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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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All sourcesNASA NTRSDOE OSTI
NASA NTRS2006

Lightweight optical mirrors formed in single crystal substrate

This invention is directed to a process for manufacturing a lightweight mirror from a single crystal material, such as single crystal silicon. As a near perfect single crystal material, single crystal silicon has much lower internal stress than a conventional material. This means much less distortion of the optical surface during the light weighting process. After being ground and polished, a single crystal silicon mirror is light weighted by removing material from the back side using ultrasonic machining. After the light weighting process, the single crystal silicon mirror may be used as-is or further figured by conventional polishing or ion milling, depending on the application and the operating wavelength.

Bly, Vincent T.↗
NASA NTRS2003

Silicon Membrane Mirrors with Electrostatic Shape Actuators

Efforts are under way to develop deformable mirrors equipped with microscopic electrostatic actuators that would be used to maintain their reflective surfaces in precise shapes required for their intended applications. Unlike actuators that depend on properties of materials (e.g., piezoelectric and electrostrictive actuators), electrostatic actuators are effective over a wide temperature range. A mirror of the present type would be denoted a MEMSDM (for microelectromechanical system deformable mirror). The reflective surface of such a mirror would be formed on a single-crystal silicon membrane that would be attached by posts to a silicon actuator membrane that would, in turn, be attached by posts to a rigid silicon base (see figure). The actuator membrane would serve as the upper electrode of a capacitor. Multiple lower electrodes, each occupying a conveniently small fraction of the total area, would be formed on an electrically insulating oxide layer on the base, thereby defining a multiplicity of actuator pixels. The actuator membrane would be corrugated in a pattern that would impart mechanical compliance needed for relaxation of operational and fabrication-induced stresses and to minimize the degree of nonlinearity of deformations. The compliance afforded by the corrugations would also help to minimize the undesired coupling of deformations between adjacent pixels (a practical goal being to keep the influence coefficient between adjacent pixels below 10 percent).

Yang, Eui-Hyeok↗
NASA NTRS2006

Lightweight, Segmented, Mostly Silicon Telescope Mirror

A document presents the concept of a curved telescope primary reflector structure, made mostly of silicon, that would have an areal mass density 1 kg/m2 and would be deployed in outer space, where it would be operated at a temperature in the cryogenic range. The concept provides for adjustment of the shape of the mirror to maintain the required precise optical surface figure despite the flexibility inherent in the ultra-lightweight design. The structure would include a thin mirror layer divided into hexagonal segments supported by flexure hinges on a lightweight two-layer backing structure. Each segment would also be supported at three points by sets of piezoelectric linear microactuators that could impose small displacements along the optical axis. The excitations applied to the aforementioned microactuators would be chosen to effect fine adjustments of the axial positions and the orientations of the segments relative to the supporting structure. Other piezoelectric linear microactuators embedded in the backing structure would enable control of the displacements of the segments along the hexagonal axes; they would also enable control of the curvature of the backing structure and, thus, additional control of the curvature of the reflector.

Yang, Eui-Hyeok↗
NASA NTRS2003

Helium Cryo Testing of a SLMS(TM) (Silicon Lightweight Mirrors) Athermal Optical Assembly

SLMS (TM) a thermal technology has been demonstrated in the small 4-foot helium cryogenic test chamber located at the NASA/MSFC X-Ray Calibration Facility (XRCF). A SLMS (TM) Ultraviolet Demonstrator Mirror (UVDM) produced by Schafer under a NASA/MSFC Phase I SBIR was helium cryo tested both free standing and bonded to a Schafer designed prototype carbon fiber reinforced silicon carbide (Cesic) mount. Surface figure data was obtained with a test measurement system that featured an Instantaneous Phase Interferometer (IPI) by ADE Phase Shift. The test measurement system s minimum resolvable differential figure deformation and possible contributions from test chamber ambient to cryo window deformation are under investigation. The free standing results showed differential figure deformation of 10.4 nm rms from 295K to 27K and 3.9 nm rms after one cryo cycle. The surface figure of the UVDM degraded by lambda/70 rms HeNe once it was bonded to the prototype Cesic mount. The change was due to a small astigmatic aberration in the rototype Cesic mount due to lack of finish machining and not the bonding technique. This effect was seen in SLMST (TM) optical assembly results, which showed differential figure deformation of 46.5 nm rms from 294K to 27K, 42.9 nm rms from 294K to 77K, 28.0 nm rms from 294K to 193K and 6.2 nm rms after one cryo cycle.

Jacoby, Marc T.↗
NASA NTRS2016

Alignment and Distortion-Free Integration of Lightweight Mirrors into Meta-Shells for High-Resolution Astronomical X-Ray Optics

High-resolution, high throughput optics for x-ray astronomy requires fabrication of well-formed mirror segments and their integration with arc-second level precision. Recently, advances of fabrication of silicon mirrors developed at NASA/Goddard prompted us to develop a new method of mirror integration. The new integration scheme takes advantage of the stiffer, more thermally conductive, and lower-CTE silicon, compared to glass, to build a telescope of much lighter weight. In this paper, we address issues of aligning and bonding mirrors with this method. In this preliminary work, we demonstrated the basic viability of such scheme. Using glass mirrors, we demonstrated that alignment error of 1" and bonding error 2" can be achieved for mirrors in a single shell. We will address the immediate plan to demonstrate the bonding reliability and to develop technology to build up a mirror stack and a whole "meta-shell".

X-ray optics↗
NASA NTRS1969

A new method for producing optical mirrors

Pure silicon improves optical mirrors for use in telescopes and high resolution optical systems. Pure silicon is used in both mirror and substrate in environments where large thermal changes occur. It has applicability in astronomical devices.

Markle, D. A.↗
NASA NTRS2002

A Piezoelectric Unimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space Telescopes

Future concepts of ultra large space telescopes include segmented silicon mirrors and inflatable polymer mirrors. Primary mirrors for these systems cannot meet optical surface figure requirements and are likely to generate over several microns of wavefront errors. In order to correct for these large wavefront errors, high stroke optical quality deformable mirrors are required. JPL has recently developed a new technology for transferring an entire wafer-level mirror membrane from one substrate to another. A thin membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers. The measured peak-to-valley surface error of a transferred and patterned membrane (1 mm x 1 mm x 0.016 mm) is only 9 nm. The mirror element actuation principle is based on a piezoelectric unimorph. A voltage applied to the piezoelectric layer induces stress in the longitudinal direction causing the film to deform and pull on the mirror connected to it. The advantage of this approach is that the small longitudinal strains obtainable from a piezoelectric material at modest voltages are thus translated into large vertical displacements. Modeling is performed for a unimorph membrane consisting of clamped rectangular membrane with a PZT layer with variable dimensions. The membrane transfer technology is combined with the piezoelectric bimorph actuator concept to constitute a compact deformable mirror device with a large stroke actuation of a continuous mirror membrane, resulting in a compact A0 systems for use in ultra large space telescopes.

continuous mirror↗
NASA NTRS1998

Next Generation Space Telescope Ultra-Lightweight Mirror Program

The Next Generation Space Telescope is currently envisioned as a eight meter diameter cryogenic deployable telescope that will operate at the earth sun libration point L2. A number of different designs are being examined within NASA and under industry studies by Ball Aerospace, Lockheed-Martin and TRW. Although these designs differ in many respects, they all require significant advancements in the state-of-the-art with respect to large diameter, ultra-lightweight, mirrors. The purpose of this paper is to provide insight into the current status of the mirror development program NGST is a tremendously ambitious undertaking that sets the mark for new NASA missions. In order to achieve the weight, cost and performance requirements of NGST, the primary mirror must be made lighter, cheaper and better than anything that has ever been done. In order to accomplish this an aggressive technology program has been put in place. The scope of the program was determined by examining historically what has been accomplished; assessing recent technological advances in fabrication and testing; and evaluating the effect of these advances relative to enabling the manufacture of lightweight mirrors that meet NGST requirements. As it is currently envisioned, the primary mirror for NGST is on the order of eight meters in diameter, it is to be diffraction limited at a wave length of 2 microns and has an overall weight requirement of 15 kilograms per square meter. Two large scale demonstration projects are under way along with a number of smaller scale demonstrations on a variety of mirror materials and concepts. The University of Arizona (UA) mirror concept is based around a 2mm thick Borosilicate glass face sheet mounted to a composite backplane structure via actuators for mirror figure correction. The Composite Optics Inc.(COI) concept consists of a 3.2mm thick Zerodur face sheet bonded to a composite support structure which in turn is mounted to a composite backplane structure via actuators for mirror phasing. These mirrors are due to be performance tested in ambient conditions in the fall of '98, and cryogenically tested in the spring of '99. The smaller scale efforts include the following: Beryllium is being investigated at Ball Aerospace, Electroform nickel is being investigated in-house at MSFC, Chemical Vapor Deposition (CVD) Silicon Carbide (SiC) is being investigated at Morton International Silicon mirrors are being investigated at Schafer, Carbon Fiber Reinforced Silicon Carbide (CSIC) is being investigated at IABG. SiC at SSG, Composite mirrors at COI, pyrolyzed graphite mirrors at Ultramet, reaction bonded SiC mirrors at Xinetics, along with techniques for lightweighting using waterjets at Waterjet Technology Inc. are all being investigated under the Small Business innovative Research Program SBIR program. A procurement for a third large scale demonstration (nominally 1.5m in diameter) is being planned for release this fall.

Bilbro, James W.↗
NASA NTRS1999

Space Adaptation of Active Mirror Segment Concepts

This report summarizes the results of a three year effort by Blue Line Engineering Co. to advance the state of segmented mirror systems in several separate but related areas. The initial set of tasks were designed to address the issues of system level architecture, digital processing system, cluster level support structures, and advanced mirror fabrication concepts. Later in the project new tasks were added to provide support to the existing segmented mirror testbed at Marshall Space Flight Center (MSFC) in the form of upgrades to the 36 subaperture wavefront sensor. Still later, tasks were added to build and install a new system processor based on the results of the new system architecture. The project was successful in achieving a number of important results. These include the following most notable accomplishments: 1) The creation of a new modular digital processing system that is extremely capable and may be applied to a wide range of segmented mirror systems as well as many classes of Multiple Input Multiple Output (MIMO) control systems such as active structures or industrial automation. 2) A new graphical user interface was created for operation of segmented mirror systems. 3) The development of a high bit rate serial data loop that permits bi-directional flow of data to and from as many as 39 segments daisy-chained to form a single cluster of segments. 4) Upgrade of the 36 subaperture Hartmann type Wave Front Sensor (WFS) of the Phased Array Mirror, Extendible Large Aperture (PAMELA) testbed at MSFC resulting in a 40 to 5OX improvement in SNR which in turn enabled NASA personnel to achieve many significant strides in improved closed-loop system operation in 1998. 5) A new system level processor was built and delivered to MSFC for use with the PAMELA testbed. This new system featured a new graphical user interface to replace the obsolete and non-supported menu system originally delivered with the PAMELA system. The hardware featured Blue Line's new stackable processing system which included fiber optic data links, a WFS digital interface, and a very compact and reliable electronics package. The project also resulted in substantial advances in the evolution of concepts for integrated structures to be used to support clusters of segments while also serving as the means to distribute power, timing, and data communications resources. A prototype cluster base was built and delivered that would support a small array of 7 cm mirror segments. Another conceptual design effort led to substantial progress in the area of laminated silicon mirror segments. While finished mirrors were never successfully produced in this exploratory effort, the basic feasibility of the concept was established through a significant amount of experimental development in microelectronics processing laboratories at the University of Colorado in Colorado Springs. Ultimately lightweighted aluminum mirrors with replicated front surfaces were produced and delivered as part of a separate contract to develop integrated segmented mirror assemblies. Overall the project was very successful in advancing segmented mirror system architectures on several fronts. In fact, the results of this work have already served as the basic foundation for the system architectures of several projects proposed by Blue Line for different missions and customers. These include the NMSD and AMSD procurements for NASA's Next Generation Space Telescope, the HET figure maintenance system, and the 1 meter FAST telescope project.

Ames, Gregory H.↗
NASA NTRS2016

A Broadband X-Ray Imaging Spectroscopy with High-Angular Resolution: the FORCE Mission

We are proposing FORCE (Focusing On Relativistic universe and Cosmic Evolution) as a future Japan-lead X-ray observatory to be launched in the mid 2020s. Hitomi (ASTRO-H) possesses a suite of sensitive instruments enabling the highest energy-resolution spectroscopy in soft X-ray band, a broadband X-ray imaging spectroscopy in soft and hard X-ray bands, and further high energy coverage up to soft gamma-ray band. FORCE is the direct successor to the broadband X-ray imaging spectroscopy aspect of Hitomi (ASTRO-H) with significantly higher angular resolution. The current design of FORCE defines energy band pass of 1-80 keV with angular resolution of <15" in half-power diameter, achieving a 10 times higher sensitivity above 10 keV compared to any previous missions with simultaneous soft X-ray coverage. Our primary scientific objective is to trace the cosmic formation history by searching for "missing black holes" in various mass-scales: "buried supermassive black holes (SMBHs)" (> 10(exp 4) Stellar Mass) residing in the center of galaxies in a cosmological distance, "intermediate-mass black holes" (10(exp 2)-(10(exp 4) Stellar Mass) acting as the possible seeds from which SMBHs grow, and "orphan stellar-mass black holes" (< 10(exp 2) Stellar Mass) without companion in our Galaxy. In addition to these missing BHs, hunting for the nature of relativistic particles at various astrophysical shocks is also in our scope, utilizing the broadband X-ray coverage with high angular-resolution. FORCE are going to open a new era in these fields. The satellite is proposed to be launched with the Epsilon vehicle that is a Japanese current solid-fuel rocket. FORCE carries three identical pairs of Super-mirror and wide-band X-ray detector. The focal length is currently planned to be 10 m. The silicon mirror with multi-layer coating is our primary choice to achieve lightweight, good angular optics. The detector is a descendant of hard X-ray imager onboard Hitomi (ASTRO-H) replacing its silicon strip detector with SOI-CMOS silicon pixel detector, allowing an extension of the low energy threshold down to 1 keV or even less.

Hard X-ray↗
NASA NTRS2012

Next Generation X-Ray Optics: High-Resolution, Light-Weight, and Low-Cost

X-ray telescopes are essential to the future of x-ray astronomy. In this talk I will describe a comprehensive program to advance the technology for x-ray telescopes well beyond the state of the art represented by the three currently operating missions: Chandra, XMM-Newton, and Suzaku. This program will address the three key issues in making an x-ray telescope: (1) angular resolution, (2) effective area per unit mass, and (3) cost per unit effective area. The objectives of this technology program are (1) in the near term, to enable Explorer-class x-ray missions and an IXO-type mission, and (2) in the long term, to enable a flagship x-ray mission with sub-arcsecond angular resolution and multi-square-meter effective area, at an affordable cost. We pursue two approaches concurrently, emphasizing the first approach in the near term (2-5 years) and the second in the long term (4-10 years). The first approach is precision slumping of borosilicate glass sheets. By design and choice at the outset, this technique makes lightweight and low-cost mirrors. The development program will continue to improve angular resolution, to enable the production of 5-arcsecond x-ray telescopes, to support Explorer-class missions and one or more missions to supersede the original IXO mission. The second approach is precision polishing and light-weighting of single-crystal silicon mirrors. This approach benefits from two recent commercial developments: (1) the inexpensive and abundant availability of large blocks of monocrystalline silicon, and (2) revolutionary advances in deterministic, precision polishing of mirrors. By design and choice at the outset, this technique is capable of producing lightweight mirrors with sub-arcsecond angular resolution. The development program will increase the efficiency and reduce the cost of the polishing and the light-weighting processes, to enable the production of lightweight sub-arcsecond x-ray telescopes. Concurrent with the fabrication of lightweight mirror segments is the continued development and perfection of alignment and integration techniques, for incorporating individual mirror segments into a precision mirror assembly. Recently, we have been developing a technique called edge-bonding, which has achieved an accuracy to enable 10-arcsecond x-ray telescopes. Currently, we are investigating and improving the long-term alignment stability of so-bonded mirrors. Next, we shall refine this process to enable 5-arsecond x-ray telescopes. This technology development program includes all elements to demonstrate progress toward TRL-6: metrology; x-ray performance tests; coupled structural, thermal, and optical performance analysis, and environmental testing.

Zhang, William W.↗
NASA NTRS2011

Next Generation X-Ray Optics: High-Resolution, Light-Weight, and Low-Cost

X-ray telescopes are essential to the future of x-ray astronomy. This paper describes a comprehensive program to advance the technology for x-ray telescopes well beyond the state of the art represented by the three currently operating missions: Chandra, XMM-Newton , and Suzaku . This program will address the three key issues in making an x-ray telescope: (I) angular resolution, (2) effective area per unit mass, and (3) cost per unit effective area. The objectives of this technology program are (1) in the near term, to enable Explorer-class x-ray missions and an IXO type mission, and (2) in the long term, to enable a flagship x-ray mission with sub-arcsecond angular resolution and multi-square-meter effective area, at an affordable cost. We pursue two approaches concurrently, emphasizing the first approach in the near term (2-5 years) and the second in the long term (4-10 years). The first approach is precision slumping of borosilicate glass sheets. By design and choice at the outset, this technique makes lightweight and low-cost mirrors. The development program will continue to improve angular resolution, to enable the production of 5-arcsecond x-ray telescopes, to support Explorer-class missions and one or more missions to supersede the original IXO mission. The second approach is precision polishing and light-weighting of single-crystal silicon mirrors. This approach benefits from two recent commercial developments: (1) the inexpensive and abundant availability of large blocks of mono crystalline silicon, and (2) revolutionary advances in deterministic, precision polishing of mirrors. By design and choice at the outset, this technique is capable of producing lightweight mirrors with sub-arcsecond angular resolution. The development program will increase the efficiency and reduce the cost of the polishing and the lightweighting processes, to enable the production of lightweight sub-arcsecond x-ray telescopes. Concurrent with the fabrication of lightweight mirror segments is the continued development and perfection of alignment and integration techniques, for incorporating individual mirror segments into a precision mirror assembly. Recently, we have been developing a technique called edge-bonding, which has achieved an accuracy to enable 10- arcsecond x-ray telescopes. Currently, we are investigating and improving the long-term alignment stability of so-bonded mirrors. Next, we shall refine this process to enable 5-arsecond x-ray telescopes. This technology development program includes all elements to demonstrate progress toward TRL-6: metrology; x-ray performance tests; coupled structural, thermal, and optical performance analysis, and environmental testing.

Zhang, William W.↗
NASA NTRS2012

Multi-Layer Far-Infrared Component Technology

A method has been developed for fabricating high-reflectivity, multi-layer optical films for the terahertz wavelength region. A silicon mirror with 99.997-percent reflectivity at 70 micrometer wavelength requires an air gap of 17.50 micrometers and a silicon thickness of 5.12 micrometers. This approach obtains pre-thinned wafers of about 20 mm thickness in order to measure their thickness precisely. A gold annulus of appropriate thickness is deposited to reach the required total thickness. This, in turn, has the central aperture etched down to the desired final silicon thickness. Also, the novel Bragg stack optics in this innovation are key to providing Fabry-Perot spectroscopy and improved spectral component technologies of unprecedented resolution, free spectral range, and aperture.

Edwards, Oliver↗
NASA NTRS2013

Design, Construction, and Testing of Lightweight X-ray Mirror Modules

Lightweight and high resolution optics are needed for future space-based X-ray telescopes to achieve advances in high-energy astrophysics. The Next Generation X-ray Optics (NGXO) team at NASA GSFC is nearing mission readiness for a 10 arc-second Half Power Diameter (HPD) slumped glass mirror technology while laying the groundwork for a future 1-2 arc-second technology based on polished silicon mirrors. Technology Development Modules (TDMs) have been designed, fabricated, integrated with mirrors segments, and extensively tested to demonstrate technology readiness. Tests include X-ray performance, thermal vacuum, acoustic load, and random vibration. The thermal vacuum and acoustic load environments have proven relatively benign, while the random vibration environment has proven challenging due to large input amplification at frequencies above 500 Hz. Epoxy selection, surface preparation, and larger bond area have increased bond strength while vibration isolation has decreased vibration amplification allowing for space launch requirements to be met in the near term. The next generation of TDMs, which demonstrates a lightweight structure supporting more mirror segments, is currently being fabricated. Analysis predicts superior performance characteristics due to the use of E-60 Beryllium-Oxide Metal Matrix Composite material, with only a modest cost increase. These TDMs will be larger, lighter, stiffer, and stronger than the current generation. Preliminary steps are being taken to enable mounting and testing of 1-2 arc-second mirror segments expected to be available in the future. A Vertical X-ray Test Facility (VXTF) will minimize module gravity distortion and allow for less constrained mirror mounts, such as fully kinematic mounts. Permanent kinematic mounting into a modified TDM has been demonstrated to achieve 2 arc-second level distortion free alignment.

contruction↗
NASA NTRS2016

Toward Large-Area Sub-Arcsecond X-Ray Telescopes II

In order to advance significantly scientific objectives, future x-ray astronomy missions will likely call for x-ray telescopes with large aperture areas (approx. = 3 sq m) and fine angular resolution (approx. = 1"). Achieving such performance is programmatically and technologically challenging due to the mass and envelope constraints of space-borne telescopes and to the need for densely nested grazing-incidence optics. Such an x-ray telescope will require precision fabrication, alignment, mounting, and assembly of large areas (approx. = 600 sq m) of lightweight (approx. = 2 kg/sq m areal density) high-quality mirrors, at an acceptable cost (approx. = 1 M$/sq m of mirror surface area). This paper reviews relevant programmatic and technological issues, as well as possible approaches for addressing these issues-including direct fabrication of monocrystalline silicon mirrors, active (in-space adjustable) figure correction of replicated mirrors, static post-fabrication correction using ion implantation, differential erosion or deposition, and coating-stress manipulation of thin substrates.

Shi Ye↗
NASA NTRS2014

Toward Large-Area Sub-Arcsecond X-Ray Telescopes

The future of x-ray astronomy depends upon development of x-ray telescopes with larger aperture areas (>1 sq m) and finer angular resolution(<1).Combined with the special requirements of nested grazing incidence optics, the mass and envelope constraints of spaceborne telescopes render such advances technologically challenging. Achieving this goal will require precision fabrication, alignment, mounting, and assembly of large areas (>100 sq m) of lightweight (1 kg/sq m areal density) high quality mirrors-possibly entailing active (in-space adjustable) alignment and figure correction. This paper discusses relevant programmatic and technological issues and summarizes progress toward large area sub-arcsecond x-ray telescopes. Key words: X-ray telescopes, x-ray optics, active optics, electroactive devices, silicon mirrors, differential deposition, ion implantation.

O'Dell, Stephen L.↗
NASA NTRS2005

Minimizing Uncertainty in Cryogenic Surface Figure Measurement

A new facility at the Goddard Space Flight Center is designed to measure with unusual accuracy the surface figure of mirrors at cryogenic temperatures down to 12 K. The facility is currently configured for spherical mirrors with a radius of curvature (ROC) of 600 mm, and apertures of about 150 mm or less. The goals of the current experiment were to 1) Obtain the best possible estimate of test mirror surface figure, S(x,y) at 87 K and 20 K; 2) Obtain the best estimate of the cryo-change, Delta (x,y): the change in surface figure between room temperature and the two cryo-temperatures; and 3) Determine the uncertainty of these measurements, using the definitions and guidelines of the ISO Guide to the Expression of Uncertainty in Measurement. A silicon mirror was tested, and the cry-change from room temperature to 20K was found to be 3.7 nm rms, with a standard uncertainty of 0.23 nm in the rms statistic. Both the cryo-change figure and the uncertainty are among the lowest such figures yet published. This report describes the facilities, experimental methods, and uncertainty analysis of the measurements.

Blake, Peter↗
NASA NTRS2018

Reflective Coatings for the Future X-Ray Mirror Substrates

We present the development of the reflective coating by magnetron sputtering deposition onto precisely-fabricated thin X-ray mirrors. Our goal is to remove distortion induced by the coating and then keep their surface pro les. We first addressed the uniform coating to minimize the distortion by introducing a mask to control the spatial distribution of the coating thickness. The uniformity was finally achieved within 1%. We next tried a platinum single-layer coating on a glass substrate with a dimension of 200 mm 125 mm. The distortion caused by the frontside coating with a thickness of 320 A was found to be at most 1 m, smaller than the previous results obtained from the non-uniform coating. We then carried out the platinum coating with the same amount of the thickness on the backside surface of the glass substrate. The surface pro le of the glass substrate was fully recovered, indicating that the residual stress was successfully balanced by the backside coating. Furthermore, we tried to an iridium single-layer coating with a thickness of 150 Aon the silicon mirrors. The frontside coating caused the degradation of the imaging quality by 7:5 arcsec in half-power width. However, the backside coating with the same amount of the thickness reduced this degradation to be 3:4 arcsec. Finally, an additional backside coating with a thickness of 100 A and the annealing to relax the residual stress were found to eliminate the distortion completely; the final degradation of the imaging quality was only 0:4 arcsec.

Mori, Hideyuki↗