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At least 55 records · Page 3

A Coupled Plasma-Sheath Model for High Density Sources

High density, low pressure plasmas are used for etching and deposition in microelectronics fabrication processes. The process characteristics are strongly determined by the ion energy distribution (IED) and the ion flux arriving at the substrate that are responsible for desorption of etch products and neutral dissociation at the surface. The ion flux and energy are determined by a self- consistent modeling of the bulk plasma, where the ions and the neutral radicals are produced, and the sheath, where the ions are accelerated. Due to their widely different time scales, it is a formidable task to self-consistently resolve non-collisional sheath in a high density bulk plasma model. In this work, we first describe a coupled plasma-sheath model that attempts to resolve the non-collisional sheath in a reactor scale model. Second, we propose a semianalytical radio frequency (RF) sheath model to improve ion dynamics.

Bose, Deepak

Iterative methods for plasma sheath calculations: Application to spherical probe

The computer cost of a Poisson-Vlasov iteration procedure for the numerical solution of a steady-state collisionless plasma-sheath problem depends on: (1) the nature of the chosen iterative algorithm, (2) the position of the outer boundary of the grid, and (3) the nature of the boundary condition applied to simulate a condition at infinity (as in three-dimensional probe or satellite-wake problems). Two iterative algorithms, in conjunction with three types of boundary conditions, are analyzed theoretically and applied to the computation of current-voltage characteristics of a spherical electrostatic probe. The first algorithm was commonly used by physicists, and its computer costs depend primarily on the boundary conditions and are only slightly affected by the mesh interval. The second algorithm is not commonly used, and its costs depend primarily on the mesh interval and slightly on the boundary conditions.

Parker, L. W.

Lunar electric fields, surface potential and associated plasma sheaths

A review is given of studies of the electric-field environment of the moon. Surface electric potentials are reported for the dayside and terminator regions, electron and ion densities in the plasma sheath adjacent to each surface-potential regime are evaluated, and the corresponding Debye lengths are estimated. The electric fields, which are approximated by the surface potential over the Debye length, are shown to be at least three orders of magnitude higher than the pervasive solar-wind electric field and to be confined to within a few tens of meters of the lunar surface.

Freeman, J. W.

Wave rectification in plasma sheaths surrounding electric field antennas

Combined measurements of Langmuir or broadband whistler wave intensity and lower-frequency electric field waveforms, all at 10-microsecond time resolution, were made on several recent sounding rockets in the auroral ionosphere. It is found that Langmuir and whistler waves are partically rectified in the plasma sheaths surrounding the payload and the spheres used as antennas. This sheath rectification occurs whenever the high frequency (HF) potential across the sheath becomes of the same order as the electron temperature or higher, for wave frequencies near or above the ion plasma frequency. This rectification can introduce false low-frequency waves into measurements of electric field spectra when strong high-frequency waves are present. Second harmonic signals are also generated, although at much lower levels. The effect occurs in many different plasma conditions, primarily producing false waves at frequencies that are low enough for the antenna coupling to the plasma to be resistive.

Boehm, M. H.

High voltage plasma sheath analysis related to TSS-1

On the first mission of the Tethered Satellite System (TSS-1), a 1.8 m diameter spherical satellite will be deployed a distance of 20 km above the Space Shuttle Orbiter on an insulated conducting tether. The satellite will be held at electric potentials up to 5000 volts positive with respect to the ambient plasma. Due to the passage of the conducting tether through the Earth's magnetic field, an electromagnetic field (EMF) will be created, driving electrons down the tether to the Orbiter, out through an electron gun into the ionosphere and back into the positive-biased satellite. The main problem addressed here is the current-voltage characteristics of the ionospheric interaction with the satellite. The first problem is that while the satellite will be capable of measuring charged particle flow to the surface at several locations, the detectors have a limited range of acceptance angle. The second problem is that the angle of incidence of the incoming electrons will have to be relative to the local normal. This will be important in order to predict the magnitude of the detectable current at each detector location so the detector gain can be pre-set to the correct range. The plasma sheath was analyzed mathematically, and subroutines were written to solve relevant finite element, Taylor-Vlasov, and Poisson equations.

Sheldon, John W.

Temporal Evolution of the Plasma Sheath Surrounding Solar Cells in Low Earth Orbit

High voltage solar array interactions with the space environment can have a significant impact on array performance and spacecraft charging. Over the past 10 years, data from the International Space Station has allowed for detailed observations of these interactions over long periods of time. Some of the surprising observations have been floating potential transients, which were not expected and are not reproduced by existing models. In order to understand the underlying processes producing these transients, the temporal evolution of the plasma sheath surrounding the solar cells in low Earth orbit is being investigated. This study includes lumped element modeling and particle-in-cell simulation methods. This presentation will focus on recent results from the on-going investigations.

Willis, Emily M.

Temporal Evolution of the Plasma Sheath Surrounding Solar Cells in Low Earth Orbit

High voltage solar array interactions with the space environment can have a significant impact on array performance and spacecraft charging. Over the past 10 years, data from the International Space Station has allowed for detailed observations of these interactions over long periods of time. Some of the surprising observations have been floating potential transients, which were not expected and are not reproduced by existing models. In order to understand the underlying processes producing these transients, the temporal evolution of the plasma sheath surrounding the solar cells in low Earth orbit is being investigated. This study includes lumped element modeling and particle-in-cell simulation methods. This presentation will focus on recent results from the on-going investigations.

Willis, Emily M.

Effects of oxidation and impurities in lithium surfaces on the emitting wall plasma sheath

The use of lithium as a surface coating in fusion devices improves the plasma performance, but the change in the wall properties affects the secondary electron emission properties of the material. Lithium oxidizes easily, which drives the emission yield well above unity. We present here simulations demonstrating the change in the sheath structure from monotonic to the nonmonotonic space-charge limited sheath using an energy-dependent data-driven emission model, which self-consistently captures both secondary emission and backscattering populations. Increased secondary electron emission from the material has ramifications for the degradation and erosion of the wall. The results show that the oxidation leads to an increased electron energy flux into the wall and a reduced ion energy flux. The net transfer of energy to the surface is significantly greater for the oxidized case than for the pure lithium case. High backscattering rates of low-energy particles lead to a high re-emission rate at the wall.

Fusion reactors

Machine learning surrogates for ion energy–angle distributions in thermal and RF plasma sheaths

Ion energy–angle distributions (IEADs) at material surfaces are a critical input for plasma–material interaction (PMI) studies in fusion devices, yet they are computationally expensive to obtain using particle-in-cell (PIC) simulations. In this work, we develop a machine learning surrogate based on a deep deconvolutional neural network (DDeCNN) trained on large databases generated with the hPIC2 code. The surrogate is capable of reconstructing IEADs from sheath parameters for both thermal and radio-frequency (RF) plasmas, including cases with multiple ion species. Across thousands of test cases, the model achieves high accuracy, with over 97 % of predictions classified as good or average based on standard error metrics (MAE, MSE, L2). Even in the more challenging RF and multi-species regimes, the surrogate reliably captures the multi-peak structure of PIC results. Once trained, the surrogate produces IEADs in milliseconds on a common workstation, yielding speedups of six to seven orders of magnitude compared with running a full PIC simulation. This computational gain enables dense parameter scans and direct coupling of IEAD predictions with PMI and erosion models on whole-device scales in fusion-relevant conditions.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

The screen hole plasma sheath of an ion accelerator system

Results of the first probing of the screen hole sheath of an ion accelerator system are presented. The screen hole sheath, represented as a set of equipotential contours, extends over a large distance within the discharge plasma. Under no conditions examined does the sheath enter the screen hole. Edge hole defocusing of multiaperture accelerator systems is due primarily to local plasma density variations rather than adjacent screen hole sheath interactions. The sheath boundary is independent of screen-to-accelerator grid spacing when the grid set is operated at the minimum ion beam divergence condition. Significant ion focusing effects occur in the sheath adjacent to the screen grid webbing leading to increased ion source beam current efficiency with decreasing screen-to-accelerator grid separation and/or screen grid thickness.

Aston, G.

On the temporal development of a plasma sheath

This work studies a one-dimensional model for the time-dependent behavior caused by placing an uncharged conducting surface in contact with a uniform equilibrium plasma. Both the probe potential and plasma response are unknown a priori but are specified through a set of self-consistent model equations and boundary conditions. Some numerical and analytical consequences of this model are investigated. In particular, such issues are considered as (1) the formation and expansion of a quasi-neutral region connecting the non-neutral sheath to the distant undisturbed plasma; (2) the validity of assuming the existence of a sheath edge; and (3) the role of both static and dynamic Bohm criteria in the theory of unsteady sheath development.

Cipolla, J. W., Jr.

Plasma Sheath Behavior of the ProSEDS Delta II

The Propulsive Small Expendable Deployer System (ProSEDS) mission is a demonstration of the orbit lowering capabilities of an electrodynamic tether. The system is sequenced through various electrical modes, involving both open circuit and closed circuit configurations, so that the performance capabilities of the system can be studied. Ionospheric electrons are collected on the upper end of the bare tether, conducted through the tether, and returned to the ionosphere at the lower end (Delta I1 2nd stage) via the operation of a Hollow Cathode Plasma Contactor (HCPC). The working gas of the HCPC is xenon. Environmental plasma measurements and sheath potential are obtained from the Differential Ion Flux Probe w/Mass Analysis (DIFPM) and Langmuir Probe and Spacecraft Potential (LPSP) instruments. Each instrument has three sensors symmetrically placed about the strut section of the Delta 2nd stage. A magnetometer is also included in the ProSEDS instrumentation suite. An initial analysis of the rocket stage sheath behavior as a function of ProSEDS configuration (open or closed circuit), ambient ionospheric density, orientation to velocity vector (ram-wake influence), and magnetic field orientation is presented. An initial assessment on how well the plasma contactor grounded the rocket stage is also presented.

Wright, K. H.

Analysis of Electromagnetic Wave Propagation in a Magnetized Re-Entry Plasma Sheath Via the Kinetic Equation

Based on a theoretical model of the propagation of electromagnetic waves through a hypersonically induced plasma, it has been demonstrated that the classical radiofrequency communications blackout that is experienced during atmospheric reentry can be mitigated through the appropriate control of an external magnetic field of nominal magnitude. The model is based on the kinetic equation treatment of Vlasov and involves an analytical solution for the electric and magnetic fields within the plasma allowing for a description of the attendant transmission, reflection and absorption coefficients. The ability to transmit through the magnetized plasma is due to the magnetic windows that are created within the plasma via the well-known whistler modes of propagation. The case of 2 GHz transmission through a re-entry plasma is considered. The coefficients are found to be highly sensitive to the prevailing electron density and will thus require a dynamic control mechanism to vary the magnetic field as the plasma evolves through the re-entry phase.

Manning, Robert M.