Search NASA⌕ Search

SEARCH · Search NASA

Results for “ARGON PLASMA”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 55 records · Page 3

Kinetic simulation of a 50 mTorr capacitively coupled argon discharge over a range of frequencies and comparison to experiments

The effect of driving frequency in the range of 13.56–73 MHz on electron energy distribution and electron heating modes in a 50 mTorr capacitively coupled argon plasma discharge is studied using 1D-3V particle-in-cell simulations. Calculated electron energy probability functions exhibit three distinct “temperatures” for low-, mid-, and high-energy electrons at all the studied driving frequencies. When compared to published experimental data, the calculated probability functions show a reasonable agreement for the energy range resolved in the measurements (about 2–10 eV). Discrepancies due to limitations in experimental energy resolution outside this range lead to differences between computational and experimental values of the electron number density determined from the distribution functions, and the predicted effective electron temperature is within 25% of experimental values. The impedance of the discharge is interpreted in terms of a homogeneous equivalent circuit model, and the driving frequency dependence of the inferred combined sheath thickness is found to obey a known, theoretically derived, power law. The average power transferred from the field to the electrons (electron heating) is computed, and a region of negative heating near the sheath edge, particularly at higher driving frequencies, is identified. Analysis of the electron momentum equation shows that electron inertia, which on temporal averaging would be zero in a linear regime, is responsible for negative values of power deposition near the sheath edge at high driving frequencies due to the highly nonlinear behavior of the discharge.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Interface-sensitive microwave loss in superconducting tantalum films sputtered on c-plane sapphire

Quantum coherence in superconducting circuits has increased steadily over the last decades because of a growing understanding of the various loss mechanisms. Recently, tantalum (Ta) emerged as a promising material to address microscopic sources of loss found on niobium (Nb) or aluminum (Al) surfaces. However, the effects of film and interface microstructure on low-temperature microwave loss are still not well understood. Here, in this study, we present a systematic study of the structural and electrical properties of Ta and Nb films sputtered on c-plane sapphire at varying growth temperatures. As growth temperature was increased, our results show that the onset of epitaxial growth of α -phase Ta correlates with lower Ta surface roughness, higher critical temperature, and higher residual resistivity ratio, but surprisingly also correlates with a significant increase in loss at microwave frequency. Notably, this high level of loss is not observed in Nb films prepared in the same way and having very similar structure. By experimentally controlling the surface on which the Ta film is nucleated, we determine that the source of loss was only present in samples having an epitaxial Ta/sapphire interface and show that it was apparently mitigated by either growing a thin, epitaxial Nb interlayer between the Ta film and the substrate or by intentionally treating, and effectively damaging, the sapphire surface with an in situ argon plasma before Ta growth. In addition to elucidating this interfacial microwave loss, this work provides adequate process details to aid reproducible growth of low-loss Ta films across fabrication facilities.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Kinetic Modeling and Experimental Studies of Capacitively Coupled Macro- and Microplasmas at Microwave Frequencies

The effect of driving frequency in the range of 13.56 MHz to 73 MHz on electron energy distribution and electron heating modes in a 50 mTorr capacitively coupled argon plasma discharge is studied using 1D-3V particle-in-cell simulations. Calculated electron energy probability functions exhibit three distinct temperatures for low-, mid-, and high-energy electrons at all the studied driving frequencies. When compared to published experimental data, the calculated probability functions show a reasonable agreement for the energy range resolved in the measurements (about 2 eV to 10 eV). Discrepancies due to limitations in experimental energy resolution outside this range lead to differences between computational and experimental values of the electron number density determined from the distribution functions, and the predicted effective electron temperature is within 25 % of experimental values. The impedance of the discharge is interpreted in terms of a homogeneous equivalent circuit model and the driving frequency dependence of the inferred combined sheath thickness is found to obey a known, theoretically-derived, power law. The average power transferred from the field to the electrons (electron heating) is computed, and a region of negative heating near the sheath edge, particularly at higher driving frequencies, is identified. Analysis of the electron momentum equation shows that electron inertia, which on temporal averaging would be zero in a linear regime, is responsible for negative values of power deposition near the sheath edge at high driving frequencies due to the highly nonlinear behavior of the discharge.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Comparison of divertor behavior and plasma confinement between argon and neon seeding in EAST

The exhaust of excessively high heat and particle fluxes on the divertor target is crucial for EAST long-pulse operation. In the recent EAST experiments, stable partial energy detachment around the upper outer strike point with H 98,y2 ~ 1 was achieved with either Ne or Ar seeding from the upper outer divetor target in the upper single null configuration with ITER-like tungsten divertor. With either Ar or Ne seeding, the electron temperature around the upper outer strike point (T et,UOSP ) was maintained at around 5 eV, the peak temperature of divertor target surface around the upper outer strike point (T div,UO ) decreased significantly, and material sputtering was well suppressed. Here, it was observed that there was less Ar seeding needed for partial energy detachment onset than Ne seeding, which shows that Ar is more efficient in the cooling of T et on the upper outer divertor than Ne. However, there was no detachment on the upper inner divertor with T et around strike point (T et,UISP ) remaining >10 eV with either Ar or Ne seeding from the upper outer divertor. Accompanied with the disappearance of double peak phenomenon of ion flux density on the upper inner divertor target (j s,UI ), the peak T div,UI around the strike point increased to around 300 °C. Although the heat flux on the upper inner divertor target (q t,UI ) is still in the acceptable level, either Ar or Ne seeding only from the upper outer divertor target is not enough to protect the upper inner divertor target from sputtering under current EAST conditions. On the other hand, Ar seeding always causes confinement degradation in the partial energy detachment state. It was observed that there is a slight confinement improvement (~10%) with Ne seeding, which may be due to density peaking, dilution effects and stabilization of the ion temperature gradient mode.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Plasma diagnostics and modeling of lithium-containing plasmas

Thin-film deposition from chemically reactive multi-component plasmas is complex, and the lack of electron collision cross-sections for even the most common metalorganic precursors and their fragments complicates their modeling based on fundamental plasma physics. This study focuses on understanding the plasma physics and chemistry in argon (Ar) plasmas containing lithium bis (trimethylsilyl) amide used to deposit Li x Si y thin films. These films are emerging as potential solid electrolytes for lithium-ion batteries, and the Li-to-Si ratio is a crucial parameter to enhance their ionic conductivity. We deposited Li x Si y films in an axial flow-through plasma reactor and studied the factors that determine the variation of the Li-to-Si ratio in films deposited at various points on a substrate spanning the entire reactor axis. While the Li-to-Si ratio is 1:2 in the precursor, the Li-to-Si ratio is as high as 3:1 in films deposited near the plasma entrance and decreases to 1:1 for films deposited downstream. Optical emission from the plasma is dominated by Li emission near the entrance, but Li emission disappears downstream, which we attribute to the complete consumption of the precursor. We hypothesized that the axially decreasing precursor concentration affects the electron energy distribution function in a way that causes different dissociation efficiencies for the production of Li and Si. We used Li line intensities to estimate the local precursor concentration and Ar line ratios to estimate the local reduced electric field to test this hypothesis. This analysis suggests that the mean electron energy increases along the reactor axis with decreasing precursor concentration. As a result, the decreasing Li-to-Si ratio with axially decreasing precursor concentration may be explained by Li release from the precursor having lower threshold energy than Si release.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Argon pumpout by ICRF waves in C-Mod L- and I-mode plasmas

Pumpout of argon ions by ICRF waves has been observed in C-Mod deuterium L- and I-mode plasmas that had a substantial hydrogen fraction. The effect is manifested by a reduction of core argon x-ray brightness up to a factor of 90% on time scales of tens of milliseconds following injection of ICRF power. For Ar 16+ , the pumpout is strongest for hydrogen minority concentrations between 0.25 and 0.4, when the ICRF waves are not expected to result in minority heating. Modeling with the TORIC code suggests that the pumpout process occurs when the H/D mode conversion layer overlaps with the 2nd harmonic impurity resonance layer. Here, the magnitude of the argon pumpout is independent of ICRF power above an apparent threshold of ~500 kW, independent of electron density and appears to decrease as the plasma current is increased. Potential application as a heavy impurity control tool in reactors is discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Argon Pumpout by ICRF Waves in C-Mod L- and I-mode Plasmas

Pumpout of argon ions by ICRF waves has been observed in C-Mod deuterium L- and I-mode plasmas that had a substantial hydrogen fraction. The effect is manifested by a reduction of core argon x-ray brightness up to a factor of 90% on time scales of tens of milliseconds following injection of ICRF power. For Ar^16+, the pumpout is strongest for hydrogen minority concentrations between 0.25 and 0.4, when the ICRF waves are not expected to result in minority heating. Modeling with the TORIC code suggests that the pumpout process occurs when the H/D mode conversion layer overlaps with the 2nd harmonic impurity resonance layer. The magnitude of the argon pumpout is independent of ICRF power above an apparent threshold of ~500 kW, independent of electron density and appears to decrease as the plasma current is increased. Potential application as a heavy impurity control tool in reactors is discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Plasma parameters and the reduction potential at a plasma-liquid interface

We report nonthermal plasmas in contact with liquids have been shown to generate a variety of reactive species capable of initiating reduction–oxidation (redox) reactions at the electrochemically active plasma–liquid interface. In conventional electrochemical cells, selective redox chemistry is achieved by controlling the reduction potential at the solid electrode–electrolyte interface by applying a bias via an external circuit. In the case of plasma–liquid systems, an analogous means of tuning the reduction potential near the interface has not clearly been identified. When treated as a floating surface, the liquid is expected to adopt a net negative charge to balance the flux of hot electrons and relatively cold positive ions. The reduction potential near the plasma–liquid interface is hypothesized to be proportional to the floating potential, which can be approximated using an analytical model provided the plasma parameters are known. Herein, we present a framework for correlating the electron density and electron temperature of a noble gas plasma jet to the reduction potential near the plasma–liquid interface. The plasma parameters were acquired for an argon atmospheric plasma jet in contact with an aqueous solution by means of laser Thomson scattering. The reduction potential was determined using identical reference electrodes to measure the potential difference between the plasma–liquid interface and bulk solution. Interestingly, the measured reduction potentials near the plasma–liquid interface were found to be in good agreement with the model-predicted values determined using the plasma parameters obtained from the Thomson scattering experiments.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Reliability of double probe measurements in nanodusty plasmas

Abstract Nonthermal plasmas are attractive sources for nanoparticles synthesis, however, their plasma properties are notoriously difficult to assess due to the chemically reactive environment and high nanoparticle concentrations. Here, we are using a floating double probe to measure the plasma properties of a nanoparticle-forming argon:silane plasma. We demonstrate good stability of current–voltage characteristics over several minutes of operation. However, unexpectedly larger electron temperatures are measured with increasing the silane mole fraction. To test the validity of these results, we developed a zero-dimensional global model to investigate the effect of the presence of nanoparticles on the plasma properties. Using this model, we show that increasing particle concentration leads to an increasing electronegativity of the plasma, causing an increase of the reduced electric field. However, this causes only a moderate increase in mean electron energy, in contrast to the much larger increase measured by the double probe. We argue that these large electron temperatures are based on the fact that a double probe measures an ‘apparent’ electron temperature, which is defined by the negative inverse slope of the logarithm of the electron energy probability function (EEPF) at an energy corresponding to the probe’s floating potential. As the silane mole fraction is increased, the plasma becomes more electronegative and the probe’s floating potential moves closer to the plasma potential. Combined with the strong non-Maxwellian EEPF, this leads to the large apparent electron temperatures obtained by the probe. Thus, the apparent electron temperatures measured with the double probe do not follow the trends in mean electron energy.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Energy amplification in plasma crystals due to multiple torsions

Interacting torsions are examined within a two-dimensional monolayer crystal suspended in an argon complex plasma for 1–10 W discharge powers and pressures of 135–155 mTorr. Two torsions embedded in a lattice are shown to amplify the kinetic energy and range of motion of particles located between the torsions to nearly three times that observed in single torsion systems. It is also shown that multiple torsions can interact via amplified particle energy when separated by up to 14 interparticle distances (Δ). The torsion separation distance also showed a positive linear trend with power and a slightly positive correlation with the pressure. This amplification of energy is possible due to the fact that multiple torsions in a lattice increase the interparticle distance of the lattice by 16% more than single torsion systems, leading to additional freedom of motion in the lattice plane. These combined findings show that multiple torsions heat the lattice differently depending on their separation from the other torsion. The midpoint particles between torsions absorb the majority of energy from the two torsions, and energy addition at the midpoint is nonlinear. The addition of more torsions to the lattice may lead to melting of the plasma crystal.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Particle-in-cell modeling of electron beam generated plasma

Plasmas generated using energetic electron beams are well known for their low electron temperature (T e ) and plasma potential, which makes them attractive for atomic-precision plasma processing applications such as atomic layer etch and deposition. A 2-dimensional particle-in-cell model for an electron beam-generated plasma in argon confined by a constant applied magnetic field is described here in this article. Plasma production primarily occurs in the path of the beam electrons in the center of the chamber. The resulting plasma spreads out in the chamber through non-ambipolar diffusion with a short-circuiting effect allowing unequal electron and ion fluxes to different regions of the bounding conductive chamber walls. The cross-field transport of the electrons (and thus the steady-state characteristics of the plasma) are strongly impacted by the magnetic field. T e is anisotropic in the electron beam region, but low and isotropic away from the plasma production zone. The plasma density increases and the plasma becomes more confined near the region of production when the magnetic field strengthens. The magnetic field reduces both electron physical and energy transport perpendicular to the magnetic field. T e is uniform along the magnetic field lines and slowly decreases perpendicular to it. Electrons are less energetic in the sheath regions where the sheath electric field repels and confines the low-energy electrons from the bulk plasma. Even though electron and ion densities are similar in the bulk plasma due to quasi-neutrality, electron and ion fluxes on the grounded chamber walls are unequal at most locations. Electron confinement by the magnetic field weakens with increasing pressure, and the plasma spread out farther from the electron beam region.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Dynamics of argon metastables in Ar–CH 4 radio frequency capacitively-coupled plasma: real-time monitoring with neural network-augmented broadband optical emission spectroscopy

In moderate-pressure radio frequency (RF) capacitively coupled plasmas generated in argon–methane mixtures, the density of argon metastable atoms (Ar 1 s 5 ) exhibits a non-monotonic dependence on methane (CH 4 ) concentration. Laser-induced fluorescence (LIF) was used to measure and compare local Ar 1 s 5 densities in Ar and Ar–CH 4 plasmas at 2.6 Torr and RF powers of 17–117 W. The addition of 1% CH 4 increases the metastable density, and 2% CH 4 triggers a strong depletion by an order of magnitude, compared to 1% CH 4 case. This non-monotonic behavior demonstrates the sensitivity of metastable populations to small gas admixtures, which is critical for processes where metastables drive precursor dissociation. For real-time monitoring of metastable population, broadband optical emission spectroscopy (OES) is augmented with a feedforward neural network (NN) to predict Ar s1 5 densities from spectral features. When trained on LIF data, the NN replicates the absolute densities and the dynamic trends of Ar 1 s 5 density variation. The NN-augmented broadband OES approach can be used as a simple and cost-effective tool for tracking Ar metastables in Ar-rich plasmas, facilitating industrial-scale optimization.

Yatom, Shurik [Princeton Plasma Physics Laboratory↗

Assessment of Electrode Contamination Mitigation at 0.5 MA Scale

The Z Machine at Sandia National Laboratories uses current pulses with peaks up to 27 MA to drive target implosions and generate high energy density conditions of interest for stockpile stewardship programs pertinent to the NNSA program portfolio . Physical processes in the region near the Z Machine target create electrode plasmas which seed parasitic current loss that reduce the performance and output of a Z experiment. Electrode surface contaminants (hydrogen, water, hydrocarbons) are thought to be the primary constituent of electrode plasmas which contribute to loss mechanisms. The Sandia team explore d in situ heating and plasma discharge techniques by integrating requisite infrastructure into Sandia's Mykonos LTD accelerator, addressing potential impacts to accelerator operation, and reporting on the impact of these techniques on electrode plasma formation and shot performance. The in situ discharge cleaning utilizes the electrodes of the accelerator to excite an argon-oxygen plasma to sputter and chemically react contaminants from electrode surfaces. Insulating breaks are required to isolate the plasma in electrode regions where loss processes are most likely to occur. The shots on Mykonos validate that these breaks do not perturb experiment performance, reducing the uncertainty on the largest unknown about the in situ cleaning system. Preliminary observations with electrical and optical diagnostics suggest that electrode plasma formation is delayed, and overall inventory has been substantively reduced. In situ heating embeds cartridge heaters into accelerator electrodes and employs a thermal bakeout to rapidly desorb contaminants from electrode surfaces. For the first time, additively manufactured (AM) electrode assemblies were used on a low impedance accelerator to integrate cooling channels and manage thermal gradients. Challenges with poor supplier fabrication to specifications, load alignment, thermal expansion and hardware movement and warpage appears to have introduced large variability in observed loss, though, preventing strong assertions of loss reduction via in situ heating. At this time, an in situ discharge cleaning process offers the lowest risk path to reduce electrode contaminant inventories on Z, though we recommend continuing to develop both approaches. Additional engineering and testing are required to improve the implementation of both systems. .

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Measurement and reduction of Ar metastable densities by nitrogen admixing in electron beam-generated plasmas

Abstract Electron beam (e-beam) generated plasmas are useful for material processing applications such as deposition and etching because the plasmas deliver a large fluence of very low energy of ions to surfaces. Metastable species produced in the beam-region can also transport significant energy to the plasma periphery and surfaces. In this work, we have investigated the spatially resolved density of metastable Ar 1s 5 species produced in an Ar and Ar/N 2 e-beam generated plasma at pressures of 60–67 mTorr using laser-induced fluorescence (LIF). The experiments provide the first direct measure of absolute density and reduction of Ar 1s 5 in an e-beam generated plasma when argon is diluted with nitrogen. These results are consistent with previous predictions of numerical modeling and measurements using optical emission spectroscopy. The present spatially resolved LIF measurements directly quantify the reduction of Ar 1s 5 in the e-beam generated plasma by nitrogen admixing. This reduction was observed in the region of the electron beam and in the plasma periphery, where substrates are usually placed. For example, up to a threefold reduction of the density of Ar 1s 5 was measured when the argon background was diluted with 15.5% nitrogen at pressure of 60 mTorr. Ar 1s 5 reduction is attributed to excitation exchange with nitrogen molecules as well as the cooling of plasma electrons via inelastic collisions with nitrogen molecules.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Dielectric Resonator Design for Low Power and Low Temperature Microwave Plasma

Waveguide-based microwave plasmas generally operate at high temperatures (2000 - 6000K)[1], making it difficult to directly interface solid materials with the plasma without significant thermal damage. Dielectric microwave resonators (DMRs), long studied for wave-based manipulation of electromagnetic radiation for telecom and optics, can focus radiation to extremely small mode volumes, creating intense localized fields with low-power input.[2] This phenomenon can be used for applications ranging from efficient plasma electronics to near-ambient plasma-materials interactions. Such DMR-based plasmas have been demonstrated a handful of times in the literature, but the majority of research towards this utilize the lowest frequency resonance mode.[3], [4], [5] By carefully controlling the geometry of cylindrical resonators, a variety of electromagnetic modes can be excited. In this work, COMSOL Multiphysics simulations are used to study the electric field enhancement and absorption properties of CaTiO3 DMRs as a function of geometry and excitation frequency. Whereas previous studies have utilized the HEM111 resonance frequency to drive low power plasma excitation, we find that higher order resonance frequencies are more effective at field enhancement and result in less power loss within the dielectric material, hence less wasted heating. The effectiveness of these modes is also geometry dependent and can be computationally optimized for plasma generation. Complementing these computational efforts, we demonstrate a new closed-system reactor design built in a WR-650 waveguide and experimentally demonstrate the formation of atmospheric argon microwave plasma using < 30 W input power on DMR dimers. We observe a shifting resonance frequency as the DMRs heat in response to microwave excitation and develop a Python-based lock-in mechanism to effectively track the DMR resonance over time, leading to stable plasma operation. We use infrared thermal imaging to monitor the temperature of the DMR dimers and surrounding quartz chamber, demonstrating thermal temperatures < 60 degreesC. Finally, we utilize optical emission spectroscopy (OES) to probe the plasma properties as a function of the resonance mode.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗