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High-Performance Computing Optimization for Aladyn – Adaptive Neural Network Molecular Dynamics Mini-Application

This report provides a description and performance evaluation of the optimization techniques for high performance computing (HPC) implementation of the open source Computational Materials mini-application Aladyn (https://github.com/nasa/aladyn). Aladyn is a basic molecular dynamics code written in FORTRAN 2003, which is designed to demonstrate the use of adaptive neural networks (ANNs) in atomistic simulations. The role of ANNs is to efficiently reproduce the very complex energy landscape resulting from the atomic interactions in materials with the accuracy of the more expensive quantum mechanics-based calculations. The ANN is trained on a large set of atomic structures calculated using the density functional theory (DFT) method. While achieving orders of magnitude faster computational performance than DFT, the ANN-based approach was still very computationally demanding compared to the conventional approach of using empirically fitted energy functions. After its initial development, Aladyn was evaluated and optimized by experts at the NASA Advanced Supercomputing (NAS) division to exploit modern supercomputer architectures. The code has been optimized for execution on multicore central processing units (CPUs), including Intel® Skylake microarchitecture, and on graphic accelerators, such as Nvidia® V100 graphic processing units (GPUs), using Open Multi-Processing (OpenMP) and Open Accelerators (OpenACC) programming interfaces. The optimization achieved a speedup of 4.7 times the baseline version on CPU performance and an additional 2.4 times on CPU+GPU performance. Atomistic computer simulations are a fundamental tool in materials research to model material properties form physics-based first principles. Atomic interaction, governed by Quantum Mechanics (QM) require sophisticated and highly computationally demanding mathematical models to calculate [1]. Classical methods use approximate functional forms, empirically fitted through a set of variable parameters to emulate atomic energies as direct functions of atomic coordinates [2]. While empirical potentials are computationally much simpler, allowing simulations of large-scale systems of up to a trillion (1012) atoms [3], they are substantially less accurate compared to quantum calculations and applicable only to very specific atomic configurations or predefined crystallographic phases. A recently suggested approach is to use heuristic machine learning methods [4], such as those based on Adaptive Neural Networks (ANNs) to predict atomic energies, after being trained on a sufficiently large database of QM-calculated structures [5,6]. This approach reduces significantly the computational complexity, allowing for simulations of orders of magnitude larger systems compared to QM-based methods without compromising accuracy. Still, compared to classical methods using empirical energy functions, ANN methods remain two- to three orders of magnitude more computationally demanding. Hence, the computational cost of simulations, together with the need for extensive training of ANNs, still makes the practical implementation of ANN-based methods quite challenging. The purpose of the Aladyn mini-application software [7], available as open source at https://github.com/nasa/aladyn, is to be a testbed for exploring possible optimization strategies to develop highly scalable parallel algorithms for ANN-based atomistic simulations. Aladyn is aimed at utilizing the architecture of the high-end modern highperformance computing (HPC) hardware based on multicore central processing units (CPUs) equipped with graphic processing unit (GPU) accelerators. Specifically, the goal is to optimize the performance on a single HPC compute node, before implementing scaling to multi-node parallelization using message passing interface (MPI). At the same time, the open source code of Aladyn can serve as a training model for students and professors in academia.

Yamakov, Vesselin I.↗

Accelerated Simulation of Air Pollution Using NVIDIA RAPIDS

Atmospheric chemistry models are a central tool to study and forecast the impact of air pollution on the environment, vegetation, and human health. However, the numerical simulation of chemical kinetics is computationally expensive due to the stiffness of the system of ordinary differential equations that describes atmospheric chemistry. Here we present an alternative approach to the computation of atmospheric chemistry based on machine learning. Our training data set is produced using the NASA Goddard Earth Observing System (GEOS) model with GEOS-Chem chemistry, run on the NASA Center for Climate Simulation (NCCS) Discover supercomputing cluster on 384 Intel Xeon Haswell cores. This model spends more than 50% of total run time on solving atmospheric chemistry. The data set contains as input features the air pollution concentrations before solving the differential equations, together with some key physical parameters such as temperature and sun intensity. As target variables we define the air pollution concentrations after solving the differential equations. Using Dask-cuDF and Dask-XGBoost on the NVIDIA RAPIDS platform on 8 Tesla V100 GPUs, we generate from this training set gradient boosted decision tree models that can reproduce the simulation of chemical kinetics. We do this on the NCCS Advanced Data Analytics Platform (ADAPT) science cloud environment. Our application takes full advantage of recent advances in Dask-XGBoost, such as multi-node and multi-GPU scaling for distributed training with large data sets. The increase in training data size enabled by this is critical to capture the full range of chemical environments encountered across the globe and all annual seasons.The boosted tree models offer good predictability and show many of the features of the full chemistry reference simulation. Further improvements can be achieved through mass balance considerations and by accounting for error correlations. We incorporate the boosted tree models into the GEOS reference model using XGBoost's C API. This enables a seamless integration of the GPU trained models into GEOS-Chem, which is written in Fortran and optimized for use in a massively parallel CPU environment. We show the benefits of this approach and discuss the potential speedup of this machine learning accelerated atmospheric chemistry model.

Keller, Christoph A.↗

Optimization of a Solver for Computational Materials and Structures Problems on NVIDIA Volta and AMD Instinct GPUs

The Scalable Implementation of Finite Elements by NASA (ScIFEN) is a software package developed to solve complex computational materials and structures problems using the finite element method (FEM). In this paper, we describe optimization techniques to speed up the linear solver computation that occurs within the ScIFEN application. We consider GPUs from two different vendors, NVIDIA and AMD as our target platforms for optimization and highlight differences in performance and optimization techniques. The NVIDIA GPU Volta V100 is used in the Summit system deployed at Oak Ridge National Laboratory, and the new exascale system, Frontier, will be using AMD Radeon Instinct GPU. We evaluated the performance of various optimization techniques on test matrices, ranging in size from100K to 4M, that are representative of ScIFEN applications. The linear solver computation is memory-bound on both GPUs. Our experiments show that on the NVIDIA GPU we obtained up to79%of the theoretical peak bandwidth, while the AMD GPU achieved 59%. Overall, the NVIDIA V100 GPU outperforms the AMD MI 25 GPU1. We observed an overall speedup of up to37X on an NVIDIA V100 compared to an Intel Skylake 12-coremachine. The solver for a 4M degree of freedom system took under 2.5 seconds.

Mohammad Zubair↗

TPSAS-NF1676L-30692-DND

Objectives: transform a branch of the FUN3D mini-app into OpenCL, benchmark OpenCL routines against sequential and CUDA versions of the same routines, use Intel OpenCL SDK to run on FPGA, and compare performance and suggest opportunities for optimization.

Jason Orender↗

TechEdSat-13: The First Flight of an AI/ML Neuromorphic Processor

Neuromorphic processors, inspired by the wiring of the brain, permit certain classes of Artificial Intelligence/Machine Learning (AI/ML) algorithms to run far more efficiently. Ultimately, such systems will make the small- and nano-satellite platforms even more useful in terms of greatly improved power, communication and internal data management. In addition, on-board processing of images and data will help to not only rapidly interpret the information, but also reduce the amount of data that needs to be transmitted to ground stations. This initial flight experiment uses the Intel/ Loihi processor combined with a custom interface board and three communication channels to run the AI/ML scripts. These will vary with increasing length and complexity during the course of the mission. The algorithms will use the (at first) limited sensor data to ‘learn’ - with comparisons to similar architecture in comparable ground experiments. Some of the applications for successor flights in the TES-n flight series include Cognitive Communications, whereby the overall communication system is optimized per overflight – by optimizing timing and data transmission functions. Lastly, the performance of the Loihi 14nm process technology will be monitored for performance in the LEO radiation environment, thus looking for induced hardware and software errors. This information will help guide future radiation protection techniques to extend the lifetime and overall utility. The TES-13 is a 3U nanosat successfully launched by the Virgin Orbit Launcher-1 on January 13, 2022, and will presage more flights and AI/ML applications to come.

TechEdSat↗

Using Federated Learning to Overcome Data Gravity in Space

Humans intend to take longer missions to outer space. Understanding the impact that space has on human health is paramount to the success of these missions. Controlled experiments with model organisms are run to infer the impact of space conditions on human health, but the data these experiments generate are too large to transfer to Earth for building models. The same is true for space-relevant data generated on Earth. Ideally, these datasets should be combined to improve statistical power and model accuracy without having to transfer data. Federated learning is such a method which trains an algorithm across decentralized computing systems, each of which has their own local copy of training and testing data. In this research, made possible by NASA@Work, the AI for Life in Space group at NASA demonstrates the use of federated learning to train an ensemble of causality inference models on a combination of data residing on the International Space Station (ISS) and in the cloud. Our work leverages CRISP, a causal inference platform developed during the 2020 Frontier Development Lab’s “Astronaut Health Challenge.” We also leverage the OpenFL federated learning library which was collaboratively developed at Intel and UPenn. We used publicly available data from the NASA Ames Life Sciences Data Archive to identify features in ionizing radiation experiments as causal of changes in cardiac blood velocity. This research demonstrates, for the first time, the possibility of running machine learning algorithms on datasets separated by astronomical distances. In this experiment, all the data were generated in terra, half of which were transferred to the ISS and analyzed on the Spaceborne Computer. In the future, our research will leverage federated learning on data generated in situ on the ISS with data generated terrestrially to predict the impact of spaceflight on mammalian female reproductive capacity.

James Casaletto↗

Porting OVERFLOW CFD Code to GPUs: To Hackathons and Beyond!

OVERFLOW is an overset, structured computational fluid dynamics (CFD) code written in Fortran which is widely used in the government, industry, and academia. Over the last several years the OVERFLOW developers have been working to port miniapps based on computationally expensive parts of OVERFLOW to run on GPUs, primarily using OpenACC. This effort started at our first hackathon in 2019 and since then the OVERFLOW team has attended two additional hackathons (virtually). These hackathon environments have provided a great place to collaborate with others and learn from experts. These learning experiences enabled porting two miniapps to run effectively on NVIDIA GPUs using OpenACC. The first miniapp focused on motifs found in the solver itself and the final ported version runs three times fast ona single V100 compared to a 40 core, dual-socket Intel Skylake node. The speed up in this solverminiapp required multiple design changes including increasing the amount of parallelism available and the amount of work performed in each kernel. The second miniapp focused on overset MPI communication, also saw significant speedups over the CPU implementation using a CUDA-aware MPI implementation through OpenACC. This presentation will discuss our experience at the hackathons, our process of porting the miniapps to run on the GPUs, and several lessons learned throughout.

OpenACC↗

Event Report for The Ethical Artificial Intelligence Quantification Workshop

Artificial Intelligence (AI) is a powerful emerging technology area which requires special attention to using it ethically. AI ethics is still an emerging field, and the partners for this workshop and report seek to move AI ethics discussion ahead by experimenting with ways to measure AI ethics criteria. The following document describes the outcomes and learnings from The Ethical Artificial Intelligence Quantification Workshop held at the National Institute for Aerospace (NIA), Hampton, Virginia on May 12th, 2022. The purpose of the workshop was for participants to evaluate and experiment-with the methodology and process presented by AIEthics.World in cooperation with Intel Corporation. The meeting participants learned about the Ethical AI Certification and Maturity Model™ and applied the methodology to selected notional AI systems. The workshop facilitated the evaluation of the maturity of the AI system according to ethical considerations relevant to NASA, NIA and other participants. The workshop consisted of three main phases. The first phase focused on understanding and summarizing NASA’s ethical approaches, mission and values based on published documentation, discussions and individual insights & opinions of participants. This information was prioritized, weighted, ordered, and quantified in phase two, to formulate an alignment between human values (ethics) and their applicability to AI systems during all lifecycle phases. The first two phases were summarized as a form of ethical genealogy for artificial intelligence, specific to NASA’s ethical approaches. In the third and last phase of the workshop the participants evaluated notional examples of artificial intelligence to qualify and quantify its ability to adhere to the organizational ethics approaches, using the Ethical AI Certification and Maturity Model™. The workshop uses the concept of genealogy, in the traditional sense: the study and traceability of lines of ancestors in the process of evolutionary development from earlier forms. However, as it is applied to an Ethical AI definition, it is providing the insights to the necessary and mandatory traceability of content, data, metrics, telemetry, elements, and structures which are used in the AI’s lifecycle to foster and measure AI ethics in all steps of its lifecycle. The Ethical Artificial Intelligence Quantification Workshop provided NASA with the opportunity to apply the Ethical AI Certification and Maturity Model™, in combination with existing and well-known decision-making and quality control methods to identify the metrics and measurements for an Ethical AI and assess its ethical condition and quality aligned with NASA ethics approaches. The result of the workshop is the capacity for NASA to apply the maturity model assessment to its AI Systems as desired and if necessary, publish the ability of these AI Systems to adhere to the organizational ethical goals. AI ethics frameworks need to be customized for each application domain, for example, individual NASA Mission Directorates. General principles that work in one area such as AI/Machine Learning-based text analysis (the ethics of information-extraction) may need to be adapted for another such as sense-and-avoid decision-making in a flight environment. The workshop was conducted among approximately twenty NASA subject matter experts, so the elements noted above should be considered examples, not definitive NASA ethical AI principles, genealogy, etc. Generating a definitive AI ethics framework for an organization as diverse as NASA would require far more discussion, debate, review, etc. However, the workshop provided valuable insight into mechanisms and processes for quantifying AI ethical qualities.

Artificial Intelligence↗

A Multi-Architecture Approach for Implicit Computational Fluid Dynamics on Unstructured Grids

High-performance computing (HPC) architectures are trending toward manycore paradigms such as graphics processing units (GPUs). Approximately half of the top 100 publicly disclosed supercomputers in the world utilize GPU accelerators for performance. This is in contrast to a decade ago, where there were only a few such machines in the top 100. It is not currently possible to compile and run legacy central processing unit (CPU) software efficiently on GPUs without significant refactoring. Though a number of frameworks offering performance portability exist, none offer a standardized specification that is supported by all major hardware vendors. Additionally, experiences show that obtaining a high percentage of peak performance often requires architecture-specific code. This work details a pragmatic multi-architecture computational fluid dynamics library focused on aerospace problems across the speed range from low subsonic to hypersonic flows involving thermochemical nonequilibrium. A thin abstraction layer above NVIDIA CUDA C++ is utilized, which enables primarily single-source software currently capable of running efficiently on multicore CPUs, NVIDIA GPUs, AMD GPUs, and Intel GPUs. Results on various problems of interest across the speed range are presented and performance is compared between various architectures.

GPU↗

A Multi-Architecture Approach for Implicit Computational Fluid Dynamics on Unstructured Grids

High-performance computing (HPC) architectures are trending toward manycore paradigms such as graphics processing units (GPUs). Approximately half of the top 100 publicly disclosed supercomputers in the world utilize GPU accelerators for performance. This is in contrast to a decade ago, where there were only a few such machines in the top 100. It is not currently possible to compile and run legacy central processing unit (CPU) software efficiently on GPUs without significant refactoring. Though a number of frameworks offering performance portability exist, none offer a standardized specification that is supported by all major hardware vendors. Additionally, experiences show that obtaining a high percentage of peak performance often requires architecture-specific code. This work details a pragmatic multi-architecture computational fluid dynamics library focused on aerospace problems across the speed range from low subsonic to hypersonic flows involving thermochemical nonequilibrium. A thin abstraction layer above NVIDIA CUDA C++ is utilized, which enables primarily single-source software currently capable of running efficiently on multicore CPUs, NVIDIA GPUs, AMD GPUs, and Intel GPUs. Results on various problems of interest across the speed range are presented and performance is compared between various architectures.

GPU↗

New Rover Conops with High-Performance Onboard Computing: Give Up Raw Data to Reduce Ops Cost and Do More Science

A major portion of time during the tactical operation of Mars rovers is spent for selecting, prioritizing, and coordinating sciences and engineering activities such that they fit within resource constraints, including the downlink data volume, energy, and time. In particular, the downlink data volume constraint is getting particularly tighter in recent missions because modern instruments produce increasingly high data volume while the communication bandwidth is essentially bounded by the law of physics. Tactical operation would be substantially simplified, hence the operation cost could be reduced, if the data volume constraint is relaxed or even removed. In this abstract, we propose a new operation paradigm for achieving this goal. The key observation is that, both in science and engineering applications, the bit size of raw data is typically much greater than the volume of processed information that is needed for scientific or engineering analysis. For example, a full-resolution image from Mastcam-Z, the main science camera on Perseverance, is about 700 kB in volume and we downlinked 29,685 images up to Sol 243, totaling ~20 GB of data. But of course, scientists do not use every pixel of these images; what they really look for in the images are geological features, typically represented by specific geometric configurations or textures. An end product after processing hundreds of Mascam-Z images could be a single geological map summarizing the spatial distribution of the features. For another example, a 100-meter drive of Perseverance produces 7-12 MB of drive telemetry, which records every detail of the rover's motion at 8 Hz, including position, attitude, steering angles, encoder readings, motor currents and many other information. But what the ground engineers eventually pay attention to is the signs of anomaly, such as excessive motor currents or high slip; if a drive is nominal, the vast majority of this data is unused. What if, then, we process the raw data onboard and only downlink the processed data that is relevant to scientific or engineering analyses, such as a list of detected science features (with cropped images) or a list of potential signs of anomaly while driving? A major roadblock for such onboard, high-level information processing has been the onboard computational resource. RAD750, the main onboard computer of Perseverance, is obviously not sufficient for performing complex image or signal processing such as object detection, semantic segmentation, or anomaly detection. Interestingly, RAD750 is not the best processor that Perseverance has; Qualcomm's Snapdragon 801, a modern mobile processor, is on her Heli Base Station, a device for communicating with Mars Helicopter Ingenuity; also, Intel's Atom E3845 processors are on engineering cameras. In the reminder of this paper, we will introduce two particular uses cases of these high-performance co-processors (meaning auxiliary CPU, GPU, or other types of processors that are separate from the main processor that runs the main flight software) for lowering operation cost and accommodating more science activities for a given communication constraint.

Didier, A.↗

3D Scanning System to Assess Gravity-Dependent Body Shape Changes

The human body shows unique morphological changes when exposed to different gravity conditions, including muscle atrophy, fluid shift, and spinal elongation. Such changes need to be incorporated for human-system integration in the vehicle habitat, garment, and spacesuit designs, as inaccurate body measurements can result in suboptimal crew protection that can potentially decrease injury tolerance. However, measurement tools have not been available for accurate assessments of body shape changes. This work aimed to develop a prototype 3-D body scanning system with the configuration and performance optimized for in-flight crewmember body scanning. A scan hardware system was developed using Intel RealSense commercial off-the-shelf 3D sensors. The sensor parameters were iteratively optimized and tested to obtain the performance level needed for body scanning. A scan booth structure was fabricated, with the overall size 4 x 4 x 8 feet. The specific number of sensors and mounting positions were determined by iterative simulations, which indicated that 16 cameras can capture 94% and 96% of body surface area from the 1st percentile female and 99th percentile male crew population subject. The mounted sensors were linked through a mix of USB-C and USB-3 cables and operated for data acquisition from a Linux laptop computer. A software prototype was developed using Python and Tkinter graphical user interface toolkit. A calibration procedure was also built using a panel of QR codes. A computer vision tool detected and decoded the unique ID and pattern locations of the QR codes. The calibration information determined the position and orientation of the 3D sensors with respect to each other. The scanner performance was assessed using a set of 3D printed custom manikins. The manikin size and shape were derived from the previous ISS study, which measured the crewmembers’ anthropometry changes across the different flight phases. The average anthropometric measurements at the pre-flight and flight day 15 were sampled and projected onto the 1st percentile female and 99th percentile male body shapes. Another pair of manikins were also 3D printed to simulate the neutral body posture, estimated from ISS microgravity environments. A preliminary analysis assessed the performance of the newly developed scanner against the reference scanner, which has been used at the NASA JSC for crew and test subject anthropometry. Although the new scanner data showed several artifacts and missing geometries in the occluded body areas such as armpits and crotch, overall shape matched with the reference scan. When the manikin surface coordinates were compared, a root mean square error of 1.3 cm was observed from the manikin torso segment. Linear measurements including the stature, knee height and circumference measurements at the chest and calf showed differences from the reference scan measurements, ranging between 0.3 and 0.9 cm. Overall, this work demonstrated a development framework for an in-flight scanner with design and operation optimized for crewmember body scanning. Further improvement can potentially provide previously unavailable anthropometric data from different gravitational environments, including 0-g, 1/6-g, and 1-g. Such data can improve suit fit, habitat design, exercise efficacy quantification and sizing of orthostatic intolerance garments.

K H Kim↗

hls4ml: A Flexible, Open-Source Platform for Deep Learning Acceleration on Reconfigurable Hardware

We present hls4ml, a free and open-source platform that translates machine learning (ML) models from modern deep learning frameworks into high-level synthesis (HLS) code that can be integrated into full designs for field-programmable gate arrays (FPGAs) or application-specific integrated circuits (ASICs). With its flexible and modular design, hls4ml supports a large number of deep learning frameworks and can target HLS compilers from several vendors, including Vitis HLS, Intel oneAPI and Catapult HLS. Together with a wider eco-system for software-hardware co-design, hls4ml has enabled the acceleration of ML inference in a wide range of commercial and scientific applications where low latency, resource usage, and power consumption are critical. In this paper, we describe the structure and functionality of the hls4ml platform. The overarching design considerations for the generated HLS code are discussed, together with selected performance results.

Schulte, Jan-Frederik [Purdue U.] (ORCID:000000034↗

Evaluating Application Characteristics for GPU Portability Layer Selection

GPUs have become the dominant source of computing power for high performance computing and are increasingly being used across the High Energy Physics computing landscape for a wide variety of tasks. Though NVIDIA is currently the main provider of GPUs, AMD and Intel are rapidly increasing their market share. As a result, programming using a vendor-specific language such as CUDA can significantly reduce deployment choices. There are a number of portability layers such as Kokkos, Alpaka, SYCL, OpenMP and std::par that permit execution on a broad range of GPU and CPU architectures, significantly increasing the flexibility of application programmers. However, each of these portability layers has its own characteristics, performing better at some tasks and worse at others, or placing limitations on aspects of the application. In this presentation, we report on a study of application and kernel characteristics that can influence the choice of a portability layer and show how each layer handles these characteristics. We have analyzed representative heterogeneous applications from CMS (patatrack and p2r), DUNE (Wire-Cell Toolkit), and ATLAS (FastCaloSim) to identify key application characteristics that have different behaviors for the various portability technologies. Using these results, developers can make more informed decisions on which GPU portability technology is best suited to their application.

Atif, Mohammad [Brookhaven]↗

A Beginner's Guide to Power and Energy Measurement and Estimation for Computing and Machine Learning

Concerns about the environmental footprint of machine learning are increasing. While studies of energy use and emissions of ML models are a growing subfield, most ML researchers and developers still do not incorporate energy measurement as part of their work practices. While measuring energy is a crucial step towards reducing carbon footprint, it is also not straightforward. This paper introduces the main considerations necessary for making sound use of energy measurement tools and interpreting energy estimates, including the use of at-the-wall versus on-device measurements, sampling strategies and best practices, common sources of error, and proxy measures. It also contains practical tips and real-world scenarios that illustrate how these considerations come into play. It concludes with a call to action for improving the state of the art of measurement methods and standards for facilitating robust comparisons between diverse hardware and software environments.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

HamLib: A library of Hamiltonians for benchmarking quantum algorithms and hardware

In order to characterize and benchmark computational hardware, software, and algorithms, it is essential to have many problem instances on-hand. This is no less true for quantum computation, where a large collection of real-world problem instances would allow for benchmarking studies that in turn help to improve both algorithms and hardware designs. To this end, here we present a large dataset of qubit-based quantum Hamiltonians. The dataset, called HamLib (for Hamiltonian Library), is freely available online and contains problem sizes ranging from 2 to 1000 qubits. HamLib includes problem instances of the Heisenberg model, Fermi-Hubbard model, Bose-Hubbard model, molecular electronic structure, molecular vibrational structure, MaxCut, Max- k -SAT, Max- k -Cut, QMaxCut, and the traveling salesperson problem. The goals of this effort are (a) to save researchers time by eliminating the need to prepare problem instances and map them to qubit representations, (b) to allow for more thorough tests of new algorithms and hardware, and (c) to allow for reproducibility and standardization across research studies.

97 MATHEMATICS AND COMPUTING↗

Extreme Ultraviolet and Beyond Extreme Ultraviolet Lithography Using Amorphous Zeolitic Imidazolate Resists Deposited by Atomic/Molecular Layer Deposition

Amorphous zinc-imidazolate (aZnMIm) resists show potential to meet the demands for next-generation high-numerical aperture (high-NA) metal-containing extreme ultraviolet (EUV) resist materials, given their ease of deposition by atomic/molecular layer deposition (ALD/MLD) at thicknesses of 20 nm and below. Here, this study demonstrates that aZnMIm thin films, previously identified as high-resolution electron beam resists, can also function as negative-tone EUV photoresists. Water development achieves high sensitivity (5 mJ/cm 2 ) but leaves significant residue, while acetic acid development results in poor contrast. A hybrid approach─water followed by acetic acid─enables residue-free development with a sensitivity of 181 mJ/cm 2 . Dry development using 1,1,1,5,5,5-hexafluoroacetylacetone (hfacH) is also possible but shows lower sensitivity (375 mJ/cm 2 ) compared to wet development methods. EUV photoelectron spectroscopy (PES), reflectometry/EUV absorption, total electron yield (TEY), residual gas analysis (RGA), and time-of-flight secondary ion mass spectrometry (TOF-SIMS) were used to investigate the effects of EUV irradiation on aZnMIm resists. Reflectometry experiments reveal an aZnMIm EUV absorption coefficient of 6.2 μm –1 , while PES and TEY analyses show that, compared to poly(4-hydroxystyrene) (PHS), a polymer-based reference resist, aZnMIm emits more primary and secondary electrons but generates fewer slow electrons relative to its primary electron emission; its total electron yield is similar to that of poly(methyl methacrylate) (PMMA) resists. When exposed to EUV, aZnMIm predominantly outgasses H 2 , as determined by RGA. TOF-SIMS measurements demonstrate that high-dose EUV exposure only partially fragments the 2-methylimidazole (2MIm) organic linkers, unlike high-dose electron beam exposure, which is known to completely degrade them. Additionally, aZnMIm resists show promise for potential beyond EUV lithography (BEUVL) due to the presence of Zn, which provides higher sensitivity at a wavelength of 6.7 nm compared to other metal ions, such as Sn, that are currently used in the best-performing EUV metal–organic resists. TEY measurements demonstrate that aZnMIm emits nearly twice as many electrons as PHS at 6.7 nm. The BEUV TEY of aZnMIm also surpasses that of PMMA, poly(pentafluorostyrene), and poly(4-iodostyrene), with the latter two being known for their high EUV TEYs. This work provides insight into zeolitic imidazolate framework (ZIF)-based EUV and BEUV resists and highlights their potential for both wet and dry development.

lithography↗

Room-temperature multiferroicity in sliding van der Waals semiconductors with sub-0.3 V switching

The search for van der Waals (vdW) multiferroic materials has been challenging but also holds great potential for the next-generation multifunctional nanoelectronics. The group-IV monochalcogenide, with an anisotropic puckered structure and an intrinsic in-plane polarization at room temperature, manifests itself as a promising candidate with coupled ferroelectric and ferroelastic order as the basis for multiferroic behavior. Unlike the intrinsic centrosymmetric AB stacking, we demonstrate a multiferroic phase of tin selenide (SnSe), where the inversion symmetry breaking is maintained in AA-stacked multilayers over a wide range of thicknesses. We observe that an interlayer-sliding-induced out-of-plane (OOP) ferroelectric polarization couples with the in-plane (IP) one, making it possible to control out-of-plane polarization via in-plane electric field and vice versa. Notably, thickness scaling yields a sub-0.3 V ferroelectric switching, which promises future low-power-consumption applications. Furthermore, coexisting armchair- and zigzag-like structural domains are imaged under electron microscopy, providing experimental evidence for the degenerate ferroelastic ground states theoretically predicted. Non-centrosymmetric SnSe, as the first layered multiferroic at room temperature, provides a novel platform not only to explore the interactions between elementary excitations with controlled symmetries, but also to efficiently tune the device performance via external electric and mechanical stress.

Chen, Rui [University of California, Berkeley, CA ↗