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At least 451 records · Page 25

Quasi Real Time Data Analysis for Air Quality Monitoring with an Electronic Nose

Cabin Air Quality Monitoring: A) Functions; 1) Incident monitor for targeted contaminants exceeding targeted concentrations. Identify and quantify. 2) Monitor for presence of compounds associated with fires or overheating electronics. 3) Monitor clean-up process. B) Characteristics; 1) Low mass, low power device. 2) Requires little crew time for maintenance and calibration. 3) Detects, identifies and quantifies selected chemical species at or below 24 hour SMAC.

data analysis↗

NASA's Plans for Developing Life Support and Environmental Monitoring and Control Systems

Life Support and Monitoring have recently been reworked in response to the Vision for Space Exploration. The Exploration Life Support (ELS) Project has replaced the former Advanced Life Support Element of the Human Systems Research and Technology Office. Major differences between the two efforts include: the separation of thermal systems into a new stand alone thermal project, deferral of all work in the plant biological systems, relocation of food systems to another organization, an addition of a new project called habitation systems, and overall reduction in the number of technology options due to lower funding. The Advanced Environmental Monitoring and Control (AEMC) Element is retaining its name but changing its focus. The work planned in the ELS and AEMC projects is organized around the three major phases of the Exploration Program. The first phase is the Crew Exploration Vehicle (CEV). The ELS and AEMC projects will develop hardware for this short duration orbital and trans-lunar vehicle. The second phase is sortie landings on the moon. Life support hardware for lunar surface access vehicles including upgrades of the CEV equipment and technologies which could not be pursued in the first phase due to limited time and budget will be developed. Monitoring needs will address lunar dust issues, not applicable to orbital needs. The ELS and AEMC equipment is of short duration, but has different environmental considerations. The third phase will be a longer duration lunar outpost. This will consist of a new set of hardware developments better suited for long duration life support and associated monitoring needs on the lunar surface. The presentation will show the planned activities and technologies that are expected to be developed by the ELS and AEMC projects for these program phases.

Lawson, B. Michael↗

Monitoring Damage Accumulation in Ceramic Matrix Composites Using Electrical Resistivity

The electric resistance of woven SiC fiber reinforced SiC matrix composites were measured under tensile loading conditions. The results show that the electrical resistance is closely related to damage and that real-time information about the damage state can be obtained through monitoring of the resistance. Such self-sensing capability provides the possibility of on-board/in-situ damage detection and accurate life prediction for high-temperature ceramic matrix composites. Woven silicon carbide fiber-reinforced silicon carbide (SiC/SiC) ceramic matrix composites (CMC) possess unique properties such as high thermal conductivity, excellent creep resistance, improved toughness, and good environmental stability (oxidation resistance), making them particularly suitable for hot structure applications. In specific, CMCs could be applied to hot section components of gas turbines [1], aerojet engines [2], thermal protection systems [3], and hot control surfaces [4]. The benefits of implementing these materials include reduced cooling air requirements, lower weight, simpler component design, longer service life, and higher thrust [5]. It has been identified in NASA High Speed Research (HSR) program that the SiC/SiC CMC has the most promise for high temperature, high oxidation applications [6]. One of the critical issues in the successful application of CMCs is on-board or insitu assessment of the damage state and an accurate prediction of the remaining service life of a particular component. This is of great concern, since most CMC components envisioned for aerospace applications will be exposed to harsh environments and play a key role in the vehicle s safety. On-line health monitoring can enable prediction of remaining life; thus resulting in improved safety and reliability of structural components. Monitoring can also allow for appropriate corrections to be made in real time, therefore leading to the prevention of catastrophic failures. Most conventional nondestructive evaluation (NDE) techniques such as ultrasonic C-scan, x-ray, thermography, and eddy current are limited since they require structural components of complex geometry to be taken out of service for a substantial length of time for post-damage inspection and assessment. Furthermore, the typical NDE techniques are useful for identifying large interlaminar flaws, but insensitive to CMC materials flaws developed perpendicular to the surface under tensile creep conditions. There are techniques such as piezoelectric sensor [7,8], and optical fiber [9,10] that could be used for on-line health monitoring of CMC structures. However, these systems involve attaching an external sensor or putting special fibers in CMC composites, which would be problematic at high temperature applications.

Smith, Craig E.↗

Small Autonomous Aircraft Servo Health Monitoring

Small air vehicles offer challenging power, weight, and volume constraints when considering implementation of system health monitoring technologies. In order to develop a testbed for monitoring the health and integrity of control surface servos and linkages, the Autonomous Aircraft Servo Health Monitoring system has been designed for small Uninhabited Aerial Vehicle (UAV) platforms to detect problematic behavior from servos and the air craft structures they control, This system will serve to verify the structural integrity of an aircraft's servos and linkages and thereby, through early detection of a problematic situation, minimize the chances of an aircraft accident. Embry-Riddle Aeronautical University's rotary-winged UAV has an Airborne Power management unit that is responsible for regulating, distributing, and monitoring the power supplied to the UAV's avionics. The current sensing technology utilized by the Airborne Power Management system is also the basis for the Servo Health system. The Servo Health system measures the current draw of the servos while the servos are in Motion in order to quantify the servo health. During a preflight check, deviations from a known baseline behavior can be logged and their causes found upon closer inspection of the aircraft. The erratic behavior nay include binding as a result of dirt buildup or backlash caused by looseness in the mechanical linkages. Moreover, the Servo Health system will allow elusive problems to be identified and preventative measures taken to avoid unnecessary hazardous conditions in small autonomous aircraft.

Quintero, Steven↗

Launch Pad 39 Hail Monitor Array System

Weather conditions at Kennedy Space Center are extremely dynamic, and they greatly affect the safety of the Space Shuttles sitting on the launch pads. For example, on May 13, 1999, the foam on the External Tank (ET) of STS-96 was significantly damaged by hail at the launch pad, requiring rollback to the Vehicle Assembly Building. The loss of ET foam on STS-114 in 2005 intensified interest in monitoring and measuring damage to ET foam, especially from hail. But hail can be difficult to detect and monitor because it is often localized and obscured by heavy rain. Furthermore, the hot Florida climate usually melts the hail even before the rainfall subsides. In response, the hail monitor array (HMA) system, a joint effort of the Applied Physics Laboratory operated by NASA and ASRC Aerospace at KSC, was deployed for operational testing in the fall of 2006. Volunteers from the Community Collaborative Rain, Hail, and Snow (CoCoRaHS) network, in conjunction with Colorado State University, continue to test duplicate hail monitor systems deployed in the high plains of Colorado.

Source record↗

Development of a Test Protocol for Spacecraft Post-Fire Atmospheric Cleanup and Monitoring

Detecting and extinguishing fires, along with post-fire atmospheric cleaning and monitoring, are vital components of a spacecraft fire response system. Preliminary efforts focused on the technology evaluation of these systems under realistic conditions are described in this paper. While the primary objective of testing is to determine a smoke mitigation filter s performance, supplemental evaluations measuring the smoke-filled chamber handheld commercial off-the-shelf (COTS) atmospheric monitoring devices (combustion product monitors) are also conducted. The test chamber consists of a 1.4 cubic meter (50 cu. ft.) volume containing a smoke generator. The fuel used to generate the smoke is a mixture of polymers in quantities representative of materials involved in a circuit board fire as a typical spacecraft fire. Two fire conditions were examined: no flame and flame. No flame events are produced by pyrolyzing the fuel mixture in a quartz tube furnace with forced ventilation to produce a white, lingering-type smoke. Flame events ignite the smoke at the outlet of the tube furnace producing combustion characterized by a less opaque smoke with black soot. Electrochemical sensor measurements showed carbon monoxide is a major indicator of each fire. Acid gas measurements were recorded, but cross interferents are currently uncharacterized. Electrochemical sensor measurements and sample acquisition techniques from photoacoustic sensors are being improved. Overall, this research shows fire characterization using traditional analytical chemistry techniques is required to verify measurements recorded using COTS atmospheric monitoring devices.

Zuniga, David↗

Orion Entry Display Feeder and Interactions with the Entry Monitor System

The Orion spacecraft is designed to return astronauts to a landing within 10 km of the intended landing target from low Earth orbit, lunar direct-entry, and lunar skip-entry trajectories. Al pile the landing is nominally controlled autonomously, the crew can fly precision entries manually in the event of an anomaly. The onboard entry displays will be used by the crew to monitor and manually fly the entry, descent, and landing, while the Entry Monitor System (EMS) will be used to monitor the health and status of the onboard guidance and the trajectory. The entry displays are driven by the entry display feeder, part of the Entry Monitor System (EMS). The entry re-targeting module, also part of the EMS, provides all the data required to generate the capability footprint of the vehicle at any point in the trajectory, which is shown on the Primary Flight Display (PFD). It also provides caution and warning data and recommends the safest possible re-designated landing site when the nominal landing site is no longer within the capability of the vehicle. The PFD and the EMS allow the crew to manually fly an entry trajectory profile from entry interface until parachute deploy having the flexibility to manually steer the vehicle to a selected landing site that best satisfies the priorities of the crew. The entry display feeder provides data from the ENIS and other components of the GNC flight software to the displays at the proper rate and in the proper units. It also performs calculations that are specific to the entry displays and which are not made in any other component of the flight software. In some instances, it performs calculations identical to those performed by the onboard primary guidance algorithm to protect against a guidance system failure. These functions and the interactions between the entry display feeder and the other components of the EMS are described.

Baird, Darren↗

Colorimetric Solid Phase Extraction (CSPE): Using Color to Monitor Spacecraft Water Quality

In August 2009, an experimental water quality monitoring kit based on Colorimetric Solid Phase Extraction (CSPE) technology was delivered to the International Space Station (ISS). The kit, called the Colorimetric Water Quality Monitoring Kit (CWQMK), was launched as a Station Development Test Objective (SDTO) experiment to evaluate the suitability of CSPE technology for routine use monitoring water quality on the ISS. CSPE is a sorption-spectrophotometric technique that combines colorimetric reagents, solid-phase extraction, and diffuse reflectance spectroscopy to quantify trace analytes in water samples. In CSPE, a known volume of sample is metered through a membrane disk that has been impregnated with an analyte-specific colorimetric reagent and any additives required to optimize the formation of the analyte-reagent complex. As the sample flows through the membrane disk, the target analyte is selectively extracted, concentrated, and complexed. Formation of the analyte-reagent complex causes a detectable change in the color of the membrane disk that is proportional to the amount of analyte present in the sample. The analyte is then quantified by measuring the color of the membrane disk surface using a hand-held diffuse reflectance spectrophotometer (DRS). The CWQMK provides the capability to measure the ionic silver (Ag +) and molecular iodine (I2) in water samples on-orbit. These analytes were selected for the evaluation of CSPE technology because they are the biocides used in the potable water storage and distribution systems on the ISS. Biocides are added to the potable water systems on spacecraft to inhibit microbial growth. On the United States (US) segment of the ISS molecular iodine serves as the biocide, while the Russian space agency utilizes silver as a biocide in their systems. In both cases, the biocides must be maintained at a level sufficient to control bacterial growth, but low enough to avoid any negative effects on crew health. For example, the presence of high levels of iodine in water can cause taste and odor issues that result in decreased water consumption by the crew. There are also concerns about potential impacts on thyroid function following exposure to high levels of iodine. With silver, there is a risk of developing argyria, an irreversible blue-gray discoloration of the skin, associated with long term consumption of water containing high concentrations of silver. The need to ensure that safe, effective levels of biocide are maintained in the potable water systems on the ISS provides a perfect platform for evaluating the suitability of CSPE technology for in-flight water quality monitoring. This paper provides an overview of CSPE technology and details on the silver and iodine methods used in the CWQMK. It also reports results obtained during in-flight analyses performed with the CWQMK and briefly discusses other potential applications for CSPE technology in both the spacecraft and terrestrial environments.

Gazda, Daniel B.↗

Replaceable Sensor System for Bioreactor Monitoring

A sensor system was proposed that would monitor spaceflight bioreactor parameters. Not only will this technology be invaluable in the space program for which it was developed, it will find applications in medical science and industrial laboratories as well. Using frequency-domain-based fluorescence lifetime technology, the sensor system will be able to detect changes in fluorescence lifetime quenching that results from displacement of fluorophorelabeled receptors bound to target ligands. This device will be used to monitor and regulate bioreactor parameters including glucose, pH, oxygen pressure (pO2), and carbon dioxide pressure (pCO2). Moreover, these biosensor fluorophore receptor-quenching complexes can be designed to further detect and monitor for potential biohazards, bioproducts, or bioimpurities. Biosensors used to detect biological fluid constituents have already been developed that employ a number of strategies, including invasive microelectrodes (e.g., dark electrodes), optical techniques including fluorescence, and membrane permeable systems based on osmotic pressure. Yet the longevity of any of these sensors does not meet the demands of extended use in spacecraft habitat or bioreactor monitoring. It was therefore necessary to develop a sensor platform that could determine not only fluid variables such as glucose concentration, pO2, pCO2, and pH but can also regulate these fluid variables with controlled feedback loop.

Mayo, Mike↗

Optical Structural Health Monitoring Device

This non-destructive, optical fatigue detection and monitoring system relies on a small and unobtrusive light-scattering sensor that is installed on a component at the beginning of its life in order to periodically scan the component in situ. The method involves using a laser beam to scan the surface of the monitored component. The device scans a laser spot over a metal surface to which it is attached. As the laser beam scans the surface, disruptions in the surface cause increases in scattered light intensity. As the disruptions in the surface grow, they will cause the light to scatter more. Over time, the scattering intensities over the scanned line can be compared to detect changes in the metal surface to find cracks, crack precursors, or corrosion. This periodic monitoring of the surface can be used to indicate the degree of fatigue damage on a component and allow one to predict the remaining life and/or incipient mechanical failure of the monitored component. This wireless, compact device can operate for long periods under its own battery power and could one day use harvested power. The prototype device uses the popular open-source TinyOS operating system on an off-the-shelf Mica2 sensor mote, which allows wireless command and control through dynamically reconfigurable multi-node sensor networks. The small size and long life of this device could make it possible for the nodes to be installed and left in place over the course of years, and with wireless communication, data can be extracted from the nodes by operators without physical access to the devices. While a prototype has been demonstrated at the time of this reporting, further work is required in the system s development to take this technology into the field, especially to improve its power management and ruggedness. It should be possible to reduce the size and sensitivity as well. Establishment of better prognostic methods based on these data is also needed. The increase of surface roughness with fatigue is closely connected to the microstructure of the metal, and ongoing research is seeking to connect this observed evidence of the fatigue state with microstructural theories of fatigue evolution to allow more accurate prognosis of remaining component life. Plans are also being discussed for flight testing, perhaps on NASA s SOFIA platform.

Buckner, Benjamin D.↗

SSV Launch Monitoring Strategies: HGDS Design Implementation Through System Maturity

With over 500,000 gallons of liquid hydrogen and liquid oxygen, it is of vital importance to monitor the space shuttle vehicle (SSV) from external tank (ET) load through launch. The Hazardous Gas Detection System (HGDS) was installed as the primary system responsible for monitoring fuel leaks within the orbiter and ET. The HGDS was designed to obtain the lowest possible detection limits with the best resolution while monitoring the SSV for any hydrogen, helium, oxygen, or argon as the main requirement. The HGDS is a redundant mass spectrometer used for real-time monitoring during Power Reactant Storage and Distribution (PRSD) load and ET load through launch or scrub. This system also performs SSV processing leak checks of the Tail Service Mast (TSM) umbilical quick disconnects (QD's), Ground Umbilical Carrier Plate (GUCP) QD's and supports auxiliary power unit (APU) system tests. From design to initial implementation and operations, the HGDS has evolved into a mature and reliable launch support system. This paper will discuss the operational challenges and lessons learned from facing design deficiencies, validation and maintenance efforts, life cycle issues, and evolving requirements

Shoemaker, Marc D.↗

The Wettzell System Monitoring Concept and First Realizations

Automated monitoring of operational system parameters for the geodetic space techniques is becoming more important in order to improve the geodetic data and to ensure the safety and stability of automatic and remote-controlled observations. Therefore, the Wettzell group has developed the system monitoring software, SysMon, which is based on a reliable, remotely-controllable hardware/software realization. A multi-layered data logging system based on a fanless, robust industrial PC with an internal database system is used to collect data from several external, serial, bus, or PCI-based sensors. The internal communication is realized with Remote Procedure Calls (RPC) and uses generative programming with the interface software generator idl2rpc.pl developed at Wettzell. Each data monitoring stream can be configured individually via configuration files to define the logging rates or analog-digital-conversion parameters. First realizations are currently installed at the new laser ranging system at Wettzell to address safety issues and at the VLBI station O Higgins as a meteorological data logger. The system monitoring concept should be realized for the Wettzell radio telescope in the near future.

Ettl, Martin↗

COLD MAGICS - Continuous Local Deformation Monitoring of an Arctic Geodetic Fundamental Station

We describe the experience gained in a project to continuously monitor the local tie at the Geodetic Observatory Ny-Alesund. A PC-controlled robotic total station was used to monitor survey prisms that were attached to survey pillars of the local network and the monuments used for geodetic VLBI and GNSS measurements. The monitoring lasted for seven days and had a temporal resolution of six minutes. The raw angle and distance measurements show clear sinusoidal signatures with a daily period, most strongly for a four-day period with 24 hours of sunshine. The derived topocentric coordinates of the survey prisms attached to the GNSS monument and the VLBI radio telescope act as approximation for the local tie. We detect clear signatures at the mm-level. With the current approach we cannot distinguish between real motion of the prisms and potential thermal influences on the instrument used for the observations. However, the project shows that continuous local tie monitoring is feasible today and in the future can and should be used for all geodetic co-location stations.

Haas, Ruediger↗

A Miniaturized Video System for Monitoring Drosophila Behavior

Long-term spaceflight may induce a variety of harmful effects in astronauts, resulting in altered motor and cognitive behavior. The stresses experienced by humans in space - most significantly weightlessness (microgravity) and cosmic radiation - are difficult to accurately simulate on Earth. In fact, prolonged and concomitant exposure to microgravity and cosmic radiation can only be studied in space. Behavioral studies in space have focused on model organisms, including Drosophila melanogaster. Drosophila is often used due to its short life span and generational cycle, small size, and ease of maintenance. Additionally, the well-characterized genetics of Drosophila behavior on Earth can be applied to the analysis of results from spaceflights, provided that the behavior in space is accurately recorded. In 2001, the BioExplorer project introduced a low-cost option for researchers: the small satellite. While this approach enabled multiple inexpensive launches of biological experiments, it also imposed stringent restrictions on the monitoring systems in terms of size, mass, data bandwidth, and power consumption. Suggested parameters for size are on the order of 100 mm3 and 1 kg mass for the entire payload. For Drosophila behavioral studies, these engineering requirements are not met by commercially available systems. One system that does meet many requirements for behavioral studies in space is the actimeter. Actimeters use infrared light gates to track the number of times a fly crosses a boundary within a small container (3x3x40 mm). Unfortunately, the apparatus needed to monitor several flies at once would be larger than the capacity of the small satellite. A system is presented, which expands on the actimeter approach to achieve a highly compact, low-power, ultra-low bandwidth solution for simultaneous monitoring of the behavior of multiple flies in space. This also provides a simple, inexpensive alternative to the current systems for monitoring Drosophila populations in terrestrial experiments, and could be especially useful in field experiments in remote locations. Two practical limitations of the system should be noted: first, only walking flies can be observed - not flying - and second, although it enables population studies, tracking individual flies within the population is not currently possible. The system used video recording and an analog circuit to extract the average light changes as a function of time. Flies were held in a 5-cm diameter Petri dish and illuminated from below by a uniform light source. A miniature, monochrome CMOS (complementary metal-oxide semiconductor) video camera imaged the flies. This camera had automatic gain control, and this did not affect system performance. The camera was positioned 5-7 cm above the Petri dish such that the imaging area was 2.25 sq cm. With this basic setup, still images and continuous video of 15 flies at one time were obtained. To reduce the required data bandwidth by several orders of magnitude, a band-pass filter (0.3-10 Hz) circuit compressed the video signal and extracted changes in image luminance over time. The raw activity signal output of this circuit was recorded on a computer and digitally processed to extract the fly movement "events" from the waveform. These events corresponded to flies entering and leaving the image and were used for extracting activity parameters such as inter-event duration. The efficacy of the system in quantifying locomotor activity was evaluated by varying environmental temperature, then measuring the activity level of the flies.

Bhattacharya, Sharmila↗

Monitoring Digital Closed-Loop Feedback Systems

A technique of monitoring digital closed-loop feedback systems has been conceived. The basic idea is to obtain information on the performances of closed-loop feedback circuits in such systems to aid in the determination of the functionality and integrity of the circuits and of performance margins. The need for this technique arises as follows: Some modern digital systems include feedback circuits that enable other circuits to perform with precision and are tolerant of changes in environment and the device s parameters. For example, in a precision timing circuit, it is desirable to make the circuit insensitive to variability as a result of the manufacture of circuit components and to the effects of temperature, voltage, radiation, and aging. However, such a design can also result in masking the indications of damaged and/or deteriorating components. The present technique incorporates test circuitry and associated engineering-telemetry circuitry into an embedded system to monitor the closed-loop feedback circuits, using spare gates that are often available in field programmable gate arrays (FPGAs). This technique enables a test engineer to determine the amount of performance margin in the system, detect out of family circuit performance, and determine one or more trend(s) in the performance of the system. In one system to which the technique has been applied, an ultra-stable oscillator is used as a reference for internal adjustment of 12 time-to-digital converters (TDCs). The feedback circuit produces a pulse-width-modulated signal that is fed as a control input into an amplifier, which controls the circuit s operating voltage. If the circuit s gates are determined to be operating too slowly or rapidly when their timing is compared with that of the reference signal, then the pulse width increases or decreases, respectively, thereby commanding the amplifier to increase or reduce, respectively, its output level, and "adjust" the speed of the circuits. The nominal frequency of the TDC s pulse width modulated outputs is approximately 40 kHz. In this system, the technique is implemented by means of a monitoring circuit that includes a 20-MHz sampling circuit and a 24-bit accumulator with a gate time of 10 ms. The monitoring circuit measures the duty cycle of each of the 12 TDCs at a repetition rate of 28 Hz. The accumulator content is reset to all zeroes at the beginning of each measurement period and is then incremented or decremented based of the value of the state of the pulse width modulated signal. Positive or negative values in the accumulator correspond to duty cycles greater or less, respectively, than 50 percent.

Katz, Richard↗

Hyperresolution Global Land Surface Modeling: Meeting a Grand Challenge for Monitoring Earth's Terrestrial Water

Monitoring Earth's terrestrial water conditions is critically important to many hydrological applications such as global food production; assessing water resources sustainability; and flood, drought, and climate change prediction. These needs have motivated the development of pilot monitoring and prediction systems for terrestrial hydrologic and vegetative states, but to date only at the rather coarse spatial resolutions (approx.10-100 km) over continental to global domains. Adequately addressing critical water cycle science questions and applications requires systems that are implemented globally at much higher resolutions, on the order of 1 km, resolutions referred to as hyperresolution in the context of global land surface models. This opinion paper sets forth the needs and benefits for a system that would monitor and predict the Earth's terrestrial water, energy, and biogeochemical cycles. We discuss six major challenges in developing a system: improved representation of surface-subsurface interactions due to fine-scale topography and vegetation; improved representation of land-atmospheric interactions and resulting spatial information on soil moisture and evapotranspiration; inclusion of water quality as part of the biogeochemical cycle; representation of human impacts from water management; utilizing massively parallel computer systems and recent computational advances in solving hyperresolution models that will have up to 10(exp 9) unknowns; and developing the required in situ and remote sensing global data sets. We deem the development of a global hyperresolution model for monitoring the terrestrial water, energy, and biogeochemical cycles a grand challenge to the community, and we call upon the international hydrologic community and the hydrological science support infrastructure to endorse the effort.

Wood, Eric F.↗

Central-Monitor Software Module

One of the software modules of the emergency-vehicle traffic-light-preemption system of the two preceding articles performs numerous functions for the central monitoring subsystem. This module monitors the states of all units (vehicle transponders and intersection controllers): It provides real-time access to the phases of traffic and pedestrian lights, and maps the positions and states of all emergency vehicles. Most of this module is used for installation and configuration of units as they are added to the system. The module logs all activity in the system, thereby providing information that can be analyzed to minimize response times and optimize response strategies. The module can be used from any location within communication range of the system; with proper configuration, it can also be used via the Internet. It can be integrated into call-response centers, where it can be used for alerting emergency vehicles and managing their responses to specific incidents. A variety of utility subprograms provide access to any or all units for purposes of monitoring, testing, and modification. Included are "sniffer" utility subprograms that monitor incoming and outgoing data for accuracy and timeliness, and that quickly and autonomously shut off malfunctioning vehicle or intersection units.

Bachelder, Aaron↗

Sensor for Monitoring Nanodevice-Fabrication Plasmas

The term plasma process diagnostics (PPD) refers to a spectroscopic technique and sensing hardware that have been proposed for monitoring plasma processes used to fabricate electronic devices that feature sizes as small as several nanometers. Nanometer dimensions are characteristic of the quantum level of miniaturization, where single impurity atoms or molecules can drastically change the local properties of the nanostructures. Such changes may be purposely used in nanoscale design but may also be extremely damaging or cause improper operation of the fabricated devices. Determination of temperature and densities of reactants near the developing features is important, since the structural synthesis is affected by characteristics of the local microenvironment. Consequently, sensors capable of nonintrusive monitoring with high sensitivity and high resolution are essential for real-time atomistic control of reaction kinetics and minimizing trace contamination in plasma processes used to fabricate electronic nanodevices. Such process-monitoring sensors are required to be compact, multiparametric, and immune to the harsh environments of processing plasmas. PPD is intended to satisfy these requirements. The specific technique used to implement plasma diagnostics with a PPD sensor would be an advanced version of continuous-wave cavity-ringdown spectroscopy (CW-CRDS) capable of profiling spectral line broadenings in order to derive both Doppler and Stark components. CRDS is based on measurements of the rate of absorption of laser light in an optical resonator. The ultimate sensitivity results from a very long absorption path length within the cavity and immunity to variations in incident laser intensity. The proposed version of this technique would involve the use of multiplexing tunable laser diodes and an actively modulated high-reflectivity optical resonator, thus offering a synergistic combination of simplicity, compactness, high sensitivity, and high resolution. The multiplexing capabilities of diode lasers could be utilized to make the PPD sensor a single, simple, compact, and inexpensive tool for the acquisition of multiparametric data. A PPD sensor would be capable of continuous measurement of such physical parameters as gas temperature, gas velocity, electron number density, and absolute densities of reacting chemical species. A laser beam can be easily adjusted to analyze the immediate vicinity of the growing nanostructures (or features etched down) in real time. The absorption enhancement in an optical cavity would afford the sensitivity needed for measurement of the temperature and densities of species at concentrations significantly lower than measurable by other nonintrusive techniques. It is anticipated that fully developed PPD sensors would enable simultaneous measurement of local temperature and determination of plasma species responsible for the synthesis and functionalization of nanodevices. These sensors would also enable tracking the pathways and origins of damaging contaminants, thereby providing feedback for adjustment of processes to optimize them and reduce contamination. The PPD sensors should also be useful for optimization of conventional microelectronics manufacturing plasma processes. Going beyond plasma processes for fabrication of electronic devices, PPD sensors could be used for monitoring of atoms, molecules, ions, radicals, clusters, and particles in a variety of other settings, including outer space. Because of their high sensitivity, such sensors could also prove useful for detecting traces of illegal drugs and explosives.

Bolshakov, Alexander↗