Low Pressure and Low Temperature Hermetic Wafer Bonding Using Microwave Heating
We bonded gold on silicon substrates (Au/Si) for a MEMS application by using microwave radiation in a single-mode cavity.
(MEMS)↗
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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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NASA Tech Briefs, January 2003
Topics covered include: Optoelectronic Tool Adds Scale Marks to Photographic Images; Compact Interconnection Networks Based on Quantum Dots; Laterally Coupled Quantum-Dot Distributed-Feedback Lasers; Bit-Serial Adder Based on Quantum Dots; Stabilized Fiber-Optic Distribution of Reference Frequency; Delay/Doppler-Mapping GPS-Reflection Remote-Sensing System; Ladar System Identifies Obstacles Partly Hidden by Grass; Survivable Failure Data Recorders for Spacecraft; Fiber-Optic Ammonia Sensors; Silicon Membrane Mirrors with Electrostatic Shape Actuators; Nanoscale Hot-Wire Probes for Boundary-Layer Flows; Theodolite with CCD Camera for Safe Measurement of Laser-Beam Pointing; Efficient Coupling of Lasers to Telescopes with Obscuration; Aligning Three Off-Axis Mirrors with Help of a DOE; Calibrating Laser Gas Measurements by Use of Natural CO2; Laser Ranging Simulation Program; Micro-Ball-Lens Optical Switch Driven by SMA Actuator; Evaluation of Charge Storage and Decay in Spacecraft Insulators; Alkaline Capacitors Based on Nitride Nanoparticles; Low-EC-Content Electrolytes for Low-Temperature Li-Ion Cells; Software for a GPS-Reflection Remote-Sensing System; Software for Building Models of 3D Objects via the Internet; "Virtual Cockpit Window" for a Windowless Aerospacecraft; CLARAty Functional-Layer Software; Java Library for Input and Output of Image Data and Metadata; Software for Estimating Costs of Testing Rocket Engines; Energy-Absorbing, Lightweight Wheels; Viscoelastic Vibration Dampers for Turbomachine Blades; Soft Landing of Spacecraft on Energy-Absorbing Self-Deployable Cushions; Pneumatically Actuated Miniature Peristaltic Vacuum Pumps; Miniature Gas-Turbine Power Generator; Pressure-Sensor Assembly Technique; Wafer-Level Membrane-Transfer Process for Fabricating MEMS; A Reactive-Ion Etch for Patterning Piezoelectric Thin Film; Wavelet-Based Real-Time Diagnosis of Complex Systems; Quantum Search in Hilbert Space; Analytic Method for Computing Instrument Pointing Jitter; and Semiselective Optoelectronic Sensors for Monitoring Microbes.
Source record↗
A wafer transfer technology for MEMS adaptive optics
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wafer transfer micro-electromechanical systems ada↗
Tomographic Volumetric Additive Manufacturing of Silica Glass with In Situ Error Calculation and Projection Tiling
The optical, thermal, and chemical properties of glass make it an ideal material for use in a wide range of applications, from optics and chemistry reactionware to consumer products. Tomographic volumetric additive manufacturing (tVAM) creates 3D objects by selectively gelling material within a rotating vial of photo-sensitive material by exposure to a series of tomographically-determined images. Here, in this study, tVAM is investigated for fabrication of complex, centimeter-scale, 3D silica glass parts. By optimizing the post-processing procedure, fully-dense glass parts with up to 2 cm 2 cross sectional area are achieved. The changes in optical properties during printing are leveraged for in situ metrology during printing, and the non-Newtonian nature of the glass-filled photoresin system to facilitate larger fabrication volumes via tiled projections. Printed structures are finally demonstrated for applications as MEMS components, optics, fluidics, and consumer products.
Materials science↗
Convex Synthesis of SNI Controllers Based on Frequency-Domain Data: MEMS Nanopositioner Example
Not provided.
Automation & Control Systems↗
Linear Multivariable Regression Models for Prediction of Eddy Dissipation Rate from Available Meteorological Data
Linear multivariable regression models for predicting day and night Eddy Dissipation Rate (EDR) from available meteorological data sources are defined and validated. Model definition is based on a combination of 1997-2000 Dallas/Fort Worth (DFW) data sources, EDR from Aircraft Vortex Spacing System (AVOSS) deployment data, and regression variables primarily from corresponding Automated Surface Observation System (ASOS) data. Model validation is accomplished through EDR predictions on a similar combination of 1994-1995 Memphis (MEM) AVOSS and ASOS data. Model forms include an intercept plus a single term of fixed optimal power for each of these regression variables; 30-minute forward averaged mean and variance of near-surface wind speed and temperature, variance of wind direction, and a discrete cloud cover metric. Distinct day and night models, regressing on EDR and the natural log of EDR respectively, yield best performance and avoid model discontinuity over day/night data boundaries.
MCKissick, Burnell T.↗
Selection, Development and Results for The RESOLVE Regolith Volatiles Characterization Analytical System
The RESOLVE project requires an analytical system to identify and quantitate the volatiles released from a lunar drill core sample as it is crushed and heated to 150 C. The expected gases and their range of concentrations were used to assess Gas Chromatography (GC) and Mass Spectrometry (MS), along with specific analyzers for use on this potential lunar lander. The ability of these systems to accurately quantitate water and hydrogen in an unknown matrix led to the selection of a small MEMS commercial process GC for use in this project. The modification, development and testing of this instrument for the specific needs of the project is covered.
Lueck, Dale E.↗
Hardware platforms for MEMS gyroscope tuning based on evolutionary computation using open-loop and closed -loop frequency response
We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation. We also report on the development of a hardware platform for integrated tuning and closed loop operation of MEMS gyroscopes. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.
evolvable hardware↗
Modeling of the Near Field Coupling Between an External Loop and an Implantable Spiral Chip Antennas in Biosensor Systems
In this paper, the near field coupling between an external hand-held loop antenna and an implantable miniature (1x1 mm) printed square spiral chip antenna used in bio-MEMS sensors for contact-less powering and RF telemetry is investigated. The loop and the spiral are inductively coupled and effectively form a transformer. The numerical results include the quasi-stationary magnetic field pattern of the implanted antenna, near zone wave impedance as a function of the radial distance and the values of the lumped elements in the equivalent circuit model for the transformer.
Simons, Rainee N.↗
4D Light Field Imaging System Using Programmable Aperture
Complete depth information can be extracted from analyzing all angles of light rays emanated from a source. However, this angular information is lost in a typical 2D imaging system. In order to record this information, a standard stereo imaging system uses two cameras to obtain information from two view angles. Sometimes, more cameras are used to obtain information from more angles. However, a 4D light field imaging technique can achieve this multiple-camera effect through a single-lens camera. Two methods are available for this: one using a microlens array, and the other using a moving aperture. The moving-aperture method can obtain more complete stereo information. The existing literature suggests a modified liquid crystal panel [LC (liquid crystal) panel, similar to ones commonly used in the display industry] to achieve a moving aperture. However, LC panels cannot withstand harsh environments and are not qualified for spaceflight. In this regard, different hardware is proposed for the moving aperture. A digital micromirror device (DMD) will replace the liquid crystal. This will be qualified for harsh environments for the 4D light field imaging. This will enable an imager to record near-complete stereo information. The approach to building a proof-ofconcept is using existing, or slightly modified, off-the-shelf components. An SLR (single-lens reflex) lens system, which typically has a large aperture for fast imaging, will be modified. The lens system will be arranged so that DMD can be integrated. The shape of aperture will be programmed for single-viewpoint imaging, multiple-viewpoint imaging, and coded aperture imaging. The novelty lies in using a DMD instead of a LC panel to move the apertures for 4D light field imaging. The DMD uses reflecting mirrors, so any light transmission lost (which would be expected from the LC panel) will be minimal. Also, the MEMS-based DMD can withstand higher temperature and pressure fluctuation than a LC panel can. Robotics need near complete stereo images for their autonomous navigation, manipulation, and depth approximation. The imaging system can provide visual feedback
Bae, Youngsam↗
Fiber-Embedded Wireless Sensors
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1½-D Printing↗
Cooperative Mission Concepts Using Biomorphic Explorers
Inspired by the immense variety of naturally curious explorers (insects, animals, and birds), their wellintegrated biological sensor-processor suites, efficiently packaged in compact but highly dexterous forms, and their complex, intriguing, cooperative behavior, this paper focuses on "Biomorphic Explorers", their defination/classification, their designs, and presents planetary exploration scenarios based on the designs. Judicious blend of bio-inspired concepts and recent advances in micro-air vehicles, microsensors, microinstruments, MEMS, and microprocessors clearly suggests that the time of small, dedicated, low cost explorers that capture some of the key features of biological systems has arrived. Just as even small insects like ants, termites, honey bees etc working cooperatively in colonies can achieve big tasks, the biomorphic explorers hold the potential for obtaining science in-accessible by current large singular exploration platforms.
Thakoor, S.↗
Chemical-free production of multiple high-value bioproducts from metabolically engineered transgenic sugarcane ‘oilcane’ bagasse and their recovery using nanofiltration
Bioenergy crops have potential for being a sustainable and renewable feedstock for biofuels and various value- added bioproducts. The study utilizes recently developed transgenic sugarcane (‘oilcane’) bagasse for chemical- free coproduction of high-value bioproducts, i.e., furfurals, HMF, acetic acid, cellulosic sugars, and vegetative lipids. Hydrothermal pretreatment was optimized at 210°C for 5 min to coproduce 6.91%, 2.67%, 5.07%, 2.42% and 37.82% (w/w) furfurals, HMF, acetic acid, vegetative lipids, and cellulosic sugars, respectively from lignocellulosic biomass. Additionally, nanofiltration system in-series was successfully established to recover sugars, furfurals, HMF, and acetic acid from the pretreatment liquor. 1st nanofiltration with Duracid NF mem- brane rejected ~99% sugars. Concentrated sugars with significantly reduced inhibitory products were obtained in retentate for fermentation. 2nd nanofiltration with NF90 membrane used permeate of 1st nanofiltration as feed and rejected ~ 86% furfurals. Furthermore, the work demonstrates the feasibility of coproducing and recovering multiple biochemicals from lignocellulosic biomass.
09 BIOMASS FUELS↗
Improving the Visible and Infrared Contrast Ratio of Microshutter Arrays
Three device improvements have been developed that dramatically enhance the contrast ratio of microshutters. The goal of a microshutter is to allow as much light through as possible when the shutters are in the open configuration, and preventing any light from passing through when they are in the closed position. The ratio of the transmitted light that is blocked is defined here as the contrast ratio. Three major components contribute to the improved performance of these microshutters: 1. The precise implementation of light shields, which protect the gap around the shutters so no light can leak through. It has been ascertained that without the light shield there would be a gap on the order of 1 percent of the shutter area, limiting the contrast to a maximum of 100. 2. The precise coating of the interior wall of each microshutter was improved with an insulator and metal using an angle deposition technique. The coating prevents any infrared light that finds an entrance on the surface of the microshutter cell from being emitted from a sidewall. Since silicon is in effect transparent to any light with a wavelength longer than .1 micrometer, these coatings are essential to blocking any stray signals when the shutters are closed. 3. A thin film of molybdenum nitride (MoN) was integrated onto the surface of the microshutter blade. This film provides the majority of light blockage over the microshutter and also ensures that the shutter can be operated over a wide temperature range by maintaining its flatness. These improvements were motivated by the requirements dictated by the James Webb Space Telescope NIRSpec instrument. The science goals of the NIRSpec require observing some of the very faintest objects in a given field of view that also may contain some very bright objects. To observe the faint objects, the light from the bright objects - which could be thousands of times brighter - must be completely blocked. If a closed microshutter is even slightly transmissive, a very bright object will still transmit a small signal, which can be larger than a signal from a very faint object transmitted through an open shutter. Since this situation can completely corrupt the results, it was necessary that the closed shutters be able to attenuate light by at least a factor of 2,000. There currently exist four flight-quality microshutter arrays that have been fully or are currently undergoing testing and the results support that the three improvements described above have successfully led to contrast levels greater than 50,000 in over 99 percent of the microshutters at an operating temperature of 35 K. Applications for these high-contrast microshutters are in the photomask generation and stepper equipment used to make integrated circuits and microelectromechanical (MEMS) devices. Since microshutters are a reconfigurable optical element, their versatility in these industries provides an improvement over printed masks and fixed projection alignment systems.
Jhabvala, Murzy↗
NASA Tech Briefs, January 2007
Topics covered include: Flexible Skins Containing Integrated Sensors and Circuitry; Artificial Hair Cells for Sensing Flows; Video Guidance Sensor and Time-of-Flight Rangefinder; Optical Beam-Shear Sensors; Multiple-Agent Air/Ground Autonomous Exploration Systems; A 640 512-Pixel Portable Long-Wavelength Infrared Camera; An Array of Optical Receivers for Deep-Space Communications; Microstrip Antenna Arrays on Multilayer LCP Substrates; Applications for Subvocal Speech; Multiloop Rapid-Rise/Rapid Fall High-Voltage Power Supply; The PICWidget; Fusing Symbolic and Numerical Diagnostic Computations; Probabilistic Reasoning for Robustness in Automated Planning; Short-Term Forecasting of Radiation Belt and Ring Current; JMS Proxy and C/C++ Client SDK; XML Flight/Ground Data Dictionary Management; Cross-Compiler for Modeling Space-Flight Systems; Composite Elastic Skins for Shape-Changing Structures; Glass/Ceramic Composites for Sealing Solid Oxide Fuel Cells; Aligning Optical Fibers by Means of Actuated MEMS Wedges; Manufacturing Large Membrane Mirrors at Low Cost; Double-Vacuum-Bag Process for Making Resin- Matrix Composites; Surface Bacterial-Spore Assay Using Tb3+/DPA Luminescence; Simplified Microarray Technique for Identifying mRNA in Rare Samples; High-Resolution, Wide-Field-of-View Scanning Telescope; Multispectral Imager With Improved Filter Wheel and Optics; Integral Radiator and Storage Tank; Compensation for Phase Anisotropy of a Metal Reflector; Optical Characterization of Molecular Contaminant Films; Integrated Hardware and Software for No-Loss Computing; Decision-Tree Formulation With Order-1 Lateral Execution; GIS Methodology for Planning Planetary-Rover Operations; Optimal Calibration of the Spitzer Space Telescope; Automated Detection of Events of Scientific Interest; Representation-Independent Iteration of Sparse Data Arrays; Mission Operations of the Mars Exploration Rovers; and More About Software for No-Loss Computing.
Source record↗
Orion Artemis I As Flown MMOD Analysis
Introduction The Lockheed Martin Orion spacecraft conducted the Artemis I flight around the Moon from November 16 through December 11, 2022. After the flight, an engineer from the NASA Johnson Space Center (JSC) Hypervelocity Impact Technology (HVIT) Group performed a Micrometeoroid and Orbital Debris MMOD analysis using the Bumper 3 risk assessment tool to predict the number of small impacts that would likely have occurred during the mission. Separately, a team from the same group inspected the Orion capsule for hypervelocity impact damage features. The results of the inspection were compared to those of the analysis to aid in improving the analysis, including the environment models. Scope of Work The spacecraft geometry model was created by Lockheed Martin during construction of the Artemis I Orion vehicle based on Computer Aided Design (CAD) models of the vehicle. New hypervelocity impact testing was performed to verify Ballistic Limit Equations (BLEs) used in the analysis to link impactor size and damage to the Thermal Protection System (TPS). The exact trajectory flown was recorded during the flight, including vehicle attitude. This data was used in conjunction with the ORDEM 3.2 and MEM 3 environment modeling tools to create models of particle flux impacting the spacecraft throughout the mission. Meteoroid shower forecast information was also included to account for additional particle flux associated with meteoroid showers. Inspection of the Orion capsule included the Backshell thermal tiles and the tape covering it, windows, fabric thermal materials, and small areas of other materials. Potential MMOD damage found was characterized using various techniques, including optical microscopy, computed tomography scanning, and X-ray spectroscopy. Findings The number of craters found in the Backshell tile, and their size distribution, matches well with the Bumper analysis prediction. Tape, window, and other material impacts recorded similarly align to Bumper analysis predictions. Conclusions and Recommendations This comparison of analysis with inspection of the hardware provides valuable insight into the MMOD environment and how accurately analysis tools assess the impact risk to spacecraft. As this was the first large, non-ablative returned surface from a lunar mission, this analysis extends the MMOD community’s insight beyond low Earth orbit into cis-lunar space.
MMOD↗
Orion Artemis I As Flown MMOD Analysis
Introduction The Lockheed Martin Orion spacecraft conducted the Artemis I flight around the Moon from November 16 through December 11, 2022. After the flight, an engineer from the NASA Johnson Space Center (JSC) Hypervelocity Impact Technology (HVIT) Group performed a Micrometeoroid and Orbital Debris MMOD analysis using the Bumper 3 risk assessment tool to predict the number of small impacts that would likely have occurred during the mission. Separately, a team from the same group inspected the Orion capsule for hypervelocity impact damage features. The results of the inspection were compared to those of the analysis to aid in improving the analysis, including the environment models. Scope of Work The spacecraft geometry model was created by Lockheed Martin during construction of the Artemis I Orion vehicle based on Computer Aided Design (CAD) models of the vehicle. New hypervelocity impact testing was performed to verify Ballistic Limit Equations (BLEs) used in the analysis to link impactor size and damage to the Thermal Protection System (TPS). The exact trajectory flown was recorded during the flight, including vehicle attitude. This data was used in conjunction with the ORDEM 3.2 and MEM 3 environment modeling tools to create models of particle flux impacting the spacecraft throughout the mission. Meteoroid shower forecast information was also included to account for additional particle flux associated with meteoroid showers. Inspection of the Orion capsule included the Backshell thermal tiles and the tape covering it, windows, fabric thermal materials, and small areas of other materials. Potential MMOD damage found was characterized using various techniques, including optical microscopy, computed tomography scanning, and X-ray spectroscopy. Findings The number of craters found in the Backshell tile, and their size distribution, matches well with the Bumper analysis prediction. Tape, window, and other material impacts recorded similarly align to Bumper analysis predictions. Conclusions and Recommendations This comparison of analysis with inspection of the hardware provides valuable insight into the MMOD environment and how accurately analysis tools assess the impact risk to spacecraft. As this was the first large, non-ablative returned surface from a lunar mission, this analysis extends the MMOD community’s insight beyond low Earth orbit into cis-lunar space.
MMOD↗
In-orbit servicing
A concept called the low-cost modular spacecraft, in which the subsystems would be contained in replaceable modules and which would be capable of various applications, is under engineering development. Studies have shown that servicing of such a spacecraft on orbit by the Space Shuttle over an extended lifetime is more economical than three other alternatives: launching replacement satellites on conventional boosters as existing satellites fail, launching replacements by Shuttle, or launching replacement satellites and retrieving malfunctioning satellites by Shuttle. For on-orbit servicing, the Shuttle would use its Remote Manipulator system (RMS) to bring the malfunctioning satellite into its cargo bay. The Flight Support System (FSS) on the Orbiter used for servicing the satellite would include an appendage storage frame, a retention cradle, a positioning platform, a Module Exchange Mechanism (MEM), and a storage magazine. Ground simulations are under way with the Orbiter mockup.
Cepollina, F. J.↗