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At least 379 records · Page 21
All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography

Defect reduction remains a critical objective in the integrated circuit manufacturing process, particularly within the highly re-entrant lithography modules where minimizing defects is crucial. Defects at the wafer edge can contaminate lithography modules and downstream processing equipment, leading to redistribution onto the wafer surface and adversely affecting overall device yield. A persistent challenge in the resist coating process is the formation of resist edge beads, driven by the strong Van der Waals attraction of excess photoresist (PR) to itself and the underlying substrate. The edge bead removal (EBR) process is a standard cleaning step designed to eliminate these edge beads and prevent potential contamination. Here, in this study, we identify the sources of EBR induced defects and additional EBR process encroachment toward edge patterning during the EBR cleaning process. This study provides a comprehensive study aimed at optimizing the EBR cleaning process to effectively eliminate EBR-induced defects, thereby enhancing overall device yield. Specifically, we identify three primary defects induced by the EBR cleaning process: rainbow-type, finger-shaped, and teardrop-type defects. Our experimental study reveals that in addition to EBR rinse time, PR cast time is crucial parameters contributing to the formation of these defects. By properly optimizing the PR cast time and EBR rinse time, we were able to remove nearly 100 % of dense clusters of defects that were easily visible even at low magnification optical microscopy throughout the wafer edge. We observed that shorter PR casting times shows edge defects caused by inefficient EBR process because of insufficient time for PR to fully settle causing superfluous PR to continue flowing toward wafer edge during EBR clearing step, leading to partial removal of PR at the wafer edge and the formation of rainbow defects. Proper optimization of both PR casting time and EBR chemistries dispense time is essential to resolve these defects, ensuring efficient EBR cleaning process and improved overall device yield.

42 ENGINEERING↗
DOE OSTI2022

On Residual Stresses and Reference Temperatures in Thermomechanical Simulations of Photovoltaic Modules Using the Finite Element Method

Thermomechanical simulation of photovoltaic (PV) modules using the finite element method (FEM) is a useful tool to evaluate module design features in terms of structural integrity, reliability, and durability. One of the main challenges in the numerical modeling of a PV module is the incorporation of residual stresses induced by the manufacturing process. Modeling assumptions and abstractions are necessary to limit the model complexity and reduce the computational time. However, oversimplifications and incorrect assumptions can lead to erroneous numerical results. Unfortunately, much simulation work still neglects process-induced stresses. This can lead to incorrect predictions of the stress-strain history and erroneous conclusions during the design process. In this work, we review current modeling practices for incorporating process-induced stresses, and contrast numerical models that consider residual stresses with those that neglect them. We find that the simulation objective and available material properties dictate which process steps need to be modeled, and explore in depth the modeling of residual stresses induced by the lamination process. We demonstrate that a simplified cooldown procedure at the beginning of the simulation can increase the model accuracy and discuss appropriate choices for starting and reference temperatures in the finite element model.

14 SOLAR ENERGY↗
DOE OSTI2017

First-Annual Global Clean Energy Manufacturing Report Shows Strong Domestic Benefits for the United States

The Energy Department’s Office of Energy Efficiency and Renewable Energy (EERE) commissioned the Clean Energy Manufacturing Analysis Center to conduct the first-ever annual assessment of the economic state of global clean energy manufacturing. The report, Benchmarks of Global Clean Energy Manufacturing, makes economic data on clean energy technology widely available.

battery cells↗
DOE OSTI2017

Evaluating the economic viability of CdTe/CIS and CIGS/CIS tandem photovoltaic modules

In this paper, we analyze the potential cost competitiveness of two frameless, glass–glass thin-film tandem photovoltaic module structures, cadmium telluride (CdTe)/CuInSe 2 (CIS) and CuIn 0.3 Ga 0.7 Se 2 (CIGS)/CIS, based on the demonstrated cost of manufacturing the respective component cell technologies in high volume. To consider multiple economic scenarios, we base the CdTe/CIS module efficiency on the current industrial production of CdTe modules, while for CIGS/CIS, we use an aspirational estimate for CIGS efficiency. We focus on four-terminal mechanically stacked structures, thus avoiding the need to achieve current matching between the two cells. The top cell in such a tandem must have a transparent back contact, which has not been successfully implemented to date. However, for the purpose of understanding the economic viability of both tandems, we assume that this can be implemented at a cost similar to that of sputtered indium tin oxide. The cost of both tandem module structures was found to be nearly identical on an equal-area basis and approximately $30/m 2 higher than the single-junction alternatives. Both tandem modules are about 4% (absolute) more efficient than a module by using the top-cell material alone. We find that these tandem modules might reduce total system cost by as much as 11% in applications having a high area-related balance-of-system cost, such as area-constrained residential systems; however, the relative advantage of tandems decreases in the cases where balance-of-system costs are lower, such as in commercial and utility scale systems.

14 SOLAR ENERGY↗
DOE OSTI2025

Design and Analysis of an Integrated Additively Manufactured Test Article for Plasma-Facing Components

Current plasma-facing components (PFCs) used in helium-cooled divertor modules are complex structures with tungsten tile, steel sleeve components, and cartridges, all assembled in a helium-cooled multiple jet (HEMJ) structure. The goal of this project is to simplify the complex PFC design using additive manufacturing techniques to create a single integrated tungsten test article. Apart from the flexibility this opens up in exploring a wide array of geometries for the article, having a single integrated article significantly reduces the number of joints and parts in the article, thus reducing chances of leaks. A process called electron beam melting has shown to produce very high-density samples and unique geometries, enabling HEMJ or similar designs. To validate and optimize this novel design, the model underwent a series of computational fluid dynamics and finite element analysis simulations to replicate steady-state heat flux in the divertors. The simulations presented in this study consider a steady-state base heat flux of 5 MW/m 2 , with water serving as the coolant. Future research will explore the use of helium as a coolant, simulate edge-localized-mode conditions, and include experimental validation. Since 3D-printed tungsten is anisotropic, the build direction versus build plane of the article are taken into consideration for the test article strength. Because of the high operating temperatures and low ductility of tungsten, thermal creep and brittle fracture are important failure mechanisms to consider. In conclusion, the cap is evaluated with various flow velocities and nozzle diameters, and an optimal design choice is made for which this cap will survive the divertor conditions with a conservative safety margin.

Divertor↗
DOE OSTI2011

ITER CS Intermodule Support Structure

With five independently driven, bi-polarity power supplies, the modules of the ITER central solenoid (CS) can be energized in aligned or opposing field directions. This sets up the possibility for repelling modules, which indeed occurs, particularly between CS2L and CS3L around the End of Burn (EOB) time point. Light interface compression between these two modules at EOB and wide variations in these coil currents throughout the pulse produce a tendency for relative motion or slip. Ideally, the slip is purely radial as the modules breathe without any accumulative translational motion. In reality, however, asymmetries such as nonuniformity in intermodule friction, lateral loads from a plasma Vertical Disruption Event (VDE), magnetic forces from manufacturing and assembly tolerances, and earthquakes can all contribute to a combination of radial and lateral module motion. This paper presents 2D and 3D, nonlinear, ANSYS models which simulate these various asymmetries and determine the lateral forces which must be carried by the intermodule structure. Summing all of these asymmetric force contributions leads to a design-basis lateral load which is used in the design of various support concepts: the CS-CDR centering rings and a variation, the 2001 FDR baseline radial keys, and interlocking castles structures. Radial key-type intermodule structure interface slip and stresses are tracked through multiple 15 MA scenario current pulses to demonstrate stable motion following the first few cycles. Detractions and benefits of each candidate intermodule structure are discussed, leading to the simplest and most robust configuration which meets the design requirements: match-drilled radial holes and pin-shaped keys.

42 ENGINEERING↗
DOE OSTI2018

Experimental and numerical studies of helium-cooled modular divertors with multiple jets

As part of the US-Japan PHENIX program, the helium-cooled modular divertor with multiple jets (HEMJ) and a simpler “flat” variant were experimentally studied in a closed helium loop with a redesigned test chamber at coolant inlet temperatures as great as 425 °C, incident heat fluxes as great as 2.2 MW/m 2 and prototypical inlet pressures of ~10 MPa. The data were used to develop correlations for the average Nusselt number and loss coefficient for a range of mass flow rates; these correlations were used in turn to predict the thermal-hydraulic performance of a single divertor module at prototypical conditions. The experimental results suggest that a flat jet array with six holes surrounding one central hole, all of the same diameter, can provide similar average heat transfer coefficients as the HEMJ divertor, albeit with higher pumping power requirements. Because of its smaller cooled surface area, however, this design has lower maximum allowable heat fluxes compared with the HEMJ divertor. Nevertheless, the flat variant could potentially simplify manufacturing and reduce the costs required to fabricate O(10 6 ) “finger” modules.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2019

Toward Greater Understanding of Upstream and Downstream Manufacturing Processes for Automotive of Li-Ion Batteries

This work focuses on cost associated with extraction and purification of raw materials used in Li-ion batteries such as Co, Ni, Mn and graphite. This work also attempts to expand cost analysis to cover costs associated with cells and modules packaging. Value chain analysis will be used to facilitate understanding of costs in the manufacturing processes of Li-ion batteries.

25 ENERGY STORAGE↗
DOE OSTI2026

Semi-Transparent Perovskite Solar Cells in a Stacked Tandem Module: Cooperative Research and Development Final Report, CRADA Number CRD-19-00810

This project seeks to develop device design, materials composition, and processing tools and parameters to fabricate semi-transparent perovskite solar cells and modules for application in stand-alone products or added to other solar cells in a mechanically stacked tandem configuration. This technology presents significant advanced manufacturing challenges and opportunities in getting to scale, including development of perovskite inks, scalable perovskite and heterojunction deposition and annealing processes, heterojunction composition, transparent electrode composition and deposition process, anti-reflection layer composition and deposition process, and cell to module integration processes. Modification 5: The proposed project seeks to develop device design, materials composition, and processing tools and parameters to fabricate semi-transparent perovskite solar cells and modules for application in stand-alone products or added to other solar cells in a mechanically-stacked tandem configuration. This technology presents significant advanced manufacturing challenges and opportunities in getting to scale, including development of perovskite inks, scalable perovskite and heterojunction deposition and annealing processes, heterojunction composition, transparent electrode composition and deposition process, passivation layers including in module scribes, anti-reflection layer composition and deposition process, and cell to module integration processes. Advanced metrology and characterization will be performed on perovskite films, cells and module. Furthermore, we will examine module or materials recycling for circular economy considerations. Modifcation 6: Gigahertz frequency microwave pump-probe spectroscopies are highly sensitive to thin film semiconductor photoconductivity of individual and stacks of layers that comprise perovskite solar cells. As such, these techniques will be used to qualify reproducibility and quality correlations during the manufacturing process. Modification 7: Mechanical adhesion of top contacts within perovskite modules significantly impacts the durability of the module when exposed to accelerated degradation testing. The adhesion between the perovskite/transport layer interface and the transport layer/top contact interface are both very sensitive small changes in processing. ALD processing conditions of the transport layer will be tuned to optimize the mechanical adhesion within the perovskite module stack.

14 SOLAR ENERGY↗
DOE OSTI2023

The MOOSE electromagnetics module

The Multiphysics Object-Oriented Simulation Environment (MOOSE) electromagnetics module has been developed to increase MOOSE physics module capabilities, enabling standalone and coupled computational electromagnetics within the MOOSE multiphysics ecosystem. The module is actively being utilized in the areas of plasma physics and advanced manufacturing, and it currently provides initial demonstrated capability in multi-dimensional, complex-valued electromagnetic wave propagation, electrostatic contact, reflection and transmission, and electromagnetic eigenvalue problems. Two-dimensional wave propagation and one-dimensional wave reflection and transmission are showcased as examples in this work. The modularity, parallelism, and plug-in infrastructure for custom future development is inherited from MOOSE itself, and the module can be used with both MOOSE-based and external codes, giving great flexibility.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2023

Toward High Conversion Efficiency of Thermoelectric Modules through Synergistical Optimization of Layered Materials

Abstract Waste‐heat electricity generation using high‐efficiency solid‐state conversion technology can significantly decrease dependence on fossil fuels. Here, a synergistical optimization of layered half‐Heusler (hH) materials and module to improve thermoelectric conversion efficiency is reported. This is realized by manufacturing multiple thermoelectric materials with major compositional variations and temperature‐gradient‐coupled carrier distribution by one‐step spark plasma sintering. This strategy provides a solution to overcome the intrinsic concomitants of the conventional segmented architecture that only considers the matching of the figure of merit ( zT ) with the temperature gradient. The current design is dedicated to temperature‐gradient‐coupled resistivity and compatibility matching, optimum zT matching, and reducing contact resistance sources. By enhancing the quality factor of the materials by Sb‐vapor‐pressure‐induced annealing, a superior zT of 1.47 at 973 K is achieved for (Nb, Hf)FeSb hH alloys. Along with the low‐temperature high‐ zT hH alloys of (Nb, Ta, Ti, V)FeSb, the single stage layered hH modules are developed with efficiencies of ≈15.2% and ≈13.5% for the single‐leg and unicouple thermoelectric modules, respectively, under Δ T of 670 K. Therefore, this work has a transformative impact on the design and development of next‐generation thermoelectric generators for any thermoelectric material families.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗
DOE OSTI2017

Progress and Strategies for Testing of Materials for Solar Panels

Accelerated testing is key to confident launch of a new product. However, for new products like solar panels, the best approach is not always clear. The challenge for materials manufacturers is that test times can be long. Also, small-coupon testing may not predict the behavior in the full-size module, but testing of the full-size module is too expensive. As a result, solar panel test standards like IEC 61215 are useful, but are not sufficient. Material manufacturers have needed to define their own test protocols. This presentation will review some historical data (e.g., data show that manufacturers are making great progress toward reducing encapsulant discoloration) and describe advances in material testing (for example, new techniques are being demonstrated on how to more quantitatively assess adhesion, detect tendency for delamination, and understand how encapsulant properties affect other properties like cracking of cells). The International PV Quality Assurance Task Force has been researching climate-specific weathering tests toward the goal of defining international standards that would simplify qualification and quality assurance testing for materials. The status of these tests and the strategies for how to organize these standards to best meet the needs of the industry will be discussed.

14 SOLAR ENERGY↗
DOE OSTI2018

Printed Assemblies of Microscale Triple-Junction (3J) Inverted Metamorphic (IMM) GaInP/GaAs/InGaAs Solar Cells

Transfer printing of microscale devices has been shown to be a manufacturable pathway to low-profile, low cost, high concentration photovoltaic modules, where extremely high efficiency solar cells are desirable to achieve competitive costs. Inverted metamorphic multijunction (IMM) solar cells represent a promising platform for ultrahigh efficiency concentrator photovoltaic systems with a clear pathway to 50% efficiency. While transfer printing of microscale solar cell devices has been demonstrated with traditional upright solar cell structures, IMM structures present additional processing challenges. We demonstrate, for the first time, the transfer printing of fully-functional microscale triple-junction (3J) IMM solar cells.

14 SOLAR ENERGY↗
DOE OSTI2022

Setting the Bar for Device Performance of Photovoltaic Cells and Modules

Cutting-edge photovoltaic (PV) research and development benefits from NREL's world-record accuracy in device performance measurements. NREL is a global leader for PV calibration services to help control manufacturing quality, assess degradation rates, and develop new technologies.

14 SOLAR ENERGY↗
DOE OSTI2016

Economic competitiveness of III-V on silicon tandem one-sun photovoltaic solar modules in favorable future scenarios

Here, tandem modules combining a III-V top cell with a Si bottom cell offer the potential to increase the solar energy conversion efficiency of one-sun photovoltaic modules beyond 25%, while fully utilizing the global investment that has been made in Si photovoltaics manufacturing. At present, the cost of III-V cells is far too high for this approach to be competitive for one-sun terrestrial power applications. We investigated the system-level economic benefits of both GaAs/Si and InGaP/Si tandem modules in favorable future scenarios where the cost of III-V cells is substantially reduced, perhaps to less than the cost of Si cells. We found, somewhat unexpectedly, that these tandems can reduce installed system cost only when the area-related balance-of-system cost is high, such as for area-constrained residential rooftop systems in the USA. When area-related balance-of-system cost is lower, such as for utility-scale systems, the tandem module offers no benefit. This is because a system using tandem modules is more expensive than one using single-junction Si modules when III-V cells are expensive, and a system using tandem modules is more expensive than one using single-junction III-V modules when III-V cells are inexpensive.

14 SOLAR ENERGY↗
DOE OSTI2022

Manufacturing Supply Chain Development for Modular Solar-Thermochemical Conversion Platform - CRADA 387 (Final Report)

Modular chemical process intensification (MCPI) is an emerging field where chemical processing is performed using small-scale modular equipment instead of conventional large centralized chemical plants. Conventional chemical plants benefit from economies of scale that encourage scale-up to ever larger plants. A goal of MCPI is to develop technology that intensifies processing so that equipment can be dramatically smaller and integrated into modular systems. Scale-up occurs by adding more modules in parallel rather than making the equipment larger. A key concept is that equipment and modules can ultimately be cheaper by leveraging economies of mass production, analogous to the automotive industry, in manufacturing the equipment. This project made significant progress toward this outcome by meeting the RAPID institute metric to reduce equipment cost by 20% for each doubling in manufacturing volume. The MCPI application was thermochemical technology that is being commercialized by STARS Technology Corporation, one of the CRADA partners. The technology converts solar and renewable power to chemical energy to produce renewable hydrogen, fuels, and chemicals. The benefit to the public is reduction in greenhouse gases that are contributing to climate change. The project transitioned the steam methane reforming (SMR) reactor from conventional fabrication methods to additive manufacturing (AM) direct metal laser sintering (DMLS) process. This is projected to reduce the cost of making a reactor by 58% when producing 100 reactors per year. Innovations in the DMLS process produced a patented design that reduces reactor weight by 60%. Reductions in material costs and processing time extend the DMLS advantage to higher production volumes. The new design promises to be 38% cheaper than the conventional processes at 1000 units per year. The resulting 87% reduction in the steam methane reforming (SMR) module cost in scaling from current costs meets the RAPID metric. The project was successful in producing and testing the first ever additively manufactured SMR reactors. A reactor achieved over 82% efficiency in converting electric power to chemical energy, which is a world record for an inductively heated SMR. The project has contributed to the design and assembly of a first demonstration plant that is headed to a hydrogen bus filling station in Thousand Palms, CA.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2021

Evaluation of Low-Pressure-Sintered Multi-Layer Substrates for Medium-Voltage SiC Power Modules: Preprint

Direct-bonded aluminum (DBA) multi-layer substrates have been fabricated using low-pressure silver sintering. These multi-layer substrates can be used to reduce the peak electric field strength inside power modules. This benefit is particularly important for medium-voltage silicon carbide (SiC) MOSFETs due to their higher operating voltages. The voiding content and defect density of the bond used to create the multi-layer substrate stackup is critical to the thermal performance and reliability of the power module. This work two low-pressure-assisted sintering techniques; one using nano-silver preform and the other using nano-silver paste to bond 23 mm by 49 mm DBA substrates. Scanning acoustic microscopy (C-SAM) is used to evaluate the bond quality after sintering. To evaluate the reliability of the sintered multi-layer substrates, passive thermal cycling from –40 °C to 200 °C was performed. Cross-sections were cut at pre-determined intervals and imaged with Scanning Electron Microscopy (SEM). After 1,000 thermal cycles, minor cracking was observed, but no failures have occurred.

28 EE - Advanced Manufacturing Office (EE-5A)↗
DOE OSTI2024

In vitro enhancement of Zika virus infection by preexisting West Nile virus antibodies in human plasma-derived immunoglobulins revealed after P2 binding site-specific enrichment

ABSTRACT Human immunoglobulin preparations contain a diverse range of polyclonal antibodies that reflect past immune responses against pathogens encountered by the blood donor population. In this study, we examined a panel of intravenous immunoglobulins (IGIVs) manufactured over the past two decades (1998–2020) for their capacity to neutralize or enhance Zika virus (ZIKV) infectionin vitro. These IGIVs were selected specifically based on their production dates in relation to the occurrences of two flavivirus outbreaks in the U.S.: the West Nile virus (WNV) outbreak in 1999 and the ZIKV outbreak in 2015. As demonstrated by enzyme-linked immunosorbent assay (ELISA) experiments, IGIVs made before the ZIKV outbreak already harbored antibodies that bind to various peptides across the envelope protein of ZIKV because of the WNV outbreak. Using phage display, the most dominant binding site was mapped precisely to the P2 peptide between residues 211 and 230 within domain II, where BF1176-56, an anti-ZIKV monoclonal antibody, also binds. When tested in permissive Vero E6 cells for ZIKV neutralization, the IGIVs, even after undergoing rigorous enrichment for P2 binding specificity, failed, as did BF1176-56. Meanwhile, BF1176-56 enhanced ZIKV infection in both FcγRII-expressing K562 cells and human peripheral blood mononuclear cells. However, for enhancement by the IGIVs to be detected in these cells, a substantial increase in their P2 binding specificity was required, thus linking the P2 site with ZIKV enhancementin vitro. Our findings warrant further study of the significance of elevated levels of anti-WNV antibodies in IGIVs, considering that various mechanisms operatingin vivomay modulate ZIKV infection outcomes. IMPORTANCE We investigated the capacity of intravenous immunoglobulins manufactured previously over two decades (1998–2020) to neutralize or enhance Zika virus infectionin vitro. West Nile virus antibodies in IGIVs could not neutralize Zika virus initially; however, once the IGIVs were concentrated further, they enhanced its infection. These findings lay the groundwork for exploring how preexisting WNV antibodies in IGIVs could impact Zika infection, bothin vitroandin vivo. Our observations are historically significant, since we tested a panel of IGIV lots that were carefully selected based on their production dates which covered two major flavivirus outbreaks in the U.S.: the WNV outbreak in 1999 and the ZIKV outbreak in 2015. These findings will facilitate our understanding of the interplay among closely related viral pathogens, particularly from a historical perspective regarding large blood donor populations. They should remain relevant for future outbreaks of emerging flaviviruses that may potentially affect vulnerable populations.

Microbiology↗