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Mask-side Hyper-NA EUV imaging on the SHARP microscope
Hyper-NA, the prospective successor to high-numerical aperture (NA) extreme ultraviolet lithography (EUVL) could be inserted soon after 2030. Hyper-NA poses a number of challenges, including reduced depth of focus, amplified mask three-dimensional effects, and increased mask-side angular range. A Hyper-NA capable extreme ultraviolet (EUV) mask-imaging tool can address these challenges and accelerate research and development toward Hyper-NA. The Sharp High-Numerical Aperture Actinic Reticle Review Project (SHARP) EUV mask microscope is supporting mask-side high-NA imaging since 2015. Implementing mask-side Hyper-NA imaging in 2024 enables research and development toward the corresponding nodes of EUVL. Hyper-NA zoneplates at 0.75 4x/8x NA with a 6.7-deg chief ray angle and 0.85 4x/8x NA with a 7.4-deg chief ray angle are added to the SHARP microscope. Imaging at mask-side Hyper-NA is demonstrated. Imaging of 5-nm half-pitch (wafer scale) horizontal lines and spaces is demonstrated using dipole illumination. Imaging of 5-nm half-pitch (wafer scale) vertical lines and spaces is demonstrated using frequency-doubled imaging of 40-nm hp (mask scale) lines and spaces. Normalized image log slope (NILS) and modulation of Hyper-NA image data match closely to simulations for horizontal lines and spaces. A reduction in NILS of 0.3 or less is observed for vertical lines and spaces in the two-beam imaging regime. Through-focus image data are discussed, comparing different dipole sources and mask-side NAs. Mask-side Hyper-NA photomask imaging has been implemented and demonstrated on the SHARP microscope and is now available to users of the instrument.
The role of gravity in apical dominance: effects of clinostating on shoot inversion-induced ethylene production, shoot elongation and lateral bud growth
Shoot inversion-induced release of apical dominance in Pharbitis nil is inhibited by rotating the plant at 0.42 revolutions per minute in a vertical plane perpendicular to the axis of rotation of a horizontal clinostat. Clinostating prevented lateral bud outgrowth, apparently by negating the restriction of the shoot elongation via reduction of ethylene production in the inverted shoot. Radial stem expansion was also decreased. Data from experiments with intact tissue and isolated segments indicated that shoot-inversion stimulates ethylene production by increasing the activity of 1-aminocyclopropane-1-carboxylic acid synthase. The results support the hypothesis that shoot inversion-induced release of apical dominance in Pharbitis nil is due to gravity stress and is mediated by ethylene-induced retardation of the elongation of the inverted shoot.
Dedication to James A. Miller
This special memorial issue pays tribute to James (Jim) A. Miller, a giant of combustion science who died in 2021, with a celebration of his enormous influence on the field. We were touched by the responses we received after we sent out the invitations for it. Jim inspired several generations of scientists, who viewed him as a mentor, a father figure, and a friend. Together with Nils Hansen and Peter Glarborg, we have written a detailed account on his life and work. Furthermore, it appeared in this journal shortly after his death; and so here we focus on the scientific areas he had interest in and influence on, and how they relate to the 34 papers in this issue. The topics of these papers span a variety of Jim's interests including nitrogen chemistry, polycyclic aromatic hydrocarbon (PAH) chemistry, oxidation chemistry, energy transfer, prompt dissociations, and codes to facilitate combustion chemistry simulations.
Zone plate-based extreme ultraviolet mask microscope with through-pellicle imaging capability
Mirror-based and zone plate-based imaging systems are being used in actinic extreme ultraviolet (EUV) reticle review tools. With regard to zone plates, a short working distance is advantageous in terms of the required spectral bandwidth, manufacturability, and potential throughput and imaging performance. Zone plates therefore typically have a short working distance. The industry has adopted the use of an EUV pellicle to protect the photomask. Imaging photomask through-pellicle requires a working distance larger than 2.5 mm. A zone-plate-based EUV mask microscope with a 3-mm working distance has been commissioned at beamline 11.3.2 of the Advanced Light Source. Through-pellicle imaging at an exposure time of 2 s is demonstrated. The instrument achieves an image contrast of 95% on large features on a photomask with a tantalum-based absorber. Imaging down to 45-nm half pitch (mask scale) is demonstrated. A NILS of 2.55 is achieved on 60-nm half-pitch (mask scale) lines and spaces. These results demonstrate that zone-plate-based imaging systems can meet the requirements of an actinic EUV mask review tool in terms of imaging performance and throughput in an instrument compatible with EUV pellicles.
Lost and Found: Rediscovering Microbiome-Associated Phenotypes that Reshape Agricultural Sustainability
Overview Code and data repository for NIL Manuscript. Documentation includes sequence processing examples and data analysis. Supplemental sequence processing and R statistical analysis for publication, which compares the microbiome of teosinte-B73 Near Isogenic Lines. Sample Data Amplicon sequence data for 16S rRNA genes, the fungal ITS2 region, and nitrogen-cycling functional genes are available through the NCBI Sequence Read Archive (SRA) under accession number PRJNA1042643(https://www.ncbi.nlm.nih.gov/bioproject/PRJNA1042643). Raw metabolomic data are available on Metabolomics Workbench, Project ID: PR002654. This study is available at the NIH Common Fund's National Metabolomics Data Repository (NMDR) website, the Metabolomics Workbench, https://www.metabolomicsworkbench.org where it has been assigned Study ID ST004211. The data can be accessed directly via its Project DOI: http://dx.doi.org/10.21228/M8KV8T.
A prototype high power portable lamp
Portable lighting system serves the combined work and photographic needs of manned spacecraft efforts. This system enables the lamps to be momentarily brightened while the camera shutter is opened. The brightness is adequate for black and white or color photography and yet the increased heat load is nil.
Correlation of irradiation data using activation fluences and irradiation temperature.
Nil-ductility transition temperature data for A302-B ferritic steel were analyzed by using multiple regression. Four independent variables were used - i.e., specimen temperature during irradiation, and time-integrated specific activations (activation fluences) of fast-, intermediate-, and thermal-neutron detectors. The results of these analyses were predictive equations having the increase in transition temperature as the dependent variable. For a reference point, a similar analysis was also performed using the flux integral above 1 MeV and the irradiation temperature as independent variables. Also, the effect of excluding irradiation temperature from these analyses was studied. The results of the analyses showed that excellent correlation was achieved by using activation fluences and irradiation temperature as the independent variables. Irradiation temperature was found to account for from 29 to 46% of the data variability depending on the model used.
Correlation of irradiation data using activation fluences and irradiation temperature.
A new method of correlating radiation damage data is tested using actual measured data taken from the open literature. This method, the activation fluence method, was found to be as accurate as other contemporary models with which it was compared. The new method also has several advantages over the other methods. The method employs a new entity, the activation fluence (time-integrated specific activation rate), as the independent variables in a regression model. Temperature at which the irradiation takes place is also a variable. Although the method was tested for a specific type of damage (change in nil-ductility transition temperature for A302-B steel) it has no inherent restrictions and is limited only by the imagination of the user.
Irradiation effects on 17-7 PH stainless steel, A-201 carbon steel, and titanium-6-percent-aluminum-4-percent-vanadium alloy
Irradiation effects on three materials from the NASA Plum Brook Reactor Surveillance Program were determined. An increase of 105 K in the nil-ductility temperature for A-201 steel was observed at a fluence of approximately 3.1 x 10 to the 18th power neutrons/sq cm (neutron energy E sub n greater than 1.0 MeV). Only minor changes in the mechanical properties of 17-7 PH stainless steel were observed up to a fluence of 2 x 10 to the 21st power neutrons/sq cm (E sub n greater than 1.0 MeV). The titanium-6-percent-aluminum-4-percent-vanadium alloy maintained its notch toughness up to a fluence of 1 x 10 to the 21st power neutrons/sq cm (E sub n greater than 1.0 MeV).
Preliminary analysis of hot spot factors in an advanced reactor for space electric power systems
The maximum fuel pin temperature for nominal operation in an advanced power reactor is 1370 K. Because of possible nitrogen embrittlement of the clad, the fuel temperature was limited to 1622 K. Assuming simultaneous occurrence of the most adverse conditions a deterministic analysis gave a maximum fuel temperature of 1610 K. A statistical analysis, using a synthesized estimate of the standard deviation for the highest fuel pin temperature, showed probabilities of 0.015 of that pin exceeding the temperature limit by the distribution free Chebyshev inequality and virtually nil assuming a normal distribution. The latter assumption gives a 1463 K maximum temperature at 3 standard deviations, the usually assumed cutoff. Further, the distribution and standard deviation of the fuel-clad gap are the most significant contributions to the uncertainty in the fuel temperature.
G2.4 + 1.4, a supernova remnant or ring nebula around a peculiar star
G2.4 + 1.4 is a probable nonthermal radio source and an optical nebula which appears to be a supernova remnant (SNR). It also contains an O VI sequence star of great excitation. We present new radiofrequency-continuum and (nil) H 92 alpha observations, optical spectroscopy, and Fabry-Perot scanner observations of the nebula. The object distance (possibly 5 kpc), origin of gas kinematics (possibly SNR expansion), and mode of excitation of the gas (possibly photoexcitation and/or shock wave) remain uncertain. We discuss the possible roles of the O VI star as 'runaway' in an SNR, as a source of photoexcitation, and as an ejector of a 'counterfeit' SNR.
An investigation of fracture toughness, fatigue-crack growth, sustained-load flaw growth, and impact properties of three pressure vessel steels
The elastic fracture toughness of the three steels is shown to not decrease significantly with decreasing temperature from room temperature to about 244 K (-20 F.). The elastic fracture toughness of the three steels increased with increasing specimen width and thickness. The fatigue-crack-growth data for all three steels fall into relatively narrow scatter bands on plots of rate against stress-intensity range. An equation is shown to predict the upper bounds of the scatter bands reasonably well. Charpy impact energies decreased with decreasing temperature in the nominal temperature range from room temperature to 244 K (-20 F). The nil-ductility temperatures of the steels are discussed.
Unsteady density and velocity measurements in the 6 foot x 6 foot wind tunnel
The methods used and the results obtained in four aero-optic tests are summarized. It is concluded that the rather large values of density fluctuation appear to be the result of much higher Mach number than freestream and the violent turbulence in the flow as it separates from the turret. A representative comparison of fairing on-fairing off rms density fluctuation indicates essentially no effect at M = 0.62 and a small effect at M = 0.95. These data indicate that some slight improvement in optical quality can be expected with the addition of a fairing, although at M = 0.62 its effect would be nil. Fairings are very useful in controlling pressure loads on turrets, but will not have first order effects on optical quality. Scale sizes increase dramatically with increasing azimuth angle for a reprensentative condition. Since both scale sizes and fluctuation levels increase (total turbulence path length also increases) with azimuth angle, substantial optical degradation might be expected. For shorter wave lengths, large degradations occur.
Maclisp extensions
A common subset of selected facilities available in Maclisp and its derivatives (PDP-10 and Multics Maclisp, Lisp Machine Lisp (Zetalisp), and NIL) is decribed. The object is to add in writing code which can run compatibly in more than one of these environments.
Excitation of the Earth's Chandler wobble by southern oscillation/El Nino, 1900-1979
The southern oscillation/El Nino (ENSO) is the single most prominent interannual signal in global atmospheric/oceanic fluctuations. The following question is addressed: how important is the angular momentum carried by ENSO in exciting the Earth's Chandler wobble? The question is attacked through a statistical analysis of the coherence spectra (correlation as a function of frequency) between two data sets spanning 1900 to 1979-the southern oscillation index (SOI) time series and the excitation function psi (with x-component psi sub x and y-component psi sub y) of the Chandler wobble derived from the homogeneous ILS (International Latitude Service) polar motion data. The coherence power and phase in the Chandler frequency band (approx. 0.79 to 0.89 cpy) are studied. It is found that, during 1900 to 1979 the coherence between SOI and psi sub x is significant well over the 95% confidence threshold whereas that between SOI and psi sub y is practically nil. Quantitatively, the coherence study shows that ENSO provides some 20% of the observed Chandler wobble excitation power. Since earlier investigations have shown that the total atmospheric/oceanic variation can account for the Chandler wobble excitation at about 20% level, the implication is that ENSO maybe an important (interannual) part of the atmospheric/oceanic variation that is responsible for the Chandler wobble excitation during 1900 to 1979.
Transformerless dc-Isolated Converter
Efficient voltage converter employs capacitive instead of transformer coupling to provide dc isolation. Offers buck/boost operation, minimal filtering, and low parts count, with possible application in photovoltaic power inverters, power supplies and battery charges. In photovoltaic inverter circuit with transformerless converter, Q2, Q3, Q4, and Q5 form line-commutated inverter. Switching losses and stresses nil because switching performed when current is zero.
The thermal engine of Venus: Implications from the impact crater distribution
Questions concerning the state of Venus' volcanological activity are currently under investigation. These questions were raised by the imaging radar and altimetric data obtained by the Magellan spacecraft, which began mapping Venus in Sept. 1990. Clues about the answers to these questions are provided by the nature and distribution of impact craters on the surface of Venus. Statistical tests show that the distribution of craters on Venus cannot be distinguished from a completely spatially random population. Further, the majority of craters look relatively pristine; only about 5 percent of the observed craters appear to be embayed or flooded by lavas. The simplest interpretation of these observations is a model in which the impact craters lie on a surface that has been undisturbed by volcanological and tectonic processes since the time the surface was formed. Counting up the number of craters and estimating the rate at which meteoroids strike the surface then gives an age for the venusian surface of 500 million years; in this model the volcanic activity since that time has been essentially nil. This scenario is described as a 'production' model, or perhaps more appropriately, a 'catastrophic' model.