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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 523 records · Page 29
All sourcesNASA NTRSDOE OSTI
DOE OSTI2013

Particle-In-Cell simulation of laser photodetachment in capacitively coupled radio frequency oxygen discharges

Particle-In-Cell simulations with Monte Carlo collision of capacitively coupled radio frequency oxygen discharges are used to study the appearance and characteristics of two experimentally observed electronegative modes, the high electronegative mode for low peak-to-peak voltage, and the low electronegative mode for high peak-to-peak voltage. For the high electronegative mode, the simulated laser photodetachment signal agrees very well with the experiment. The simulation identifies the dominant transport processes for high electronegativities: electrons flow fast out of the perturbed region, where the laser pulse generates laser detachment of negative ions. Negative ions are not streaming inward, but are produced within this region by dissociative attachment after the laser pulse.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2013

Investigation of the effects of a thin dielectric layer on low-pressure hydrogen capacitive discharges driven by combined radio frequency and pulse power sources

Negative hydrogen ion sources, for instance for fusion devices, currently attract considerable attention. To generate the precursors—highly rovibrationally excited hydrogen molecules—for negative hydrogen ions effectively by electron excitation, a thin dielectric layer is introduced to cover the surface of the electrically grounded electrode of two parallel metal plates in a low-pressure hydrogen capacitive discharge driven by combined rf and pulse power sources. To understand the characteristics of such discharges, particle-in-cell simulations are conducted to study the effects that the single dielectric layer would bring onto the discharges. The simulation results show that the dielectric layer leads to a much higher plasma density and a much larger production rate of highly vibrationally excited hydrogen molecules compared to discharges without the dielectric layer on the electrode. Further investigation indicates that the nonlinear oscillation of the electrons induced by the nanosecond-pulse continues until it is finally damped down and does not show any dependence on the pulse plateau-time, which is in stark contrast to the case without the dielectric layer present. The physical reason for this phenomenon is explored and explained.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2014

Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF{sub 4} and Ar/O{sub 2}/CF{sub 4} discharges

The electron density and ion energy distribution (IED) are investigated in low-pressure dual-frequency capacitively coupled Ar/CF{sub 4} (90%/10%) and Ar/O{sub 2}/CF{sub 4} (80%/10%/10%) plasmas. The relations between controllable parameters, such as high-frequency (HF) power, low-frequency (LF) power and gas pressure, and plasma parameters, such as electron density and IEDs, are studied in detail by utilizing a floating hairpin probe and an energy resolved quadrupole mass spectrometer, respectively. In our experiment, the electron density is mainly determined by the HF power and slightly influenced by the LF power. With increasing gas pressure, the electron density first goes up rapidly to a maximum value and then decreases at various HF and LF powers. The HF power also plays a considerable role in affecting the IEDs under certain conditions and the ion energy independently controlled by the LF source is discussed here. For clarity, some numerical results obtained from a two-dimensional fluid model are presented.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2014

Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2014

Hybrid model of atmospheric pressure Ar/O{sub 2}/TiCl{sub 4} radio-frequency capacitive discharge for TiO{sub 2} deposition

A hybrid global-analytical model of an atmospheric pressure radio-frequency driven capacitive discharge is applied to determine the plasma conditions for TiO{sub 2} film deposition. The feed gas is mainly argon with a small fraction of O{sub 2} and a smaller fraction of TiCl{sub 4}. Variations of the discharge parameters and species densities with O{sub 2} concentration, discharge power, and flow rate are determined. A simplified chemistry model is developed and compared with the simulation results, showing good agreement. For a base case with Ar/O{sub 2}/TiCl{sub 4} flow rates of 203/30/0.17 sccm, the results indicate that a minimum O{sub 2} fraction of 7.3 × 10{sup −4} is required for pure (un-chlorinated) TiO{sub 2} film deposition that the active precursor species is TiO{sub 2}Cl{sub 3}, with subsequent abstraction of Cl atoms by dissociative electron attachment and that the deposition rates are around 1 nm/s.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2014

Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF{sub 4} discharge

Computer simulations based on the particle-in-cell/Monte Carlo collision method are performed to study the plasma characteristics and especially the transition in electron heating mechanisms in a hybrid direct current (dc)/dual-frequency (DF) capacitively coupled CF{sub 4} discharge. When applying a superposed dc voltage, the plasma density first increases, then decreases, and finally increases again, which is in good agreement with experiments. This trend can be explained by the transition between the four main heating modes, i.e., DF coupling, dc and DF coupling, dc source dominant heating, and secondary electron dominant heating.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2014

Direct current dielectric barrier assistant discharge to get homogeneous plasma in capacitive coupled discharge

In this paper, we propose a method to get more homogeneous plasma in the geometrically asymmetric capacitive coupled plasma (CCP) discharge. The dielectric barrier discharge (DBD) is used for the auxiliary discharge system to improve the homogeneity of the geometrically asymmetric CCP discharge. The single Langmuir probe measurement shows that the DBD can increase the electron density in the low density volume, where the DBD electrodes are mounted, when the pressure is higher than 5 Pa. By this manner, we are able to improve the homogeneity of the plasma production and increase the overall density in the target volume. At last, the finite element simulation results show that the DC bias, applied to the DBD electrodes, can increase the homogeneity of the electron density in the CCP discharge. The simulation results show a good agreement with the experiment results.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2014

Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses

A kinetic Particle-In-Cell simulation with Monte Carlo Collisions was performed of a geometrically symmetric capacitively coupled, parallel-plate discharge in argon, driven by trapezoidal asymmetric voltage pulses with a period of 200 ns. The discharge was electrically asymmetric, making the ion energy distributions at the two electrodes different from one another. The fraction of the period (α), during which the voltage was kept at a constant (top-flat) positive value, was a critical control parameter. For the parameter range investigated, as α increased, the mean ion energy on the grounded electrode increased and the ions became more directional, whereas the opposite was found for the ions striking the powered electrode. The absolute value of the DC self-bias voltage decreased as α increased. Plasma instabilities, promoted by local double layers and electric field reversals during the time of the positive voltage excursion, were characterized by electron plasma waves launched from the sheath edge.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2014

Observation of transient electric fields in particle-in-cell simulation of capacitively coupled discharges

The analytical prediction of the presence of transient electric field regions between the bulk plasma and sheath edge in radio frequency capacitively coupled plasma (RF-CCP) discharges has been reported by Kaganovich [Phys. Rev. Lett. 89, 265006 (2002)]. In this paper, we have used the semi-infinite particle-in-cell (PIC) simulation technique to verify the theoretical prediction for the existence of transient electric field in the linear regime; it is shown that the PIC simulation results are in good agreement with the results predicted by analytical model in this regime. It is also demonstrated that the linear theory overestimates the transient electric field as one moves from linear to weakly nonlinear regime. The effect of applied RF current density and electron temperature on evolution of transition field and phase mixing regime has been explored.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2014

Experimental observation of standing wave effect in low-pressure very-high-frequency capacitive discharges

Radial uniformity measurements of plasma density were carried out by using a floating double probe in a cylindrical (21 cm in electrode diameter) capacitive discharge reactor driven over a wide range of frequencies (27–220 MHz). At low rf power, a multiple-node structure of standing wave effect was observed at 130 MHz. The secondary density peak caused by the standing wave effect became pronounced and shifts toward the axis as the driving frequency further to increase, indicative of a much more shortened standing-wave wavelength. With increasing rf power, the secondary density peak shift toward the radial edge, namely, the standing-wave wavelength was increased, in good qualitative agreement with the previous theory and simulation results. At higher pressures and high frequencies, the rf power was primarily deposited at the periphery of the electrode, due to the fact that the waves were strongly damped as they propagated from the discharge edge into the center.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2014

Experimental and numerical investigations of the phase-shift effect in capacitively coupled discharges

The phase-shift effect has been investigated by a Langmuir probe and a fluid model in Ar capacitively coupled plasmas at 50 mTorr. In the discharge, two sources with the same frequency, i.e., 27.12 MHz, are applied on the top and bottom electrodes simultaneously, and the phase shift between them varies from 0 to π. It is found that the electron density has an off-axis peak near the radial edge when the phase difference is equal to 0 due to the electrostatic edge effect, and the best radial uniformity is observed at a phase difference equal to π. Furthermore, when the voltage increases, the best radial uniformity is obtained at lower phase shift values. Moreover, the electron energy probability function has a bi-temperature structure at all the selected phase differences at r = 1–15 cm. The evolution of the plasma characteristics with the phase difference implies that the best radial uniformity can be obtained, by balancing the electrostatic edge effect and the phase shift effect.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2014

Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

Capacitively coupled radio frequency (CCRF) plasmas are widely studied in last decades due to the versatile applicability of energetic ions, chemically active species, radicals, and also energetic neutral species in many material processing fields including microelectronics, aerospace, and biology. A dc self-bias is known to generate naturally in geometrically asymmetric CCRF plasma because of the difference in electrode sizes known as geometrical asymmetry of the electrodes in order to compensate electron and ion flux to each electrode within one rf period. The plasma series resonance effect is also come into play due to the geometrical asymmetry and excited several harmonics of the fundamental in low pressure CCRF plasma. In this work, a 13.56 MHz CCRF plasma is studied on the based on the nonlinear global model of asymmetric CCRF discharge to understand the influences of finite geometrical asymmetry of the electrodes in terms of generation of dc self-bias and plasma heating. The nonlinear global model on asymmetric discharge has been modified by considering the sheath at the grounded electrode to taking account the finite geometrical asymmetry of the electrodes. The ion density inside both the sheaths has been taken into account by incorporating the steady-state fluid equations for ions considering that the applied rf frequency is higher than the typical ion plasma frequency. Details results on the influences of geometrical asymmetry on the generation of dc self-bias and plasma heating are discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2014

Room temperature magnetocaloric effect and refrigerant capacitance in La{sub 0.7}Sr{sub 0.3}MnO{sub 3} nanotube arrays

High aspect ratio La{sub 0.7}Sr{sub 0.3}MnO{sub 3} nanotube (NT) arrays have been synthesized using nitrates based sol-gel precursor by nanoporous anodized aluminum oxide template assisted method. Their phase purity and microstructures were analyzed by X-ray diffraction, scanning electron microscopy, and energy-dispersive x-ray spectroscopy. Magnetocaloric effect (MCE) of as prepared NTs was investigated by means of field dependence magnetization measurements. Significant magnetic entropy change, −△S{sub M} = 1.6 J/kg K, and the refrigerant capacitance, RC = 69 J/kg, were achieved near the transition temperature at 315 K for 5 T. For comparison, a bulk sample was also prepared using the same precursor solution which gives a value of −△S{sub M} = 4.2 J/kg K and a RC = 165 J/kg. Though the bulk sample exhibits higher △S{sub M} value, the NTs present an expanded temperature dependence of −△S{sub M} curves that spread over a broad temperature range and assured to be appropriate for active magnetic refrigeration. The diminutive MCE observed in manganite NTs is explained by the increased influence of surface sites of nanograins which affect the structural phase transition occurred by external magnetic field due to the coupling between magnetism and the lattice in manganese perovskites. Our report paves the way for further investigation in 1D manganite nanostructured materials towards applications in such magnetic refrigeration technology or even on hyperthermia/drug delivery.

77 NANOSCIENCE AND NANOTECHNOLOGY↗
DOE OSTI2014

Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge

Based on the drift and diffusion approximation theory, a 1D fluid model on capacitively coupled RF argon glow discharge at low pressure is established to study the effect of secondary electron emission (SEE) on the discharge characteristics. The model is numerically solved by using a finite difference method and the numerical results are obtained. The numerical results indicate that when the SEE coefficient is larger, the plasma density is higher and the time of reaching steady state is longer. It is also found that the cycle-averaged electric field, electric potential, and electron temperature change a little as the SEE coefficient is increased. Moreover, the discharge characteristics in some nonequilibrium discharge processes with different SEE coefficients have been compared. The analysis shows that when the SEE coefficient is varied from 0.01 to 0.3, the cycle-averaged electron net power absorption, electron heating rate, thermal convective term, electron energy dissipation, and ionization all have different degrees of growth. While the electron energy dissipation and ionization are quite special, there appear two peaks near each sheath region in the discharge with a relatively larger SEE coefficient. In this case, the discharge is certainly operated in a hybrid α-γ-mode.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2014

Absolute CF{sub 2} density and gas temperature measurements by absorption spectroscopy in dual-frequency capacitively coupled CF{sub 4}/Ar plasmas

Broadband ultraviolet absorption spectroscopy has been used to determine the CF{sub 2} radical density in dual-frequency capacitively coupled CF{sub 4}/Ar plasmas, using the CF{sub 2} A{sup ~1}B{sub 1}←X{sup ~1}A{sub 1} system of absorption spectrum. The rotational temperature of ground state CF{sub 2} and excited state CF was also estimated by using A{sup ~1}B{sub 1}←X{sup ~1}A{sub 1} system and B{sup 2}Δ−X{sup 2}Π system, respectively. The translational gas temperature was deduced from the Doppler width of the Ar{sup *}({sup 3}P{sub 2}) and Ar{sup *}({sup 3}P{sub 0}) metastable atoms absorption line by using the tunable diode laser absorption spectroscopy. The rotational temperatures of the excited state CF are about 100 K higher than those of ground state CF{sub 2}, and about 200 K higher than the translational gas temperatures. The dependences of the radical CF{sub 2} density, electron density, electron temperature, rotational temperature, and gas temperature on the high frequency power and pressure have been analyzed. Furthermore, the production and loss mechanisms of CF{sub 2} radical and the gas heating mechanisms have also been discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2015

An investigation of Ar metastable state density in low pressure dual-frequency capacitively coupled argon and argon-diluted plasmas

An tunable diode laser absorption spectroscopy has been used to determine the Ar*({sup 3}P{sub 2}) and Ar*({sup 3}P{sub 0}) metastable atoms densities in dual-frequency capacitively coupled plasmas. The effects of different control parameters, such as high-frequency power, gas pressure and content of Ar, on the densities of two metastable atoms and electron density were discussed in single-frequency and dual-frequency Ar discharges, respectively. Particularly, the effects of the pressure on the axial profile of the electron and Ar metastable state densities were also discussed. Furthermore, a simple rate model was employed and its results were compared with experiments to analyze the main production and loss processes of Ar metastable states. It is found that Ar metastable state is mainly produced by electron impact excitation from the ground state, and decayed by diffusion and collision quenching with electrons and neutral molecules. Besides, the addition of CF{sub 4} was found to significantly increase the metastable destruction rate by the CF{sub 4} quenching, especially for large CF{sub 4} content and high pressure, it becomes the dominant depopulation process.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2015

Experimental investigations of driving frequency effect in low-pressure capacitively coupled oxygen discharges

The effect of driving frequency on the electron density is investigated in low-pressure capacitively coupled oxygen plasmas by utilizing a floating hairpin probe. The power absorbed by the plasma is investigated and it is found that the power lost in the matching network can reach 50% or higher under certain conditions. The effect of driving frequency on the electron density is studied from two aspects, i.e., constant absorbed power and electrode voltage. In the former case, the electron density increases with the driving frequency increasing from 13.56 to 40.68 MHz and slightly changes depending on the gas pressures with the frequency further increasing to 100 MHz. In the latter case, the electron density rapidly increases when the driving frequency increases from 13.56 to 40.68 MHz, and then decreases with the frequency further increasing to 100 MHz. The electron series resonance is observed at 40.68 MHz and can be attributed to the higher electron density. And the standing wave effect also plays an important role in increasing electron density at 100 MHz and 2.6 Pa.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2015

Pseudo capacitive performance of copper oxide thin films grown by RF sputtering

Thin films of Copper Oxide were prepared by radio frequency magnetron sputtering on steel substrates maintained at 250°C under different RF powers ranging from 150W to 250W by keeping the sputtering pressure at 5.7×10{sup −3} mbar and O{sub 2}:Ar ratio of 1:7. The influence of RF power on the pseudo capacitive performance of thin films was studied. The X-ray diffraction studies and Raman studies indicates that all the thin films exhibits CuO phase. The electrochemical studies was done by using three electrode configuration with platinum as reference electrode. From the cyclic voltammetry studies a high rate pseudocapacitance of 227 mFcm{sup −2} at 0.5 mVs{sup −1} and 77% of capacity retention after 1000 cycles was obtained for the CuO thin films prepared at an RF power of 220W.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗