SEARCH · Search NASA

Results for “gas injection”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

SourceResearch connectionFrom yearThrough year

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 451 records · Page 25

All sources NASA NTRS DOE OSTI

DOE OSTI2022

Hybrid Capture for Net-Negative Emissions

The Energy & Environmental Research Center, in partnership with the U.S. Department of Energy and North Dakota ethanol producer Red Trail Energy, LLC (RTE), completed an initial engineering design (IED) for a potential hybrid capture system at the RTE CCS (carbon capture and storage) site. The RTE CCS Project is currently operating a CO2 capture facility, adjacent to the RTE ethanol facility in western North Dakota, and injecting the CO2 more than a mile below RTE property for permanent storage. This novel process would add capturing CO2 produced from natural gas boilers to the existing bioprocessing capture system to achieve a net-negative CO2 emissions industrial process at commercial scale (~310,000 tonnes/yr CO2). Initial findings of the IED showed the hybrid system to be technically viable with a moderate estimated cost of $55/tonne CO2 captured for the hybrid system. A cradle-to-gate life cycle assessment (LCA) was also conducted, showing preliminary net-negative carbon emissions potential anticipated from implementing a hybrid CCS system at a commercial scale. Recommended next steps toward potential implementation include hybrid capture system demonstration testing for detailed engineering and LCA model comparisons with low-carbon fuel incentive programs for financial support.

01 COAL, LIGNITE, AND PEAT↗

DOE OSTI2021

Cold start strategy and system for gasoline direct injection compression ignition engine

A method for starting a compression ignition engine having at least one cylinder with a reciprocating piston located therein, an intake valve configured to control the intake of air to an intake port of the cylinder and an exhaust valve configured to control the expulsion of gas from an exhaust port of the cylinder. The method includes the steps of: cranking the engine, conditioning intake air at the intake port of the cylinder to raise the temperature of air in the cylinder, controlling a valve timing the intake valve and/or the exhaust valve to allow the piston to compress the air within the cylinder, thereby increasing the temperature of the air within the cylinder, and injecting fuel into the cylinder when the air within the cylinder has been heated to a temperature sufficient to support compression ignition of a gasoline and air mixture within the cylinder.

Sellnau, Mark C.↗

DOE OSTI2020

Gas Production from Hot Water Circulation through Hydraulic Fractures in Methane Hydrate-Bearing Sediments: THC-Coupled Simulation of Production Mechanisms

Methane hydrates, widely found in permafrost and deep marine sediments, have great potential as a future energy 6 source. Conventional production schemes perform poorly for challenging hydrate reservoirs with low permeability. We propose an 7 efficient production scheme by combining hydraulic fracturing from horizontal wells and hot water circulation through fractures. A 8 fully coupled thermo-hydro-chemical (THC) model is developed to simulate the key physical processes during gas production from 9 a hydrate reservoir representative of typical geological settings in Shenhu, South China Sea. We found that the gas production 10 process has two distinct stages divided by thermal breakthrough: a relatively short prebreakthrough stage and a postbreakthrough 11 stage yielding stable gas production. Heat advection along and near the hydraulic fracture dominates the prebreakthrough stage, 12 whereas conduction-driven thermal recovery in the volume around fractures dominates the postbreakthrough stage. We identified 13 that the steady-state injection temperature has a strong effect on the performance of the proposed scheme while the fluid mass 14 circulation rate has a moderate impact beyond a threshold. The proposed scheme proves to be efficient and robust over a range of 15 reservoir conditions with respect to initial hydrate saturation and intrinsic permeability, including their spatial heterogeneities, 16 thereby offering a promising solution for challenging reservoir conditions.

gas hydrate, fracture flow, gas production, numeri↗

DOE OSTI2022

Gold-gold luminosity increase in RHIC for a beam energy scan with colliding beam energies extending below the nominal injection energy

The Beam Energy Scan phase II (BES-II), performed in the Relativistic Heavy Ion Collider (RHIC) from 2019 to 2021, explored the phase transition between quark-gluon plasma and hadronic gas. BES-II exceeded the goal of a fourfold increase in the average luminosity over that achieved during Beam Energy Scan phase I (BES-I), at five gold beam energies: 9.8, 7.3, 5.75, 4.59, and 3.85 GeV / nucleon. This was accomplished by addressing several beam dynamics effects, including intrabeam scattering, beam-beam, space charge, beam instability, and field errors induced by superconducting magnet persistent currents. Some of these effects are especially detrimental at low energies. BES-II achievements are presented, and the measures taken to improve RHIC performance are described. These measures span the whole RHIC complex, including ion beam sources, injectors, beam lifetime improvements in RHIC, and operation with the world’s first bunched beam Low Energy RHIC electron Cooler (LEReC).

43 PARTICLE ACCELERATORS↗

DOE OSTI2019

Rotating Detonation Combustion for Gas Turbines: Modeling and System Synthesis to Exceed 65% Efficiency Goal (Phase II)

As of May 2019, all RDE test hardware and test operations were completed for this program. Over 700 hot fire tests were conducted at 4 facilities with 7 RDE assemblies, with the data available for future analysis. In particular, measured static and dynamic pressure and computational fluid dynamics (CFD) provided basis for pressure gain combustion (PGC) analysis of the Engineering Scale RDE. It was demonstrated via measurements and CFD that a carefully designed diffuser can recover some total pressure of the highly oscillatory RDE exhaust. In general, the isolator/injector is largest contributor of pressure losses; however a low loss design was demonstrated that improves significantly on previous natural-gas/air RDEs. Also, a tailored injector and mixing technique was demonstrated that allowed NG-air RDE operation with overall equivalence ratio of less than 0.6. CFD models by AR, the UofM and Purdue University were extensively used throughout the program to refine diffuser design for improved pressure recovery, to simulate injection and mixing, to estimate turbine interaction, to estimate combustor pressure gain anchored with test data and to provide input to other design and analytical tasks. CFD analyses were completed for many of the configurations tested at Purdue with the 13.4” RDE including the shark fin and low area ratio isolators. Results were compared favorably to available hot fire test particle image velocimetry (PIV) measurements and wave speeds. The results of these CFD analyses suggest a modest pressure gain of 33% with a sufficiently low area ratio isolator. A thermodynamic power plant system model was set up which utilizes an RDE combustor. The performance of the RDE combustor module was scaled based on measurements from the Engineering Scale RDE tests with low loss injector and tailored fuel flow. This combined model indicates potential for significant plant efficiency improvement. The successful tailored fuel injection test result with lower than .6 equivalence ratio has implication that a power plant can use a RDE combustor configuration where all the air flows through the combustion zone thereby not requiring a bypass mixer. In this configuration, the results of the natural gas combined cycle (NGCC) plant system indicate net efficiency of 66.4%.

02 PETROLEUM↗

DOE OSTI2023

Experimental Characterization of Hydrocarbons and Nitrogen Oxides Production in a Heavy-Duty Diesel–Natural Gas Reactivity-Controlled Compression Ignition Engine

Reactivity-Controlled Compression Ignition (RCCI) combustion is considered one of the most promising Low-Temperature Combustion (LTC) concepts aimed at reducing greenhouse gases for the transportation and power generation sectors. Due to the spontaneous combustion of a lean, nearly homogeneous mixture of air and low-reactivity fuel (LRF), ignited through the direct injection of a small quantity of high-reactivity fuel (HRF), RCCI (dual-fuel) shows higher efficiency and lower pollutants compared to conventional diesel combustion (CDC) if run at very advanced injection timing. Even though a HRF is used, the use of advanced injection timing leads to high ignition delays, compared to CDC, and generates high cycle-to-cycle variability, limited operating range, and high pressure rise rates at high loads. This work presents an experimental analysis performed on a heavy-duty single-cylinder compression ignited engine in dual-fuel diesel–natural gas mode. The objective of the present work is to investigate and highlight the correlations between combustion behavior and pollutant emissions, especially unburned hydrocarbons (HC) and oxides of nitrogen (NOx). Based on the analysis of crank-resolved pollutants measurements performed through fast FID and fast NOx systems under different engine operating conditions, two correlations were found demonstrating a good accordance between pollutant production and combustion behavior: Net Cyclic Hydrocarbon emission—cyclic IMEP variations (R 2 = 0.86), and Cyclic NOx—maximum value of the Rate of Heat Released (R 2 = 0.82).

33 ADVANCED PROPULSION SYSTEMS↗

DOE OSTI2024

Development of a near-isothermal transcritical CO 2 compression system with a liquid piston compressor

Compressors are critical components in vapor compression cycle systems, significantly contributing to energy consumption. As global demand for HVAC&R systems rises, enhancing compressor efficiency becomes increasingly vital. This paper introduces a novel liquid piston compressor integrated with a gas cooler for the transcritical CO 2 refrigeration cycle. The liquid piston enables CO 2 refrigerant compression within various types of heat exchangers, facilitating the transfer of compression heat to the heat transfer fluid. By releasing significant heat, this compressor allows for removing or downsizing the traditional gas cooler in the refrigeration system. This paper presents the experimental performance of the first near-isothermal compressor utilizing a liquid piston in a vapor compression cycle. The critical parameters affecting heat transfer are analyzed by using a 1-D simulation model to achieve a near-isothermal compression process. The results show that the developed prototype successfully reduced the compression temperature increase from 95 K to 10 K, achieving 90 % isothermal efficiency. Furthermore, the 1-D simulation results suggest the smaller internal diameter tubes benefit the isothermal efficiency the most.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

DOE OSTI2025

Thermal shock resistance of lightweight cements developed for geothermal conditions

Cements are a critical component in well construction, as they act to prevent well fluid and gas escape, prevent corrosion of the casing, and strengthen the wellbore to prevent deformation. Under the high temperature/pressure conditions common in geothermal systems, the injection of cold water for energy production is expected to induce cyclic damage to the borehole cement through the rapid temperature fluctuations. These “thermal shocks” are expected to cause casing shrinkage, annulus formation, and cement tensile stresses. To understand the effect of cold water injection on the wellbore environment, a set of rock-cement-steel samples were created to simulate the structure of a geothermal well. Lightweight thermally-insulating cement blends were tested under thermal shock conditions in this study. In each test, the samples were pressurized to an effective pressure of ~3.5 MPa and placed at high temperatures. Thermal shocks were performed by injecting cold water (~10-15 °C) through the samples at a constant rate while keeping the samples at high temperatures until the sample temperature stopped decreasing and deformation ceased. Eight thermal shock tests were conducted with each sample – two at 100 °C and six at 200 °C. Post-tests analysis was then conducted by cutting open each sample to examine the damage in each component of the simulated wellbore. Experimental results suggest that all samples experienced similar degrees of axial and lateral contraction during cold water injection, but for the most part this contraction is recoverable when injection halts. Post-test analysis revealed that fly ash cenosphere pre-treatment had the best effect on improving thermal shock resistance in the cement blends. Thermomechanical modeling of likely stress paths experienced by the cements during heating/cooling cycles shows that elasto-plastic cement constitutive behavior results in most plastic strain occurring during the initial heating steps, with mostly elastic strain occurring during the thermal shock cycles. In conclusion, this agrees with experimental evidence, suggesting that cement damage from shocking occurs via other mechanisms such as chemical alteration, corrosion, and fatigue.

36 MATERIALS SCIENCE↗

DOE OSTI2024

Effect of a collapsing gas bubble on the shock-to-detonation transition in liquid nitromethane

We studied the shock-induced collapse of butane gas bubbles in the homogeneous explosive nitromethane (NM) to investigate the effects of hot spot formation on the detonation process. A butane bubble was injected into a sample of NM, and a shock wave from a flat plate impactor compressed the bubble, creating a localized hot spot. We measured shock and detonation wave speeds with optical velocimetry, and we used a high-speed camera to image the shock propagation and bubble collapse processes. A multiband optical fiber pyrometer measured the time-resolved thermal radiance, and we used the results and emissivity values extracted from spectral fits to estimate temperatures. We measured the characteristics of the shock-to-detonation transition in NM with and without a bubble. All experiments were performed at shock pressures near 8 GPa, where neat NM can detonate. A single bubble in this system was shown to sensitize NM, leading to a reduced run-to-detonation time. We used hydrodynamic modeling to predict shock wave propagation, the extent of chemical reaction, and subsequent temperature rise from the collapsing bubble. We used a temperature-dependent Arrhenius burn model for simulations, and it yielded much better results than reactive burn models that depend only on pressure and density.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

DOE OSTI2022

Wall conditioning and ELM mitigation with boron nitride powder injection in KSTAR

Results from KSTAR powder injection experiments, in which tens of milligrams of boron nitride (BN) were dropped into low-power H-mode plasmas, show an improvement in wall conditions in subsequent discharges and, in some cases, a reduction or elimination of edge-localized modes (ELMs). Injected powder is distributed by the plasma flow and is deposited on the wall and, over the course of several discharges, was observed to gradually reduce recycling by 33%, and decrease both the ELM amplitude and frequency. This is the first demonstration of the use of BN for ELM mitigation. In all of these experiments, an Impurity Powder Dropper (IPD) was used to introduce precise, controllable amounts of the materials into ELMy H-mode KSTAR discharges. The plasma duration was between 10 s and 15 s, 𝐼𝑝 = 500 kA, 𝐵𝑇 = 1.8 T, 𝑃NBI = 1.6 MW, and 𝑃ECH = 0.6 MW. Plasma densities were between 2 and 3 × 1019 m−3. In all cases, the pre-fill and startup gas-fueling was kept constant, suggesting that the decrease in baseline D𝛼 emission is in fact due to a reduction in recycling. The results presented herein highlight the viability of powder injection for intra-shot and between-shot wall conditioning.

Gilson, Erik↗

DOE OSTI2020

Electron Bernstein wave conversion of high-field side injected X-modes in QUEST

This paper presents a detailed design of the Q-shu University experimental steady state spherical tokamak's (QUEST's) high-field side (HFS) injection system for electron Bernstein wave (EBW) excitation and the results of an experimental comparison of the HFS eXtraordinary X-mode and low-field side (LFS) ordinary O-mode injection of 8.2 GHz radio frequency (RF) power. Waveguides, as an alternative to mirror polarizers for transmitting RF X-mode power from LFS to HFS for EBW conversion, were used instead of the installation of an RF mirror. Testing of LFS-to-HFS RF power transmission at 8.2 GHz, using an RG-50-type vacuum waveguide in a bench-scale device filled with SF6 gas at 0.03 Mpa, revealed that an RF power of 10.8 kW could traverse the fundamental electron cyclotron resonance layer for 60 s without breakdown. The short-length, open-ended waveguide antenna used in the HFS injection-induced wave diffraction reduced the efficiency of power delivery to the upper hybrid resonance (UHR) by approximately 7% at an electron temperature of 50 eV. The HFS injection was able to produce brighter camera images than the standard LFS injection. The location of the UHR, as estimated by measuring the density with an interferometer, agreed with its location as measured by plasma radiation low-field, side-edge positions shown by fast camera imaging. This indicates that the plasma was produced by mode-converted EBW. The HFS injection had an absorption efficiency of 96%, compared to 40% for LFS. A greater fluctuation of floating potential adjustable to the lower hybrid wave (LHW) was observed in the HFS case by installing a Langmuir probe, confirming that EBW conversion efficiency was higher in the HFS case. Moreover, after setting the poloidal field to B PF = 7.6 mT, plasma current (I P ) in the HFS peaked at 1.3 kA, as opposed to 0.3 kA for LFS, despite LFS injection having a total power of 55 kW, compared to 40 kW for HFS. However, as the impurity level was comparatively high, it is believed that this I P is dominated by pressure-drive, which makes it difficult to analyze EBWCD. Finally, the line-integrated density in the HFS injection peaked at 1.6 × 10 18 m -2 , compared to 8 × 10 17 m -2 in the LFS one.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2023

Multiple emission components in the Cygnus cocoon detected from Fermi -LAT observations

Star-forming regions may play an important role in the life cycle of Galactic cosmic rays (CRs), notably as home to specific acceleration mechanisms and transport conditions. Gamma-ray observations of Cygnus X have revealed the presence of an excess of hard-spectrum gamma-ray emission, possibly related to a cocoon of freshly accelerated particles. We seek an improved description of the gamma-ray emission from the cocoon using ~13 yr of observations with the Fermi-Large Area Telescope (LAT) and use it to further constrain the processes and objects responsible for the young CR population. We developed an emission model for a large region of interest, including a description of interstellar emission from the background population of CRs and recent models for other gamma-ray sources in the field. Thus, we performed an improved spectro-morphological characterisation of the residual emission including the cocoon. The best-fit model for the cocoon includes two main emission components: an extended component FCES G78.74+1.56, described by a 2D Gaussian of extension r 68 = 4.4° ± 0.1° -0.1° +0.1° and a smooth broken power law spectrum with spectral indices 1.67 ± 0.05 -0.01 +0.02 and 2.12 ± 0.02 -0.01 +0.00 below and above 3.0 ± 0.6 -0.2 +0.0 GeV, respectively; and a central component FCES G80.00+0.50, traced by the distribution of ionised gas within the borders of the photo-dissociation regions and with a power law spectrum of index 2.19 ± 0.03 -0.01 +0.00 that is significantly different from the spectrum of FCES G78.74+1.56. An additional extended emission component FCES G78.83+3.57, located on the edge of the central cavities in Cygnus X and with a spectrum compatible with that of FCES G80.00+0.50, is likely related to the cocoon. For the two brightest components FCES G80.00+0.50 and FCES G78.74+1.56, spectra and radial-azimuthal profiles of the emission can be accounted for in a diffusion-loss framework involving one single population of non-thermal particles with a flat injection spectrum. Particles span the full extent of FCES G78.74+1.56 as a result of diffusion from a central source, and give rise to source FCES G80.00+0.50 by interacting with ionised gas in the innermost region. For this simple diffusion-loss model, viable setups can be very different in terms of energetics, transport conditions, and timescales involved, and both hadronic and leptonic scenarios are possible. The solutions range from long-lasting particle acceleration, possibly in prominent star clusters such as Cyg OB2 and NGC 6910, to a more recent and short-lived release of particles within the last 10–100 kyr, likely from a supernova remnant. The observables extracted from our analysis can be used to perform detailed comparisons with advanced models of particle acceleration and transport in star-forming regions.

79 ASTRONOMY AND ASTROPHYSICS↗

DOE OSTI2021

Wall conditioning and ELM mitigation with boron nitride powder injection in KSTAR

Results from KSTAR powder injection experiments, in which tens of milligrams of boron nitride (BN) were dropped into low-power H-mode plasmas, show an improvement in wall conditions in subsequent discharges and, in some cases, a reduction or elimination of edge-localized modes (ELMs). Injected powder is distributed by the plasma flow and is deposited on the wall and, over the course of several discharges, was observed to gradually reduce recycling by 33%, and decrease both the ELM amplitude and frequency. This is the first demonstration of the use of BN for ELM mitigation. In all of these experiments, an Impurity Powder Dropper (IPD) was used to introduce precise, controllable amounts of the materials into ELMy H-mode KSTAR discharges. The plasma duration was between 10 s and 15 s, I p = 500 kA, B T = 1 . 8 T, P NBI = 1 . 6 MW, and P ECH = 0 . 6 MW. Plasma densities were between 2 and 3 × 1 0 19 m -3 . In all cases, the pre-fill and startup gas-fueling was kept constant, suggesting that the decrease in baseline D α emission is in fact due to a reduction in recycling. The results presented herein highlight the viability of powder injection for intra-shot and between-shot wall conditioning

36 MATERIALS SCIENCE↗

DOE OSTI2024

A dynamic solvent chamber propagation estimation framework using RNN for warm solvent injection in heterogeneous reservoirs

Warm solvent injection (WSI), injecting low-temperature solvent into formations to reduce the viscosity of heavy oil, is a clean technology for heavy oil production through reducing greenhouse gas emissions and water usage. The success of WSI operation depends on the uniform development and propagation of solvent chambers in reservoirs. However, reservoir heterogeneity stemming from shale barriers plays a detrimental role in the conformance of solvent chamber development and oil production rate. In this work, we developed a novel recurrent neural network (RNN)-based framework with the capability of efficiently tracking and estimating the solvent chamber positions in heterogeneous reservoirs based on only production time-series data. The developed estimation model utilizes the “sequence-to-sequence" mapping methodology to correlate observed production time-series sequence and solvent chamber edge sequence via a long short-term memory (LSTM) algorithm. The trained RNN models exhibit high accuracy, evidenced by the predicted dynamic solvent chamber locations match the corresponding true locations from numerical simulation, with a high coefficient of determination (R 2 ) and a low mean squared error. Specifically, the achieved R 2 values exceed 0.98 on both the training and testing data. The developed RNN-based workflow was tested via several cases from both regularly- and irregularly-shaped shale barriers, and the results were promising. The predicted solvent chambers showed strong agreement with those obtained from numerical simulations. The major benefits of this workflow include reducing computational time and saving overall monitoring and tracking costs for conventional techniques. In conclusion, the present work would provide a good demonstration of the capability of practical integration of machine learning methods in solving engineering problems.

58 GEOSCIENCES↗

DOE OSTI2021

Practical CO2—WAG Field Operational Designs Using Hybrid Numerical-Machine-Learning Approaches

Machine-learning technologies have exhibited robust competences in solving many petroleum engineering problems. The accurate predictivity and fast computational speed enable a large volume of time-consuming engineering processes such as history-matching and field development optimization. The Southwest Regional Partnership on Carbon Sequestration (SWP) project desires rigorous history-matching and multi-objective optimization processes, which fits the superiorities of the machine-learning approaches. Although the machine-learning proxy models are trained and validated before imposing to solve practical problems, the error margin would essentially introduce uncertainties to the results. In this paper, a hybrid numerical machine-learning workflow solving various optimization problems is presented. By coupling the expert machine-learning proxies with a global optimizer, the workflow successfully solves the history-matching and CO2 water alternative gas (WAG) design problem with low computational overheads. The history-matching work considers the heterogeneities of multiphase relative characteristics, and the CO2-WAG injection design takes multiple techno-economic objective functions into accounts. This work trained an expert response surface, a support vector machine, and a multi-layer neural network as proxy models to effectively learn the high-dimensional nonlinear data structure. The proposed workflow suggests revisiting the high-fidelity numerical simulator for validation purposes. The experience gained from this work would provide valuable guiding insights to similar CO2 enhanced oil recovery (EOR) projects.

29 ENERGY PLANNING, POLICY, AND ECONOMY↗

DOE OSTI2022

Investigating Performance of Geothermal Reservoirs With Bi-Directional Heat Transfer for Seasonal Thermal Storage Using Thermal-Hydraulic Reservoir Simulations

This paper presents initial simulation results of deep subsurface seasonal thermal storage of waste heat from a natural gas-fired power plant during the summer months for providing heating during winter months at the Cornell University main campus in Ithaca, New York. An injection temperature profile is calculated with the MEnU tool and numerical reservoir simulations are conducted with the simulator FALCON. Both a porous medium and large single fracture geothermal reservoir are considered at about 3 km depth with initial reservoir temperature of 75 degrees C. Simulations indicate that a much smaller reservoir - which is technically easier and less risky to develop - is sufficient when operating the reservoir for seasonal thermal storage instead of for continuous heat production. For example, storing 13 GWh of heat seasonally in a 100 m thick porous medium based on the Galway formation requires about 65 m of well spacing to limit the yearly variation in production temperature to 10 degrees C. Operating this reservoir for continuous heat production would require a well spacing of 365 m to limit the thermal decline to 10 degrees C after 10 years. Neglecting wellbore heat losses and assuming uniform and homogeneous properties, a round-trip thermal efficiency of 100% can be obtained if the yearly averaged injection temperature matches the initial reservoir temperature.

district heating↗

DOE OSTI2020

Etching of Si 3 N 4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

An etching system based on the interaction of electrons extracted from a direct current (DC) hollow-cathode (HC) Ar plasma and injected towards a Si3N4 covered silicon substrate located in the downstream reactive environment created by an additional remote CF 4 /O 2 plasma source was developed and evaluated. By controlling the properties of the injected beam electrons, this approach allows to deliver energy to a surface functionalized by exposure to reactive species, and initiate surface etching. The energy of the primary beam electrons is controlled by the acceleration voltage relative to the HC discharge. Ar atoms flow from the high-pressure HC discharge into the low pressure downstream reactive environment in the process chamber. For an acceleration voltage greater than the ionization potential of Ar and/or process gas species, the energetic primary beam electrons produce a secondary plasma in the process chamber, and can also cause additional dissociation. We have characterized the properties of the secondary plasma and also surface etching of Si 3 N 4 as a function of process parameters, including acceleration voltage (0-80 V), discharge current of the HC discharge (1-2 A), pressure (3.5-20 mTorr), source to substrate distance (1.5 to 5 cm), and feed gas composition (20% and 80% O2 in CF 4 /O 2 ). The electron energy probability function (EEPF) measured with a Langmuir probe about 2.5 cm below the extraction ring suggests several major groups of electrons for this situation, including high energy primary beam electrons with an energy that varies as the acceleration voltage is changed and low energy electrons produced by beam electron-induced ionization of the Ar gas in the process chamber. When a remote CF 4 /O 2 plasma is additionally coupled to the process chamber, Si 3 N 4 surfaces can be functionalized, and by varying the energy of the beam electrons, Si 3 N 4 etching can be induced by electron-neutral synergy effect with plasma-surface interaction. For conditions without beam electron injection, the remote plasma etching rate (ER) of Si 3 N 4 depends strongly on the O 2 concentration in the CF 4 /O 2 processing gas mixture and can be suppressed for O 2 -rich process conditions by the formation of a SiONF passivation layer on the Si 3 N 4 surface. The combination of the HC electron beam source with the remote plasma source (HCEB-RP) makes it possible to induce Si 3 N 4 etching for O 2 -rich remote plasma conditions where remote plasma by itself produces negligible Si 3 N 4 etching. The electron enhanced etching of Si 3 N 4 depends strongly on O 2 /CF 4 mixing ratio reflecting changing arrival rates of O and F species at the surface. Optical emission spectroscopy was used to estimate the ratio of gas phase F and O densities and found to be controlled by the gas mixing ratio and independent of HC EB operating conditions. At this time the detailed sequence of events operative in the etching mechanism is unclear. While the increase of the electron energy is ultimately responsible for initiating surface etching, at present we cannot rule out a role of ions from the simultaneously produced secondary plasma in plasma surface interaction mechanisms.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2022

Destabilization of binary mixing layer in supercritical conditions

Compressible mixing layer instabilities are of importance to a wide range of environmental and industrial applications. Past studies have focused on either ideal-gas or real-fluid thermodynamic regimes of single-species mixing layers. However, mixing layers of binary mixtures at supercritical conditions, commonly encountered in fuel injection systems, introduce additional complexities due to the added compositional degree-of-freedom. Moreover, the effect of strong variations in thermodynamic response functions across the Widom line on the binary mixing layer stability remains poorly understood. Thus, the objective of this study is to examine the coupling between the hydrodynamic instability and the real-fluid thermodynamics across the Widom line and its effects on the overall binary mixing layer dynamics. To this end, we develop a linear stability analysis of the full binary-species compressible transport equations coupled with the PC-SAFT equation of state. Analysis shows the existence of a novel instability mechanism that arises from juxtapositioning of the Widom-line transition and the hydrodynamic inflection point. This novel thermodynamically induced instability mechanism has the net effect of destabilizing the binary mixing layer at lowering supercritical conditions towards the critical pressure point. This is in contrast to previous stability analyses of supercritical single-species mixing layers, where increasing pressure destabilizes the flow due to its effect on reducing the density stratification. The discovered thermodynamically induced instability mechanism of binary mixing flows highlights the need for an extension of classical instability criteria to incorporate the effect of strong variations in the thermodynamic response functions across the Widom line on mixing layer instability.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗