Equal path, phase shifting, sample point interferometer for monitoring the configuration of surfaces
A system for monitoring the configuration of a surface (e.g., a segmented parabolic surface) using orthogonally placed retroreflectors at sets of points 1, 2, and 3 dispersed throughout the surface with a stationary halfwave plate (HWP) in the front of the one retroreflector at a corner point 3 and a rotating halfwave plate (RHWP) over a source of linearly polarized coherent light, thereby causing the direction of linear polarization to continuously rotate through 360 deg and causing light returned by the retroreflector at point 3 to be continuously phase shifted through 360 deg relative to light returned by retroreflectors at points 1 and 2. The returned light from each set of points 1, 2, and 3 is focused onto a bed-of-nails (BON) phase grating diagonally oriented with respect to the orthogonal orientation of the incident beams from retroreflectors 1, 2, and 3, thereby causing overlap in the light from points 1 and 3 to produce interferometric signals 1,3 and 2,3. Any change in phase of the interferometric signals 1,3 and 2,3 indicates both the magnitude and direction of any change in the position of the retroreflector at point 3 relative to retroreflectors at points 1 and 2.