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At least 397 records · Page 22

The Role of Plasma in Plasma Enhanced Chemical Vapour Deposition of Nanostructure Growth

Chemical vapour deposition (CVD) has become the preferred process for high yield growth of carbon nanotubes and nanofibres because of its ability to pattern growth through lithographic positioning of transition metal catalysts on substrates. Many potential applications of nanotubes such as field emitters [1] require not only patterned growth but also vertical alignment. Some degree of ali,ment in thermal CVD processes can be obtained when carbon nanotubes are grown closely together as a result of van der Waals interactions. The ali,onment however is marginal, and the van der Waals prerequisite makes growth of freestanding nanofibres with thermal CVD unrealizable. The application of electric fields as a means of ali,onment has been shown to overcome this limitation [2-5], and highly aligned nanostructures can be grown if electric fields on the order of 0.5 V/microns are employed. Plasma enhanced CVD in various configurations including dc, rf, microwave, inductive and electron cyclotron resonance has been pursued as a means of enabling alignment in the CVD process. However, the sheath fields for the non-dc sources are in general not sufficient for a high degree of ali,pment and an additional dc bias is usually applied to the growth substrate. This begs the question as to the actual role of the plasma. It is clear that the plasma itself is not required for aligned growth as references [3] and [4] employed fields through small applied voltages (3-20 V) across very small electrode spacings (10-100 microns) and thus avoided striking a discharge.

Hash, David B.↗

Predictive Modeling in Plasma Reactor and Process Design

Research continues toward the improvement and increased understanding of high-density plasma tools. Such reactor systems are lauded for their independent control of ion flux and energy enabling high etch rates with low ion damage and for their improved ion velocity anisotropy resulting from thin collisionless sheaths and low neutral pressures. Still, with the transition to 300 mm processing, achieving etch uniformity and high etch rates concurrently may be a formidable task for such large diameter wafers for which computational modeling can play an important role in successful reactor and process design. The inductively coupled plasma (ICP) reactor is the focus of the present investigation. The present work attempts to understand the fundamental physical phenomena of such systems through computational modeling. Simulations will be presented using both computational fluid dynamics (CFD) techniques and the direct simulation Monte Carlo (DSMC) method for argon and chlorine discharges. ICP reactors generally operate at pressures on the order of 1 to 10 mTorr. At such low pressures, rarefaction can be significant to the degree that the constitutive relations used in typical CFD techniques become invalid and a particle simulation must be employed. This work will assess the extent to which CFD can be applied and evaluate the degree to which accuracy is lost in prediction of the phenomenon of interest; i.e., etch rate. If the CFD approach is found reasonably accurate and bench-marked with DSMC and experimental results, it has the potential to serve as a design tool due to the rapid time relative to DSMC. The continuum CFD simulation solves the governing equations for plasma flow using a finite difference technique with an implicit Gauss-Seidel Line Relaxation method for time marching toward a converged solution. The equation set consists of mass conservation for each species, separate energy equations for the electrons and heavy species, and momentum equations for the gas. The sheath is modeled by imposing the Bohm velocity to the ions near the walls. The DSMC method simulates each constituent of the gas as a separate species which would be analogous in CFD to employing separate species mass, momentum, and energy equations. All particles including electrons are moved and allowed to collide with one another with the stipulation that the electrons remain tied to the ions consistent with the concept of ambipolar diffusion. The velocities of the electrons are allowed to be modified during collisions and are not confined to a Maxwellian distribution. These benefits come at a price in terms of computational time and memory. The DSMC and CFD are made as consistent as possible by using similar chemistry and power deposition models. Although the comparison of CFD and DSMC is interesting, the main goal of this work is the increased understanding of high-density plasma flowfields that can then direct improvements in both techniques. This work is unique in the level of the physical models employed in both the DSMC and CFD for high-density plasma reactor applications. For example, the electrons are simulated in the present DSMC work which has not been done before for low temperature plasma processing problems. In the CFD approach, for the first time, the charged particle transport (discharge physics) has been self-consistently coupled to the gas flow and heat transfer.

Hash, D. B.↗

A Survey of Interplanetary Coronal Mass Ejections During 1996 - 2007

Interplanetary coronal mass ejections, the interplanetary counterparts of coronal mass ejections at the Sun, are the major drivers of interplanetary shocks in the heliosphere, and are associated with modulations of the galactic cosmic ray intensity, both short term (Forbush decreases caused by the passage of the shock, post-shock sheath, and ICME) and possibly with longer term modulation. Using several in-situ signatures of ICMEs, including plasma temperature, and composition, magnetic fields, and cosmic ray modulations, made by near-Earth spacecraft, we have compiled a "comprehensive" list of ICMEs passing the Earth since 1996, encompassing solar cycle 23. We summarize the properties of these ICMEs, such as their occurrence rate, speeds, association with solar energetic particle events, shocks and cosmic ray decreases.

Richardson, Ian↗

Interplanetary Coronal Mass Ejections During 1996 - 2007

Interplanetary coronal mass ejections, the interplanetary counterparts of coronal mass ejections at the Sun, are the major drivers of interplanetary shocks in the heliosphere, and are associated with modulations of the galactic cosmic ray intensity, both short term (Forbush decreases caused by the passage of the shock, post-shock sheath, and ICME), and possibly with longer term modulation. Using several in-situ signatures of ICMEs, including plasma temperature, and composition, magnetic fields, and cosmic ray modulations, made by near-Earth spacecraft, we have compiled a "comprehensive" list of ICMEs passing the Earth since 1996, encompassing solar cycle 23. We summarize the properties of these ICMEs, such as their occurrence rate, speeds and other parameters, the fraction of ICMEs that are classic magnetic clouds, and their association with solar energetic particle events, halo CMEs, interplanetary shocks, geomagnetic storms, shocks and cosmic ray decreases.

Richardson, I. G.↗

Vidyut3d: A Non-Equilibrium Plasma Modeling Tool [SWR-24-101]

Vidyut3d is a massively-parallel plasma-fluid solver for low-temperature plasmas (LTPs) that supports both local field (LFA) and local mean energy (LMEA) approximations, as well as complex gas and surface-phase chemistry. The solver supports 2D and 3D domains, and uses AMReX's adaptive mesh refinement capabilities to increase the grid resolution around complex structures (e.g. streamer heads and sheaths) while maintaining a tractable problem size. Vidyut specializes in simulating various types of gas-phase discharges, as well as plasma/surface interactions and surface chemistry (e.g. for plasma-mediated catalysis applications). The solver also supports hybrid CPU/GPU parallelization strategies, and has demonstrated excellent scaling on various HPC architectures for problem sizes consisting of O(100 M) control volumes.

Sitaraman, Hariswaran↗

A Comparison of ARTEMIS Observations and Particle-in-cell Modeling of the Lunar Photoelectron Sheath in the Terrestrial Magnetotail

As an airless body in space with no global magnetic field, the Moon is exposed to both solar ultraviolet radiation and ambient plasmas. Photoemission from solar UV radiation and collection of ambient plasma are typically opposing charging currents and simple charging current balance predicts that the lunar dayside surface should charge positively; however, the two ARTEMIS probes have observed energydependent loss cones and high-energy, surface-originating electron beams above the dayside lunar surface for extended periods in the magnetosphere, which are indicative of negative surface potentials. In this paper, we compare observations by the ARTEMIS P1 spacecraft with a one dimensional particle-in-cell simulation and show that the energy-dependent loss cones and electron beams are due to the presence of stable, non-monotonic, negative potentials above the lunar surface. The simulations also show that while the magnitude of the non-monotonic potential is mainly driven by the incoming electron temperature, the incoming ion temperature can alter this magnitude, especially for periods in the plasma sheet when the ion temperature is more than twenty times the electron temperature. Finally, we note several other plasma phenomena associated with these non-monotonic potentials, such as broadband electrostatic noise and electron cyclotron harmonic emissions, and offer possible generation mechanisms for these phenomena.

Lunar↗

Isolated cold plasma regions: Observations and their relation to possible production mechanisms

Regions of enhanced cold plasma, isolated from the main plasmasphere along the Explorer 45 orbit on the equatorial plane, are reported using the sheath induced potentials seen by the electric field experiment. The occurrence of these regions has a strong correlation with negative enhancements of Dst, and their locations are primarily in the noon-dusk quadrant. The data support the concept that changes in large scale convection play a dominant role in the formation of these regions. Plasmatails that are predicted from enhancements of large scale convection electric fields in general define where these regions may be found. More localized processes are necessary to account for the exact configuration and structure seen in these regions and may eventually result in detachment from the main plasmasphere.

Maynard, N. C.↗

The advanced thermionic converter with microwave power as an auxiliary ionization source

In the search for auxiliary sources of ionization for the advanced thermionic converter plasma, as required for terrestial applications, the use of externally applied microwave power is considered. The present work is part of the advanced model thermionic converter development research currently performed at the laboratory for Power and Environmental Studies at SUNY Buffalo. Microwave power in the frequency range 1-3 GHz is used to externally pump a thermionic converter and the results are compared to the theoretical model proposed by Lam (1976) in describing the thermionic converter plasma. The electron temperature of the plasma is found to be raised considerably by effective microwave heating which results in the disappearance of the double sheath ordinarily erected in front of the emitter. The experimental data agree satisfactorily with theory in the low current region.

Manikopoulos, C. N.↗

Laboratory experiments on plasma contactors

Experimental results describing the operation of hollow cathode plasma contactors collecting and emitting electrons from and to an ambient plasma at current levels of the order of one ampere are presented. The voltage drops induced between a contactor and an ambient plasma are shown to be a few tens of volts at such current levels. The development of a double sheath and the production of substantial numbers of ions by electrons streaming across it are associated with the electron collection process. The development of a complex potential structure including a high potential hill just downstream of the cathode orifice is shown to characterize typical contactor emitting electrons.

Wilbur, Paul J.↗

Electrostatic charging of spacecraft in response to electron beam injection

Electron beam injections from spacecraft now constitute a major activity in space research. Here, the charging level of a conducting surface when an electron beam is injected from it is investigated. Injections into both vacuum and an ambient plasma are considered. When a Maxwellian beam is injected into vacuum, the surface changes to a potential much greater than the average beam energy. The dependence of this excess is examined by considering beams with water-bag types of velocity distribution functions in which no electron has a velocity V(max) above a certain value. The electric field distribution in the electron sheath near the surface is determined by the pressure distribution. Thus, the surface potential is determined not only by V(max) but by all the beam parameters. The ambient plasma reduces the charging level and causes an oscillation in the surface potential. The oscillation frequency is the electron-plasma frequency associated with the ambient plasma.

Singh, Nagendra↗

Ground-based plasma contractor characterization

Presented are recent NASA Lewis Research Center (LeRC) plasma contractor experimental results, as well as a description of the plasma contractor test facility. The operation of a 24 cm diameter plasma source with hollow cathode was investigated in the lighted-mode regime of electron current collection from 0.1 to 7.0 A. These results are compared to those obtained with a 12 cm plasma source. Full two-dimensional plasma potential profiles were constructed from emissive probe traces of the contractor plume. The experimentally measured dimensions of the plume sheaths were then compared to those theoretically predicted using a model of a spherical double sheath. Results are consistent for currents up to approximately 1.0 A. For currents above 1.0 A, substantial deviations from theory occur. These deviations are due to sheath asphericity, and possibly volume ionization in the double-sheath region.

Patterson, Michael J.↗

Ground-based plasma contactor characterization

This paper presents recent NASA Lewis Research Center plasma contactor experimental results, as well as a description of the plasma contactor test facility. The operation of a 24-cm-diameter plasma source with hollow cathode was investigated in the 'ignited-mode' regime of electron current collection from 0.1 to 7.0 A. These results are compared to those obtained with a 12-cm plasma source. Full two-dimensional plasma potential profiles were constructed from emissive probe traces of the contactor plume. The experimentally measured dimensions of the plume sheaths were then compared to those theoretically predicted, using a model of a spherical double sheath. Results are consistent for currents up to approximately 1.0 A. For currents above 1.0 A, substantial deviations from theory occur. These deviations are due to sheath asphericity, and, possibly, volume ionization in the double-sheath region.

Patterson, Michael J.↗

Interaction of a neutral cloud moving through a magnetized plasma

Current collection by outgassing probes in motion relative to a magnetized plasma may be significantly affected by plasma processes that cause electron heating and cross field transport. Simulations of a neutral gas cloud moving across a static magnetic field are discussed. The authors treat a low-Beta plasma and use a 2-1/2 D electrostatic code linked with the authors' Plasma and Neutral Interaction Code (PANIC). This study emphasizes the understanding of the interface between the neutral gas cloud and the surrounding plasma where electrons are heated and can diffuse across field lines. When ionization or charge exchange collisions occur a sheath-like structure is formed at the surface of the neutral gas. In that region the crossfield component of the electric field causes the electron to E times B drift with a velocity of the order of the neutral gas velocity times the square root of the ion to electron mass ratio. In addition a diamagnetic drift of the electron occurs due to the number density and temperature inhomogeneity in the front. These drift currents excite the lower-hybrid waves with the wave k-vectors almost perpendicular to the neutral flow and magnetic field again resulting in electron heating. The thermal electron current is significantly enhanced due to this heating.

Goertz, C. K.↗

Electric Field Double Probe Measurements for Ionospheric Space Plasma Experiments

Double probes represent a well-proven technique for gathering high quality DC and AC electric field measurements in a variety of space plasma regimes including the magnetosphere, ionosphere, and mesosphere. Such experiments have been successfully flown on a variety of spacecraft including sounding rockets and satellites. Typical instrument designs involve a series of trades, depending on the science objectives, type of platform (e.g., spinning or 3-axis stabilized), expected plasma regime where the measurements will be made, available telemetry, budget, etc. In general, ionospheric DC electric field instruments that achieve accuracies of 0.1 mV/m or better, place spherical sensors at large distances (10m or more) from the spacecraft body in order to extend well beyond the spacecraft wake and sheath and to achieve large signal-to-noise ratios for DC and long wavelength measurements. Additional sets of sensors inboard of the primary, outermost sensors provide useful additional information, both for diagnostics of the plasma contact potentials, which particularly enhance the DC electric field measurements on non-spinning spacecraft, and for wavelength and phase velocity measurements that use the spaced receiver or "interferometer" technique. Accurate attitude knowledge enables B times V contributions to be subtracted from the measured potentials, and permits the measured components to be rotated into meaningful geophysical reference frames. We review the measurement technique for both DC and wave electric field measurements in the ionosphere discussing recent advances involving high resolution burst memories, multiple baseline double probes, new sensor surface materials, biasing techniques, and other considerations.

Pfaff, R.↗

Investigation of two-dimensional radio-frequency sheath properties using a microscale fluid model

Abstract In previous work (Kohno and Myra 2023 Comput. Phys. Commun. 291 108841), we developed a numerical scheme based on a two-dimensional microscale radio-frequency (RF) sheath model with periodically curved wall boundaries. Here, we expand the capability of this scheme through modification of the boundary conditions (BCs) on the conducting walls, which allows the ion flow to turn back to the plasma at locations on the walls where the electromagnetic force on the ions is reversed from its usual direction. Numerical simulations are carried out to investigate the dependences of the surface-integrated admittances on the wall bump height, ion magnetization, ion mobility, and the magnetic field angle, and to visualize the sheath structures in several cases. One of the main results is the ion cyclotron admittance resonance observed under the condition of low ion mobility (high normalized frequency). It is shown that the amplitude of the resonance peak depends on the wall bump height and the ion velocity is reversed on the sides of the bump in an RF cycle for the resonance cases. Furthermore, the differences in the admittances between the one- and two-dimensional microscale models are assessed for the purpose of understanding non-locality of the sheath near the wall surface for the parameters considered in this study. This information will be essential for improving the sheath BC for macroscale calculations in the future.

Kohno, H. (ORCID:0000000332690010)↗

Plasma waves in the dayside polar cusp. II - Magnetopause and polar magnetosheath

During the outbound pass of Nov. 1, 1968, Ogo 5 sporadically encountered the low-altitude polar cusp at low magnetic latitudes. The spacecraft remained in the cusp beyond six earth radii, and it then traversed the interface region between the magnetospheric cusp and the magnetosheath. Two large scale discontinuities were detected in this sheath-cusp transition region, and several possible interpretations are evaluated here. At 1427 UT, local changes in magnetic field orientation and the variation in ULF magnetic power spectral density were typical of shifts detected at the magnetopause, although the spacecraft did not traverse a true boundary of warm plasma at this point. The second discontinuity, detected at 1456 UT, resembled a collisionless shock, and it was characterized by observations of intense, impulsive VLF electric field bursts and rapid local variations in both total ion flux and differential electron flux. The simplest interpretation is that Ogo 5 had traversed a standing shock within the sheath.

Scarf, F. L.↗

Anode power deposition in quasi-steady MPD arcs

The power deposited in the anode of a quasi-steady MPD accelerator has been measured directly by thermocouples attached to the inside surface of a shell anode which provide a local measurement of anode heat flux. The results over a range of arc currents from 5.5 to 44 kiloamperes and argon mass flows from 1 g/sec to 48 g/sec show that the fraction of the total input power deposited in the anode decreases drastically from 50% at an arc power of 200 kW to 10% at 20 MW, and that anode power is not uniformly deposited in the anode. A theoretical model of the anode heat transfer, including effects of anode work function, electron thermal energy, and anode sheath, can be brought into reasonable agreement with the measurements, provided the effective range of the conduction electrons from within the discharge plasma to the anode surface is properly acknowledged.

Saber, A. J.↗