Search NASA⌕ Search

SEARCH · Search NASA

Results for “Low temperature plasma”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 487 records · Page 27
All sourcesNASA NTRSDOE OSTI
NASA NTRS2007

Large-Area Permanent-Magnet ECR Plasma Source

A 40-cm-diameter plasma device has been developed as a source of ions for material-processing and ion-thruster applications. Like the device described in the immediately preceding article, this device utilizes electron cyclotron resonance (ECR) excited by microwave power in a magnetic field to generate a plasma in an electrodeless (noncontact) manner and without need for an electrically insulating, microwave-transmissive window at the source. Hence, this device offers the same advantages of electrodeless, windowless design - low contamination and long operational life. The device generates a uniform, high-density plasma capable of sustaining uniform ion-current densities at its exit plane while operating at low pressure [<10(exp -4) torr (less than about 1.3 10(exp -2) Pa)] and input power <200 W at a frequency of 2.45 GHz. Though the prototype model operates at 2.45 GHz, operation at higher frequencies can be achieved by straightforward modification to the input microwave waveguide. Higher frequency operation may be desirable in those applications that require even higher background plasma densities. In the design of this ECR plasma source, there are no cumbersome, power-hungry electromagnets. The magnetic field in this device is generated by a permanent-magnet circuit that is optimized to generate resonance surfaces. The microwave power is injected on the centerline of the device. The resulting discharge plasma jumps into a "high mode" when the input power rises above 150 W. This mode is associated with elevated plasma density and high uniformity. The large area and uniformity of the plasma and the low operating pressure are well suited for such material-processing applications as etching and deposition on large silicon wafers. The high exit-plane ion-current density makes it possible to attain a high rate of etching or deposition. The plasma potential is <3 V low enough that there is little likelihood of sputtering, which, in plasma processing, is undesired because it is associated with erosion and contamination. The electron temperature is low and does not vary appreciably with power.

Foster, John E.↗
DOE OSTI2024

Low-pressure inductively coupled plasmas in hydrogen: impact of gas heating on the spatial distribution of atomic hydrogen and vibrationally excited states

Non-equilibrium inductively coupled plasmas (ICPs) operating in hydrogen are of significant interest for applications including large-area materials processing. Increasing control of spatial gas heating, which drives the formation of neutral species density gradients and the rate of gas-temperature-dependent reactions, is critical. In this study, we use 2D fluid-kinetic simulations with the Hybrid Plasma Equipment Model to investigate the spatially resolved production of atomic hydrogen in a low-pressure planar ICP operating in pure hydrogen (10–20 Pa or 0.075–0.15 Torr, 300 W). The reaction set incorporates self-consistent calculation of the spatially resolved gas temperature and 14 vibrationally excited states. We find that the formation of neutral-gas density gradients, which result from spatially non-uniform electrical power deposition at constant pressure, can drive significant variations in the vibrational distribution function and density of atomic hydrogen when gas heating is spatially resolved. This highlights the significance of spatial gas heating on the production of reactive species in relatively high-power-density plasma processing sources.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS2002

Chandra Observations of a Young Embedded Magnetic B Star in the p Ophiuchus Cloud

This paper reports the analysis of two Chandra X-ray observations of the young magnetic B star rho Ophiuchus S1. X-ray emission from the star was detected in both observations. The average flux is almost the same in both, but during each observation the flux shows significant time variations by a factor of two on timescales of 20-40 ksec. Each spectrum can be fit by either an absorbed power law model with a photon index of approx. -3 or a thin-thermal plasma model with a temperature of approx. 2 keV and an extremely low metal abundance (approx. less than 0.1 solar). The spectrum of the first observation has an apparent line feature at about 6.8 keV, which likely corresponds to highly ionized iron K alpha. In contrast, the spectrum of the second observation shows an anomalous edge absorption component at E approx. 1 keV. The continuum emission and log (L(sub X)/L(sub bol)) approx. -6 are similar to those of young intermediate-mass stars (Herbig Ae/Be stars) although the presence of the magnetic field inferred from the detection of non-thermal radio emission has drawn an analogy between rho Ophiuchus S1 and magnetic chemically peculiar (MCP) stars. If the X-ray emission is thermal, the highest plasma temperature observed is too high to be explained by the conventional theories of magnetic stars, and favors some kind of magnetic dynamo activity, while if the emission is nonthermal, it might be related to mass infall. The 6.8 keV line and 4 keV edge features are marginal but they give important information near the stellar body if they are real. Their physical interpretation is discussed.

Hamaguchi, Kenji↗
NASA NTRS2022

Revolutionizing Our Understanding of Particle Energization in Space Plasmas Using on-Board Wave-Particle Correlator Instrumentation

A leap forward in our understanding of particle energization in plasmas throughout the heliosphere is essential to answer longstanding questions in heliophysics, including the heating of the solar corona, acceleration of the solar wind, and energization of particles that lead to observable phenomena, such as the Earth’s aurora. The low densities and high temperatures of typical heliospheric environments lead to weakly collisional plasma conditions. Under these conditions, the energization of particles occurs primarily through collisionless interactions between the electromagnetic fields and the individual plasma particles with energies characteristic of a particular interaction. To understand how the plasma heating and particle acceleration impacts the macroscopic evolution of the heliosphere, impacting phenomena such as extreme space weather, it is critical to understand these collisionless wave-particle interactions on the characteristic ion and electron kinetic timescales. Such understanding requires high-cadence measurements of both the electromagnetic fields and the three-dimensional particle velocity distributions. Although existing instrument technology enables these measurements, a major challenge to maximize the scientific return from these measurements is the limited amount of data that can be transmitted to the ground due to telemetry constraints. A valuable, but underutilized, approach to overcome this limitation is to compute on-board correlations of the maximum-cadence field and particle measurements to improve the sampling time by several orders of magnitude. Here we review the fundamentals of the innovative field-particle correlation technique, present a formulation of the technique that can be implemented as an on-board wave-particle correlator, and estimate results that can be achieved with existing instrumental capabilities for particle velocity distribution measurements.

plasma heating↗
NASA NTRS2004

Modeling of Sheath Ion-Molecule Reactions in Plasma Enhanced Chemical Vapor Deposition of Carbon Nanotubes

In many plasma simulations, ion-molecule reactions are modeled using ion energy independent reaction rate coefficients that are taken from low temperature selected-ion flow tube experiments. Only exothermic or nearly thermoneutral reactions are considered. This is appropriate for plasma applications such as high-density plasma sources in which sheaths are collisionless and ion temperatures 111 the bulk p!asma do not deviate significantly from the gas temperature. However, for applications at high pressure and large sheath voltages, this assumption does not hold as the sheaths are collisional and ions gain significant energy in the sheaths from Joule heating. Ion temperatures and thus reaction rates vary significantly across the discharge, and endothermic reactions become important in the sheaths. One such application is plasma enhanced chemical vapor deposition of carbon nanotubes in which dc discharges are struck at pressures between 1-20 Torr with applied voltages in the range of 500-700 V. The present work investigates The importance of the inclusion of ion energy dependent ion-molecule reaction rates and the role of collision induced dissociation in generating radicals from the feedstock used in carbon nanotube growth.

Hash, David B.↗
DOE OSTI2025

Elimination of remnant phases in low-temperature growth of wurtzite ScAlN by molecular-beam epitaxy

Growth of wurtzite ScxAl1−xN (x < 0.23) by plasma-assisted molecular-beam epitaxy on cplane GaN at high temperatures significantly alters the extracted lattice constants of the material due to defects likely associated with remnant phases. In contrast, ScAlN grown below a composition-dependent threshold temperature exhibits uniform alloy distribution, reduced defect density, and atomic-step surface morphology. The c-plane lattice constant of this low-temperature ScAlN varies with composition as expected from previous theoretical calculations and can be used to reliably estimate alloy composition. Moreover, lattice-matched Sc0.18Al0.82N/GaN multiquantum wells grown under these conditions display strong and narrow near-infrared intersubband absorption lines that confirm advantageous optical and electronic properties.

Dzuba, Brandon↗
NASA NTRS2008

ISS Charging Hazards and Low Earth Orbit Space Weather Effects

Current collection by high voltage solar arrays on the International Space Station (ISS) drives the vehicle to negative floating potentials in the low Earth orbit daytime plasma environment. Pre-flight predictions of ISS floating potentials Phi greater than |-100 V| suggested a risk for degradation of dielectric thermal control coatings on surfaces in the U.S. sector due to arcing and an electrical shock hazard to astronauts during extravehicular activity (EVA). However, hazard studies conducted by the ISS program have demonstrated that the thermal control material degradation risk is effectively mitigated during the lifetime of the ISS vehicle by a sufficiently large ion collection area present on the vehicle to balance current collection by the solar arrays. To date, crew risk during EVA has been mitigated by operating one of two plasma contactors during EVA to control the vehicle potential within Phi less than or equal to |-40 V| with a backup process requiring reorientation of the solar arrays into a configuration which places the current collection surfaces into wake. This operation minimizes current collection by the solar arrays should the plasma contactors fail. This paper presents an analysis of F-region electron density and temperature variations at low and midlatitudes generated by space weather events to determine what range of conditions represent charging threats to ISS. We first use historical ionospheric plasma measurements from spacecraft operating at altitudes relevant to the 51.6 degree inclination ISS orbit to provide an extensive database of F-region plasma conditions over a variety of solar cycle conditions. Then, the statistical results from the historical data are compared to more recent in-situ measurements from the Floating Potential Measurement Unit (FPMU) operating on ISS in a campaign mode since its installation in August, 2006.

Minow, Joseph↗
NASA NTRS1991

Diamond film deposition using microwave plasmas under low pressures

Microwave plasma depositions of diamond films have been investigated under low pressures of 10 mTorr to 10 Torr, at low substrate temperatures of 400 to 750 C, using high methane concentrations of 5 to 15 percent and oxygen concentrations of 5 to 10 percent in hydrogen plasmas. The deposition system consists of a microwave plasma chamber, a downstream deposition chamber, and a RF induction-heated sample stage. The deposition system can be operated in either high-pressure microwave or electron cyclotron resonance (ECR) modes by varying the sample stage position. Cathodoluminescence (CL) studies on diamond films deposited at 10 Torr pressure show that CL emissions at 430, 480, 510, 530, 560, 570 and 740 nm can be employed to characterize the quality of diamond films. High-quality, well-faceted diamond films have been deposited at 10 Torr and 600 C using 5 percent CH4 and 5 percent O2 in H2 plasmas; CL measurements on these films show very low N impurities and no detectable Si impurities. Diamond nucleation on SiC has been demonstrated by depositing well-faceted diamond crystallites on SiC-coated Si substrates.

Shing, Y. H.↗
NASA NTRS1990

In Situ deposition of YBCO high-T(sub c) superconducting thin films by MOCVD and PE-MOCVD

Metalorganic Chemical Vapor Deposition (MOCVD) offers the advantages of a high degree of compositional control, adaptability for large scale production, and the potential for low temperature fabrication. The capability of operating at high oxygen partial pressure is particularly suitable for in situ formation of high temperature superconducting (HTSC) films. Yttrium barium copper oxide (YBCO) thin films having a sharp zero-resistance transition with T( sub c) greater than 90 K and Jc approx. 10 to the 4th power A on YSZ have been prepared, in situ, at a substrate temperature of about 800 C. Moreover, the ability to form oxide films at low temperature is very desirable for device applications of HTSC materials. Such a process would permit the deposition of high quality HTSC films with a smooth surface on a variety of substrates. Highly c-axis oriented, dense, scratch resistant, superconducting YBCO thin films with mirror-like surfaces have been prepared, in situ, at a reduced substrate temperature as low as 570 C by a remote microwave-plasma enhanced metalorganic chemical vapor deposition (PE-MOCVD) process. Nitrous oxide was used as a reactant gas to generate active oxidizing species. This process, for the first time, allows the formation of YBCO thin films with the orthorhombic superconducting phase in the as-deposited state. The as-deposited films grown by PE-MOCVD show attainment of zero resistance at 72 K with a transition width of about 5 K. MOCVD was carried out in a commercial production scale reactor with the capability of uniform deposition over 100 sq cm per growth run. Preliminary results indicate that PE-MOCVD is a very attractive thin film deposition process for superconducting device technology.

Zhao, J.↗
NASA NTRS1991

In-situ deposition of YBCO high-Tc superconducting thin films by MOCVD and PE-MOCVD

Metal-Organic Chemical Vapor Deposition (MOCVD) offers the advantages of a high degree of compositional control, adaptability for large scale production, and the potential for low temperature fabrication. The capability of operating at high oxygen partial pressure is particularly suitable for in situ formation of high temperature superconducting (HTSC) films. Yttrium barium copper oxide (YBCO) thin films having a sharp zero-resistance transition with T(sub c) greater than 90 K and J(sub c) of approximately 10(exp 4) A on YSZ have been prepared, in situ, at a substrate temperature of about 800 C. Moreover, the ability to form oxide films at low temperature is very desirable for device applications of HTSC materials. Such a process would permit the deposition of high quality HTSC films with a smooth surface on a variety of substrates. Highly c-axis oriented, dense, scratch resistant, superconducting YBCO thin films with mirror-like surfaces have been prepared, in situ, at a reduced substrate temperature as low as 570 C by a remote microwave-plasma enhanced metal-organic chemical vapor deposition (PE-MOCVD) process. Nitrous oxide was used as a reactant gas to generate active oxidizing species. This process, for the first time, allows the formation of YBCO thin films with the orthorhombic superconducting phase in the as-deposited state. The as-deposited films grown by PE-MOCVD show attainment of zero resistance at 72 K with a transition width of about 5 K. MOCVD was carried out in a commercial production scale reactor with the capability of uniform deposition over 100 sq cm per growth run. Preliminary results indicate that PE-MOCVD is a very attractive thin film deposition process for superconducting device technology.

Zhao, J.↗
NASA NTRS1995

The heliospheric sector boundary as a distented magnetic cloud

A magnetic cloud was detected both near Earth and by Pioneer 11 located 43 deg east of Earth at 4.8 AU. The magnetic field within the cloud rotated smoothly from toward to away polarity, marking sector boundary passage. Interpreted as a flux rope, the cloud had a vertical axis, implying that its cylindrical cross-section in the ecliptic plane was distended along the sector boundary by at least 43, forming an extensive occlusion in the heliospheric current sheet. At 1 AU the cloud had plasma signatures typical of a fast coronal mass ejection with low temperature and a leading shock. In contrast, at 4.8 AU, only the cloud signature remained. Its radial dimension was the same at both locations, consistent with little expansion beyond 1 AU. Energetic particle data at 4.8 AU show high fluxes preceding the cloud but not extending forward to the corotating shock that marked entry into the interaction region containing the cloud. The streaming direction was antisunward, consistent with possible acceleration in a low-beta region of field line draping around the cloud's western (upstream) end. The fluxes dropped upon entry into the cloud and became essentially isotropic one third of the way through it. On the basis of sector boundary characteristics published in the past, we suggest that distended clouds may be common heliospheric current sheet occlusions.

Crooker, N. U.↗
NASA NTRS2024

SiC Charged Particle Telescope GRC Independent Research and Development (IRAD) Program End of Project Final Report

In an advancement over the state-of-the art, NASA Glenn Research Center (GRC) has developed a large area silicon carbide (SiC)-based charged particle telescope through an Independent Research and Development (IRAD) project. The telescope has been demonstrated to have improved noise characteristics and resolution than previous SiC detectors. This improvement will meet the challenges of compact multidirectional robust radiation detector systems to study a wide range of elementary particle mass and energies. In order to provide a complete understanding of how energetic processes internal and external to the solar system shape magnetospheres, atmospheres, and surfaces, in situ particle observations should include measurements of Solar Energetic Particles (SEP) and Galactic Cosmic Rays (GCR), along with solar wind and plasma. The potential temperature stability, tolerance to high radiation environments, and low noise characteristics expected in SiC-based detectors can have advantages over the state-of-the-art silicon detectors. These advantages will allow the detectors to be deployed in small compact systems on a variety of platforms, enabling compact structures for small satellite platforms with improved data quality.

Field and particle detectors↗
NASA NTRS2008

In-Situ F2-Region Plasma Density and Temperature Measurements from the International Space Station

The International Space Station orbit provides an ideal platform for in-situ studies of space weather effects on the mid and low latitude F-2 region ionosphere. The Floating Potential Measurement Unit (FPMU) operating on the ISS since Aug 2006. is a suite of plasma instruments: a Floating Potential Probe (FPP), a Plasma Impedance Probe (PIP), a Wide-sweep langmuir Probe (WLP), and a Narrow-sweep Langmuir Probe (NLP). This instrument package provides a new opportunity lor collaborative multi-instrument studies of the F-region ionosphere during both quiet and disturbed periods. This presentation first describes the operational parameters for each of the FPMU probes and shOWS examples of an intra-instrument validation. We then show comparisons with the plasma density and temperature measurements derived from the TIMED GUVI ultraviolet imager, the Millstone Hill ground based incoherent scatter radar, and DIAS digisondes, Finally we show one of several observations of night-time equatorial density holes demonstrating the capabilities of the probes lor monitoring mid and low latitude plasma processes.

Coffey, Victoria↗
DOE OSTI2022

Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source

Tin contamination of the collector mirror surface remains one of the crucial issues of EUV (Extreme Ultraviolet) sources, directly impacting the availability of the tool. Hydrogen plasma-based tin removal processes employ hydrogen radicals and ions to interact with tin deposits to form gaseous tin hydride (SnH 4 ), which can be removed through pumping. An annular surface wave plasma (SWP) source developed at the University of Illinois—Urbana Champaign is integrated into the cone and perimeter of the collection mirror for in situ tin removal. The SWP is characterized by high ion and radical densities, low electron temperature, and local generation where etching is needed. This method has the potential to significantly reduce downtime and increase mirror lifetime. Radical probe measurements show hydrogen radical densities in the order of 10 19 m -3 , while Langmuir probe measurements show electron temperatures of up to 6 eV and plasma densities on the order of 10 17–18 m -3 . The generated ions are essential to the tin cleaning and have sufficiently low energy to cause no damage to the collector capping layer. Tin etch rates of up to 270 nm/min were observed in a variety of experimental conditions, including various powers, pressures, flowrates, and temperatures. In conclusion, the high etch rates demonstrated in this study exceed the expected contamination rate of the EUV source.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2022

Path Integral Monte Carlo Simulations of Iron Plasmas (Final Technical Report)

This documents is the final technical report for our grant entitled "Path Integral Monte Carlo Simulations of Iron Plasmas" that focused on developing path integral Monte Carlo (PIMC) computer simulations. This techniques will be developed to study plasmas composed of heavier elements including iron and other third row elements. Equations of state (EOS) and transport properties will be derived in the regime of warm dense matter (WDM) and dense plasmas where existing first-principles methods cannot be applied. While standard density functional theory (DFT) has been used to accurately predict the structure of many solids and liquids up to temperatures on the order of 100,000 K, this method is not applicable at much higher temperature because the number of partially occupied electronic orbitals reaches intractably large numbers or the use of finite-temperature free energy functionals in orbital-free DFT introduces an uncontrolled approximation. Here we focus on PIMC methods that become more and more efficient with increasing temperatures and still include all electronic correlation effects. In this approach, electronic excitations increase the efficiency rather than reduce it. While it had commonly been assumed this method could only be applied to elements without core electrons, we showed that PIMC with free-particle nodes works well for first-row elements (PRL 108 (2012) 115502). Most recently, we extended the applicability range of all-electron PIMC to second-row elements by adopting localized nodal surfaces (PRL 115 (2015) 176403). To simulate third-row elements efficiently under WDM conditions, we propose a new method to remove core electrons by introducing pseudo-nodes. We explain our approach step by step and present preliminary results. We focus our method development on getting PIMC simulations of iron to work because of its fundamental importance for WDM and astrophysics. Then we move on to krypton and copper-doped beryllium, a ICF ablator material. We plan to continue working on key second-row material such as Na, Mg, MgO, Al, silica, and silicon-doped plastic ablators. Our collaborators at LLNL, will use our PIMC EOS data both as comparisons to existing semi-empirical, EOS-generating schemes, and as input for continuum radiation hydrodynamics simulations. We will establish an efficient pipeline from PIMC to macroscopic continuum studies of materials response. An emphasis will be placed on benchmarking such methods for plasmas of heavy elements at the very high temperatures (~100 eV) and low densities that are generated when Hohlraum radiation heats the ablator material in indirect drive laser experiments. Results from changes to the EOS will be of immeasurable importance to the designers at the National Ignition Facility (NIF) and at other facilities. Starting with our EOS of Cu-doped Be, our second collaborator at LLE, will perform real-time simulations of laser fusion experiments at the Omega laser and at the NIF to determine how sensitive the compression path depends on the ablator EOS. Since our collaborator also has experience in performing orbital-free DFT calculations, we propose to compare predictions from this method with PIMC results. In joint publications, we plan to analyze the accuracy of different free-energy functionals in order to understand why existing orbital-free DFT calculations do not predict compression peaks along the shock Hugoniot curve that we see with PIMC. The peaks are caused by the ionization of various electron shells. Their accurate characterization is important to compare with experimental results. We will break new ground by developing PIMC techniques that can simulate iron and all other third row elements in the plasma and WDM regimes. We introduce the concept of pseudo-nodes for the efficient treatment of the core-electrons. The EOS and transport properties will be derived and published online in the form of a new WDM database. Our PIMC EOS calculations will benchmark and possibly replace semi-analytical EOS tables like QEOS or SESAME, which will impact the hydrocode simulation community and will affect the design of NIF targets. Our PIMC results will help to improve the accuracy of orbital-free DFT simulations.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS1983

Measurement of coronal X-ray emission lines from Capella

The Einstein Observatory's Focal Plane Crystal Spectrometer has detected X-ray emission lines due to O VIII, Fe XVII, and Fe XX, from the binary star system Capella. Line luminosities are well fitted by an emitting plasma at a single temperature of 6.29 + or - 0.01 - 0.03 million K, and a volume emission measure of about 8.6 x 10 to the 52nd/cu cm, corresponding to the low temperature component previously observed. A high temperature component is undetectable, since the observed lines are not produced in plasma at temperatures above about 20 million K. Nearly isothermal plasma would be expected if many of the magnetically confined coronal loops have similar sizes and pressures, and a second population of longer loops would be required to account for the hotter component. An alternative interpretation of the observed X-ray line emission and upper limit is that the plasma contains a continuous distribution of emission measure versus temperature that rises sharply to 3 million K and then falls by nearly a decade to 16 million. An extrapolation of the loop sizes suggested by this alternative to hotter, longer loops may also account for the higher temperature emission.

Vedder, P. W.↗
NASA NTRS1975

Rocket-borne particle, field, and plasma observations in the cleft region

Results are reported for comprehensive observations of magnetic and electric fields together with ambient and suprathermal plasmas above the dayside auroral oval with rocket-borne instrumentation which penetrated the cleft region. Measurements were also obtained equatorward and poleward of the cleft. Convection velocities as inferred from electric-field measurements were generally toward noon equatorward of the cleft and were antisunward over the polar cap. Observations of electron temperatures, electric fields, and low-frequency electrostatic noise provide strong evidence of a plasma instability (Farley-Buneman) in the E-layer associated with the appearance of the 'slant E condition' identified in ground-acquired ionograms. The positions of these measurements relative to that of the cleft were firmly established via the determination of the plasma environment with an electrostatic analyzer.

Ungstrup, E.↗