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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 37 records · Page 2
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Temporal pre-pulse shaping in dual pulse laser produced plasma for the optimization of the EUV source in tin microdroplet system

Dual-laser beams interacting with small droplets of liquid tin are currently the most efficient systems for producing the 13.5 nm EUV photon radiation source required for the next generation microchips. Usually, EUV light is produced during the second main-pulse stage, while the pre-pulse (PP) is used for target preparation, i.e., droplet preheating, vaporization, and target deformation. However, the PP laser energy can be utilized more efficiently if the EUV producing plasma is being developed during the PP stage as well. In this work, we study the ways of optimization of the PP laser temporal shape to achieve conditions for maximum EUV output during the pre-pulse. The size of the deformed droplet is kept optimized for the following main laser pulse. Our simulations showed a significant increase in the EUV output at the pre-pulse stage when a ramping profile is used for the laser temporal shape. Using the ramped square pre-pulse produces 24% gain in the EUV output in comparison with the standard Gaussian temporal profile (i.e., regular Nd:YAG shape) for the same energy of the laser pulse.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Acceleration mechanisms of energetic ion debris in laser-driven tin plasma EUV sources

Laser-driven tin plasmas are driving new-generation nanolithography as sources of extreme ultraviolet (EUV) radiation centered at 13.5 nm. A major challenge facing industrial EUV source development is predicting energetic ion debris produced during the plasma expansion that may damage the sensitive EUV channeling multilayer optics. Gaining a detailed understanding of the plasma dynamics and ion acceleration mechanisms in these sources could provide critical insights for designing debris mitigation strategies in future high-power EUV sources. Here, we develop a fully kinetic model of tin-EUV sources using one-dimensional particle-in-cell simulations to study ion debris acceleration, which will be valuable for cross-validation of radiation-hydrodynamic simulations. An inverse-bremsstrahlung heating operator is used to model the interaction of a tin target with an Nd:YAG laser, and thermal conduction is included through a Monte Carlo Coulomb collision operator. While the large-scale evolution is in reasonable agreement with analogous hydrodynamic simulations, the significant timescale for collisional equilibration between electrons and ions allows for the development of prominent two-temperature features. A collimated flow of energetic ions is produced with a spectrum that is significantly enhanced at high energies compared to fluid simulations. The dominant acceleration mechanism is found to be a large-scale electric field supported mainly by the electron pressure gradient, which is enhanced in the kinetic simulations due to the increased electron temperature. We discuss the implications of these results for future modeling of tin-EUV sources and the development of debris mitigation schemes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS1990

Solar EUV irradiance derived from a sounding rocket experiment on November 10, 1988

Results are presented on the solar EUV irradiance measurements in the range 30-100 nm obtained in a sounding rocket experiment launched from the White Sands Missile Range, New Mexico, on November 10, 1988. The observed solar EUV irradiance was found to be about 20 percent less than the solar EUV flux from a proxy model based on the daily 10.7-cm solar flux and its 81-day mean and the AE-E solar EUV data taken in the 1970s. The November 10 measurement of the solar EUV flux provides a good calibration reference spectrum for the solar EUV instruments on the San Marco satellite.

Woods, Thomas N.↗
NASA NTRS1992

Quality control of EUVE databases

The publicly accessible databases for the Extreme Ultraviolet Explorer include: the EUVE Archive mailserver; the CEA ftp site; the EUVE Guest Observer Mailserver; and the Astronomical Data System node. The EUVE Performance Assurance team is responsible for verifying that these public EUVE databases are working properly, and that the public availability of EUVE data contained therein does not infringe any data rights which may have been assigned. In this poster, we describe the Quality Assurance (QA) procedures we have developed from the approach of QA as a service organization, thus reflecting the overall EUVE philosophy of Quality Assurance integrated into normal operating procedures, rather than imposed as an external, post facto, control mechanism.

John, L. M.↗
NASA NTRS1994

EUVAC: A solar EUV flux model for aeronomic calculations

This paper presents a new solar Extreme Ultraviolet (EUV) flux model for aeronomic calulations (EUVAC), which is based on the measured F74113 solar EUV reference spectrum. The model provides fluxes in the 37 wavelength bins that are in widespread use. This paper also presents cross sections to be used with the EUVAC flux model to calculate photoionization rates. The flux scaling for solar activity is accomplished using a proxy-based on the F10.7 index and its 81-day average together with the measured solar flux variation from the EUVS instrument on the Atmosphere Explorer E satellite. This new model produces 50-575 A integrated EUV fluxes in good agreement with rocket observations. The solar cycle variation of the chromospheric fluxes agrees well with the measured variation of the Lyman alpha flux between 1982 and 1988. In addition, the theoretical photoelectron fluxes, calculated using the new EUV flux model, are in good agreement with the solar minimum photoelectron fluxes from the Atmosphere Explorer E satellite and also with the solar maximum photoelectron fluxes from the Dynamics Explorer satellite. Its relative simplicity coupled with its ability to reproduce the 50-575 A solar EUV flux as well as the measured photoelectron spectrum makes the model well suited for aeronomic applications. However, EUVAC is not designed to accurately predict the solar flux variability for numerous individual lines.

Richards, P. G.↗
NASA NTRS1995

EUV emission from a sample of Active Galactic Nuclei

Active Galactic Nuclei (AGN) emit a substantial fraction of their total radiated power in the EUV passband, because spectroscopically this band is situated at or near the peak of the 'big blue bump,' which is bounded on either side by the UV and soft X-ray excesses. Owing to the lack of observational data, the shape of AGN spectra in the EUV is not well known. This paper presents broad band (65-190 eV) count rates of 11 AGN detected by the Extreme Ultraviolet Explorer (EUVE). Assuming a power law spectral shape for the EUV and soft X-ray energies, we demonstrate that the photon indices of the sources are considerably steeper than typical AGN indices. For 6 sources where ROSAT data are available to provide a more precise determination of their spectral parameters in the 0.1-2.5 keV range, we have used these parameters to compute predicted EUVE count rates and compared them with the observed values. The two sets of quantities agree to within experimental error. We conclude that there is no evidence of spectral steepening or turn-over of the soft X-ray excess at EUV wavelengths for a sample of AGN which covers a wide range of brightness.

Lieu, R.↗
NASA NTRS2000

IMAGE EUV Observations and Modeling of the Plasmaspheric Density Trough Associated with the 24 May 2000 Geomagnetic Storm

The IMAGE EUV imager observed a plasmaspheric density trough in association with a geomagnetically active period on 24 May 2000. At EUV wavelengths, this density trough appeared as an Archimedes spiral extending from Earth's shadow to approximately 1800 MLT. We present an analysis of this density trough using simulated EUV images. Observational EUV images are subjected to edge analysis to establish the plasmapause L-shell and the location of the density trough in terms of L-shell, MLT extent, and radial width. The plasmaspheric density distribution is modeled using both static and dynamic models for the plasmasphere. The background plasmasphere is then numerically simulated using the 4-parameter plasmaspheric density model contained within the Global Core Plasma Model (GCPM) [Gallagher et al., 20001 and the Dynamic Global Core Plasma Model (DGCPM). Simulated EUV images of the model plasmasphere are produced once an artificial density depletion, matching the observed MLT extent and width, has been removed. Once the azimuthal extent and width of the trough have been simulated, the depth of the artificial density depletion is iteratively adjusted to produce simulated EUV images that approximate observation. The results of this analysis and discussion of possible origins for this density trough will be presented.

Adrian, M.L.↗
NASA NTRS2001

The Large-Scale Plasmaspheric Density Trough Associated With the 24 May 2000 Geomagnetic Storm: IMAGE EUV Observations and Global Core Plasma Modeling

The IMAGE EUV imager observed a plasmaspheric density, trough in association with a geomagnetically active period on 24 May 2000. In EUV, this density, trough appears as an Archimedes spiral extending from Earth's shadow to approximately 1900 MLT. We present an analysis of this density trough using simulated EUV images, Observational EUV images are subjected to edge analysis to establish the plasmapause L-shell and the location of the density trough in terms of L-shell, MLT extent, and radial width. The plasmaspheric density distribution is modeled using both static and dynamic models for the plasmasphere. The background plasmasphere is then numerically simulated using the 4-parameter plasmaspheric density model contained within the Global Core Plasma Model (GCPM) and the Dynamic Global Core Plasma Model (DGCPM). Simulated EUV images of the model plasmasphere are produced once an artificial density, depletion, matching the observed MLT extent and width, has been removed. Once the azimuthal extent and width of the trough have been simulated, the depth of the artificial density depletion is iteratively adjusted to produce simulated EUV images that approximate observation. The results of this analysis and discussion of possible origins for this density trough will be presented.

Adrian, M. L.↗
NASA NTRS2001

Continued Analysis of EUVE Solar System Observations

This is the final report for this project. We proposed to continue our work on extracting important results from the EUVE (Extreme UltraViolet Explorer) archive of lunar and jovian system observations. In particular, we planned to: (1) produce several monochromatic images of the Moon at the wavelengths of the brightest solar EUV emission lines; (2) search for evidence of soft X-ray emissions from the Moon and/or X-ray fluorescence at specific EUV wavelengths; (3) search for localized EUV and soft X-ray emissions associated with each of the Galilean satellites; (4) search for correlations between localized Io Plasma Torus (IPT) brightness and volcanic activity on Io; (5) search for soft X-ray emissions from Jupiter; and (6) determine the long term variability of He 58.4 nm emissions from Jupiter, and relate these to solar variability. However, the ADP review panel suggested that the work concentrate on the Jupiter/IPT observations, and provided half the requested funding. Thus we have performed no work on the first two tasks, and instead concentrated on the last three. In addition we used funds from this project to support reduction and analysis of EUVE observations of Venus. While this was not part of the original statement of work, it is entirely in keeping with extracting important results from EUVE solar system observations.

Gladstone, G. Randall↗
DOE OSTI2025

In Situ Analysis of Electron-Induced Chemical Transformations in Vapor-Phase-Synthesized Al-Based Inorganic–Organic Hybrid Thin Films for EUV Resist Platform

The rapid advancement and stringent requirements of extreme ultraviolet (EUV) lithography technology necessitate the development of advanced photoresist systems for next-generation microelectronics. Recent studies have demonstrated that inorganic-based hybrid photoresists offer notable improvements in EUV sensitivity, etch resistance, and greater insusceptibility to pattern collapse compared to their purely organic counterparts. However, variations in the synthesis/coating approaches and chemistry of inorganic–organic photoresists can result in distinct exposure mechanisms. In this work, an Al-based hybrid thin film resist system synthesized via molecular (atomic) layer deposition (MLD or MALD) is explored, focusing on its electron-beam and EUV patterning mechanisms. The Al-based hybrid thin films are deposited using trimethylaluminum (TMA) and the organic precursor hydroquinone, exhibiting a saturated growth rate within the temperature range of 150–200°C. In diluted tetramethylammonium hydroxide (TMAH)-based developer solutions, the electron-irradiated Al-based hybrid thin film system behaves as a negative tone resist, achieving a sensitivity of 10.4 mC/cm 2 at 0.1 kV electron beam lithography (EBL). Chemical changes induced by electron exposure are also analyzed in this study using X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and a unique infrared spectroscopy setup, revealing the potential cross-linking pathways. To further correlate the electron-induced chemical transformations with those mediated by EUV irradiations, a combination of X-ray photoemission electron microscopy/low-energy electron microscopy (XPEEM/LEEM) system is also employed. In conclusion, this study provides critical insights into the mechanisms underlying solubility switching and contributes to the design of advanced resist materials for EUV lithography.

36 MATERIALS SCIENCE↗
NASA NTRS2012

Quasi-periodic Fast-mode Wave Trains Within a Global EUV Wave and Sequential Transverse Oscillations Detected by SDO-AIA

We present the first unambiguous detection of quasi-periodic wave trains within the broad pulse of a global EUV wave (so-called EIT wave) occurring on the limb. These wave trains, running ahead of the lateral coronal mass ejection (CME) front of 2-4 times slower, coherently travel to distances greater than approximately solar radius/2 along the solar surface, with initial velocities up to 1400 kilometers per second decelerating to approximately 650 kilometers per second. The rapid expansion of the CME initiated at an elevated height of 110 Mm produces a strong downward and lateral compression, which may play an important role in driving the primary EUV wave and shaping its front forwardly inclined toward the solar surface. The wave trains have a dominant 2 minute periodicity that matches the X-ray flare pulsations, suggesting a causal connection. The arrival of the leading EUV wave front at increasing distances produces an uninterrupted chain sequence of deflections and/or transverse (likely fast kink mode) oscillations of local structures, including a flux-rope coronal cavity and its embedded filament with delayed onsets consistent with the wave travel time at an elevated (by approximately 50%) velocity within it. This suggests that the EUV wave penetrates through a topological separatrix surface into the cavity, unexpected from CME-caused magnetic reconfiguration. These observations, when taken together, provide compelling evidence of the fast-mode MHD wave nature of the primary (outer) fast component of a global EUV wave, running ahead of the secondary (inner) slow component of CME-caused restructuring.

Solar Corona↗
NASA NTRS2013

Correlations Between Variations in Solar EUV and Soft X-Ray Irradiance and Photoelectron Energy Spectra Observed on Mars and Earth

Solar extreme ultraviolet (EUV; 10-120 nm) and soft X-ray (XUV; 0-10 nm) radiation are major heat sources for the Mars thermosphere as well as the primary source of ionization that creates the ionosphere. In investigations of Mars thermospheric chemistry and dynamics, solar irradiance models are used to account for variations in this radiation. Because of limited proxies, irradiance models do a poor job of tracking the significant variations in irradiance intensity in the EUV and XUV ranges over solar rotation time scales when the Mars-Sun-Earth angle is large. Recent results from Earth observations show that variations in photoelectron energy spectra are useful monitors of EUV and XUV irradiance variability. Here we investigate photoelectron energy spectra observed by the Mars Global Surveyor (MGS) Electron Reflectometer (ER) and the FAST satellite during the interval in 2005 when Earth, Mars, and the Sun were aligned. The Earth photoelectron data in selected bands correlate well with calculations based on 1 nm resolution observations above 27 nm supplemented by broadband observations and a solar model in the 0-27 nm range. At Mars, we find that instrumental and orbital limitations to the identifications of photoelectron energy spectra in MGS/ER data preclude their use as a monitor of solar EUV and XUV variability. However, observations with higher temporal and energy resolution obtained at lower altitudes on Mars might allow the separation of the solar wind and ionospheric components of electron energy spectra so that they could be used as reliable monitors of variations in solar EUV and XUV irradiance than the time shifted, Earth-based, F(10.7) index currently used.

EUV↗
DOE OSTI2026

Multi-diagnostic characterization of laser-produced tin plasmas for EUV lithography

We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the new experimental platform, “SparkLight.” Tin plasmas are generated by irradiating a continuously moving tin-coated wire with laser pulses (1064 nm, 10 ns, up to 5.7 × 10 10 W/cm 2 ) and probed via coherent Thomson scattering, laser interferometry, and EUV emission spectroscopy. Thomson scattering measurements reveal electron temperatures and densities that decay with distance from the target. Densities derived from Thomson scattering are cross-validated against laser interferometry, showing excellent agreement. Correlating the results of these laser diagnostics with spatially resolved EUV spectroscopy suggests that the bulk of useful EUV emission originates within 150 μm of the target and is generated under suboptimal plasma conditions. This work demonstrates a practical integrated approach for plasma characterization in EUV source development.

Musikhin, S. [Princeton Plasma Physics Laboratory ↗
DOE OSTI2021

Chemical and structural characterization of EUV photoresists as a function of depth by standing-wave x-ray photoelectron spectroscopy

The success in the miniaturization of the electronic device constituents depends mostly on the photolithographic techniques. Recently, to achieve patterning at the sub-10-nm node, extreme ultraviolet (EUV) lithography has been introduced into high volume production. Continued scaling of EUV via increased numerical aperture to achieve nodes at 3-nm and below requires the development of fundamentally new patterning materials and new characterization methods. Current EUV-resist film thicknesses are in the 20- to 40-nm range, and further thickness reduction is required for the next generation. Therefore, interfaces become exceedingly important, and the properties of the resist film would be dominated by top and bottom interfacial effects. X-ray photoelectron spectroscopy (XPS) combined with standing-wave excitation (SW-XPS), a fairly new method in the EUV lithography field, previously had been largely applied in multilayers and superlattices for characterizing the composition and electronic structure of buried layers and interfaces as a function of depth. We applied the SW-XPS method to organic/inorganic photoresists to provide depth-selective information on their structural and chemical conditions of as a function of temperature, EUV exposure, different underlayers, and other fundamental parameters. As a first attempt, we perform an SW-XPS feasibility study on self-assembled monolayer (SAM) films after exposure to an electron beam. By SW-XPS, we determined that the interface between the Al 2 O 3 underlayer and the SAMs is smooth, with a mean roughness of about 0.2 nm. Moreover, we determined that the SAM chains are, on average, tilted by 1/430 deg off the sample normal. The SW-XPS results also suggest that the SAM is not a perfectly aligned and uniform monolayer, with some areas having thickness higher than a single monolayer. We demonstrated that SW-XPS can provide useful information on ultrathin materials with high potential for being used as a characterization method of organic/inorganic photoresists.

36 MATERIALS SCIENCE↗
NASA NTRS1976

EUV fluxes in the solar spectrum below 2000 A

The list of EUV fluxes presented at the 1969 IAGA review in Madrid (Hinteregger, 1970) has served as a useful reference in many aeronomical studies, leading to a wide range of opinions regarding both the absolute values in that reference list and the question of estimating EUV fluxes from the only routinely obtained data, i.e., the solar 10.7 cm flux. Advances made since 1969 will be reviewed including previously unpublished observations of the variability of solar EUV for the period from January 1974 to May 1975 which were obtained from the EUV spectrophotometer experiment on the AE-C satellite. The review is concluded by a discussion of current and future needs of solar EUV flux measurements for aeronomical applications.

Hinteregger, H. E.↗
NASA NTRS1978

On the dissociation of nitrogen by electron impact and by EUV photo-absorption

The dissociation of N2 by electron impact and by absorption of EUV photons was studied experimentally. It was shown that most of the N2 molecules excited to singlet states in the 12.5-14.86 eV range are depopulated by predissociation and not by the emission of EUV photons and that this is the principal mechanism by which N2 is dissociated by solar EUV absorption and by electron impact. The experiments provide a physical explanation for the near absence of N2 band radiation in airglow and auroral EUV spectra, and rule out the excitation of EUV radiation as a major factor in the overall energy economy of an auroral substorm.

Zipf, E. C.↗
NASA NTRS1982

EUV arcades - Signatures of filament instability

The present investigation is based on the EUV observations from the HCO spectroheliometer aboard Skylab. These observations provide a great deal of information on coronal structures. The investigation is concerned with the EUV corona around active region filaments. One of its goals is to define the geometry and temperature distribution around those filaments which appear to be 'stable' (lifetimes equal to or greater than 2 days). The second goal is to study time changes in structures associated with other filaments which are 'unstable'. It is pointed out that the filaments and associated EUV loops reported in this investigation are not flare-related. The data of primary interest are those of Sept. 5, 1973, for which there exist simultaneous EUV and H-alpha filtergrams for the active region McMath 12510. It is found that active region filaments lie within channels of low emissivity in EUV lines formed above 1.5 x 10 to the 6th K.

Schmahl, E. J.↗
NASA NTRS1984

Correlations between thermospheric density and temperature, solar EUV flux, and 10.7-cm flux variations

Simultaneously measured thermospheric N2 densities and solar EUV fluxes obtained by the AE-E satellite are compared with ground-based solar 10.7-cm fluxes and calcium plage measurements. Short-wavelength (coronal) EUV emissions correlate better with thermospheric density than the 10.7-cm flux, although the reduction in density residuals is small. Correlation of density with a calcium plage index was somewhat worse than with 10.7. Although the overall correlation of 10.7-cm flux with EUV fluxes is high, the best fit slopes are different for short- and long-term variations, and there are instances where the short-term behavior of various EUV emissions and that of the 10.7-cm flux are distinctly different. For both density and EUV, a two-factor formula based on daily 10.7-cm flux and a running mean of the 10.7-cm flux provides a better fit than using the daily 10.7-cm flux alone.

Hedin, A. E.↗