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At least 55 records · Page 3

An EUV spectrometer for atmospheric remote sensing

This paper describes the Berkeley EUV Airglow Rocket Spectrometer (BEARS) experiment, designed to investigate the interactions between the solar ionizing radiation and the earth's upper atmosphere. The primary objective of this experiment is the verification the feasibility of using EUV observations as a quantitative diagnostic of the terrestrial atmosphere and its plasma environment. The expected information provided by spectroscopic measurements of EUV emission will include data on the excitation mechanisms, excitation rates, and branching ratios. The BEARS experimental package consists of a high-resolution EUV airglow spectrometer, a hydrogen Lyman-alpha photometer to measure both the solar radiations and the geocoronal emissions, and a moderate-resolution solar EUV spectrometer. In a test experiment, the instruments were carried aboard a four-stage sounding rocket to a peak altitude of about 960 km and obtained airglow spectra in the 980-1060 A range and in the 1300-1360 range.

Chakrabarti, S.↗

A study of EUV emission from the O4f star Zeta Puppis

Our 20 ks observation did not allow us to carry out our primary objective, i.e., to test the limitations of deeply embedded EUV and X-ray sources. However, it did provide a very useful constraint in our analysis of a newly acquired high S/N ROSAT PSPC X-ray spectrum of Zeta Pup. In addition, modifications to our stellar wind opacity code have been preformed to investigate the sensitivity of the EUV opacity energy range to different photospheric model flux inputs and different wind structures. These analyses provided the justification for a 140 ks follow up EUVE Cycle III observation of this star. We have recently been informed that our requested observation has been accepted as a Type 1 target for Cycle III. The remainder of this report focuses on the following: (1) a brief background on the status of X-ray emission from OB stars; (2) a discussion on the importance of EUV observations; (3) a discussion of our scientific objectives; and (4) a summary of our technical approach for our Cycle III observation (including the predicted EUV counts for various lines.)

Waldron, Wayne L.↗

The nightside ionosphere of Venus under varying levels of solar EUV flux

Solar activity varied widely over the 14 year lifetime of the Pioneer Venus Orbiter (PVO), and these variations directly affected the properties of the nightside ionosphere. At solar maximum, when solar EUV was largest, the Venus ionosphere was found to extend to highest altitudes and nightward ion transport was the main source of the nightside ionosphere. At solar minimum, nightward ion transport was reduced, and electron precipitation was thought to be the main source. In this study, we have attempted a separation of spatial variations from temporal variations by examining the altitude profiles of the magnetic field, and electron density and temperature for three different solar EUV flux ranges. In the upper ionosphere and near-planet magnetotail (h greater than 1800 km), the solar EUV flux effects are significant. The electron density decreases about an order of magnitude from high to low EUV flux, while the electron temperature at least doubles. The magnetic field also increases 2 - 3 nT. In the lower ionosphere (200 - 600 km), lower EUV fluxes are associated with slightly reduced density, and higher temperature. These results are in accord with recent entry phase observations, where the electron density measured above the ionospheric density peak is lower than that observed at solar maximum during the early Pioneer Venus mission.

Ho, C. M.↗

Contemporaneous IUE, EUVE, and High-Energy Observations of 3C 273

We present the results of our 1994 January and 1995 January observations of the quasar 3C 273 obtained with the International Ultraviolet Explorer (IUE) and the Extreme-Ultraviolet Explorer (EUVE). These observations were part of a large multiwavelength campaign to observe 3C 273 from radio through gamma-rays. Our 1995 January photometric observations with the EUVE Lexan/B Deep Survey (DS) instrument indicate strong evidence for variability, at a 99% confidence level, during the 12 day observing period. We have utilized ROSAT PSPC soft X-ray power-law models to correlate with EUVE count rates. Besides variations in the normalization level between both observations, our EUV count rates are consistent with a simple power-law model with spectral index alpha approx. 1.77 (F(sub upsilon) proportional to upsilon(sup -alpha) that can be extrapolated from the soft X-rays to the EUV range. The active galactic nucleus 3C 273 is an important blazar to study because in our picture it reveals the presence of both disk and relativistic beam spectral contributions.

Ramos, E.↗

The Nightside Ionosphere of Venus Under Varying Levels of Solar EUV Flux

Solar activity varied widely over the 14 year lifetime of the Pioneer Venus Orbiter, and these variations directly affected the properties of the nightside ionosphere. At solar maximum, when solar EUV was largest, the Venus ionosphere was found to extend to highest altitudes and nightward ion transport was the main source of the nightside ionosphere. At solar minimum, nightward ion transport was reduced, and electron precipitation was thought to be the main source. In this study, we have attempted a separation of spatial variations from temporal variations by examining the altitude profiles of the magnetic field, and electron density and temperature for three different solar EUV flux ranges. In the upper ionosphere and near-planet magnetotail (h greater than 1800 km), the solar EUV effects are significant. The electron density decreases about an order of magnitude from high to low EUV flux, while the electron temperature at least doubles. The magnetic field also increases 2 - 3 nT. In the lower ionosphere (200 - 600 km), lower EUV fluxes are associated with slightly reduced density, and higher temperature. These results are in accord with recent entry phase observations, where the electron density measured above the ionospheric density peak is lower than that observed at solar maximum during the early Pioneer Venus mission.

Ho, C. M.↗

Four Years of EUVE Observations of the Bursting Gamma-Ray Emitting Blazar Markarian 421

We present spectral and timing analysis of all the data collected by the Extreme Ultraviolet Explorer Satellite (EUVE) for the bright, nearby BL Lacertae object, Markarian 421, during the four-year period 1994-1997. During these years Mrk 421 has been observed by EUVE 4 times with the Deep-Survey/Spectrograph and 2 times with the imaging telescopes for a total of approximately 1.4 7nillions seconds. From 1993 to 1996 three very bright gamma ray flares were also detected by the Whipple observatory. In 1994 Mrk 421 was observed simultaneously by EUVE (Apr 2-12) and IUE one month before the TeV flare; of the 2 EUVF, observations (Feb 4-7 and Apr 25-May 13) of 1995, the second was part of a multiwavelength campaign that mapped the evolution of the TeV flare. In 1996 we observed Mrk 421 twice simultaneously with XTE: one immediately before (Apr 17-30) and another one (May 10-11) right after the May 7 1996 TeV flare. And finally in 1997 from Feb. 7 to Feb. ll. The total light curve seems to be smoothly varying on the long time-scale while on a shorter time-scale there is evidence of an EUVE flare well correlated to the TeV energy 1995 flare. We have analysed the three spectral data set in an homogenous way using the appropriate calibration data for the off-axis observations and our analysis confirms the presence of the absorption features around approximately 70A, in the entire 1995 dataset and possibly in the 1996 data set. We also show the first power spectrum analysis of the Mrk 421 EUVE lightcurves and a comparison with the power spectra predicted by current theoretical models.

Cagnoni, Ilaria↗

The EUV Helium Spectrum in the Quiet Sun: A By-Product of Coronal Emission?

In this paper we test one of the mechanisms proposed to explain the intensities and other observed properties of the solar helium spectrum, and in particular of its Extreme-Ultraviolet (EUV) resonance lines. The so-called Photoionisation-Recombination (P-R) mechanism involves photoionisation of helium atoms and ions by EUV coronal radiation, followed by recombination cascades. We present calibrated measurements of EUV flux obtained with the two CDS spectrometers on board SOHO, in quiescent solar regions. We were able to obtain an essentially complete estimate of the total photoionizing flux in the wavelength range below 504 A (the photoionisation threshold for He(I)), as well as simultaneous measurements with the same instruments of the intensities of the strongest EUV helium lines: He(II) lambda304, He(I) lambda584, and He(I) lambda537. We find that there are not enough EUV photons to account for the observed helium line intensities. More specifically, we conclude that He(II) intensities cannot be explained by the P-R mechanism. Our results, however, leave open the possibility that the He(I) spectrum could be formed by the P-R mechanism, with the He(II) lambda304 line as a significant photoionizating source.

Andretta, Vincenzo↗

EUV Imaging of SWCX-Produced He(+) 30.4-nm Emission/Scattering at the Magnetosheath

Theoretically, charge exchange between solar wind alpha-particles and geocoronal hydrogen at the magnetosheath results in the production of helium ions in an excited state, i.e, He(2+) + H (right arrow) He(+*) + H(+) resulting in the emission of 30.4-nm radiation upon relaxation of the helium ions. It has been estimated that the magnetosphere was compressed to inside the orbit of IMAGE during the Halloween storm of 2003. This configuration should have placed the subsolar point of the magnetosheath well beyond the limb of the solar disk and allow EUV the potential of imaging this solar wind charge exchange interaction Analysis of EUV full-frame data acquired during 31 October 2003 (Day 304) indicates the detection of 30.4-nm photons in the likely vicinity of the magnetosheath either as a direct consequence of the emission proposed above or, provided the magnetosheath He(+) density was sufficient to exceed the EUV sensitivity threshold, via resonant scattering of solar UV. We present initial analysis of EUV imaging during the Halloween 2003 storm from the context of solar wind parameters, including composition, and from the perspective of the generation of simulated EUV imaging of the event both as an emitting and as a scattering process.

Adrian, M. L.↗

Re-Entry Survivability Risk Assessment of the Extreme Ultraviolet Explorer (EUVE)

A reentry analysis of the Extreme Ultraviolet Explorer (EUVE) spacecraft was performed using the Object Reentry Survival Analysis Tool (ORSAT) - Version 5.0. The analysis was done in response to a request by NASA Headquarters and Goddard Space Flight Center (GSFC) after a preliminary assessment using the NASA Johnson Space Center Debris Assessment Software (DAS) - Version 1.0 had shown that the EUVE reentry may produce a debris area greater than the limit set within the NASA Safety Standard 1740.14 guidelines. DAS predicted that an uncontrolled reentry of the EUVE spacecraft would result in a total casualty area of 12.41 sq m, which exceeds the 8 sq m limit set in the NASA standards and implies a potential human casualty risk of approximately 1 in 5300. The ORSAT model enabled a higher fidelity thermal analysis of the EUVE spacecraft, utilizing sophisticated material and thermal properties such as emissivity, heat of oxidation, thermal conductivity, and material thickness inputs, which provided a foundation for a more in depth analysis of the reentering objects. Due to the conservative nature of the DAS study, it was reasonable to run ORSAT for only the ten objects shown to survive in the original DAS analysis. The result of the ORSAT study was a reduced casualty area of only 5.95 sq m, well within NASA safety limits. With the risk to human life now acceptably low, NASA can avoid having to take mitigation measures and allow EUVE to reenter the Earth's atmosphere uncontrolled.

O'Hara, Robin E.↗

On the Absence of EUV Emission from Comet C/2012 S1 (ISON)

When the sungrazing comet C2012 S1 (ISON) made its perihelion passage within two solar radii of the Sun's surface, it was expected to be a bright emitter at extreme ultraviolet (EUV) wavelengths. However, despite solar EUV telescopes repointing to track the orbit of the comet, no emission was detected. This null result is interesting in its own right, offering the possibility of placing limits on the size and composition of the nucleus. We explain the lack of detection by considering the properties of the comet and the solar atmosphere that determine the intensity of EUV emission from sungrazing comets. By comparing these properties with those of sungrazing comet C2011 W3 (Lovejoy), which did emit in the EUV, we conclude that the primary factor resulting in non-detectable EUV emission from C2012 S1 (ISON) was an insufficiently large nucleus. We conclude that the radius of C2012 S1 (ISON) was at least a factor of four less than that of C2011 W3 (Lovejoy). This is consistent with white-light observations in the days before perihelion that suggested the comet was dramatically reducing in size on approach.

Bryans, Paul↗

From the Solar Limb and Out: Results from the Wide-Field EUV Image Campaigns with GOES/SUVI

Traditional approaches to tracking solar outflows for space weather forecasting rely primarily on coronagraph images, which generally observe the solar corona above a minimum height of about 2.5 solar radii. EUV images have been widely used to characterize features on the solar disk, but the limited fields of view of most current EUV imagers have prevented their use for tracking outflows through the inner and middle coronae. A series of off-point campaigns with the GOES 16-18 Solar Ultraviolet Imager (SUVI) between 2018 and 2022 from three Flight Models have provided an opportunity to assess the value of extended EUV images for space weather forecasting applications. These new results demonstrate that wide field-of-view EUV images are useful for characterizing the early onset of eruptive events and tracking smaller outflow into the solar wind. They also reveal the origins of shocks that are known to accelerate particles and drive solar energetic particle (SEP) events. Because CMEs generally experience the bulk of their acceleration below the height of white light coronagraphic observations, these images provide information about the origins of these events that has not been available traditionally. Together with coronagraphic measurements, EUV images provide the continuous views needed to connect CMEs back to their source regions. Here, we present these new SUVI observations and discuss their potential use in space weather operations.

SUVI↗

Inspection of next-generation EUV resists with nano-projectile secondary ion mass spectrometry

There is a rapidly growing need for new materials for extreme ultraviolet (EUV) lithography, which incorporate high EUV absorbing elements. Hybrid resists, which are a combination of inorganic and organic moieties, are promising as they offer both high EUV sensitivity and high etch resistance. However, there is a glaring lack of methods to examine the uniformity of these important materials at the nanoscale. We examine the capabilities of nano-projectile secondary ion mass spectrometry (NP-SIMS) to investigate hybrid resists. NP-SIMS is a mass spectrometry-based technique with high lateral resolution. Using NP-SIMS, a surface is probed stochastically with a suite of individual projectiles, 10 6 to 10 7 in total, separated in time and space. Examining these individual mass spectra allows for nanoscale investigation of the uniformity of the surface. We evaluated the performance of NP-SIMS using samples of poly(methyl methacrylate) (PMMA) infiltrated with varying amounts of InO x via vapor-phase infiltration (VPI), an organic–inorganic hybridization method derived from atomic layer deposition. Here, we found that NP-SIMS measurements contained abundant characteristic ions related to both the PMMA and infiltrated In. The intensity of In atomic ions increased linearly with the number of infiltration cycles; however, the uniformity of In and PMMA varied with the number of infiltration cycles. After one cycle, we found that both the PMMA and In were relatively inhomogeneous. The homogeneity improved with subsequent infiltration cycles. In addition, NP-SIMS measurements contained characteristic ions related to the infiltration reaction and provided insights into the VPI mechanism. Overall, the results show that NP-SIMS is capable of examining both the inorganic and organic moieties in a hybrid resist and will be an important method for understanding the performance of these materials for use in EUV lithography.

36 MATERIALS SCIENCE↗

Review of the 1st EUV Light Sources Code Comparison Workshop

We review the results of the 1 st Extreme Ultraviolet (EUV) Light Sources Code Comparison Workshop. The goal of this workshop was to provide a platform for specialists in EUV light source plasma modeling to benchmark and validate their numerical codes using well-defined case studies. Detailed consideration of a plethora of atomic collisional and radiative processes is required for modeling EUV light source plasmas. Eight institutions spanning four countries contributed data to the workshop. Two topics were addressed, namely (i) the atomic kinetics and radiative properties of tin plasmas under EUV-generating conditions and (ii) laser absorption in a fully ionized, one-dimensional hydrogen plasma. In this paper, we summarize the key findings of the workshop and outline plans for future iterations of the code comparison activity.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

EUV debris mitigation using magnetic nulls

Next generation EUV sources for photolithography use light produced by laser-produced plasmas (LPP) from ablated tin droplets. A major challenge for extending the lifetime of these devices is mitigating damage caused by deposition of tin debris on the sensitive collection mirror. Especially difficult to stop are high energy (up to 10 keV) highly charged tin ions created in the plasma. Existing solutions include the use of stopping gas, electric fields, and magnetic fields. One common configuration consists of a magnetic field perpendicular to the EUV emission direction, but such a system can result in ion populations that are trapped rather than removed. Here we investigate a previously unconsidered mitigation geometry consisting of a magnetic null by performing full-orbit integration of the ion trajectories in an EUV system with realistic dimensions and optimize the coil locations for the null configuration. The magnetic null prevents a fraction of ions from hitting the mirror comparable to that of the perpendicular field, but does not trap any ions due to the chaotic nature of ion trajectories that pass close to the null. This technology can potentially improve LPP-based EUV photolithography system efficiency and lifetime and may allow for a different, more efficient formulation of buffer gas.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Line identification of boron and nitrogen emissions in EUV and VUV wavelength ranges in the impurity powder dropping experiments of LHD and its application to spectroscopic diagnostics

An impurity powder dropper was installed in the 21st campaign of the Large Helical Device experiment (Oct. 2019–Feb. 2020) under a collaboration between the National Institute for Fusion Science and the Princeton Plasma Physics Laboratory for the purposes of real-time wall conditioning and edge plasma control. In order to assess the effective injection of the impurity powders, spectroscopic diagnostics were applied to observe line emission from the injected impurity. Therefore, extreme-ultraviolet (EUV) and vacuum-ultraviolet (VUV) emission spectra were analyzed to summarize observable impurity lines with B and BN powder injection. Emission lines released from B and N ions were identified in the EUV wavelength range of 5–300 Å measured using two grazing incidence flat-field EUV spectrometers and in the VUV wavelength range of 300–2400 Å measured using three normal incidence 20 cm VUV spectrometers. BI–BV and NIII–NVII emission lines were identified in the discharges with the B and BN powder injection, respectively. Useful B and N emission lines which have large intensities and are isolated from other lines were successfully identified as follows: BI (1825.89, 1826.40) Å (blended), BII 1362.46 Å, BIII (677.00, 677.14, 677.16) Å (blended), BIV 60.31 Å, BV 48.59 Å, NIII (989.79, 991.51, 991.58) Å (blended), NIV 765.15 Å, NV (209.27, 209.31) Å (blended), NVI 1896.80 Å, and NVII 24.78 Å. Applications of the line identifications to the advanced spectroscopic diagnostics were demonstrated, such as the vertical profile measurements for the BV and NVII lines using a space-resolved EUV spectrometer and the ion temperature measurement for the BII line using a normal incidence 3 m VUV spectrometer.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Hybrid chemical characterization of latent images in EUV resist with 12 nm half-pitch features

With the advancement of high numerical aperture extreme ultraviolet (EUV) lithography, the new platform will enable chipmakers to achieve critical dimensions of 8 nm. However, resist materials face significant challenges in delivering increased sensitivity while managing rising stochastic variations. We aim to develop comprehensive techniques to characterize the chemical profile of latent images, stored in EUV resists after exposure and postexposure baking, which is essential for understanding the origin of stochastic effects. Infrared photo-induced force microscopy (IR PiFM) is a bimodal atomic force microscopy technique combined with an infrared light source, allowing for simultaneous sub-5 nm topographic and chemical characterization within a localized environment. Critical-dimension resonant soft X-ray scatterometry (CD-RSoXS) provides statistical data that reveal structural and chemical information for comparative analysis. For the first time, IR PiFM has been used to chemically map the latent images of EUV resists (after exposure and postexposure baking) at a record high resolution of 12 nm half-pitch, enabling nondestructive analysis of patterns prior to development. Furthermore, CD-RSoXS offers direct experimental observation and comparison of exposed, postexposure baked, and developed patterns, which align with the IR PiFM results. We demonstrate that the IR PiFM technique offers valuable insights into both high spatial resolution and local chemical information simultaneously. In addition, CD-RSoXS provides statistical results that support our main findings. This hybrid metrology approach leverages a multifaceted dataset by combining the most reliable information from each source, which is essential for a comprehensive understanding of the stochastic effects in EUV lithography processes.

O’Reilly, Padraic↗

H-alpha macrospicules - Identification with EUV macrospicules and with flares in X-ray bright points

The paper presents observational evidence that two newly observed transient solar phenomena, EUV macrospicules and X-ray bright-point flares, are closely related. Time-lapse H-alpha filtergram observations of the limb in quiet regions show small surgelike eruptions called H-alpha macrospicules. From the similarity of H-alpha macrospicules and EUV macrospicules, and from comparison of simultaneous H-alpha and He II 304 A observations, we conclude that H-alpha macrospicules are EUV macrospicules viewed in H-alpha, although most EUV macrospicules are too faint in H-alpha to appear on H-alpha filtergrams of normal exposure. From comparison of simultaneous X-ray and H-alpha observations of flares in X-ray bright points situated on the limb, we show that flares in X-ray bright points often produce H-alpha macrospicules.

Moore, R. L.↗

The EUV continuum emission /1400-1960 A/ in a solar flare observed from Skylab

The total radiative output in the EUV continuum (1400-1960 A) from the 5 September 1973 flare has been obtained from the EUV spectra of the flare observed with the NRL slit spectrograph (SO82B) on Skylab. The radiative energy in the EUV continuum is of the order of 10 to the 29th ergs, which is more than a factor of 2 greater than those radiated in soft X-rays (8-20 A) and in H-alpha for the flare. Thus, the EUV continuum emission is an important radiative energy loss, and should be included in the consideration of the energy balance of the flare.

Cheng, C.-C.↗