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All sourcesNASA NTRSDOE OSTI
NASA NTRS2003

Non-inertial calibration of vibratory gyroscopes

The electrostatic elements already present in a vibratory gyroscope are used to simulate the Coriolis forces. An artificial electrostatic rotation signal is added to the closed-loop force rebalance system. Because the Coriolis force is at the same frequency as the artificial electrostatic force, the simulated force may be introduced into the system to perform an inertial test on MEMS vibratory gyroscopes without the use of a rotation table.

Gutierrez, Roman C.↗
NASA NTRS1998

MEMS Louvers for Thermal Control

Mechanical louvers have frequently been used for spacecraft and instrument thermal control purposes. These devices typically consist of parallel or radial vanes, which can be opened or closed to vary the effective emissivity of the underlying surface. This project demonstrates the feasibility of using Micro-Electromechanical Systems (MEMS) technology to miniaturize louvers for such purposes. This concept offers the possibility of substituting the smaller, lighter weight, more rugged, and less costly MEMS devices for such mechanical louvers. In effect, a smart skin that self adjusts in response to environmental influences could be developed composed of arrays of thousands of miniaturized louvers. Several orders of magnitude size, weight, and volume decreases are potentially achieved using micro-electromechanical techniques. The use of this technology offers substantial benefits in spacecraft/instrument design, integration and testing, and flight operations. It will be particularly beneficial for the emerging smaller spacecraft and instruments of the future. In addition, this MEMS thermal louver technology can form the basis for related spacecraft instrument applications. The specific goal of this effort was to develop a preliminary MEMS device capable of modulating the effective emissivity of radiators on spacecraft. The concept pursued uses hinged panels, or louvers, in a manner such that heat emitted from the radiators is a function of louver angle. An electrostatic comb drive or other such actuator can control the louver position. The initial design calls for the louvers to be gold coated while the underlying surface is of high emissivity. Since, the base MEMS material, silicon, is transparent in the InfraRed (IR) spectrum, the device has a minimum emissivity when closed and a maximum emissivity when open. An initial set of polysilicon louver devices was designed at the Johns Hopkins Applied Physics Laboratory in conjunction with the Thermal Engineering Branch at NASA's Goddard Space Flight Center.

Champion, J. L.↗
NASA NTRS2001

Microshutter Arrays for the NGST NIRSpec

We are developing a programmable multiobject field selector for the NGST NIRSpec. This device is a microshutter array, a close-packed 2000 x 2000 array of 100 micrometer x 100 micrometer shutters fabricated with Micro-ElectroMechanical Systems (MEMS) technologies. The shutters are opened using a magnet scanned over the array. The shutters are held open by electrostatic potentials on adjacent vertical electrodes. Modeling of the magnetic actuation of the microshutters allowed optimization of the magnetic field configuration, the distance between magnet and shutters, and the force and torque produced by the magnet. The results of laboratory tests are consistent with our modeling. We have demonstrated actuation, latching and addressing. We are able to rotate shutters out of the plane up to 90 degree and more, to latch them electrostatically to the walls and release them selectively. During the last six month all critical elements of the array have been demonstrated. Fabrication processes were developed to deposit vertical electrodes on support grid side walls and insulated light-shields that block the gaps between shutters and the support grid. Physical optics analysis was performed to assess the expected optical performance of the microshutters. A preliminary Fourier optics analysis on the microshutter array performance has been carried out. More detailed analysis of wave propagation through 3D structures is a next step. An optical test station for verifying optical parameters of the shutter array at room temperature has been developed. It allows to measure parameters, such as transmission, scattering, contrast ratio, and diffraction of the array structure. Initial data have been acquired and are being analyzed and compared to theoretical predictions.

Moseley, Harvey↗
NASA NTRS2008

Four-Point-Latching Microactuator

An experimental inchworm-type linear microactuator is depicted. This microactuator is a successor to one described in "MEMS-Based Piezoelectric/Electrostatic Inchworm Actuator" (NPO-30672), NASA Tech Briefs, Vol. 27, No. 6 (June 2003), page 68. Both actuators are based on the principle of using a piezoelectric transducer operated in alternation with electrostatically actuated clutches to cause a slider to move in small increments. However, the design of the present actuator incorporates several improvements over that of the previous one. The most readily apparent improvement is in geometry and, consequently, in fabrication: In the previous actuator, the inchworm motion was perpendicular to the broad faces of a flat silicon wafer on which the actuator was fabricated, and fabrication involved complex processes to form complex three-dimensional shapes in and on the wafer. In the present actuator, the inchworm motion is parallel to the broad faces of a wafer on which it is fabricated. The components needed to produce the in-plane motion are nearly planar in character and, consequently, easier to fabricate. Other advantages of the present design are described, including that the previous actuator contained two clutches (denoted 'holders' in the cited prior article), the present actuator contains four clutches. The operational sequence of the previous two-clutch actuator is similar. However, the two-clutch configuration is susceptible to tilt of the slider and a consequent large increase in drag. Hence, the primary operational advantages of the present four-point-latching design over the prior two-point-latching design are less drag and greater control robustness arising from greater stability of the orientation of the slider.

Toda, Risaku↗
NASA NTRS2006

Free-field Calibration of the Pressure Sensitivity of Microphones at Frequencies up to 80 kHz

A free-field (FF) substitution method for calibrating the pressure sensitivity of microphones at frequencies up to 80 kHz is demonstrated with both grazing and normal incidence geometries. The substitution-based method, as opposed to a simultaneous method, avoids problems associated with the non-uniformity of the sound field and, as applied here, uses a 1/2 -inch air-condenser pressure microphone as a known reference. Best results were obtained with a centrifugal fan, which is used as a random, broadband sound source. A broadband source minimizes reflection-related interferences that often plague FF measurements. Calibrations were performed on 1/4-inch FF air-condenser, electret, and micro-electromechanical systems (MEMS) microphones in an anechoic chamber. The accuracy of this FF method is estimated by comparing the pressure sensitivity of an air-condenser microphone, as derived from the FF measurement, with that of an electrostatic actuator calibration and is typically 0.3 dB (95% confidence), over the range 2-80 kHz.

Herring, G. C.↗
NASA NTRS1997

Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

The MEMS (Micro-Electro-Mechanical-Systems) technology is quickly evolving as a viable means to combine micro-mechanical and micro-optical elements on the same chip. One MEMS technology that has recently gained attention by the research community is the micro-mechanical Fabry-Perot optical filter. A MEMS based Fabry-Perot consists of a vertically integrated structure composed of two mirrors separated by an air gap. Wavelength tuning is achieved by applying a bias between the two mirrors resulting in an attractive electrostatic force which pulls the mirrors closer. In this work, we present a new micro-mechanical Fabry-Perot structure which is simple to fabricate and is integratable with low cost silicon photodetectors and transistors. The structure consists of a movable gold coated oxide cantilever for the top mirror and a stationary Au/Ni plated silicon bottom mirror. The fabrication process is single mask level, self aligned, and requires only one grown or deposited layer. Undercutting of the oxide cantilever is carried out by a combination of RIE and anisotropic KOH etching of the (111) silicon substrate. Metallization of the mirrors is provided by thermal evaporation and electroplating. The optical and electrical characteristics of the fabricated devices were studied and show promissing results. A wavelength shift of 120nm with 53V applied bias was demonstrated by one device geometry using 6.27 micrometer air gap. The finesse of the structure was 2.4. Modulation bandwidths ranging from 91KHz to greater than 920KHz were also observed. Theoretical calculations show that if mirror reflectivity, smoothness, and parallelism are improved, a finesse of 30 is attainable. The predictions also suggest that a reduction of the air gap to 1 micrometer results in an increased wavelength tuning range of 175 nm with a CMOS compatible 4.75V.

Patterson, James D.↗
NASA NTRS2000

Development of Individually Addressable Micro-Mirror-Arrays for Space Applications

We have been developing a 32 x 32 prototype array of individually addressable Micro-Mirrors capable of operating at cryogenic temperature for Earth and Space Science applications. Micro-Mirror-Array technology has the potential to revolutionize imaging and spectroscopy systems for NASA's missions of the 21st century. They can be used as programmable slits for the Next Generation Space Telescope, as smart sensors for a steerable spectrometer, as neutral density filters for bright scene attenuation etc. The, entire fabrication process is carried out in the Detector Development Laboratory at NASA, GSFC. The fabrication process is low temperature compatible and involves integration of conventional CMOS technology and surface micro-machining used in MEMS. Aluminum is used as the mirror material and is built on a silicon substrate containing the CMOS address circuit. The mirrors are 100 microns x l00 microns in area and deflect by +/- 10 deg induced by electrostatic actuation between two parallel plate capacitors. A pair of thin aluminum torsion straps allow the mirrors to tilt. Finite-element-analysis and closed form solutions using electrostatic and mechanical torque for mirror operation were developed and the results were compared with laboratory performance. The results agree well both at room temperature and at cryogenic temperature. The development demonstrates the first cryogenic operation of two-dimensional Micro-Mirrors with bi-state operation. Larger arrays will be developed meeting requirements for different science applications. Theoretical analysis, fabrication process, laboratory test results and different science applications will be described in detail.

Dutta, Sanghamitra B.↗
NASA NTRS2007

Design and Simulation of a MEMS Structure for Electrophoretic and Dielectrophoretic Separation of Particles by Contactless Electrodes

Rapid identification of pathogenic bacterial species is an important factor in combating public health problems such as E. coli contamination. Food and waterborne pathogens account for sickness in 76 million people annually (CDC). Diarrheagenic E. coli is a major source of gastrointestinal illness. Severe sepsis and Septicemia within the hospital environment are also major problems. 75 1,000 cases annually with a 30-50% mortality rate (Crit Care Med, July '01, Vol. 29, 1303-10). Patient risks run the continuum from fever to organ failure and death. Misdiagnosis or inappropriate treatment increases mortality. There exists a need for rapid screening of samples for identification of pathogenic species (Certain E. coli strains are essential for health). Critical to the identification process is the ability to isolate analytes of interest rapidly. This poster discusses novel devices for the separation of particles on the basis of the dielectric properties, mass and surface charge characteristics is presented. Existing designs involve contact between electrode surfaces and analyte medium resulting in contamination of the electrode bearing elements Two different device designs using different bulk micromachining MEMS processes (PolyMUMPS and a PyrexBIGold electrode design) are presented. These designs cover a range of particle sizes from small molecules through eucaryotic cells. The application of separation of bacteria is discussed in detail. Simulation data for electrostatic and microfluidic characteristics are provided. Detailed design characteristics and physical features of the as fabricated PolyMUMPS design are provided. Analysis of the simulation data relative to the expected performance of the devices will be provided and subsequent conclusions discussed.

Shaw, Harry C.↗
NASA NTRS2019

Actuation Force Study of Next Generation Micro Shutter Array for More Reliable Actuation

Micro shutter array (MSA) is a programmable optical spatial filtering device fabricated by MEMS technology, which was originally developed for James Webb Space Telescope to enable multi-object spectroscopy. Next Generation Micro Shutter Array (NGMSA) is an effort to improve JWST MSA by eliminating macroscopic actuation magnet and using electrostatic force to achieve simple and reliable instrument that can support NASA’s multiple future missions. We have been fabricating NGMSA with design inherited from JWST, however the legacy design is not friendly for electrostatic actuation because applied force direction on the moving shutter blade is different. We use COMSOL AC/DC module’s electrostatics feature to understand electrostatic force applied on an individual shutter within a range of motion and study new candidate designs. Also, structural mechanics module is used to study torsion bar’s restoration force.

Kim, K.↗
NASA NTRS2011

Programmable Aperture with MEMS Microshutter Arrays

A microshutter array (MSA) has been developed for use as an aperture array for multi-object selections in James Webb Space Telescope (JWST) technology. Light shields, molybdenum nitride (MoN) coating on shutters, and aluminum/aluminum oxide coatings on interior walls are put on each shutter for light leak prevention, and to enhance optical contrast. Individual shutters are patterned with a torsion flexure that permits shutters to open 90 deg. with a minimized mechanical stress concentration. The shutters are actuated magnetically, latched, and addressed electrostatically. Also, micromechanical features are tailored onto individual shutters to prevent stiction. An individual shutter consists of a torsion hinge, a shutter blade, a front electrode that is coated on the shutter blade, a backside electrode that is coated on the interior walls, and a magnetic cobalt-iron coating. The magnetic coating is patterned into stripes on microshutters so that shutters can respond to an external magnetic field for the magnetic actuation. A set of column electrodes is placed on top of shutters, and a set of row electrodes on sidewalls is underneath the shutters so that they can be electrostatically latched open. A linear permanent magnet is aligned with the shutter rows and is positioned above a flipped upside-down array, and sweeps across the array in a direction parallel to shutter columns. As the magnet sweeps across the array, sequential rows of shutters are rotated from their natural horizontal orientation to a vertical open position, where they approach vertical electrodes on the sidewalls. When the electrodes are biased with a sufficient electrostatic force to overcome the mechanical restoring force of torsion bars, shutters remain latched to vertical electrodes in their open state. When the bias is removed, or is insufficient, the shutters return to their horizontal, closed positions. To release a shutter, both the electrode on the shutter and the one on the back wall where the shutter sits are grounded. The shutters with one or both ungrounded electrodes are held open. Sub-micron bumps underneath light shields and silicon ribs on back walls are the two features to prevent stiction. These features ensure that the microshutter array functions properly in mechanical motions. The MSA technology can be used primarily in multi-object imaging and spectroscopy, photomask generation, light switches, and in the stepper equipment used to make integrated circuits and MEMS (microelectromechanical systems) devices.

Moseley, Samuel↗
NASA NTRS2004

A MEMS Micro-Translation Stage with Long Linear Translation

A MEMS Micro-Translation Stage (MTS) actuator concept has been developed that is capable of traveling long distances, while maintaining low power, low voltage, and accuracy as required by many applications, including optical coupling. The Micro-Translation Stage (MTS) uses capacitive electrostatic forces in a linear motor application, with stationary stators arranged linearly on both sides of a channel, and matching rotors on a moveable shuttle. This creates a force that allows the shuttle to be pulled along the channel. It is designed to carry 100 micron-sized elements on the top surface, and can travel back and forth in the channel, either in a stepping fashion allowing many interim stops, or it can maintain constant adjustable speeds for a controlled scanning motion. The MTS travel range is limited only by the size of the fabrication wafer. Analytical modeling and simulations were performed based on the fabrication process, to assure the stresses, friction and electrostatic forces were acceptable to allow successful operation of this device. The translation forces were analyzed to be near 0.5 micron N, with a 300 micron N stop-to-stop time of 11.8 ms.

Ferguson, Cynthia K.↗
NASA NTRS1995

Micromechanical Switches on GaAs for Microwave Applications

In this presentation, we describe the fabrication of micro-electro-mechanical system (MEMS) devices, in particular, of low-frequency multi-element electrical switches using SiO2 cantilevers. The switches discussed are related to micromechanical membrane structures used to perform switching of optical signals on silicon substrates. These switches use a thin metal membrane which is actuated by an electrostatic potential, causing the switch to make or break contact. The advantages include: superior isolation, high power handling capabilities, high radiation hardening, very low power operations, and the ability to integrate onto GaAs monolithic microwave integrated circuit (MMIC) chips.

Randall, John N.↗
NASA NTRS2004

Thermal-Stress Control of Microshutter Arrays in Cryogenic Applications for the James Webb Space Telescope

We report on methods to minimize thermally-induced deformation in a MEMS-based reconfigurable aperture. The device is an enabling component of the Near-Infrared Spectrometer, a principle instrument on NASA's James Webb Space Telescope. The Microshutter Array consists of 384 x 175 individually addressable shutters which can be magnetically rotated 90 deg into the plane of the array and electrostatically latched open. Each shutter is a 100 x 200 micron rectangular membrane suspended by a small neck region and torsion flexure. The primary materials in the shutter are a 5000A Si3N4 layer for mechanical rigidity, 2000A Al for opacity and electrostatic latching, and 2800A CoFe for magnetic actuation. This multi-layer stack presents a challenge due to the operating temperatures required for the device: both room temperature (300K) and cryogenic temperature (35K). Thermal expansion of the materials causes the shutters to bow out of plane excessively, which can prevent actuation of the shutters, cause damage to portions of the array, and allow light leakage around closed shutters. Here we present our investigation of several methods to prevent microshutter bowing including deposition of additional materials on the shutters to create a symmetrical layer stack and replacing the current stack with low-coefficient of thermal expansion materials. Using shutter-size suspended cantilever beams as a rapid-development test bed, we have reduced out-of-plane bowing between 300K and 35K to 10% or better. We are currently applying these results to microshutter arrays to develop shutters that remain flat from room temperature to cryogenic temperature while retaining the required mechanical, optical, and magnetic properties.

Kelly, Daniel P.↗
NASA NTRS2017

Electrostatic Microshutter Arrays

Based on the Microshutter Array (MSA) subsystems developed at NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST), Next Generation Microshutter Array (NGMSA) has been developed to be used as multi-object selectors for future telescopes in space applications. Microshutter arrays function as transmission devices. Selected shutters fully open at 90 degrees permitting income light going through, while the rest of shutters keep closed. The programmable microshutter open and close make the device perform as a multi object selector that can be used on space telescopes. Utilizing a multi object selector, the telescope efficiency can be increased to 100 times or more. Like JWST MSAs, NGMSA features torsion hinges, light shields, front and back electrodes for shutter actuation, latch, and closing. The difference is that JWST MSA utilized the magnetic actuation while NGMSA the electrostatic actuation.

Micro-electro-mechanical-system (MEMS)↗
NASA NTRS2003

Wafer-Level Membrane-Transfer Process for Fabricating MEMS

A process for transferring an entire wafer-level micromachined silicon structure for mating with and bonding to another such structure has been devised. This process is intended especially for use in wafer-level integration of microelectromechanical systems (MEMS) that have been fabricated on dissimilar substrates. Unlike in some older membrane-transfer processes, there is no use of wax or epoxy during transfer. In this process, the substrate of a wafer-level structure to be transferred serves as a carrier, and is etched away once the transfer has been completed. Another important feature of this process is that two electrodes constitutes an electrostatic actuator array. An SOI wafer and a silicon wafer (see Figure 1) are used as the carrier and electrode wafers, respectively. After oxidation, both wafers are patterned and etched to define a corrugation profile and electrode array, respectively. The polysilicon layer is deposited on the SOI wafer. The carrier wafer is bonded to the electrode wafer by using evaporated indium bumps. The piston pressure of 4 kPa is applied at 156 C in a vacuum chamber to provide hermetic sealing. The substrate of the SOI wafer is etched in a 25 weight percent TMAH bath at 80 C. The exposed buried oxide is then removed by using 49 percent HF droplets after an oxygen plasma ashing. The SOI top silicon layer is etched away by using an SF6 plasma to define the corrugation profile, followed by the HF droplet etching of the remaining oxide. The SF6 plasma with a shadow mask selectively etches the polysilicon membrane, if the transferred membrane structure needs to be patterned. Electrostatic actuators with various electrode gaps have been fabricated by this transfer technique. The gap between the transferred membrane and electrode substrate is very uniform ( 0.1 m across a wafer diameter of 100 mm, provided by optimizing the bonding control). Figure 2 depicts the finished product.

Yang, Eui-Hyeok↗
NASA NTRS1999

Scaling Laws of Microactuators and Potential Applications of Electroactive Polymers in MEMS

Besides the scale factor that distinguishes the various species, fundamentally biological muscles changes little between species, indicating a highly optimized system. Electroactive polymer actuators offer the closest resemblance to biological muscles, however besides the large actuation displacement these materials are falling short with regards to the actuation force. As improved materials are emerging it is becoming necessary to address key issues such as the need for effective electromechanical modeling and guiding parameters in scaling the actuators. In this paper, we will review the scaling laws for three major actuation mechanisms that are of relevance to micro electromechanical systems: electrostatic actuation, magnetic actuation, thermal bimetallic actuation, and piezoelectric actuation.

Liu, Chang↗
NASA NTRS2003

MEMS-Based Piezoelectric/Electrostatic Inchworm Actuator

A proposed inchworm actuator, to be designed and fabricated according to the principles of microelectromechanical systems (MEMS), would effect linear motion characterized by steps as small as nanometers and an overall range of travel of hundreds of microns. Potential applications for actuators like this one include precise positioning of optical components and active suppression of noise and vibration in scientific instruments, conveyance of wafers in the semiconductor industry, precise positioning for machine tools, and positioning and actuation of micro-surgical instruments. The inchworm motion would be generated by a combination of piezoelectric driving and electrostatic clamping. The actuator (see figure), would include a pair of holders (used for electrostatic clamping), a slider (the part that would engage in the desired linear motion), a driver, a piezoelectric stack under the driver, and a pair of polymer beams centrally clamped to the flexure beam via a T bar. The holders would be held stationary. One end of the piezoelectric stack would be held stationary; the other end would be connected to the bottom of the driver, which would be free to move up and down. All of these components except the piezoelectric stack and the polymer beams would be micromachined from a 500- m-thick silicon wafer by deep reactive-ion etching. The inchworm motion would be perpendicular to the broad faces of the wafer (perpendicular to the plane of the figure). The combination of the polymer beams and the centrally clamped flexure beam would spring-bias the slider into a position such that, in the absence of electrostatic clamping, the gap between the slider on the one hand and both the driver and the holder on the other hand would be no more than a few microns. This arrangement would make it possible to electrostatically pull the slider into contact with either the holders or the driver at a clamping force of the order of 1 N by applying a reasonably small voltage (of the order of 100 V).

Yang, Eui-Hyeok↗
NASA NTRS2003

Continuous Tuning and Calibration of Vibratory Gyroscopes

A method of control and operation of an inertial reference unit (IRU) based on vibratory gyroscopes provides for continuously repeated cycles of tuning and calibration. The method is intended especially for application to an IRU containing vibratory gyroscopes that are integral parts of microelectromechanical systems (MEMS) and that have cloverleaf designs, as described in several previous NASA Tech Briefs articles. The method provides for minimization of several measures of spurious gyroscope output, including zero-rate offset (ZRO), angle random walk (ARW), and rate drift. These benefits are afforded both at startup and thereafter during continuing operation, in the presence of unknown rotation rates and changes in temperature. A vibratory gyroscope contains a precision mechanically resonant structure containing two normal modes of vibration nominally degenerate in frequency and strongly coupled via a Coriolis term. In the case of the cloverleaf design MEMS gyro, these normal modes of vibration are plate rocking modes. The rocking motion of the plate is described by giving two angles, theta(sub 1) and theta(sub 2). A proof mass consisting of a post orthogonal to the plate ensures a high degree of Coriolis coupling of vibratory energy from one mode into the other under inertial rotation. The plate is driven and sensed capacitively across a few-microns-wide gap, and the normal mode frequencies can be tuned electrostatically by DC voltages applied across this gap. In order to sense rotation, the resonator plate is caused to rock in the theta(sub 1) direction, then any small motions in the theta(sub 2) direction are sensed, rebalanced, and interpreted as inertial rotation. In this scenario, the "drive" has been assigned to the theta(sub 1) direction, and the "sense" has been assigned to the theta(sub 2) direction.

Hayworth, Ken↗