Search NASA⌕ Search

SEARCH · Search NASA

Results for “CVD”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 361 records · Page 20
All sourcesNASA NTRSDOE OSTI
NASA NTRS1992

Thin film diamond temperature sensor array for harsh aerospace environment

The feasibility of using polycrystalline CVD diamond films as temperature sensors in harsh aerospace environment associated with hypersonic flights was tested using patterned diamond resistors, fabricated on flat or curved oxidized Si surfaces, as temperature sensors at temperatures between 20 and 1000 C. In this temperature range, the measured resistance was found to vary over 3 orders of magnitude and the temperature coefficient of resistance to change from 0.017/K to 0.003/K. After an annealing treatment, the resistance change was reproducible within 1 percent on the entire temperature range for short measuring times.

Aslam, M.↗
NASA NTRS1991

Modeling of InP metalorganic chemical vapor deposition

The growth of InP by metalorganic chemical vapor deposition (MOCVD) in a horizontal reactor is being modeled with a commercially available computational fluid dynamics modeling code. The mathematical treatment of the MOCVD process has four primary areas of concern: 1) transport phenomena, 2) chemistry, 3) boundary conditions, and 4) numerical solution methods. The transport processes involved in CVD are described by conservation of total mass, momentum, energy, and atomic species. Momentum conservation is described by a generalized form of the Navier-Stokes equation for a Newtonian fluid and laminar flow. The effect of Soret diffusion on the transport of particular chemical species and on the predicted deposition rate is examined. Both gas-phase and surface chemical reactions are employed in the model. Boundary conditions are specified at the inlet and walls of the reactor for temperature, fluid flow and chemical species. The coupled set of equations described above is solved by a finite difference method over a nonuniform rectilinear grid in both two and three dimensions. The results of the 2-D computational model is presented for gravity levels of zero- and one-g. The predicted growth rates at one-g are compared to measured growth rates on fused silica substrates.

Black, Linda R.↗
NASA NTRS1991

Mechanical behavior of high strength ceramic fibers at high temperatures

The mechanical behavior of commercially available and developmental ceramic fibers, both oxide and nonoxide, has been experimentally studied at expected use temperatures. In addition, these properties have been compared to results from the literature. Tensile strengths were measured for three SiC-based and three oxide ceramic fibers for temperatures from 25 C to 1400 C. The SiC-based fibers were stronger but less stiff than the oxide fibers at room temperature and retained more of both strength and stiffness to high temperatures. Extensive creep and creep-rupture experiments have been performed on those fibers from this group which had the best strengths above 1200 C in both single filament tests and tests of fiber bundles. The creep rates for the oxides are on the order of two orders of magnitude faster than the polymer derived nonoxide fibers. The most creep resistant filaments available are single crystal c-axis sapphire filaments. Large diameter CVD fabricated SiC fibers are the most creep and rupture resistant nonoxide polycrystalline fibers tested to date.

Tressler, R. E.↗
NASA NTRS1993

High reflectance coatings for space applications in the EUV

Advances in optical coating and materials technology have made possible the development of instruments with substantially improved efficiency and made possible to consider more complex optical designs in the EUV. The importance of recent developments in chemical vapor deposited silicon carbide (CVD-SiC), SiC films and multilayer coatings is discussed in the context of EUV instrumentation design. The EUV performance of these coatings as well as some strengths and problem areas for their use in space will be addressed.

Keski-Kuha, Ritva A. M.↗
NASA NTRS1993

Design and fabrication of the All-Reflecting H-Lyman-alpha Coronagraph/Polarimeter

We have designed, analyzed, and are now fabricating an All-Reflecting H-Lyman-alpha Coronagraph/Polarimeter for solar research. This new instrument operates in a narrow bandpass centered at 215.7 A - the neutral hydrogen Ly-alpha line. It is shorter and faster than the telescope which produced solar Ly-alpha images as a part of the MSSTA payload that was launched on May 13, 1991. The Ly-alpha line is produced and linearly polarized in the solar corona by resonance scattering, and the presence of a magnetic field modifies this polarization according to the Hanle effect. The Lyman-alpha Coronagraph/Polarimeter instrument has been designed to measure coronal magnetic fields by interpreting, via the Hanle effect, the measured linear polarization of the coronal Ly-alpha line. Ultrasmooth mirrors, polarizers, and filters are being flow-polished for this instrument from CVD silicon carbide substrates. These optical components will be coated using advanced induced transmission and absorption thin film multilayer coatings to optimize the reflectivity and polarization properties at 1215.7 A. We describe some of the solar imaging results obtained with the MSSTA Lyman-alpha coronagraph. We also discuss the optical design parameters and fabrication plans for the All-Reflecting H-Lyman-alpha Coronagraph/Polarimeter.

Hoover, Richard B.↗
NASA NTRS1993

Atomic probe microscopy of 3C SiC films grown on 6H SiC substrates

The surface of 3C SiC films grown on 6H SiC substrates has been studied by atomic probe microscopy in air. Atomic-scale images of the 3C SiC surface have been obtained by STM which confirm the 111 line type orientation of the cubic 3C layer grown on the 0001 plane type surface of the hexagonal 6H substrate. The nearest-neighbor atomic spacing for the 3C layer has been measured to be 3.29 +/- 0.2 A, which is within 7 percent of the bulk value. Shallow terraces in the 3C layer have been observed by STM to separate regions of very smooth growth in the vicinity of the 3C nucleation point from considerably rougher 3C surface regions. These terraces are oriented at right angles to the growth direction. Atomic force microscopy has been used to study etch pits present on the 6H substrate due to high temperature HCl cleaning prior to CVD growth of the 3C layer. The etch pits have hexagonal symmetry and vary in depth from 50 nm to 1 micron.

Steckl, A. J.↗
NASA NTRS1993

Monolithic catalytic igniters

Catalytic igniters offer the potential for excellent reliability and simplicity for use with the diergolic bipropellant oxygen/hydrogen as well as with the monopropellant hydrazine. State-of-the-art catalyst beds - noble metal/granular pellet carriers - currently used in hydrazine engines are limited by carrier stability, which limits the hot-fire temperature, and by poor thermal response due to the large thermal mass. Moreover, questions remain with regard to longevity and reliability of these catalysts. In this work, Ultramet investigated the feasibility of fabricating monolithic catalyst beds that overcome the limitations of current catalytic igniters via a combination of chemical vapor deposition (CVD) iridium coatings and chemical vapor infiltration (CVI) refractory ceramic foams. It was found that under all flow conditions and O2:H2 mass ratios tested, a high surface area monolithic bed outperformed a Shell 405 bed. Additionally, it was found that monolithic catalytic igniters, specifically porous ceramic foams fabricated by CVD/CVI processing, can be fabricated whose catalytic performance is better than Shell 405 and with significantly lower flow restriction, from materials that can operate at 2000 C or higher.

La Ferla, R.↗
NASA NTRS1993

Electronic passivation of n- and p-type GaAs using chemical vapor deposited GaS

We report on the electronic passivation of n- and p-type GaAs using CVD cubic GaS. Au/GaS/GaAs-fabricated metal-insulator-semiconductor (MIS) structures exhibit classical high-frequency capacitor vs voltage (C-V) behavior with well-defined accumulation and inversion regions. Using high- and low-frequency C-V, the interface trap densities of about 10 exp 11/eV per sq cm on both n- and p-type GaAs are determined. The electronic condition of GaS/GaAs interface did not show any deterioration after a six week time period.

Tabib-Azar, Massood↗
NASA NTRS1991

Chemical vapor deposition coatings for oxidation protection of titanium alloys

Results of an experimental investigation of the oxidation protection afforded to Ti-14Al-21Nb and Ti-14Al-23Nb-2V titanium aluminides and Ti-17Mo-3Al-3Nb titanium alloy by aluminum-boron-silicon and boron-silicon coatings are presented. These coatings are applied by a combination of physical vapor deposition (PVD) and chemical vapor deposition (CVD) processes. The former is for the application of aluminum, and the latter is for codeposition of boron and silicon. Coating thickness is in the range of 2 to 7 microns, and coating weights are 0.6 to 2.0 mg/sq cm. Oxidation testing was performed in air at temperatures to 1255 K in both static and hypersonic flow environments. The degree of oxidation protection provided by the coatings is determined from weight change measurements made during the testing and post test compositional analyses. Temperature-dependent total normal emittance data are also presented for four coating/substrate combinations. Both types of coatings provided excellent oxidation protection for the exposure conditions of this investigation. Total normal emittances were greater than 0.80 in all cases.

Cunnington, G. R.↗
NASA NTRS1992

Growth and characterizaton of 3C-SiC and 6H-SiC films on 6H-SiC wafers

Single crystal SiC films were grown by CVD on vicinal (0001) SiC wafers cut from boules produced by the modified sublimation method. Wafers with tilt angles less than 0.5 deg yielded 3C-SiC; tilt angles of 3 to 4 deg resulted in 6H-SiC films. The surface morphology of these films, up to 24 microns thick, were investigated as a function of growth parameters such as the Si/C ratio in the input gases and the presence of dopant materials such as nitrogen and trimethylaluminum.

Powell, J. A.↗
NASA NTRS1993

Diamond thermoluminescence properties of different chondrites

It was found that thermoluminescence (TL) glows of diamonds depend on the origin of diamonds and the chondrite metamorphism degree. The investigation of TL of diamonds was continued and the results for diamonds from Murchison CM2, Krymka LL3.0, Kainsaz CO3, and Abee E4 were considered. The diamonds synthesized by CVD-process (samples 133, 159) and by detonation from soot (DDS-B14-89) were also analyzed for comparison. Before the TL measuring samples were annealed at approximately 350 C for a few seconds and then irradiated by gamma-rays of Cs-137 up to dose approximately 200 krad. TL-measurements were performed in the air atmosphere on the standard equipment. TL data for samples are shown. TL glow for some diamonds are also presented.

Fisenko, A. V.↗
NASA NTRS1993

Research on chemical vapor deposition processes for advanced ceramic coatings

Our interdisciplinary background and fundamentally-oriented studies of the laws governing multi-component chemical vapor deposition (VD), particle deposition (PD), and their interactions, put the Yale University HTCRE Laboratory in a unique position to significantly advance the 'state-of-the-art' of chemical vapor deposition (CVD) R&D. With NASA-Lewis RC financial support, we initiated a program in March of 1988 that has led to the advances described in this report (Section 2) in predicting chemical vapor transport in high temperature systems relevant to the fabrication of refractory ceramic coatings for turbine engine components. This Final Report covers our principal results and activities for the total NASA grant of $190,000. over the 4.67 year period: 1 March 1988-1 November 1992. Since our methods and the technical details are contained in the publications listed (9 Abstracts are given as Appendices) our emphasis here is on broad conclusions/implications and administrative data, including personnel, talks, interactions with industry, and some known applications of our work.

Rosner, Daniel E.↗
NASA NTRS1994

Deposition of tantalum carbide coatings on graphite by laser interactions

Graphite surfaces can be hardened and protected from erosion by hydrogen at high temperatures by refractory metal carbide coatings, which are usually prepared by chemical vapor deposition (CVD) or chemical vapor reaction (CVR) methods. These techniques rely on heating the substrate to a temperature where a volatile metal halide decomposes and reacts with either a hydrocarbon gas or with carbon from the substrate. For CVR techniques, deposition temperatures must be in excess of 2000 C in order to achieve favorable deposition kinetics. In an effort to lower the bulk substrate deposition temperature, the use of laser interactions with both the substrate and the metal halide deposition gas has been employed. Initial testing involved the use of a CO2 laser to heat the surface of a graphite substrate and a KrF excimer laser to accomplish a photodecomposition of TaCl5 gas near the substrate. The results of preliminary experiments using these techniques are described.

Veligdan, James↗
NASA NTRS1994

Neutral ion sources in precision manufacturing

Ion figuring of optical components is a relatively new technology that can alleviate some of the problems associated with traditional contact polishing. Because the technique is non contacting, edge distortions and rib structure print through do not occur. This initial investigation was aimed at determining the effect of ion figuring on surface roughness of previously polished or ductile ground ceramic optical samples. This is the first step in research directed toward the combination of a pre-finishing process (ductile grinding or polishing) with ion figuring to produce finished ceramic mirrors. The second phase of the project is focusing on the development of mathematical algorithms that will deconvolve the ion beam profile from the surface figure errors so that these errors can be successfully removed from the optical components. In the initial phase of the project, multiple, chemical vapor deposited silicon carbide (CVD SiC) samples were polished or ductile ground to specular or near-specular roughness. These samples were then characterized to determine topographic surface information. The surface evaluation consisted of stylus profilometry, interferometry, and optical and scanning electron microscopy. The surfaces, were ion machined to depths from 0-5 microns. The finished surfaces were characterized to evaluate the effects of the ion machining process with respect to the previous processing methods and the pre-existing subsurface damage. The development of the control algorithms for figuring optical components has been completed. These algorithms have been validated with simulations and future experiments have been planned to verify the methods. This paper will present the results of the initial surface finish experiments and the control algorithms simulations.

Fawcett, Steven C.↗
NASA NTRS1995

Effects of the LDEF orbital environment on the reflectance of optical mirror materials

Specimens of eight different optical mirror materials were flown in low earth orbit as part of the Long Duration Exposure Facility (LDEF) manifest to determine their ability to withstand exposure to the residual atomic oxygen and other environmental effects at those altitudes. Optical thin films of aluminum, gold, iridium, osmium, platinum, magnesium fluoride-overcoated aluminum and reactively deposited, silicon monoxide-protected aluminum, all of which were vacuum deposited on polished fused silica substrates, were included as part of Experiment S0010, Exposure of Spacecraft Coatings. Two specimens of polished, chemical vapor deposited (CVD) silicon carbide were installed in sites available in Experiment A0114, Interaction of Atomic Oxygen with Solid Surfaces at Orbital Altitudes, which included trays in two of the spacecraft bays, one on the leading edge and the other on the trailing edge. One of the silicon carbide samples was located in each of these trays. This paper will compare specular reflectance data from the preflight and postflight measurements made on each of these samples and attempt to explain the changes in light of the specific environments to which the experiments were exposed.

Herzig, Howard↗
NASA NTRS1995

Advanced Small Rocket Chambers. Option 3: 110 1Bf Ir-Re Rocket, Volume 1

This report describes the AJ10-221, a high performance Iridium-coated Rhenium (Ir-Re) 110 lbf (490N) welded rocket chamber with 286:1 area ratio nozzle. This engine was designed, built, and hot fired for over 6 hours on this program. It demonstrated an I(s) of 321.8 sec, which is 10 sec higher than conventional 110 lbf silicide coated Cb chambers now in use. The approach used in this portion of the program was to demonstrate the performance improvement that can be made by the elimination of fuel film cooling and the use of a high temperature (4000F) (2200C) iridium-coated rhenium (Ir-Re) rocket chamber. Detailed thermal, performance, mechanical, and dynamic design analyses of the full engine were conducted by Aerojet. Two Ir-Re chambers were built to the Aerojet design by Ultramet, using the chemical vapor deposition (CVD) process. Incorporation of a secondary mixing device or Boundary Layer Trip (BLT) within the combustion chamber (Aerojet Patents 4882904 and 4936091) results in improvement in flow uniformity, and a significant life and performance increase. The 110 lbf engine design was verified in bolt-up hardware tests at sea level and altitude. The effects of injector design on performance were studied. Two duplicate injectors were fabricated matching the preferred design and were demonstrated to be interchangeable in operation. One of these units was fabricated matching the preferred design and was demonstrated to be interchangeable in operation. One of these units was welded into a flight type thruster which was tested for an accumulated duration of 22,590 sec in 93 firings, one of which was a continuous burn of two hours. A design deficiency in the C-103 nozzle near the Re-Cb transition joint was discovered, studied and corrected design has been prepared. Workhardening studies have been conducted to investigate methods for increasing the low yield strength of the Re in the annealed conditions. An advanced 490N high performance engine has been demonstrated which, when proven to be capable of withstanding launch vibration, is ready for flight qualification.

Jassowski, Donald M.↗
NASA NTRS1995

Advanced small rocket chambers. Option 3: 110 1bf Ir-Re rocket, volume 2

This is the second part of a two-part report that describes the AJ10-221, a high performance iridium-coated rhenium (Ir-Re) 110 lbf (490N) welded rocket chamber with 286:1 area ratio nozzle. This engine was designed, built, and hot fired for over 6 hours on this program. It demonstrated an I(s) of 321.8 sec, which is 10 sec higher than conventional 110 lbf silicide coated Cb chambers now in use. The approach used in this portion of the program was to demonstrate the performance improvement that can be made by the elimination of fuel film cooling and the use of a high temperature (4000 F) (2200 C) iridium-coated rhenium (Ir-Re) rocket chamber. Detailed thermal, performance, mechanical, and dynamic design analyses of the full engine were conducted by Aerojet. Two Ir-Re chambers were built to the Aerojet design by Ultramet, using the chemical vapor deposition (CVD) process. Incorporation of a secondary mixing device or Boundary Layer Trip (BLT) within the combustion chamber (Aerojet Patents 4882904 and 4936091) results in improvement in flow uniformity, and a significant life and performance increase. The 110 lbf engine design was verified in bolt-up hardware tests at sea level and altitude. The effects of injector design on performance were studied. Two duplicate injectors were fabricated matching the preferred design and were demonstrated to be interchangeable in operation. One of these units were welded into a flight type thruster which was tested for an accumulated duration of 22,590 sec in 93 firings, one of which was a continuous burn of two hours. A design deficiency in the C-103 nozzle near the Re-Cb transition joint was discovered, studied and corrected design has been prepared. Workhardening studies have been conducted to investigate methods for increasing the low yield strength of the Re in the annealed conditions. An advanced 490N high performance engine has been demonstrated which, when proven to be capable of withstanding launch vibration, is ready for flight qualification.

Jassowski, Donald M.↗
NASA NTRS1995

Diamond and diamondlike carbon as wear-resistant, self-lubricating coatings for silicon nitride

Recent work on the friction and wear properties of as-deposited fine-grain diamond, polished coarse-grain diamond, and as-deposited diamondlike carbon (DLC) films in humid air at a relative humidity of approximately 40 percent and in dry nitrogen is reviewed. Two types of chemical vapor deposition (CVD) processes are used to deposit diamond films on silicon nitride (Si3N4) substrates: microwave-plasma and hot-filament. Ion beams are used to deposit DLC films of Si3N4 substrates. The diamond and DLC films in sliding contact with hemispherical bare Si3N4 pins have low steady-state coefficients of friction (less than 0.2) and low wear rates (less than 10(exp -7) mm(exp 2)/N-m), and thus, can be used effectively as wear-resistant, self-lubricating coatings for Si3N4 in the aforementioned two environments.

Miyoshi, Kazuhisa↗