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At least 523 records · Page 29

Fabrication of Microshutter Arrays for James Webb Space Telescope

Two-dimensional MEMS microshutter arrays are being developed at NASA Goddard Space Flight Center for use in the near-infrared region on the Next Generation Space Telescope (NGST). The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast. The NGST environment requires cryogenic operation at 45K. Microshutter arrays are fabricated out of silicon-oxide-insulated (SOI) silicon wafers. Arrays are close-packed silicon nitride membranes with a pixel size of 100x100 microns. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. The mechanical shutter arrays are fabricated using MEMS technologies. The processing includes a multi-layer metal deposition and patterning of shutter electrodes and magnetic pads, reactive ion etching (RE) of the front side to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, followed by a deep RIE (DRIE) back-etch down to the nitride shutter membrane to form frames and relieve shutters from the silicon substrate. An additional metal deposition and patterning is used to form back electrodes. Shutters are actuated using a magnetic force and latched using an electrostatic force.

Li, Mary J.↗

Microshutter Arrays for James Webb Space Telescope

Two-dimensional MEMS microshutter arrays are being developed at NASA Goddard Space Flight Center for use in the near-infrared region on the James Webb Space Telescope (JWST). The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast. The JWST environment requires cryogenic operation at 35K. Microshutter arrays are fabricated out of silicon-oxide-insulated (SOI) silicon wafers. Arrays are close-packed silicon nitride membranes with a pixel size of 100x200 p. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. The mechanical shutter arrays are fabricated using MEMS technologies. The processing includes a multi- layer metal deposition and patterning of shutter electrodes and magnetic pads, reactive ion etching (NE) of the front side to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, followed by a deep RIE (DRIE) back-etch down to the nitride shutter membrane to form W e s and relieve shutters from the silicon substrate. An additional metal deposition and patterning is used to form back electrodes. Shutters are actuated using a magnetic force and latched using an electrostatic force. . . . KEYWORDS: microshutter, MEMS, RIE, DRIE, micro-optics, near inbred, space telescope

Li, Mary J.↗

NbN A/D Conversion of IR Focal Plane Sensor Signal at 10 K

We are implementing a 12 bit SFQ counting ADC with parallel-to-serial readout using our established 10 K NbN capability. This circuit provides a key element of the analog signal processor (ASP) used in large infrared focal plane arrays. The circuit processes the signal data stream from a Si:As BIB detector array. A 10 mega samples per second (MSPS) pixel data stream flows from the chip at a 120 megabit bit rate in a format that is compatible with other superconductive time dependent processor (TDP) circuits being developed. We will discuss our planned ASP demonstration, the circuit design, and test results.

conversion↗

Detector Arrays for the James Webb Space Telescope Near-Infrared Spectrograph

The James Webb Space Telescope's (JWST) Near Infrared Spectrograph (NIRSpec) incorporates two 5 micron cutoff (lambda(sub co) = 5 microns) 2048x2048 pixel Teledyne HgCdTe HAWAII-2RG sensor chip assemblies. These detector arrays, and the two Teledyne SIDECAR application specific integrated circuits that control them, are operated in space at T approx. 37 K. In this article, we provide a brief introduction to NIRSpec, its detector subsystem (DS), detector readout in the space radiation environment, and present a snapshot of the developmental status of the NIRSpec DS as integration and testing of the engineering test unit begins.

Rauscher, Bernard J.↗

Measurements of microlens performance

We present results of laboratory evaluations of several microlens types that have been designed and fabricated at the Lockheed Research and Development Division. The microlenses include wideband and dispersive types, in isolation and in arrays, and fabricated with binary or grayscale methods. Different lens pixel geometries are considered, including square, hexagonal, and skewed microlenses. We describe our micro-optics laboratory testbed which has been designed for the evaluation of individual lenslets or 2D arrays at selected spectral wavelengths. Measurement capabilities include focal length, point-spread functions, wavefront quality, and modulation transfer functions. Our present effort focuses on the results of point spread function measurements and their comparison with design predictions.

Shough, D.↗

Assembly and Integration Process of the First High Density Detector Array for the Atacama Cosmology Telescope

The Advanced ACTPol (AdvACT) upgrade on the Atacama Cosmology Telescope (ACT) consists of multichroicTransition Edge Sensor (TES) detector arrays to measure the Cosmic Microwave Background (CMB) polarization anisotropies in multiple frequency bands. The first AdvACT detector array, sensitive to both 150 and 230 GHz, is fabricated on a 150 mm diameter wafer and read out with a completely different scheme compared to ACTPol. Approximately 2000 TES bolometers are packed into the wafer leading to both a much denser detector density and readout circuitry. The demonstration of the assembly and integration of the AdvACT arrays is important for the next generation CMB experiments, which will continue to increase the pixel number and density. We present the detailed assembly process of the first AdvACT detector array.

Li, Yaqiong↗

Cosmic Ray-Air Shower Measurement from Space

A feasibility study has been initiated to observe from space the highest energy cosmic rays above 1021 eV. A satellite observatory concept, the Maximum-energy Auger (Air)-Shower Satellite (MASS), is recently renamed as the Orbital Wide-angle Collector (OWL) by taking its unique feature of using a very wide field-of-view (FOV) optics. A huge array of imaging devices (about 10(exp 6) pixels) is required to detect and record fluorescent light profiles of cosmic ray cascades in the atmosphere. The FOV of MASS could extend to as large as about 60 in. diameter, which views (500 - 1000 km) of earth's surface and more than 300 - 1000 cosmic ray events per year could be observed above 1020 eV. From far above the atmosphere, the MASS/OWL satellite should be capable of observing events at all angles including near horizontal tracks, and would have considerable aperture for high energy photon and neutrino observation. With a large aperture and the spatial and temporal resolution, MASS could determine the energy spectrum, the mass composition, and arrival anisotropy of cosmic rays from 1020 eV to 1022 eV; a region hitherto not explored by ground-based detectors such as the Fly's Eye and air-shower arrays. MASS/OWL's ability to identify cosmic neutrinos and gamma rays may help providing evidence for the theory which attributes the above cut-off cosmic ray flux to the decay of topological defects. Very wide FOV optics system of MASS/OWL with a large array of imaging devices is applicable to observe other atmospheric phenomena including upper atmospheric lightning. The wide FOV MASS optics being developed can also improve ground-based gamma-ray observatories by allowing simultaneous observation of many gamma ray sources located at different constellations.

Takahashi, Yoshiyuki↗

The brighter-fatter effect in the JWST MIRI Si:As IBC detectors: I. Observations, impact on science, and modeling

Context.The Mid-Infrared Instrument (MIRI) on board theJames WebbSpace Telescope (JWST) uses three Si:As impurity band conduction (IBC) detector arrays. The output voltage level of each MIRI detector pixel is digitally recorded by sampling up the ramp. For uniform or low-contrast illumination, the pixel ramps become nonlinear in a predictable way, but in areas of high contrast, the nonlinearity curve becomes much more complex. The origin of the effect is poorly understood and currently not calibrated out of the data. Aims.We provide observational evidence of the brighter-fatter effect (BFE) in MIRI conventional and high-contrast coronagraphic imaging, low-resolution spectroscopy, and medium-resolution spectroscopy data, and we investigate the physical mechanism that gives rise to the effect on the MIRI detector pixel raw voltage integration ramps. Methods.We used public data from the JWST/MIRI commissioning and Cycle 1 phase. We also developed a numerical electrostatic model of the MIRI detectors using a modified version of the publicPoisson_CCDcode. Results.We find that the physical mechanism behind the BFE manifesting in MIRI data is fundamentally different to that of charge-coupled devices and photodiode arrays such as the Hawaii-XRG near-infrared detectors used by the NIRISS, NIRCam, and NIRSpec instruments on board JWST. Observationally, the BFE makes the JWST MIRI data yield 10–25% larger point sources and spectral line profiles as a function of the relative level of de-biasing of neighboring detector pixels. This broadening impacts the MIRI absolute flux calibration, time-series observations of faint companions, and point spread function modeling and subtraction. We also find that the intra-pixel 2D profile of the shrinking Si:As IBC detector depletion region directly impacts the accuracy of the pixel ramp nonlinearity calibration model.

Astronomy & Astrophysics↗

Development of Large-Scale Magnetic Calorimeter Arrays

We describe performance of large-scale arrays of metallic magnetic calorimeters (MMCs) we are developing to meet requirements of the Lynx X-ray Microcalorimeter (LXM) instrument in the astrophysics mission concept Lynx. We have fabricated prototypes with 55,800 x-ray pixels thermally connected to 5,688 MMC sensors. Subarrays demonstrate three types of pixels, which have different energy and spatial resolution goals in LXM. Pixel pitch is 50 or 25 µm. For two subarrays, use of position sensitive detectors, in a "hydra" configuration with 25 x-ray absorbers per sensor, helps achieve a large focal plane by increasing pixel count relative to readout channels. Since each absorber has a different thermal link to its sensor, it generates a different pulse shape and enables discrimination of pixel position. Superconducting wiring from all sensors was brought out to the perimeter of the overall array using multiple buried metal layers planarized by Chemical Mechanical Planarization to achieve high critical current, low inductance, and high fabrication yield. An automated, algorithmic approach was used to layout the complex wiring pattern. For readout with existing small arrays of Superconducting Quantum Interference (SQUID) amplifiers, 112 selected pixels were connected to wire bond pads. In hydras, we successfully identified 25 pulse shapes using rise-time and pulse height. Pulse shapes were similar to simulations. We measured noise and responsivity to substrate temperature and applied x-ray pulses. While we designed sensors to have high inductance to relative to stray inductance of wiring, we had only mismatched (lower input inductance) SQUIDs available in our current apparatus, giving non-optimized resolution. We compared measured and calculated energy resolutions. We have the required sensitivity to reach < 3 eV FWHM resolution for 6 keV x-rays, required for the LXM Main Array, and the ability to discriminate the 25 different absorber pixels down to energies < 300 eV.

microcalorimeters↗

Chromatic Modulator for High Resolution CCD or APS Devices

A system for providing high-resolution color separation in electronic imaging. Comb drives controllably oscillate a red-green-blue (RGB) color strip filter system (or otherwise) over an electronic imaging system such as a charge-coupled device (CCD) or active pixel sensor (APS). The color filter is modulated over the imaging array at a rate three or more times the frame rate of the imaging array. In so doing, the underlying active imaging elements are then able to detect separate color-separated images, which are then combined to provide a color-accurate frame which is then recorded as the representation of the recorded image. High pixel resolution is maintained. Registration is obtained between the color strip filter and the underlying imaging array through the use of electrostatic comb drives in conjunction with a spring suspension system.

Frank T Hartley↗

Design and Deployment of a Multichroic Polarimeter Array on the Atacama Cosmology Telescope

We present the design and the preliminary on-sky performance with respect to beams and pass bands of a multichroic polarimeter array covering the 90 and 146 GHz cosmic microwave background bands and its enabling broad-band optical system recently deployed on the Atacama Cosmology Telescope (ACT). The constituent pixels are feedhorn-coupled multichroic polarimeters fabricated at NIST. This array is coupled to the ACT telescope via a set of three silicon lenses incorporating novel broad-band metamaterial anti-reflection coatings. This receiver represents the first multichroic detector array deployed for a CMB experiment and paves the way for the extensive use of multichroic detectors and broad-band optical systems in the next generation of CMB experiments.

passbands↗

Wide‐Field Bond Quality Evaluation Using Frequency Domain Thermoreflectance with Deep Neural Network Feature Reconstruction

Heterogeneous integration of microelectronic components provides a pathway to improve circuit/component performance; however, this comes with assembly challenges, in particular due to complex interfaces via subsurface bump bonds. The ability of these bonds to transmit electrical signals and conduct heat to the carrier substrate limits component performance. In this work, hyperspectral frequency‐domain thermoreflectance (FDTR) imaging is demonstrated as a robust technique for evaluating the quality of subsurface indium bump bonds in a surrogate microelectronic sample. By performing microscale FDTR imaging with coarse motion image stitching, thermal phase maps that cover a 4 mm by 4 mm field‐of‐view with subsurface feature sensitivity at depths greater than 50 µm are obtained. The resulting FDTR hyperspectral data contains more than three million pixels and reveal the quality of subsurface microbump arrays. Wide‐field analysis of bonded versus gap regions is enabled by deep neural network feature reconstruction, that after training, rapidly provides an interpretable representation of bond quality. Utility of noisy higher frequency FDTR phase maps, i.e., near the computationally predicted sensing depth limit, results in an average prediction error of 11%. Taken together, FDTR with neural network‐based analysis demonstrates subsurface bond monitoring at length scales relevant for heterogeneously integrated microelectronics.

FDTR↗

Imaging MAMA detector systems

Imaging multianode microchannel array (MAMA) detector systems with 1024 x 1024 pixel formats have been produced for visible and UV wavelengths; the UV types employ 'solar blind' photocathodes whose detective quantum efficiencies are significantly higher than those of currently available CCDs operating at far-UV and EUV wavelengths. Attention is presently given to the configurations and performance capabilities of state-of-the-art MAMA detectors, with a view to the development requirements of the hybrid electronic circuits needed for forthcoming spacecraft-sensor applications. Gain, dark noise, uniformity, and dynamic range performance data are presented for the curved-channel 'chevron', 'Z-plate', and helical-channel high gain microchannel plate configurations that are currently under evaluation with MAMA detector systems.

Slater, David C.↗

Real-time processor for staring receivers

The design, fabrication, and testing of a state-of-the-art, high-throughput on-focal plane IR-image signal processor is described. The processing functions performed are frame differencing and thresholding. The final focal plane array will consist of a 128 x 128-pixel platinum-silicide detector bump-mounted to an on-chip CCD multiplexer. The processor is in a 128-channel parallel-pipeline format. Each channel consists of a pixel regenerator (charge differencer), 128-pixel frame store CCD memory, pixel differencer, second pixel regenerator, thresholder (analog comparator), and digital latch. Four parallel analog outputs and four parallel digital outputs are included. The digital outputs provide a bit map of the image. All analog clock signals (128 KHz, 256 KHz, and 5 MHz) are generated by on-chip TTL-input clock drivers. TTL clock driver inputs are generated off-chip. The technology is low-temperature surface and buried channel CCD/CMOS/indium bump. The design goal was 8-bit resolution at 77 K and 1000 frames/s. Applications include point- or extended-target motion detection with thresholding. Design trade-offs and enhancements (such as on-chip detector gain compensation and a simple window processor) are discussed.

Hanzal, Brian↗

A Deep Optical Survey of the Ecliptic

This was an observing-intensive investigation into the newly discovered regions of the solar system beyond Neptune. The research was focussed on the use of unique imaging facilities on telescopes atop Mauna Kea, Hawaii, although other observatories (in Arizona and Chile) were also occasionally used. We secured about 20 nights of telescope time per year for our 'Medium Depth Wide Area' survey (JLC96). In this, we covered 5 sq. deg. of sky to apparent red magnitude 24.2. We used a high quantum efficiency Tektronix 2048x2048 CCD for all observations in this program. We secured observing time at the UH 2.2 meter for testing the suitability of a much larger array CCD camera for survey work (an 8192x8192 pixel device). We obtained observing runs at the twin Schmidt telescopes of Kitt Peak National Observatory and Cerro-Tololo InterAmerican Observatory in order to assess the number of bright Kuiper Belt objects, Centaurs and gas giant Trojans.

Jewitt, David↗

Design of a Day/Night Star Camera System

This paper describes the design of a camera system capable of acquiring stars during both the day and night cycles of a high altitude balloon flight (35-42 km). The camera system will be filtered to operate in the R band (590-810 nm). Simulations have been run using MODTRAN atmospheric code to determine the worse case sky brightness at 35 km. With a daytime sky brightness of 2(exp -05) W/sq cm/str/um in the R band, the sensitivity of the camera system will allow acquisition of at least 1-2 stars/sq degree at star magnitude limits of 8.25-9.00. The system will have an F2.8, 64.3 mm diameter lens and a 1340X1037 CCD array digitized to 12 bits. The CCD array is comprised of 6.8 X 6.8 micron pixels with a well depth of 45,000 electrons and a quantum efficiency of 0.525 at 700 nm. The camera's field of view will be 6.33 sq degree and provide attitude knowledge to 8 arcsec or better. A test flight of the system is scheduled for fall 1999.

Alexander, Cheryl↗

NTD-GE Based Microcalorimeter Performance

Our group has been developing x-ray microcalorimeters consisting of neutron transmutation doped (NTD) germanium thermistors attached to superconducting tin absorbers. We discuss the performance of single pixel x-ray detectors, and describe an array technology. In this paper we describe the read-out circuit that allows us to measure fast signals in our detectors as this will be important in understanding the primary cause of resolution broadening. We describe briefly a multiplexing scheme that allows a number of different calorimeters to be read out using a single JFET. We list the possible causes of broadening and give a description of the experiment which best demonstrates the cause of the primary broadening source. We mention our strategy for finding a suitable solution to this problem and describe briefly a technology for building arrays of these calorimeters.

Bandler, Simon↗

Materials Development for Auxiliary Components for Large Compact Mo/Au TES Arrays

We describe our current fabrication process for arrays of superconducting transition edge sensor microcalorimeters, which incorporates superconducting Mo/Au bilayers and micromachined silicon structures. We focus on materials and integration methods for array heatsinking with our bilayer and micromachining processes. The thin superconducting molybdenum bottom layer strongly influences the superconducting behavior and overall film characteristics of our molybdenum/gold transition-edge sensors (TES). Concurrent with our successful TES microcalorimeter array development, we have started to investigate the thin film properties of molybdenum monolayers within a given phase space of several important process parameters. The monolayers are sputtered or electron-beam deposited exclusively on LPCVD silicon nitride coated silicon wafers. In our current bilayer process, molybdenum is electron-beam deposited at high wafer temperatures in excess of 500 degrees C. Identifying process parameters that yield high quality bilayers at a significantly lower temperature will increase options for incorporating process-sensitive auxiliary array components (AAC) such as array heat sinking and electrical interconnects into our overall device process. We are currently developing two competing technical approaches for heat sinking large compact TES microcalorimeter arrays. Our efforts to improve array heat sinking and mitigate thermal cross-talk between pixels include copper backside deposition on completed device chips and copper-filled micro-trenches surface-machined into wafers. In addition, we fabricated prototypes of copper through-wafer microvias as a potential way to read out the arrays. We present an overview on the results of our molybdenum monolayer study and its implications concerning our device fabrication. We discuss the design, fabrication process, and recent test results of our AAC development.

Finkbeiner, F. m.↗