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At least 55 records · Page 3

Time-resolved electron energy distribution functions at the substrate during a HiPIMS discharge with cathode voltage reversal

Abstract The time-dependent plasma properties of a high-power impulse magnetron sputtering plasma are investigated which include a positive ‘kick’ pulse on the sputtering target 2 μ s after the main negative pulse, this reversing the voltage on the cathode. At a substrate 15 cm distant from the magnetron, the time-dependent electron energy distribution function (EEDF), plasma potential, potential commute time and plasma diffusion properties are measured using a single Langmuir probe. Results show that the positive pulse on the target expels plasma and raises the plasma potential across the chamber on the order of 1 to 2 μ s, which is the time scale of the electron diffusion. The EEDF at the substrate fits a Druyvesteyn distribution during the main negative pulse rising slightly in average energy over time. The distribution is still Druyvesteyn and at the very start of the positive pulse, but then loses the higher energy electrons and drops in average electron energy as the positive pulse progresses. A Boltzmann equation solver, BOLSIG+, was used to predict the EEDF at the substrate during the positive pulse and it agrees best with the measurements assuming a value of 0.2 Td for the E / N (electric field/gas number density).

Physics↗

Langmuir Probe Measurements in an Inductively Coupled Ar/CF4 Plasmas

Technological advancement in the microelectronics industry requires an understanding of the physical and chemical processes occurring in plasmas of fluorocarbon gases, such as carbon tetrafluoride (CF4) which is commonly used as an etchant, and their mixtures to optimize various operating parameters. In this paper we report data on electron number density (ne), electron temperature'(Te), electron energy distribution function (EEDF), mean electron energy, ion number density (ni), and plasma potential (Vp) measured by using Langmuir probe in an inductively coupled 13.56 MHz radio frequency plasmas generated in 50%Ar:50%CF4 mixture in the GEC cell. The probe data were recorded at various radial positions providing radial profiles of these plasma parameters at 10-50 mTorr pressures and 200 W and 300 W of RF power. Present measurements indicate that the electron and ion number densities increase with increase in pressure and power. Whereas the plasma potential and electron temperature decrease with increase in pressure, and they weakly depend on RF power. The radial profiles exhibit that the electron and ion number densities and the plasma potential peak at the center of the plasma with an exponential fall away from it, while the electron temperature has a minimum at the center and it increases steadily towards the electrode edge. The EEDFs have a characteristic drop near the low energy end at all pressures and pressures and their shapes represent non-Maxwellian plasma and exhibit more like Druyvesteyn energy distribution.v

Rao, M. V. V. S.↗

Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, CHF3/Ar and CHF3/Ar/O2 Mixtures

Absolute fluxes and energy distributions of ions in inductively coupled plasmas of Ar, CHF3/Ar, and CHF3/Ar/O2 have been measured. These plasmas were generated in a Gaseous Electronics Conference (GEC) cell modified for inductive coupling at pressures 10-50 mTorr and 100-300 W of 13.56 MHz radio frequency (RF) power in various feedgas mixtures. In pure Ar plasmas, the Ar(+) flux increases linearly with pressure as well as RF-power. Total ion flux in CHF3 mixtures decreases with increase in pressure and also CHF3 concentration. Relative ion fluxes observed in the present studies are analyzed with the help of available cross sections for electron impact ionization and charge-exchange ion-molecule reactions. Measurements of plasma potential, electron and ion number densities, electron energy distribution function, and mean electron energy have also been made in the center of the plasma with a RF compensated Langmuir probe. Plasma potential values are compared with the mean ion energies determined from the measured ion energy distributions and are consistent. Electron temperature, plasma potential, and mean ion energy vary inversely with pressure, but increase with CHF3 content in the mixture.

Kim, J. S.↗

Langmuir Probe Measurements of Inductively Coupled CHF3/Ar and Ar/CHF3/O2 Plasmas

Plasma parameters, such as, electron number density (ne), electron temperature (Te), y electron energy distribution function (EEDF), mean electron energy (Ee), ion number density (ni), and plasma potential (Vp), have been measured by using Langmuir probe in low-pressure (10-50 mTorr) inductively coupled CHF3/Ar and CHF3/Ar/O2 plasmas generated in the GEC cell. The measurements were made at the center of the plasma, keeping the lower electrode grounded, for various CHF3/Ar and Ar/CHF3/O2 mixtures operating at 10-50 mTorr pressures and two input RF power levels, 200 and 300 W. EEDF data show a strong Druyvesteyn distribution with relatively lower number of low energy electrons as compared to a Maxwell distribution and a large electron population with energies higher than the plasma potential. The results further show that at low CHF3 concentrations (less than 50%) the electron number density remains nearly constant with increase in pressure. At higher CHF3 concentrations, however, it decreases with increase in pressure. Plasma potential and electron temperature increase with decrease in pressure and with increase in CHF3 concentration. An analysis of the above observations and mechanisms will be presented.

Sharma, S. P.↗

Modification of spacecraft potentials by plasma emission

The ion engine operations on Applied Technology Satellite 6 (ATS-6) altered the charge state of the spacecraft, changing the spacecraft surface potentials with respect to the distant plasmas. Plasma emission in quiet environments (plasma temperatures below 1 keV) caused the spacecraft potential to shift from a few volts positive to a few volts negative. A net ion current is emitted in such cases. The emission of a plasma or beam in energetic environments (plasma temperatures in the 5-10-keV range) in sunlight caused larger changes. Typical equilibrium potentials for ATS-6 in such environments were on the order of a hundred volts negative, with variations in potential across the spacecraft surface of comparable magnitude. Engine operations under such conditions raised the mainframe potential to near zero volts, and discharged the differential potentials on the dielectric surfaces. Plasma emission by the plasma bridge was an effective method of discharging kilovolt potentials in eclipse.

Olsen, R. C.↗

Mitigation of ICRF—edge plasma interaction in Alcator C-Mod

The parasitic interaction between ion cyclotron range of frequencies (ICRF) waves and the edge plasma has long limited high-power ICRF utilization in magnetically confined fusion plasmas. In this paper, we report on the successful mitigation of this interaction by power tapering a four-strap field-aligned (FA) antenna in the Alcator C-Mod tokamak. With the antenna operated in dipole phasing ($0\pi0\pi$), the ratio of the power coupled by the central two straps ($P_\mathrm {cent}$) to the power coupled by the outer two straps was varied at fixed total coupled ICRF power ($P_\mathrm {tot}$). With $P_\mathrm {cent}$/$P_\mathrm {tot} \approx 0.8-0.9$, no enhancement of the plasma potential was measured despite 1 MW of coupled ICRF power. When the antenna is powered, energy deposition increases on its four corners and on neighboring limiter tiles magnetically connected to some of those corners. The energy deposited on the antenna and limiter is minimized together with near-field plasma potentials. Additionally, we show that deviation from $P_\mathrm {cent}$/$P_\mathrm {tot} \approx 0.8$ enhances wave-plasma interactions in places not magnetically connected to the antenna. These far-field effects are correlated with changes in the antenna spectrum. Hence, on C-Mod, near-field and far-field interactions were minimized for about the same range of $P_\mathrm {cent}$/$P_\mathrm {tot}$. Optimal power tapering was also found to improve ICRF heating efficiency and facilitate H-mode access. Finally, we show that the heat flux pattern on the toroidally aligned antennas reverses with the direction of the RF-induced E×B flow in front of the antenna, a correlation not observed for the FA antenna. We argue that the RF-induced E×B flow, which carries high-density plasma from the near-SOL, is aligned with the FA antenna and does not intercept its corners, where the plasma potential is large. This could explain the previously reported smaller impurity generation by the FA antenna (Wukitch et al 2013 Phys. Plasmas 20 056117).

Alcator C-Mod↗

A Multi-ring Ionospheric Plasma Probe

An ionospheric plasma probe was constructed which consists of a long cylinder with the end facing the flow closed by an end plate made up of multiple annular rings and a center disk. A theoretical argument is given which yields the plasma potential and electron temperature in terms of known plasma parameters and the currents to the various rings of the end plate. This probe was successfully operated in an ionospheric flow simulation facility and the resulting plasma potential is in excellent agreement with the traditional Langmuir analysis (1.22 volts).

Sheldon, J. W.↗

Ion Voltage Diagnostics in the Far-Field Plume of a High-Specific Impulse Hall Thruster

The effects of the magnetic field and discharge voltage on the far-field plume of the NASA 173Mv2 laboratory-model Hall thruster were investigated. A cylindrical Langmuir probe was used to measure the plasma potential and a retarding potential analyzer was employed to measure the ion voltage distribution. The plasma potential was affected by relatively small changes in the external magnetic field, which suggested a means to control the plasma surrounding the thruster. As the discharge voltage increased, the ion voltage distribution showed that the acceleration efficiency increased and the dispersion efficiency decreased. This implied that the ionization zone was growing axially and moving closer to the anode, which could have affected thruster efficiency and lifetime due to higher wall losses. However, wall losses may have been reduced by improved focusing efficiency since the total efficiency increased and the plume divergence decreased with discharge voltage.

Hofer, Richard R.↗

The Effect of Anode Configuration on the Plasma Plume of a 25-A class Hollow Cathode

The effect of anode configuration on the plasma plume properties of a 25-A class hollow cathode are experimentally characterized. At a nominal operating condition of 20.8 A and 14.7 sccm of xenon, the cathode was operated with two axially-segmented anodes of different diameters at varying distance from the cathode. A fast, reciprocating motion stage was used to rapidly insert an ion saturation probe and an emissive probe on cathode centerline, and from those measurements, spatial profiles of plasma density, plasma potential, and electron temperature were calculated. For both anode diameters, maximum plasma potential and electron temperature increased with increasing anode distance. However, the 64-mm diameter anode was found to be significantly more sensitive to position, with measurements indicating that parameters changed continuously with position instead of an instantaneous mode change at a certain critical distance. The 254-mm diameter, in contrast, showed much more similar plasma property profiles across the range of anode positions tested and much smaller changes per unit increase in distance. These results are discussed in the context of assessing anode design for component-level cathode tests.

Space propulsion↗

The Effect of Anode Configuration on the Plasma Plume of a 25-A class Hollow Cathode

The effect of anode configuration on the plasma plume properties of a 25-A class hollow cathode are experimentally characterized. At a nominal operating condition of 20.8 A and 14.7 sccm of xenon, the cathode was operated with two axially-segmented anodes of different diameters at varying distance from the cathode. A fast, reciprocating motion stage was used to rapidly insert an ion saturation probe and an emissive probe on cathode centerline, and from those measurements, spatial profiles of plasma density, plasma potential, and electron temperature were calculated. For both anode diameters, maximum plasma potential and electron temperature increased with increasing anode distance. However, the 64-mm diameter anode was found to be significantly more sensitive to position, with measurements indicating that parameters changed continuously with position instead of an instantaneous mode change at a certain critical distance. The 254-mm diameter, in contrast, showed much more similar plasma property profiles across the range of anode positions tested and much smaller changes per unit increase in distance. These results are discussed in the context of assessing anode design for component-level cathode tests.

space propulsion↗

Ion Thruster Discharge Performance Per Magnetic Field Topography

DC-ION is a detailed computational model for predicting the plasma characteristics of rain-cusp ion thrusters. The advanced magnetic field meshing algorithm used by DC-ION allows precise treatment of the secondary electron flow. This capability allows self-consistent estimates of plasma potential that improves the overall consistency of the results of the discharge model described in Reference [refJPC05mod1]. Plasma potential estimates allow the model to predict the onset of plasma instabilities, and important shortcoming of the previous model for optimizing the design of discharge chambers. A magnetic field mesh simplifies the plasma flow calculations, for both the ions and the secondary electrons, and significantly reduces numerical diffusion that can occur with meshes not aligned with the magnetic field. Comparing the results of this model to experimental data shows that the behavior of the primary electrons, and the precise manner of their confinement, dictates the fundamental efficiency of ring-cusp. This correlation is evident in simulations of the conventionally sized NSTAR thruster (30 cm diameter) and the miniature MiXI thruster (3 cm diameter).

plasma processes↗

Comparison of theory and in situ observations for electron and ion distributions in the near wake of the Explorer 31 and AE-C satellites

Measurements of electron density, plasma potential, and mean ion mass from the Explorer 31 satellite, and measurements of ion current, plasma potential, and ion composition from the Atmosphere Explorer C satellite were used in a comparative study with Parker's theory regarding the charged particle distribution in the near wake of an ionospheric satellite (1976). It is shown that theory and experiment agree fairly well in the angle-of-attack range between 90 and 135 deg. In the maximum rarefaction zone (between 145 and 180 deg), however, the theoretical model overestimates the measured ion depletion by several orders of magnitude. A comparison between theory and the Explorer 31 electron measurements shows that the theory again overestimates the electron depletion. These discrepancies are mainly due to the use of a steady-state theory and a single ion equation (using a mean ion mass). Improved agreement between theory and experiment can be obtained by the use of the time-dependent Vlasov-Poisson equations with separate equations for the various ion species.

Samir, U.↗

Grid-Assisted Direct-Current Magnetron Sputtering of Titanium: Plasma Discharge Diagnostics

Grid-assisted magnetron sputtering is attractive for the deposition of ultrathick Be coatings in inertial confinement fusion (ICF) applications because it offers improved control over the plasma. Here, we investigate the plasma discharge characteristics of grid-assisted direct current magnetron sputtering with Ti as a surrogate sputter target material instead of Be. We map the magnetic field of our magnetron source assembly, study the current-voltage characteristics of both the source and the substrate, and measure the energy distributions of ions bombarding the film surface during growth. The results reveal a slightly asymmetric magnetic field of the magnetron source array and strong dependencies of the plasma discharge characteristics on both the grid and the substrate voltages. Positive grid voltage increases both target and substrate currents, increases the plasma potential, and broadens the energy distributions of ions bombarding the substrate. Grid biasing effects on the plasma discharge characteristics and substrate current can be attributed to corresponding changes to the plasma potential, while substrate biasing effects are more complex and nonlinear. Furthermore, these results demonstrate that grid-assisted deposition offers additional flexibility in controlling the deposition process for tuning properties of ultrathick films for ICF applications.

ICF targets↗

Evidence for electron energization accompanying spontaneous formation of ion acceleration regions in expanding plasmas

We report experiments conducted in an expanding argon plasma generated in the inductive mode of a helicon source in the Hot hELIcon eXperiment–Large Experiment on Instabilities and Anisotropies facility. As the neutral gas pressure increases, the supersonic ion acceleration weakens. Increasing neutral pressure also alters the radial profile of electron temperature, density, and plasma potential upstream of the plasma expansion region. Langmuir probe measurements of the electron energy probability function (EEPF) show that heating of electrons at the plasma edge by RF fields diminishes with increasing gas pressure, yielding a plasma with a centrally peaked electron temperature, and flat potential profiles at higher neutral pressures. For neutral pressures at which ion acceleration regions develop in the expanding plasma plume, EEPFs reveal electrons with two temperature components.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Testing and Analysis of NEXT Ion Engine Discharge Cathode Assembly Wear

Experimental and analytical investigations were conducted to predict the wear of the discharge cathode keeper in the NASA Evolutionary Xenon Thruster. The ion current to the keeper was found to be highly dependent upon the beam current, and the average beam current density was nearly identical to that of the NSTAR thruster for comparable beam current density. The ion current distribution was highly peaked toward the keeper orifice. A deterministic wear assessment predicted keeper orifice erosion to the same diameter as the cathode tube after processing 375 kg of xenon. A rough estimate of discharge cathode assembly life limit due to sputtering indicated that the current design exceeds the qualification goal of 405 kg. Probabilistic wear analysis showed that the plasma potential and the sputter yield contributed most to the uncertainty in the wear assessment. It was recommended that fundamental experimental and modeling efforts focus on accurately describing the plasma potential and the sputtering yield.

Domonkos, Matthew T.↗

Near Field Probe Measurements in the Plume of a NEXT Ion Thruster

Due to the extremely long lifetime and ground testing complications, such as facility backpressure effects, modeling is a necessary tool for validating mission lifetime requirements. Both NASA's Glenn Research Center and Jet Propulsion Laboratory have developed lifetime validation models for the NEXT ion thruster. The largest uncertainties in these models are due to unknown plasma properties, such as plasma potential, that occur very near to the grid. Previous studies have made measurements in the mid to far field. Here, we make very near field measurements of the plasma properties in the ion beam within 0.1 thruster radii of the grid using various probes. Emissive and triple Langmuir probes are swept through the plume to spatially resolve plasma potential, electron temperature and ion density very near to the grid. The goal is to provide refined inputs to the lifetime modeling efforts and increase the accuracy of the models.

Arthur, Neil↗

Near Field Probe Measurements in the Plume of a NEXT Ion Thruster

Due to the extremely long lifetime and ground testing complications, such as facility backpressure effects, modeling is a necessary tool for validating mission lifetime requirements. Both NASA's Glenn Research Center and Jet Propulsion Laboratory have developed lifetime validation models for the NEXT ion thruster. The largest uncertaintiesin these models are due to unknown plasma properties, such as fields plasma potential, that occur very near to the grid. Previous studies have made measurements in the mid to far field. Here, we make very near field measurements of the plasma properties in the ion beam within 0.1 thruster radii of the grid using various probes. Emissive and triple Lang-muir probes are swept through the plume to spatially resolve plasma potential, electron temperature and ion density very near to the grid. The goal is to provide refined inputs to the lifetime modeling efforts and increase the accuracy of the models.

Arthur, Neil A.↗