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Site-Selective Atomic Layer Deposition at Thermally Generated Surface Oxygen Vacancies on Rutile TiO 2

Unique atomic arrangements (i.e., defects) on material surfaces may exhibit distinctive reactivity that affords opportunities for selective surface chemistry exclusively at those sites. While theoretically appealing, site-selective atomic layer deposition (ALD) processes remain largely unrealized experimentally. Here we provide evidence for site-selective ALD that exclusively targets oxygen vacancies thermally generated at the surface of TiO 2 single crystals. High-resolution in situ ellipsometry reveals the nucleation behavior of dimethylaluminum isopropoxide (DMAI) and water at process conditions precisely tuned for selective hydroxylation of surface defects. An island growth model for nucleation and atomic force microscopy (AFM) imaging are consistent with a site-selective growth mechanism that depends on the surface oxygen vacancy density. This approach to direct ALD reactions at defective surface sites may provide future opportunities for targeted remediation of electronically imperfect interfaces.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Formation of Gas-Phase Allyl Radicals from Glycerol on Rutile TiO2(110)

The reaction pathways of glycerol on partially reduced TiO2(110) have been studied by a combination of molecular beam dosing and temperature-programmed desorption (TPD). Glycerol is found to bind more strongly to TiO2(110) than glycols due to an additional hydroxyl group in the molecule. When the Ti surface sites are saturated by glycerol, the majority of glycerol molecules (~ 95%) undergo further reactions to yield carbon-free (water and hydrogen) and carbon-containing products that are desorbed during the TPD ramp. In contrast to glycols for which both water and hydrogen arise exclusively from the cleavage of glycol O-H bonds, we identify two distinct reaction channels resulting from the cleavage of O-H and C-H bonds, respectively, for both water and hydrogen evolution from glycerol on TiO2(110). Quantitative determination of the desorption yields of water and hydrogen reveals that the C-H bond scission channel which occurs at higher temperature than the O-H bond scission channel, is a minor reaction channel for water formation, while it is a major reaction channel responsible for hydrogen evolution. For the carbon-containing products, we exclude both carbon deposition and carbon oxides (CO and CO2) formation, and identify the allyl radical as the major carbon-containing product. The formation of the allyl radical is accompanied by the formation of various minor carbon-containing products including propylene, acrolein, allyl alcohol, acetone, formaldehyde and ethylene. The different surface chemistries observed between glycerol and simpler alcohols and glycols on TiO2(110), suggest that smaller oxygenates cannot serve as models for larger oxygenates in probing their reaction pathways on oxide surfaces. The new reaction channels observed for glycerol on TiO2(110) may open up a new way to convert bio-renewable glycerol directly to pure hydrogen and hydrocarbons on TiO2. This work was supported by the US Department of Energy, Office of Sciences, Office of Basic Energy Sciences, Division of Chemical Sciences, Geosciences & Biosciences, and performed in EMSL, a national scientific user facility sponsored by the Department of Energy’s Office of Biological and Environmental Research and located at Pacific Northwest National Laboratory (PNNL). PNNL is a multiprogram national laboratory operated for the DOE by Battelle.

Chen, Long↗