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Ion Milling of Sapphire

The ion figuring system at the Marshall Space Flight Center has been successfully used for at least three previous investigations into the ion milling of metals. The research was directed toward improving the surface quality of X-ray directing optics. These studies were performed on surfaces that were already hand polished to an excellent surface quality and were intended to remove the residual unwanted figure left by those techniques. The ion milling was typically carried out on test surfaces or mandrels that were several centimeters in width and length. The good thermal conductivity of the metal samples allowed the ion beam to be directed onto the sample for an indefinite period of time. This is not true of sapphire or most electrical insulators and problems have arisen in recent attempts to ion mill thin samples of sapphire. The failure and fracture of the material was likely due to thermal stresses and the relatively low thermal conductivity of sapphire (compared to most metals), These assumed stresses actually provided the key as to how they might be monitored. A thermal gradient in the sapphire sample will induce an effective index of refraction change and because of the shape constraint and the crystal structure and simple thermal expansion, this index change will be nonuniform across the sample. In all but simple cubic crystal structures, this leads to a spatially nonuniform optical retardance induced on any polarized optical beam traversing the sample, and it is this retardance that can be monitored using standard polarimetric procedures.

Don A. Gregory↗

Epitaxial Ferroelectric Ba(0.5)Sr(0.5)TiO3 Thin Films for Room-Temperature High-Frequency Tunable Element Applications

Perovskite Ba(0.5)SR(0.5)TiO3 thin films have been synthesized on (001) LaAl03 substrates by pulsed laser ablation. Extensive X-ray diffraction, rocking curve, and pole-figure studies suggest that the films are c-axis oriented and exhibit good in-plane relationship of <100>(sub BSTO)//<100>(sub LAO). Rutherford Backscattering Spectrometry studies indicate that the epitaxial films have excellent crystalline quality with an ion beam minimum yield chi(sub min) Of only 2.6 %. The dielectric property measurements by the interdigital technique at 1 MHz show room temperature values of the relative dielectric constant, epsilon(sub r), and loss tangent, tan(sub delta), of 1430 and 0.007 with no bias, and 960 and 0.001 with 35 V bias, respectively. The obtained data suggest that the as-grown Ba(0.5)SR(0.5)TiO3 films can be used for development of room-temperature high-frequency tunable elements.

Chen, C. L.↗

Texturing Blood-Glucose-Monitoring Optics Using Oxygen Beams

A method has been invented for utilizing directed, hyperthermal oxygen atoms and ions for texturing tips of polymeric optical fibers or other polymeric optical components for use in optical measurement of concentration of glucose in blood. The required texture of the sensory surface of such a component amounts to a landscape of microscopic hills having high aspect ratios (hills taller than they are wide), with an average distance between hills of no more than about 5 m. This limit on the average distance between hills is chosen so that blood cells (which are wider) cannot enter the valleys between the hills, where they could obstruct optical sensing of glucose in the blood plasma. On the other hand, the plasma is required to enter the valleys, and a high aspect ratio is intended to maximize the hillside and valley surface area in contact with the plasma, thereby making it possible to obtain a given level of optical glucose- measurement sensitivity with a relatively small volume of blood. The present method of texturing by use of directed, hyperthermal (particle energy >1 eV) oxygen atoms and ions stands in contrast to a prior method of texturing by use of thermal monatomic oxygen characterized by a temperature of the order of 0.5 eV. The prior method yields low-aspect- ratio (approximately hemispherical) craters that are tens of microns wide . too wide to exclude blood cells. The figure schematically depicts parts of a typical apparatus for texturing according to the present method. One or more polymeric optical components to be textured (e.g., multiple optical fibers bundled together for simultaneous processing) are mounted in a vacuum chamber facing a suitable ion- or atom-accelerating device capable of generating a beam of oxygen atoms and/or ions having kinetic energies >1 eV. Typically, such a device includes a heated cathode, in which case it is desirable to interpose a water-cooled thermal-radiation shield to prevent melting of the polymeric component(s) to be textured. In operation, the chamber is evacuated to a pressure .10.5 torr (less than or equal to approximately 1.3 mPa), then the beam is turned on. The resulting texture is characterized by approximately conical hills having aspect ratios greater than 1. In experiments, it was demonstrated that separations between adjacent hills can be made .1 m and that the separations and heights of the hills can be varied by varying the fluence of monatomic oxygen and/or oxygen ions.

Banks, Bruce↗

Heavy-ion physics at the LHC

Heavy-ion collisions have been part of the programme of the LHC since its conception. The main nucleus–nucleus system is 208 82 + Pb + 208 82 + Pb . During the Runs 1 and 2, the LHC provided Pb+Pb collisions with centre-of-mass energy per nucleon pair √ s NN = 2.76 and 5.02 TeV, Xe+Xe with √ s NN = 5.44 TeV, and p+Pb with √ s NN = 5.02 and 8.16 TeV. The LHC performance with heavy-ion beams is described in Ref. 1. The ALICE detector was conceived to be dedicated to the study of heavy-ion collisions. The ATLAS and CMS experiments participated in the programme since the very beginning, and the LHCb experiment participated since the end of Run 1. Figure 1 shows event displays of Pb+Pb collisions from the four experiments.

Audurier, Benjamin↗

Domed, 40-cm-Diameter Ion Optics for an Ion Thruster

Improved accelerator and screen grids for an ion accelerator have been designed and tested in a continuing effort to increase the sustainable power and thrust at the high end of the accelerator throttling range. The accelerator and screen grids are undergoing development for intended use as NASA s Evolutionary Xenon Thruster (NEXT) a spacecraft thruster that would have an input-power throttling range of 1.2 to 6.9 kW. The improved accelerator and screen grids could also be incorporated into ion accelerators used in such industrial processes as ion implantation and ion milling. NEXT is a successor to the NASA Solar Electric Propulsion Technology Application Readiness (NSTAR) thruster - a state-of-the-art ion thruster characterized by, among other things, a beam-extraction diameter of 28 cm, a span-to-gap ratio (defined as this diameter divided by the distance between the grids) of about 430, and a rated peak input power of 2.3 kW. To enable the NEXT thruster to operate at the required higher peak power, the beam-extraction diameter was increased to 40 cm almost doubling the beam-extraction area over that of NSTAR (see figure). The span-to-gap ratio was increased to 600 to enable throttling to the low end of the required input-power range. The geometry of the apertures in the grids was selected on the basis of experience in the use of grids of similar geometry in the NSTAR thruster. Characteristics of the aperture geometry include a high open-area fraction in the screen grid to reduce discharge losses and a low open-area fraction in the accelerator grid to reduce losses of electrically neutral gas atoms or molecules. The NEXT accelerator grid was made thicker than that of the NSTAR to make more material available for erosion, thereby increasing the service life and, hence, the total impulse. The NEXT grids are made of molybdenum, which was chosen because its combination of high strength and low thermal expansion helps to minimize thermally and inertially induced deflections of the grids. A secondary reason for choosing molybdenum is the availability of a large database for this material. To keep development costs low, the NEXT grids have been fabricated by the same techniques used to fabricate the NSTAR grids. In tests, the NEXT ion optics have been found to outperform the NSTAR ion optics, as expected.

Soulas, George C.↗

Laboratory Astrophysics using a Microcalorimeter and Bragg Crystal Spectrometer on an Electron Beam Ion Trap

During the past year we have been preparing our new microcalorimeter system for permanent delivery to the NIST EBIT. Unfortunately, there have been delays due to technical difficulties in the fabrication of the two-stage adiabatic demagnetization refrigerator and in the life expectancy of the thin windows used for internal thermal baffling of the infrared radiation. These problems have been solved and we are completing tests of the entire system and it will be set up at NIST during the first week of May. Several photos of the new system are shown in Figures 1A and 1B. This microcalorimeter spectrometer only requires helium refills every three days (as opposed to every 24 hours) and it will hold a temperature! of 65 mK for up to 48 hours (as opposed to 8 hours). Consequently, the efficiency of data acquisition will improve dramatically. In parallel we have published a paper that reviews our previous work (Takacs et al. 2003), especially on Fe XVII, in the context of recent measurements by other groups. This paper is included. We highlight a recent measurement of a broad band spectrum of Fe in Figure 2 that simultaneously includes L and K radiation. It is compared with the simulated spectrum of the Perseus Cluster that one could expect to obtain with a microcalorimeter in the focus of a grazing incidence telescope such as the one being designed for Constellation X. Both the charge state distributions and the relative intensity ratios of the emission lines within the particular charge state are very similar in the two spectra. This further demonstrates the importance and relevance of the laboratory measurements in predicting the components of cosmic spectra.

Brinton, John C.↗

Ion Milling On Steps for Fabrication of Nanowires

Arrays of nanowires having controlled dimensions can now be fabricated on substrates, optionally as integral parts of multilayer structures, by means of a cost-effective, high-yield process based on ion milling on steps. Nanowires made, variously, of semiconductors or metals are needed as components of sensors and high-density electronic circuits. Unlike prior processes used to fabricate nanowires, the present process does not involve electron-beam lithography, manipulation of nanoscopic objects by use of an atomic-force microscope, or any other technique that is inherently unsuitable for scaling up to mass production. In comparison with the prior processes, this process is rapid and simple. Wires having widths as small as a few tens of nanometers and lengths as long as millimeters have been fabricated by use of this process. The figure depicts a workpiece at different stages of the process. A silicon dioxide substrate is coated with a photoresist or poly(methyl methacrylate) [PMMA] to a thickness of as much as 500 nm. The photoresist or PMMA is patterned to form edges where wires are to be formed. A metal - either Pt or Ti - is deposited, by sputtering, to a thickness of as much as 200 nm. By ion milling at normal incidence, the thickness of the metal deposit is reduced until the only metal that remains is in the form of wall-like nanowires along the edges of the photoresist or PMMA. Finally, an oxygen plasma is used to remove the photoresist or PMMA, leaving only the nanowires on the substrate.

Yun, Minhee↗

Crossed, Small-Deflection Energy Analyzer for Wind/Temperature Spectrometer

Determination of neutral winds and ion drifts in low-Earth-orbit missions requires measurements of the angular and energy distributions of the flux of neutrals and ions entering the satellite from the ram direction. The magnitude and direction of the neutral-wind (or ion-drift) determine the location of the maximum in the angular distribution of the flux. Knowledge of the angle of maximum flux with respect to satellite coordinates (pointing) is essential to determine the wind (or ion-drift) vector. The crossed Small-Deflection Energy Analyzer (SDEA) spectrometer (see Figure 1) occupies minimal volume and consumes minimal power. Designed for upper atmosphere/ionosphere investigations at Earth altitudes above 100 km, the spectrometer operates by detecting the angular and energy distributions of neutral atoms/molecules and ions in two mutually perpendicular planes. In this configuration, the two detection planes actually cross at the spectrometer center. It is possible to merge two SDEAs so they share a common optical axis and alternate measurements between two perpendicular planes, and reduce the number of ion sources from two to one. This minimizes the volume and footprint significantly and reduces the ion source power by a factor of two. The area of the entrance aperture affects the number of ions detected/second and also determines the energy resolution. Thermionic emitters require heater power of about 100 mW to produce 1 mA of electron beam current. Typically, electron energy is about 100 eV and requires a 100-V supply for electron acceleration to supply an additional 100 mW of power. Thus, ion source power is at most 200 mW. If two ion sources were to be used, the ion source power would be, at most, 400 mW. Detector power, deflection voltage power, and microcontroller and other functions require less than 150 mW. A WTS (wind/ temperature spectrometer) with two separate optical axes would consume about 650 mW, while the crossed SDEA described here consumes about 350 mW. The entrance aperture has a diameter of 0.004 in. (0.10 mm) to provide the required energy resolution between 0.05 and 0.15. This design (see Figure 2) provides a WTS occupying a volume less than 40 cm(sup 3), on a footprint of diameter about 1.5 in. (38 mm). The Crossed SDEA offers many advantages in the measurements of neutral wind and ion drifts in the Earth's thermosphere. As such, it will be useful in future commercial satellites dedicated to monitoring the ionosphere with a view to improving the integrity and predictability of GPS operations.

Herrero, Federico A.↗

An absolute recoil-carbon polarimeter for polarized light-ions at the BNL Booster

We describe a recoil-carbon polarimeter for the BNL Booster synchrotron capable of measuring the transverse polarization of both the polarized proton beam and the polarized 3 He ion beam throughout the acceleration cycle. The instrument addresses a critical gap in the BNL polarized beam program: no independent polarization measurement currently exists in the injector chain between the 200 MeV Linac polarimeter and the AGS. The proposed new polarimeter will provide continuous, absolute polarization measurements at the Booster stage, supplying additional anchor points for the polarization transmission through the accelerator chain. The polarimeter 9 is based on elastic pC and 3 He C scattering from a thin internal carbon target, with detection of the recoil 12 C nucleus in a fixed six-station silicon detector ring. A single detector geometry provides continuous kinematic coverage from injection to extraction for both beam species without mechanical adjustment. For pC scattering, the available data and the Bonin parametrization provide a well-established basis for estimating the analyzing power and figure of merit over the Booster energy range; for 3 He C the sole experimental anchor is a measurement at 443 MeV, and the Booster polarimeter itself is identified as the instrument to map the analyzing power across the remainder of the acceleration ramp by a ramp-and-return calibration that anchors the absolute 3 He polarization scale to a few percent. Provision for future deuteron polarimetry is incorporated in the chamber design without modification to the existing geometry. With appropriate detector upgrades, the same recoil-carbon technique can be extended to deuteron beams, for which analyzing power data are already available, and, with future analyzing-power measurements, also to 6 Li and 7 Li beams, making the polarimeter a versatile instrument for the full range of light polarized ion species anticipated at BNL.

43 PARTICLE ACCELERATORS↗

Heavy ion induced Single Event Phenomena (SEP) data for semiconductor devices from engineering testing

The accumulation of JPL data on Single Event Phenomena (SEP), from 1979 to August 1986, is presented in full report format. It is expected that every two years a supplement report will be issued for the follow-on period. This data for 135 devices expands on the abbreviated test data presented as part of Refs. (1) and (3) by including figures of Single Event Upset (SEU) cross sections as a function of beam Linear Energy Transfer (LET) when available. It also includes some of the data complied in the JPL computer in RADATA and the SPACERAD data bank. This volume encompasses bipolar and MOS (CMOS and MHNOS) device data as two broad categories for both upsets (bit-flips) and latchup. It also includes comments on less well known phenomena, such as transient upsets and permanent damage modes.

Nichols, Donald K.↗

Improved Oxygen-Beam Texturing of Glucose-Monitoring Optics

An improved method has been devised for using directed, hyperthermal beams of oxygen atoms and ions to impart desired textures to the tips of polymethylmethacrylate [PMMA] optical fibers to be used in monitoring the glucose content of blood. The improved method incorporates, but goes beyond, the method described in Texturing Blood-Glucose- Monitoring Optics Using Oxygen Beams (LEW-17642-1), NASA Tech Briefs, Vol. 29, No. 4 (April 2005), page 11a. The basic principle of operation of such a glucose-monitoring sensor is as follows: The textured surface of the optical fiber is coated with chemicals that interact with glucose in such a manner as to change the reflectance of the surface. Light is sent down the optical fiber and is reflected from, the textured surface. The resulting change in reflectance of the light is measured as an indication of the concentration of glucose. The required texture on the ends of the optical fibers is a landscape of microscopic cones or pillars having high aspect ratios (microscopic structures being taller than they are wide). The average distance between hills must be no more than about 5 mso that blood cells (which are wider) cannot enter the valleys between the hills, where they would interfere with optical sensing of glucose in the blood plasma. On the other hand, the plasma is required to enter the valleys, and high aspect ratio structures are needed to maximize the surface area in contact with the plasma, thereby making it possible to obtain a given level of optical glucose-measurement sensitivity with a relatively small volume of blood. There is an additional requirement that the hills be wide enough that a sufficient amount of light can propagate into them and, after reflection, can propagate out of them. The method described in the cited prior article produces a texture comprising cones and pillars that conform to the average-distance and aspect-ratio requirements. However, a significant fraction of the cones and pillars are so narrow that not enough light can propagate along them. The improved method makes it possible to form wider cones and pillars while still satisfying the average-distance and aspect-ratio requirements. In the improved method, as in the previously reported method, multiple optical fibers are first bundled together for simultaneous texturing of their distal tips. However, prior to texturing by exposure to an oxygen beam, the tips are first coated by vapor deposition of a thin, sparse layer of aluminum: The exposure to the aluminum vapor must be short enough (typically of the order of seconds) so that the aluminum nucleates into islands separated by uncoated areas. The coated tips are textured by exposure to a directed beam of hyperthermal (kinetic energy >1 eV) oxygen atoms and/or ions in a vacuum chamber, as in the previously reported method. The aluminum islands partially shield the underlying PMMA from oxidation and erosion by the beam, so that the cones or pillars remaining after texturing are wider than they would otherwise be. To some extent, the dimensions of the hills and the distances between them can be tailored through choice of the thickness of the aluminum coat and/or the oxygen-beam fluence. The figure illustrates an example of texturing of the tip of a PMMA optical fiber without and with prior aluminum coating.

Banks, Bruce A.↗

In Situ Electrochemical Deposition of Microscopic Wires

A method of fabrication of wires having micron and submicron dimensions is built around electrochemical deposition of the wires in their final positions between electrodes in integrated circuits or other devices in which the wires are to be used. Heretofore, nanowires have been fabricated by a variety of techniques characterized by low degrees of controllability and low throughput rates, and it has been necessary to align and electrically connect the wires in their final positions by use of sophisticated equipment in expensive and tedious post-growth assembly processes. The present method is more economical, offers higher yields, enables control of wire widths, and eliminates the need for post-growth assembly. The wires fabricated by this method could be used as simple electrical conductors or as transducers in sensors. Depending upon electrodeposition conditions and the compositions of the electroplating solutions in specific applications, the wires could be made of metals, alloys, metal oxides, semiconductors, or electrically conductive polymers. In this method, one uses fabrication processes that are standard in the semiconductor industry. These include cleaning, dry etching, low-pressure chemical vapor deposition, lithography, dielectric deposition, electron-beam lithography, and metallization processes as well as the electrochemical deposition process used to form the wires. In a typical case of fabrication of a circuit that includes electrodes between which microscopic wires are to be formed on a silicon substrate, the fabrication processes follow a standard sequence until just before the fabrication of the microscopic wires. Then, by use of a thermal SiO-deposition technique, the electrodes and the substrate surface areas in the gaps between them are covered with SiO. Next, the SiO is electron-beam patterned, then reactive-ion etched to form channels having specified widths (typically about 1 m or less) that define the widths of the wires to be formed. Drops of an electroplating solution are placed on the substrate in the regions containing the channels thus formed, then the wires are electrodeposited from the solution onto the exposed portions of the electrodes and into the channels. The electrodeposition is a room-temperature, atmospheric-pressure process. The figure shows an example of palladium wires that were electrodeposited into 1-mm-wide channels between gold electrodes.

Yun, Minhee↗

Polarized internal target experiments based on EIC beams

The Electron-Ion Collider is under construction at BNL. It will have high-energy high-intensity polarized beams of electrons and hadrons. These beams will allow a high accuracy investigation of nucleon structure in the low- to very-low-x DIS regime. At the same time, similar to the realization at HERA, these beams could be used with an internal target for a very productive investigation of medium- to high-x nucleon structure. Due to a novel regime of electron beam operation and its high polarization and intensity, the Figure-of-Merit of an internal target experiment at EIC will be 500+ times higher than was obtained by HERMES.

Wojtsekhowski, Bogdan↗

Discharge Hollow Cathode and Extraction Grid Analysis for the MiXI Ion Thruster

Miniature ion thrusters are well-suited future space missions such as Terrestrial Planet Finder - Interferometer (TPF-I), where high efficiency thrusters using non-contaminating noble gas propellant are desirable. Transient dynamic and orbital analyses have shown that the low-noise, continuous thrust of the Miniature Xenon Ion (MiXI) thruster is desirable for TPF-I formation rotation maneuvers when compared with other thruster options [1], [2]. The 3cm diameter MiXI thruster, Figure 1, was originally designed using experimental methods and is capable of high Isp (> 3,000 sec), propellant efficiency > 80%, and thrust from <0.1 mN to >1.5 mN [3]. The MiXI thruster must demonstrate high levels of thrust resolution and a low minimum impulse bit to ensure it meets the precision formation flying needs of missions such as TPF-I. A novel concept for controlling the ion extraction voltages yields the necessary thrust characteristics for the MiXI thruster. Experiments verify these techniques and two dimensional computational models show that such techniques should have minimal effect on the lifetime of the thruster. During this effort, the MiXI thruster incorporates, for the first time, flight like hollow cathodes for both the discharge chamber and beam neutralization.

ions↗

Critical Fluctuations in Beam-Plasma Systems and Solar Type III Radio Bursts

The type III radio bursts are the most intense radio emissions from the sun. In Figure 1, we present a typical type III burst observed by the STEREO spacecraft. Ginzburg and Zheleznyakov (1958) were the first to suggest that Langmuir waves excited by the solar flare accelerated electrons are the source of these bursts. The in situ detection of electron beams and Langmuir waves in association with type III bursts together with tracking of type III burst sources in the interplanetary medium confirmed this plasma hypothesis. However, the dynamics of type III electron beams and their interaction with the ambient plasma through the excited Langmuir waves is an unsolved problem. In order that the electron beams don't lose their energy by resonantly interacting with Langmuir waves, various nonlinear processes, such as the induced scattering of Langmuir waves off the background ions in weak turbulence regime and oscillating two-stream instability in strong turbulence regime were invoked. However, the observed electron density fluctuations do not allow Langmuir waves to grow to very high intensities as pointed out by several authors. As far as the conversion of Langmuir wave energy into electromagnetic energy is concerned, there is no consensus either for the fundamental or for the second harmonic emission. In this paper, we address these issues in terms of critical fluctuations near the boundary of the beam-plasma instability which is analogous to the anomalously growing fluctuations near the phase transition points called critical points. We show that this phenomenon can account for the survival of electron beams over large distances as well as the intensities of Langmuir waves excited during this phase transition regime are sufficient to explain the peak intensities of the fundamental as well as harmonic emissions

Fluctuations↗

MOS Circuitry Would Detect Low-Energy Charged Particles

Metal oxide semiconductor (MOS) circuits for measuring spatially varying intensities of beams of low-energy charged particles have been developed. These circuits are intended especially for use in measuring fluxes of ions with spatial resolution along the focal planes of mass spectrometers. Unlike prior mass spectrometer focal-plane detectors, these MOS circuits would not be based on ion-induced generation of electrons, and photons; instead, they would be based on direct detection of the electric charges of the ions. Hence, there would be no need for microchannel plates (for ion-to-electron conversion), phosphors (for electron-to-photon conversion), and photodetectors (for final detection) -- components that degrade spatial resolution and contribute to complexity and size. The developmental circuits are based on linear arrays of charge-coupled devices (CCDs) with associated readout circuitry (see figure). They resemble linear CCD photodetector arrays, except that instead of a photodetector, each pixel contains a capacitive charge sensor. The capacitor in each sensor comprises two electrodes (typically made of aluminum) separated by a layer of insulating material. The exposed electrode captures ions and accumulates their electric charges during signal-integration periods.

Sinha, Mahadeva↗

Slopes To Prevent Trapping of Bubbles in Microfluidic Channels

The idea of designing a microfluidic channel to slope upward along the direction of flow of the liquid in the channel has been conceived to help prevent trapping of gas bubbles in the channel. In the original application that gave rise to this idea, the microfluidic channels are parts of micro-capillary electrophoresis (microCE) devices undergoing development for use on Mars in detecting compounds indicative of life. It is necessary to prevent trapping of gas bubbles in these devices because uninterrupted liquid pathways are essential for sustaining the electrical conduction and flows that are essential for CE. The idea is also applicable to microfluidic devices that may be developed for similar terrestrial microCE biotechnological applications or other terrestrial applications in which trapping of bubbles in microfluidic channels cannot be tolerated. A typical microCE device in the original application includes, among other things, multiple layers of borosilicate float glass wafers. Microfluidic channels are formed in the wafers, typically by use of wet chemical etching. The figure presents a simplified cross section of part of such a device in which the CE channel is formed in the lowermost wafer (denoted the channel wafer) and, according to the present innovation, slopes upward into a via hole in another wafer (denoted the manifold wafer) lying immediately above the channel wafer. Another feature of the present innovation is that the via hole in the manifold wafer is made to taper to a wider opening at the top to further reduce the tendency to trap bubbles. At the time of reporting the information for this article, an effort to identify an optimum technique for forming the slope and the taper was in progress. Of the techniques considered thus far, the one considered to be most promising is precision milling by use of femtosecond laser pulses. Other similar techniques that may work equally well are precision milling using a focused ion beam, or a small diamond-tipped drill bit.

Greer, Harold E.↗

Slot-Antenna/Permanent-Magnet Device for Generating Plasma

A device that includes a rectangular-waveguide/slot-antenna structure and permanent magnets has been devised as a means of generating a substantially uniform plasma over a relatively large area, using relatively low input power and a low gas flow rate. The device utilizes electron cyclotron resonance (ECR) excited by microwave power to efficiently generate plasma in a manner that is completely electrodeless in the sense that, in principle, there is no electrical contact between the plasma and the antenna. Plasmas generated by devices like this one are suitable for use as sources of ions and/or electrons for diverse material-processing applications (e.g., etching or deposition) and for ion thrusters. The absence of plasma/electrode contact essentially prevents plasma-induced erosion of the antenna, thereby also helping to minimize contamination of the plasma and of objects exposed to the plasma. Consequently, the operational lifetime of the rectangular-waveguide/ slot-antenna structure is long and the lifetime of the plasma source is limited by the lifetime of the associated charged-particle-extraction grid (if used) or the lifetime of the microwave power source. The device includes a series of matched radiating slot pairs that are distributed along the length of a plasma-source discharge chamber (see figure). This arrangement enables the production of plasma in a distributed fashion, thereby giving rise to a uniform plasma profile. A uniform plasma profile is necessary for uniformity in any electron- or ion-extraction electrostatic optics. The slotted configuration of the waveguide/ antenna structure makes the device scalable to larger areas and higher powers. All that is needed for scaling up is the attachment of additional matched radiating slots along the length of the discharge chamber. If it is desired to make the power per slot remain constant in scaling up, then the input microwave power must be increased accordingly. Unlike in prior ECR microwave plasma-generating devices, there is no need for an insulating window on the antenna. Such windows are sources of contamination and gradually become ineffective as they become coated with erosion products over time. These characteristics relegate prior ECR microwave plasma-generating devices to non-ion beam, non-deposition plasma applications. In contrast, the lack of need for an insulating window in the present device makes it possible to use the device in both ion-beam (including deposition) and electron-beam applications. The device is designed so that ECR takes place above each slot and the gradient of the magnetic field at each slot is enough to prevent backflow of plasma.

Foster, John E.↗