonate thickness of 100-200 in existed at the target site, then copious amounts of C could have been reduced by impact processing of carbonates and also C-shale, depending on the efficiency of the processing and the amount of postimpact oxidation. Conclusion: The Sudbury crater offers a unique opportunity to study preserved characteristics of immediate carbonaceous fallback matter and particles of short-term residency in the impact plume as well as dust/aerosols from postimpact atmospheric processing.

Bunch, T. E.↗
NASA NTRS1999

Low Energy Sputtering Experiments for Ion Engine Lifetime Assessment

The sputtering yield of molybdenum under xenon ion bombardment was measured using a Quartz Crystal Microbalance. The measurements were made for ion kinetic energies in the range 100-1keV on molybdenum films deposited by magnetron sputtering in conditions optimized to reproduce or approach bulk-like properties. SEM micrographs for different anode bias voltages during the deposition are compared, and four different methods were implemented to estimate the density of the molybdenum films. A careful discussion of the Quartz Crystal Microbalance is proposed and it is shown that this method can be used to measure mass changes that are distributed unevenly on the crystal electrode surface, if an analytical expression is known for the differential mass-sensitivity of the crystal and the erosion profile. Finally, results are presented that are in good agreement with previously published data, and it is concluded that this method holds the promise of enabling sputtering yield measurements at energies closer to the threshold energy in the very short term.

Duchemin Olivier B.↗
NASA NTRS1997

Calibration of the QCM/SAW Cascade Impactor for Measurement of Ozone

The Quartz Crystal Microbalance Surface Acoustic Wave (QCM/SAW) cascade impactor is an instrument designed to collect size-fractionated distributions of aerosols on a series of quartz crystals and employ SAW devices coated with chemical sensors for gas detection. We are calibrating the cascade impactor in our laboratory for future deployment for in-situ experiments to measure ozone. Experiments have been performed to characterize the QCM and SAW mass loading, saturation limits, mass frequency relationships, and sensitivity. The characteristics of mass loading, saturation limits, mass-frequency relationships, sensitivity, and the loss of ozone on different materials have been quantified.

Williams, Cassandra K.↗
NASA NTRS2001

Ion Energy and Ion Flux Distributions of CF4/Ar/O2 Inductively Coupled Plasmas in a GEC Cell

Knowledge of ion kinetics in plasma processing gas mixtures, such as CF4:Ar:O2, is important for understanding plasma assisted etching and deposition of materials. Ion energies and ion fluxes were measured in this mixture for 80:10:10, 60:20:20, and 40:30:30 mixture ratios in the pressure range of 10-50 mTorr, and at 200 and 300 W of RF power. Ions from plasma, sampled through a 10 micron orifice in the center of the lower plane electrode, were energy and mass analyzed by a combination of electrostatic energy and quadrupole mass filters. CFx(+) (x = 1 - 3), F2(+), F(+), C(+) from CF4, Ar(+) from Ar, and O2(+) and O(+) from O2, and by-product ions SiFx(+)(x = 1 - 3) from etching of quartz coupling window, COFx(+)(x = 1 - 3), CO(+), CO2(+), and OF(+) were detected. In all conditions ion flux decreases with increase of pressure but increase with increase of RF power. Ar(+) signal decreases with increase of pressure while CF3(+), which is the dominant ion at all conditions, increases with increase in pressure. The loss mechanism for Ar(+) and increase of CF3(+) is due to large cross section for Ar(+) + CF4 yields Ar + CF3(+) + F. Ion energies, which range from 15-25 eV depending on plasma operating conditions, are nearly Gaussian. By-product ion signals are higher at lower pressures indicating stronger plasma interaction with quartz window.

Rao, M. V. V. S.↗