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Healable Coatings as a Mechanism to Repair Leading Edge Erosion in Wind Energy

Wind turbine blades are highly engineered structures designed to face temperature extremes and high winds. However, erosion of the blade's leading edge and subsequent repair remains a significant and costly challenge for the wind energy industry. Repair of these leading edges can lead to large amounts of downtime for the turbine and significant operational inefficiencies. In this work, the strength of adhesion and healing ability of a commercially available vitrimer (Mallinda's VITRIMAX) was compared to that of a thermoplastic resin, which has previously been demonstrated in wind energy applications (Arkema's Elium) to evaluate their efficacy as surface coatings for wind turbine blades, particularly their leading edges. Vitrimers are a class of inherently reprocessable thermosets, and it was theorized that vitrimer-based leading edge coatings could enable more robust and efficient wind turbine blades with decreased operational downtime and safer maintenance practices. It was found that the VITRIMAX adhered better to the wind blades' surfaces than both the manufacturer's paint and Elium, with increases in pull-off strength of adhesion ranging from 24% to 83% above that of the original paint. Furthermore, the VITRIMAX adhered strongly to the underlying composite of each blade with strength of adhesion values increasing in ranges from 42% to 97% above that of the original paint. Finally, the vitrimer coating showed an 88% decrease in surface roughness compared to end-of-life blade materials, and initial healing demonstrations in which coatings were manually scratched and subsequently healed exhibited an ~84.5% decrease in scratch depths.

Hubbard, Amber [ORNL]

Stellar Population Properties in the Stellar Streams around SPRC047

Abstract We have investigated the properties (e.g., age, metallicity) of the stellar populations of a ringlike tidal stellar stream (or streams) around the edge-on galaxy SPRC047 (z= 0.031) using spectral energy distribution (SED) fits to integrated broadband aperture flux densities. We used visual images in six different bands and Spitzer/IRAC 3.6μm data. We have attempted to derive best-fit stellar population parameters (metallicity, age) in three noncontiguous segments of the stream. Due to the very low surface brightness of the stream, we have performed a deconvolution with a Richardson–Lucy–type algorithm of the low spatial resolution 3.6μm IRAC image, thereby reducing the effect of the point-spread function aliasedemissionfrom the bright edge-on central galaxy at the locations of our three stream segments. Our SED fits that used several different star formation (SF) history priors, from an exponentially decaying SF burst to continuous SF, indicate that the age–metallicity–dust degeneracy is not resolved, most likely because of inadequate wavelength coverage and low signal-to-noise ratios of the low surface brightness features. We also discuss how future deep visual–near-infrared observations, combined with absolute flux calibration uncertainties at or below the 1% level, complemented by equally well absolute flux-calibrated observations in ultraviolet and mid-infrared bands, would improve the accuracy of broadband SED fitting results for low surface brightness targets, such as stellar streams around nearby galaxies that are not resolved into stars.

Astronomy & Astrophysics

Mathematical Model of a Regenerative Fuel Cell for System Optimization

This thesis developed a system-level optimization model of a regenerative fuel cell (RFC) system for long-duration, off-world energy storage applications. Prior RFC design studies have typically been limited to reduced parameter sets and simplified constraints due to computational limitations relative to the number of relevant degrees of freedom. As a result, important nonlinear interactions between subsystems have not been fully captured. This work began to address that gap by developing a higher-fidelity, nonlinear optimization framework that incorporates a broader set of design variables and coupled constraints, enabling a multidimensional model that captures the coupled behavior of RFC subsystems and demonstrates the feasibility of applying optimization to such systems. An expanded system-level optimization approach was established that captures interactions between electrochemical performance, structural requirements, and storage design. This enabled a more comprehensive evaluation of trade-offs than conventional formulations. The model integrates four coupled subsystems: a fuel cell, an electrolyzer, reactant gas, and high-pressure storage tanks, and was formulated to accommodate a wide range of mission parameters, including operational time and required output power. It incorporates constraints on available solar array power, reactant mass balance between production and consumption, and pressure-dependent storage requirements. To enable reliable convergence, the optimization problem was reformulated to reduce dimensionality and improve numerical stability, with subsystem models organized for efficient evaluation. Problem dimensionality was reduced by consolidating lower-level design variables into higher-level representative quantities, and subsystem behavior was evaluated within the optimization loop. A multi-start initialization strategy was employed to mitigate sensitivity to local minima and improve solution quality, while nonlinear relationships were solved using robust numerical methods. The results showed that convergence was achieved across a range of required output power values. Specific energy reached a maximum at a critical mission power level, where the electrolyzer power matched the available solar input and operated near its voltage and current density limits. Beyond this point, further increases in required power resulted in less mass-efficient operation, increasing total system mass and reducing overall performance. The developed model represents an advancement in RFC system-level optimization by enabling analysis of a broader and more tightly coupled design space than previous considerations. While convergence behavior and computational cost remain challenges, the methods introduced improve solvability and allow inclusion of additional design variables with minimal loss of physical fidelity. However, the numerical results should not be interpreted as definitive design recommendations, as the model includes simplifying assumptions and omits several higher-order effects. Future work should extend this framework by incorporating additional subsystems and loss mechanisms, such as thermal management, parasitic power consumption, and reactant losses, to improve fidelity and ensure more representative design conclusions.

Electrochemistry

Detection and characterization of detached tidal dwarf galaxies

Tidal interactions between galaxies often give rise to tidal tails, which can harbor concentrations of stars and interstellar gas resembling dwarf galaxies. Some of these tidal dwarf galaxies (TDGs) have the potential to detach from their parent galaxies and become independent entities, but their long-term survival is uncertain. In this study, we conducted a search for detached TDGs associated with a sample of 39 interacting galaxy pairs in the local Universe using infrared, ultraviolet, and optical images. We employed IR colors and UV/optical/IR spectral energy distributions to identify potential interlopers, such as foreground stars or background quasars. Through spectroscopic observations using the Boller and Chivens spectrograph at San Pedro Mártir Observatory, we confirmed that six candidate TDGs are at the same redshift as their putative parent galaxy pairs. We identified and measured emission lines in the optical spectra and calculated nebular oxygen abundances, which range from log(O/H) = 8.10 ± 0.01 to 8.51 ± 0.02. We have serendipitously discovered an additional detached TDG candidate in Arp72 using available spectra from SDSS. Utilizing the photometric data and the CIGALE code for stellar population and dust emission fitting, we derived the stellar masses, stellar population ages, and stellar metallicities for these detached TDGs. Compared to standard mass-metallicity relations for dwarf galaxies, five of the seven candidates have higher than expected metallicities, confirming their tidal origins. One of the seven candidates remains unclear due to large uncertainties in metallicity, and another has stellar and nebular metallicities compatible with those of a preexisting dwarf galaxy. The latter object is relatively compact in the optical relative to its stellar mass, in contrast to the other candidate TDGs, which have large diameters for their stellar masses compared to most dwarf galaxies. The derived stellar population ages range from 100 Myr to 900 Myr, while the inferred stellar masses are between 2 × 10 6 M ⊙ and 8 × 10 7 M ⊙ . Four of the six TDGs are associated with the gas-rich M51-like pair Arp 72, one TDG is associated with a second M51-like pair Arp 86, and another is associated with Arp 65, an approximately equal mass pair. In spite of the relatively low stellar masses of these TDGs, they have survived for at least 100–900 Myrs, suggesting that they are stable and in dynamical equilibrium. We conclude that encounters with a relatively low-mass companion (1/10th–1/4th of the mass of the primary) can also produce long-lasting TDGs.

Astronomy & Astrophysics

Activating magnetite ores for aqueous ironmaking at high current densities

Low-temperature electrochemical cells reducing iron oxides to metal in alkaline electrolytes can support fully electrified steelmaking processes. Previous studies on these cells have primarily focused on high-surface-area hematite, Fe 2 O 3 , reactants whereas attempts to reduce suspensions of magnetite, Fe 3 O 4 —one of the two feedstocks for existing ironmaking reactors—have generally been limited to low rates of reaction (<30 mA cm −2 ). Here, in this study, we control the crystalline domain size of Fe 2 O 3 and Fe 3 O 4 particles in 10 M NaOH electrolytes to study how the nanoscale morphology of oxides controls the rate of electrochemical ironmaking. Rotating-ring disk electrode measurements of Fe 2+ , in situ Raman spectroscopy of the electrode surface, and ex situ electron microscopy were consistent with a hypothesized passivation process at Fe 3 O 4 surfaces that may prevent the continuous formation of soluble intermediates. Sufficiently small (<100 nm diameter) oxide particles yielded Fe partial current densities >160 mA cm −2 , a fivefold increase relative to previously reported rates for Fe 3 O 4 suspensions and comparable to active Fe 2 O 3 . Electron microscopy revealed that electrodeposited films were composed of micron-scale crystalline Fe domains with a porous film of Fe 3 O 4 nanoparticles and supports a model where Fe is grown primarily from soluble Fe 2+ intermediates. Based on these insights, inactive blast-furnace-grade iron-oxides were transformed into high surface area nanoparticles (1.6 to 229.2 m 2 g −1 ) via reprecipitation, leading to a ninefold enhancement in faradaic efficiency and an Fe partial current density of 120 mA cm −2 . When integrated with chlor-iron cells producing reagents for reprecipitation, this approach could lead to a cost-competitive process for electrochemical ironmaking from industrially relevant feedstocks.

TEM

3D Printing ofThermally Responsive Shape Memory LiquidCrystalline Epoxy Networks

Abstract A two-component liquid crystalline epoxy network (LCEN) with shape memory behavior was developed and evaluated as a candidate material for 3D printing. The cure kinetics of the uncured material and the shape memory properties of the cured LCEN were investigated by using parallel plate rheology and dynamic mechanical analysis, respectively. A commercially available fumed silica additive was introduced to the neat, uncured material to improve the rheological properties for 3D printing. The addition of fumed silica was found to increase the yield stress, shear-thinning behavior, and toughness of the uncured epoxy ink. Polarized light microscopy, differential scanning calorimetry, and wide-angle X-ray scattering measurements between the neat and additive-modified LCEN suggested a reduction in liquid crystalline alignment in the modified LCEN, owing to interactions between crystalline domains and fumed silica, which in turn influenced the mechanical behavior. Overall, the additive was found to be successful in preserving the shape memory properties of LCEN while improving its printability.

Chemistry

Techno-Economic Evaluation of a 600MW Pumped Storage Hydropower Plant using the Pumped Storage Hydropower Valuation Tool

This paper presents a techno-economic evaluation of the proposed 600 MW, 8-hour Craig – Hayden pumped storage hydropower project using the U.S. Department of Energy’s Pumped Storage Hydropower Valuation Tool. The analysis integrates plant technical characteristics, regional grid conditions, and market-based operating assumptions to quantify stacked value streams from energy arbitrage, capacity, ancillary services, transmission congestion relief, and reliability. Both price taker and price influencer frameworks are applied to examine the impact of market participation and system interactions on lifecycle economic performance using Benefit - Cost Analysis and Multi - Criteria Decision Analysis. The results show that the price taker approach provides higher revenue estimates based on exogenous price signals, while the price influencer approach captures production cost savings, renewable curtailment reduction, and market price formation, yielding more conservative but system-representative outcomes. The study demonstrates the strategic value of long-duration PSH for enhancing operational flexibility, resource adequacy, and grid reliability in a high-renewable Western Interconnection.

Bhattacharyya, Arjun [ORNL] (ORCID:000900060976046

Using Open Innovation in Reducing Risk to Crews

In the exploration of destinations outside of Earth's neighborhood, specifically Mars, scientific and engineering inquiries have occurred by two means; observations from satellites and observations by landed spacecraft. Satellite observations (Mariner, MRO, Mars Odyssey, provide global-scale spatial and temporal data while landed spacecraft (Viking, Mars Pathfinder, Spirit, Opportunity, Phoenix Mars Lander) investigate highly localized areas of the surface of the planet. In preparation for human exploration, extensive knowledge of the surface and atmospheric environments should be known before the first human leaves Earth. The primary goal of performing reconnaissance on Mars on a sub-global scale is to know as much as possible about the environment to which crews will be subjected. At the current rate of launching and landing probes to Mars, it will take a very long time to understand the surface and atmospheric conditions associated with the regions where prospective crews may land. Meanwhile electronics and electrical systems are rapidly getting smaller. One can argue that to acquire the knowledge of the region, one must take hundreds, maybe thousands of measurements simultaneously. One means to perform such a task is to deploy a swarm of sensors. Such a swarm would perform an in-situ assessment of the region. Imagine a close flyby mission to Mars for example, where mini- to micro-sensors are deposited into the atmosphere over half an orbit or more. The sensors, captured by the atmospheric drag and Martian gravity slowly descend buffeted about by Martian winds and weather until they settle on the surface a great time later (think of how long dust takes to settle). As they descend they communicate a vast array of data; temperature, chemistry, pressure, radiation dose, electric or magnetic properties from a region of the planet and an individual sensor need not measure the same quantity as its neighbors. Initially, they could move at the whim of the environment but later versions could have locomotion or propulsion mechanisms. Humans wouldn't need to decide where the sensors go, the sensors do that for themselves. This is a key strength of a sensor swarm. The intelligence relies on the group not on a decision maker on earth. Real time sensor inputs direct what the swarm considers most interesting to investigate resulting in emergent behavior. We issued a $20,000 challenge to the global innovators to provide solutions as to how such a swarm could be initialized and by what protocols and methodologies by which they operate. Over 400 innovators from 49 countries took a look at the problem, with three receiving partial awards for solutions.

Mel Ferebee

Thermal Bekenstein-Hawking entropy from the worldsheet

We define and compute the leading sphere diagram contribution to the entropy of the BTZ black hole supported by Kalb-Ramond flux in bosonic string theory. In a winding condensate description, integrating exactly over the constant mode for the radial direction of AdS 3 reduces the problem to one of the correlation functions of winding operators in the free theory. The volume of the residual PSL(2,ℂ) gauge group of the sphere is canceled by the action of conformal transformations on the winding interaction insertions. We formulate a precise version of the replica trick in terms of (infinitesimally) non-integer winding condensates to produce the entropy of the BTZ black hole. The resulting entropy can be calculated from the one-point function of a non-local operator on the worldsheet.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS

Ultrafast Nanoimaging of Carrier Funneling in Composition-Graded Semiconductor Nanowires

Recent advances in bandgap engineering of low-dimensional semiconductors have enabled high-efficiency carrier transport in miniaturized electronic and optoelectronic devices. The physical properties and functionalities of these materials are governed by complex carrier dynamics coupled with multiple transport mechanisms in tailored band structures. Here, we report ultrafast nanoimaging of carrier funneling and recombination in composition-grade CdSxSe1-x nanowires using pump-probe near-field nanoscopy. Leveraging the high resolution of this technique in both space and time, we resolve nanoscale local carrier dynamics along composition-graded nanowires, revealing the local variation of composition-dependent carrier mobilities and lifetimes that significantly differ from their uniform composition counterparts. Furthermore, we demonstrate a length-dependent behavior wherein shorter nanowires exhibit enhanced funneling effects, accelerating carrier transport by up to 33%. Our findings provide direct visualization of nanoscale carrier transport while supporting an effective approach for investigating complex carrier interactions in inhomogeneous semiconductor nanostructures, with implications for optimizing next-generation optoelectronic devices.

Yang, Rundi

Surveyor Project Final Report: Part 1 - Project Description and Performance, Volume 1

The Surveyor Project planned and conducted seven unmanned lunar missions for which spacecraft were launched between May 1966 and January 1968. Each of the spacecraft was successfully launched with the then newly developed Atlas/Centaur vehicle which utilized for the first time a high-specific-impulse, liquid hydrogen/liquid oxygen fueled stage. Five of the spacecraft successfully soft-landed and returned a great quantity of engineering and scientific data on extensive postlanding operations, accomplishing all mission and project objectives. Four of the spacecraft soft-landed at selected mare sites to provide data which were required to support the Apollo Program. The final spacecraft was then successfully used for scientific investigation of a contrasting site in the rugged lunar highlands. Surveyor was a fully attitude-stabilized spacecraft designed to receive and execute a wide variety of earth commands, as well as to perform certain automatic functions including the critical terminal-descent and soft-landing sequences. Significant new and advanced subsystems that were developed and/or used in combination to enable Surveyor to execute the complex terminal phase of flight were: (1) a solid-propellant main retro motor, (2) throttlable liquid-propellant vernier engines (also used for midcourse velocity correction), (3) highly sensitive velocity- and altitude-sensing radars, and (4) an automatic closed-loop guidance and control system. The first Surveyor spacecraft carried a survey television camera which, together with other engineering instrumentation, obtained in-flight and postlanding data. The complement of instruments carried on later missions included various combinations of the following additional devices: (1) a soil mechanics/surface sampler instrument for picking, digging, and handling lunar surface material; (2) an alpha scattering instrument for performing a chemical analysis of the lunar surface material; and (3) magnets attached to the spacecraft for determining magnetic properties of the soil.

Jet Propulsion Laboratory

Surveyor Project Final Report: Part 1 - Project Description and Performance, Volume 2

The Surveyor Project planned and conducted seven unmanned lunar missions for which spacecraft were launched between May 1966 and January 1968. Each of the spacecraft was successfully launched with the then newly developed Atlas/Centaur vehicle which utilized for the first time a high-specific-impulse, liquid hydrogen/liquid oxygen fueled stage. Five of the spacecraft successfully soft-landed and returned a great quantity of engineering and scientific data on extensive postlanding operations, accomplishing all mission and project objectives. Four of the spacecraft soft-landed at selected mare sites to provide data which were required to support the Apollo Program. The final spacecraft was then successfully used for scientific investigation of a contrasting site in the rugged lunar highlands. Surveyor was a fully attitude-stabilized spacecraft designed to receive and execute a wide variety of earth commands, as well as to perform certain automatic functions including the critical terminal-descent and soft-landing sequences. Significant new and advanced subsystems that were developed and/or used in combination to enable Surveyor to execute the complex terminal phase of flight were: (1) a solid-propellant main retro motor, (2) throttlable liquid-propellant vernier engines (also used for midcourse velocity correction), (3) highly sensitive velocity- and altitude-sensing radars, and (4) an automatic closed-loop guidance and control system. The first Surveyor spacecraft carried a survey television camera which, together with other engineering instrumentation, obtained in-flight and postlanding data. The complement of instruments carried on later missions included various combinations of the following additional devices: (1) a soil mechanics/surface sampler instrument for picking, digging, and handling lunar surface material; (2) an alpha scattering instrument for performing a chemical analysis of the lunar surface material; and (3) magnets attached to the spacecraft for determining magnetic properties of the soil.

Jet Propulsion Laboratory

Swamp Works Regolith Compaction Technologies

While the level of compaction below the lunar surface increases quickly after only a few cm of depth, in many cases during a construction mission there will be a need to excavate and transport regolith to a new location for cut-and-fill or horizontal construction of structures such as berms. In these cases to achieve high levels of bulk density, compaction must be per-formed. Additionally, in some cases surface technologies such as systems that sinter/melt the surface may desire the maximum possible compaction at the sur-face to improve melting/heating performance and the final material strength properties. Kennedy Space Center’s (KSC) Swamp Works has developed two means of compaction, lunar and mar-tian compaction. Planetary Autonomous Compaction Technology (PACT) which is part of the Multifunction End Effector for Regolith Compaction Acquisition and Transfer (MEERCAT) robotic arm end effector system’s capabilities and the Site Preparation Tooling for Operations on Mobility Platforms (STOMP) vibratory roller compactor. PACT on MEERCAT has been demonstrated to a TRL 5 and STOMP to a TRL 4 in ambient testing. The results of PACT on MEERCAT and STOMP testing will be shared with results for various simulants including BP-1, ICN-LHT-1G (aka CSM-LHT-1G), RDW-LHT-1GH (a simulant developed for the Mason Tipping Point to match characteristics of ICN-LHT-1G), and Exolith LHS-1E. This will also include discussions on methods used to verify relative density before and after compaction and means to verify density effects below depth. To calculate relative density, maximum and minimum densities for simulants were taken from literature and additional lab testing (publication in work).

redwire

Few is different: deciphering many-body dynamics in mesoscopic quantum gases

Emergent macroscopic descriptions of matter, such as hydrodynamics, are central to our description of complex physical systems across a wide spectrum of energy scales. The conventional understanding of these many-body phenomena has recently been shaken by a number of experimental findings. Collective behavior of matter has been observed in mesoscopic systems, such as high-energy hadron–hadron collisions, or ultracold gases with only a few strongly interacting fermions. In such systems, the separation of scales between macroscopic and microscopic dynamics (at the heart of any effective theory) is inapplicable. To address the conceptual challenges that arise from these observations and explore the universality of emergent descriptions of matter, the EMMI Rapid Reaction Task Force was assembled. This document summarizes the RRTF discussions on recent theoretical and experimental advances in this rapidly developing field. Leveraging technological breakthroughs in the control of quantum systems, we can now quantitatively explore what it means for a system to exhibit behavior beyond the sum of its individual parts. In particular, the report highlights how the (in)applicability of hydrodynamics and other effective theories can be probed across three principal frontiers: the size frontier, the equilibrium frontier, and the interaction frontier.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS

CO2 Handling & Electrolyzer Efficiency Scaling Evaluator

CHEESE is an interactive dashboard tool for estimating the performance and material requirements of carbon dioxide electrolysis systems. It helps users evaluate how electrode area, current density, product selectivity, gas flow, cell voltage, and the number of cells in a stack affect system operation. The dashboard provides simple and advanced modes so it can be used for both quick estimates and more detailed engineering analysis. Users can estimate product output, carbon dioxide use, electrical power, electrode area, gas and liquid flow rates, energy efficiency, material cost per test, and the effect of scaling from a single cell to a multi cell stack. It also includes tools for examining carbon balance, equipment durability, component replacement, and changes in performance over time. This is intended to help both academia and industry researchers who are either getting into CO2 electrolysis on lab-scale or are trying to establish a larger footprint. CHEESE presents results through tables, charts, and simplified cell and stack diagrams. It is intended to support research planning, experimental design, comparison of operating conditions, and early stage scale up studies.

Prajapati, Aditya [Lawrence Livermore National Lab

Swamp Works Regolith Compaction Technologies

While the level of compaction below the lunar surface increases quickly after only a few cm of depth, in many cases during a construction mission there will be a need to excavate and transport regolith to a new location for cut-and-fill or horizontal construction of structures such as berms. In these cases to achieve high levels of bulk density, compaction must be per-formed. Additionally, in some cases surface technolo-gies such as systems that sinter/melt the surface may desire the maximum possible compaction at the sur-face to improve melting/heating performance and the final material strength properties. Kennedy Space Center’s (KSC) Swamp Works has developed two means of compaction, lunar and mar-tian compaction. Planetary Autonomous Compaction Technology (PACT) which is part of the Multifunction End Effector for Regolith Compaction Acquisition and Transfer (MEERCAT [1]) robotic arm end effector system’s capabilities and the Site Preparation Tooling for Operations on Mobility Platforms (STOMP [2]) vibratory roller compactor. PACT on MEERCAT has been demonstrated to a TRL 5 and STOMP to a TRL 4 in ambient testing. The results of PACT on MEERCAT and STOMP testing will be shared with results for various simulants including BP-1, ICN-LHT-1G (aka CSM-LHT-1G), RDW-LHT-1GH (a simulant developed for the Mason Tipping Point to match characteristics of ICN-LHT-1G), and Exolith LHS-1E. This will also include discus-sions on methods used to verify relative density before and after compaction and means to verify density effects below depth. To calculate relative density, maximum and minimum densities for simulants were taken from literature [3] [4] [5] and additional lab test-ing (publication in work).

vibration

Aerothermodynamic Analysis of a Flexible Thermal Protection System under Reentry Loads

The Carryall Block 1 reentry vehicle being developed by Outpost Space utilizes a strut supported semirigid deployable heatshield. This consists of a flexible thermal protection system, a heat-resistant fabric stack, stretched over actuated spars. The advantages of a deployable heatshield include reduced heat loading and earlier deceleration in the trajectory. However, the nature of the flexible thermal protection system necessitates considering the loaded shape of the heat shield. The flexible thermal protection system will deflect under reentry loads leading to areas of higher heating rates as well as a reduced axial coefficient as compared to the nominal shape. The Carryall Block 1 is analyzed using NASA’s FUN3D and DPLR CFD solvers with a deflected shape based on the catenary equations. The aerodynamic results are found to be within a percent for both solvers and both structured and unstructured mesh types. Fluid Structure Interaction (FSI) analysis is currently a work in progress, using file I/O to communicate between FUN3D and LS-DYNA, a commercial nonlinear structural solver. Challenges in deforming the geometry, mesh, and initial results are presented here.

thermal protection system

Low thermal budget dopant activation in shallow junctions of implanted Si via Tunable plasma enhanced annealing

Low thermal budget (LTB) annealing has become increasingly critical for shallow junctions as semiconductor devices are scaled down. Plasma Enhanced Annealing (PEA) has emerged as a promising LTB annealing process, however its mechanisms remain unclear. In this study, arsenic and boron implanted silicon wafers were subjected to helium or argon ion bombardment generated by annealing plasmas under controlled ion energies and doses in a home-built annealing reactor. The structural and electrical changes were characterized by four-point probe measurements, secondary ion mass spectrometry, Raman spectroscopy and spectroscopic ellipsometry. A pronounced reduction in sheet resistance, accompanied by a decrease in the damage layer thickness demonstrates the surface selective annealing capability of PEA process. Comparative studies using He and Ar plasmas and related ion bombardment reveal a dependence of activation efficacy on both ion species and the dopant implantation profile. Furthermore, a multi-step annealing mechanism is proposed, consisting of an initial (low dose) structural recovery stage followed by the generation of “extended” defects and concluded at large doses by an enhanced dopant activation. The proposed annealing kinetics are thought to be controlled by ion flux, dose and energy. Finally, these results highlight PEA as an effective, surface-selective, LTB approach for shallow-dopant activation and near surface annealing, and provide mechanistic insights into PEA processes.

dopant activation