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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 55 records · Page 3
All sourcesNASA NTRSDOE OSTI
DOE OSTI2023

Atomic layer deposition and its derivatives for extreme ultraviolet (EUV) photoresist applications

Solution-processed photoresists have been forerunners in semiconductor patterning for decades. Even with the drastic reduction in photolithography wavelength, traditional spin-on resists still support the fabrication of the most advanced, sub-5 nm node logic and memory devices using EUV lithography (EUVL) (λ = 13.5 nm). However, trade-off between resolution, sensitivity, and roughness in the conventional resists pose a critical challenge in the race towards device downscaling to 1 nm node. While great efforts are being made to improve spin-on EUV photoresist performance, there has been emergence of new approaches focused on developing novel resists via vapor-phase processing routes, such as atomic layer deposition (ALD) and its analogs. This review summarizes recent advances in EUVL photoresist development based on ALD and its derivative techniques, which include ALD-based inorganic–organic dry resists and hybrid resists synthesized by infiltrating conventional spin-on resists. Despite being in the early stage, initial studies have shown the great potential of ALD applications in EUVL photoresist development.

36 MATERIALS SCIENCE↗
DOE OSTI2025

Effect of Networking Density on the Patterning Performance of Molecular Layer Deposited Alucone Electron Beam/EUV Resists

One of the main barriers to continued device scaling in the era of extreme ultraviolet (EUV) lithography is the need for improved photoresist chemistries to address challenges such as poor EUV sensitivity, inadequate etch resistance, and pattern collapse. Metal-organic photoresists are a promising class of materials that can address many of these challenges, and among them, resists deposited via hybrid molecular layer deposition (MLD) have attracted interest for their unique advantages in thickness control, chemical homogeneity, and compatibility with vacuum processing. However, despite many successful demonstrations of patterning, little is known about how the molecular design of hybrid MLD resists affects their lithographic performance. In this work, we study the effect of the network structure, a common feature among all hybrid MLD resists, via a series of aluminum alkoxide ("alucone") negative tone resists with varying networking density. Their patterning mechanism is investigated via electron beam lithography (EBL)─a common proxy for EUV─and compared to their EUV-induced reactions studied via flood exposure and in situ characterization. In conclusion, we show that the resist with the least networking density demonstrates the best sensitivity and resolution, with the ability to resolve dense line/space gratings as small as 14 nm half pitch via EBL.

electron beam lithography↗
NASA NTRS1998

Relationship of Topside Ionospheric Ion Outflows to Auroral Forms and Precipitation, Plasma Waves, and Convection Observed by Polar

The POLAR satellite often observes upflowing ionospheric ions (UFIs) in and near the aurora] oval on southern perigee (approx. 5000 km altitude) passes. We present the UFI features observed by the thermal ion dynamics experiment (TIDE) and the toroidal imaging mass angle spectrograph (TIMAS) in the dusk-dawn sector under two different geomagnetic activity conditions in order to elicit their relationships with auroral forms, wave emissions, and convection pattern from additional POLAR instruments. During the active interval, the ultraviolet imager (UVI) observed a bright discrete aurora on the duskside after the substorm onset and then observed a small isolated aurora form and diffuse auroras on the dawnside during the recovery phase. The UFIs showed clear conic distributions when the plasma wave instrument (PWI) detected strong broadband wave emissions below approx. 10 kHz, while no significant auroral activities were observed by UVI. At higher latitudes, the low-energy UFI conics gradually changed to the polar wind component with decreasing intensity of the broadband emissions. V-shaped auroral kilometric radiation (AKR) signatures observed above -200 kHz by PWI coincided with the region where the discrete aurora and the UFI beams were detected. The latitude of these features was lower than that of the UFI conics. During the observations of the UFI beams and conics, the lower-frequency fluctuations observed by the electric field instrument were also enhanced, and the convection directions exhibited large fluctuations. It is evident that large electrostatic potential drops produced the precipitating electrons and discrete auroras, the UFI beams, and the AKR, which is also supported by the energetic plasma data from HYDRA. Since the intense broadband emissions were also observed with the UFIs, the ionospheric ions could be energized transversely before or during the parallel acceleration due to the potential drops.

Hirahara, M.↗
NASA NTRS1997

Relationship of Topside Ionospheric Ion Outflows to Auroral Forms and Precipitations, Plasma Waves, and Convection Observed by POLAR

The POLAR satellite often observes upflowing ionospheric ions (UFls) in and near the auroral oval on southern perigee (approximately 5000 km altitude) passes. We present the UFI features observed by the thermal ion dynamics experiment (TIDE) and the toroidal imaging mass-angle spectrograph (TIMAS) in the dusk-dawn sector under two different geomagnetic activity conditions in order to elicit their relationships with auroral forms, wave emissions, and convection pattern from additional POLAR instruments. During the active interval, the ultraviolet imager (UVI) observed a bright discrete aurora on the dusk side after the substorm onset and then observed a small isolated aurora form and diffuse auroras on the dawn side during the recovery phase. The UFls showed clear conic distributions when the plasma wave instrument (PWI) detected strong broadband wave emissions below approximately 10 kHz, while no significant auroral activities were observed by UVI. At higher latitudes, the low-energy UFI conics gradually changed to the polar wind component with decreasing intensity of the broadband emissions. V-shaped auroral kilometric radiation (AKR) signatures observed above approximately 200 kHz by PWI coincided with the region where the discrete aurora and the UFI beams were detected. The latitude of these features was lower than that of the UFI conics. During the observations of the UFI beams and conics, the lower-frequency fluctuations observed by the electric field instrument (EFI) were also enhanced, and the convection directions exhibited large fluctuations. It is evident that large electrostatic potential drops produced the precipitating electrons and discrete auroras, the UFI beams, and the AKR, which is also supported by the energetic plasma data from HYDRA. Since the intense broadband emissions were also observed with the UFIs. the ionospheric ions could be energized transversely before or during the parallel acceleration due to the potential drops.

Hirahara, M.↗
NASA NTRS2011

Tissue Photolithography

Tissue lithography will enable physicians and researchers to obtain macromolecules with high purity (greater than 90 percent) from desired cells in conventionally processed, clinical tissues by simply annotating the desired cells on a computer screen. After identifying the desired cells, a suitable lithography mask will be generated to protect the contents of the desired cells while allowing destruction of all undesired cells by irradiation with ultraviolet light. The DNA from the protected cells can be used in a number of downstream applications including DNA sequencing. The purity (i.e., macromolecules isolated form specific cell types) of such specimens will greatly enhance the value and information of downstream applications. In this method, the specific cells are isolated on a microscope slide using photolithography, which will be faster, more specific, and less expensive than current methods. It relies on the fact that many biological molecules such as DNA are photosensitive and can be destroyed by ultraviolet irradiation. Therefore, it is possible to protect the contents of desired cells, yet destroy undesired cells. This approach leverages the technologies of the microelectronics industry, which can make features smaller than 1 micrometer with photolithography. A variety of ways has been created to achieve identification of the desired cell, and also to designate the other cells for destruction. This can be accomplished through chrome masks, direct laser writing, and also active masking using dynamic arrays. Image recognition is envisioned as one method for identifying cell nuclei and cell membranes. The pathologist can identify the cells of interest using a microscopic computerized image of the slide, and appropriate custom software. In one of the approaches described in this work, the software converts the selection into a digital mask that can be fed into a direct laser writer, e.g. the Heidelberg DWL66. Such a machine uses a metalized glass plate (with chrome metallization) on which there is a thin layer of photoresist. The laser transfers the digital mask onto the photoresist by direct writing, with typical best resolution of 2 micrometers. The plate is then developed to remove the exposed photoresist, which leaves the exposed areas susceptible to chemical chrome etch. The etch removes the unprotected chrome. The rest of the photoresist is then removed, by either ultraviolet organic solvent or over-development. The remaining chrome pattern is quickly oxidized by atmospheric exposure (typically within 30 seconds). The ready chrome mask is now applied to the tissue slide and aligned manually, or using automatic software and pre-designed alignment marks. The slide plate sandwich is then exposed to UV to destroy the DNA of the unwanted cells. The slide and plate are separated and the slide is processed in a standard way to prepare for polymerase chain reaction (PCR) and potential identification of cancer sequences.

Wade, Lawrence A.↗
NASA NTRS1960

The Surface-Tension Method of Visually Inspecting Honeycomb-Core Sandwich Plates

When one face of a metal-honeycomb-core sandwich plate is heated or cooled relative to the other, heat transfer through the core causes the temperature on each face at the lines of contact with the core to be slightly different from that on the rest of the face. If a thin liquid film is applied to the face, the variation of surface tension with temperature causes the liquid to move from warmer to cooler areas and thus to develop a pattern corresponding to the temperature pattern on the face. Irregularities in the pattern identify the locations where the core is not adequately bonded to the face sheet. The pattern is easily observed when a fluorescent liquid is used and illumination is by means of ultraviolet light. Observation in ordinary light is also possible when a very deeply colored liquid is used. A method based on the use of a thermographic phosphor to observe the temperature pattern was found to be less sensitive than the surface-tension method. A sublimation method was found to be not only less sensitive but also far more troublesome.

Katzoff, Samuel↗
NASA NTRS1972

Venus - Atmospheric rotation.

Photographs of Venus taken in ultraviolet light from Sept. 29, 1963, to May 29, 1971, indicate a general planet-wide circulation in the upper atmosphere of that planet having velocities which varied with time from -87 to -127m/sec at the equator. Positional measurements on 67 pairs of photographs which show the recurrence of similar patterns after intervals of one to three rotations suggest an asymmetric bimodal distribution of these velocities. The ultraviolet markings appear to be randomly distributed and quite ephemeral in nature, rarely enduring in a recognizable pattern for more than 20 days and usually much less. Attention is directed to an apparent but fictitious mean sidereal rotation period of approximately 4.06 days derived from observations which are made at a single station and span many months or years. Under such conditions this fictitious value for the rotation period is produced by the commensurability of the one-day period of earth and the assumed four-day period of the atmosphere of Venus.

Scott, A. H.↗
NASA NTRS1983

Non-noble metal based metallization systems

The results of efforts to produce a nonsilver metallization system for silicon photovoltaic cells are given. The system uses a metallization system based on molybdenum, tin, and titanium hydride. The initial work in this system was done using the MIDFILM process. The MIDFILM process attains a line resolution comparable to photoresist methods with a process related to screen printing. The surface to be processed is first coated with a thin layer of photopolymer material. Upon exposure to ultraviolet light through a suitable mask, the polymer in the non-pattern area crosslinks and becomes hard. The unexposed pattern areas remain tacky. The conductor material is then applied in the form of a dry mixture of metal which adheres to the tacky pattern area. The assemblage is then fired to ash the photopolymer and sinter the conductor powder.

Garcia, A., III↗
DOE OSTI2022

Command of active and responsive elastomers by topological defects and patterns

The project resulted in the development of stimuli-responsive elastomer coatings formed by photopolymerized liquid crystal molecules. The molecular orientation of the liquid crystal elastomers is coupled to rubber-like elasticity. The project developed an approach to produce complex patterns of molecular orientation in elastomers by employing photopatterning technique based on plasmonic metamasks that convert unpolarized incoming light into a transmitted light beam with spatially-varying linear polarization. The polarization-modulated light beam aligns the film of azodye molecules, which serves as the substrate for liquid crystal elastomer coating. The alignment of the azodye molecules follows the polarization pattern with a phase shift of the alignment direction by 90 degrees. The azodye substrate imposes orientation of molecules in the adjacent liquid crystal layer which is preserved after the monomers are polymerized into a liquid crystal elastomer. By using differently aligned substrates one could produce various patterns of molecular orientation in the elastomer, which dictate the mechanical properties of the elastomers and their response to external stimuli such as temperature, humidity, and ultraviolet irradiation. In particular, the predesigned molecular orientation produces deterministically defined topography response of the liquid crystal coatings, in which their free surface changes from flat to either locally elevated or locally compressed, depending on whether the pre-inscribed molecular orientation is predesigned with a splay or bend deformation. The research established that the mechanism of this deterministic relation between the dynamic topography and pre-inscribed molecular orientation is rooted in the change of the tensorial order parameter that characterizes the degree of orientational order, and in the contraction/expansion of polymer molecules in response to the order parameter changes. In particular, lowering the order causes contraction of polymer globules. The work demonstrated that the dynamic topography of elastomer coatings with three-dimensional pattern of orientational order includes up and down motion of the material (along the normal to the coating) and also shifts in lateral directions. We demonstrate that the deterministic relationship between the orientational patterns and variations of coatings’ profile is caused by forces that are mathematically equivalent to active forces in the system of “pullers” or “pushers” in active matter, demonstrating universality of the out-of-equilibrium behavior. The project resulted in theoretical models that predictively describe the dynamic response of coatings. The topography of liquid crystal elastomers is sensitive to stimuli such as temperature, ultraviolet irradiation, and humidity. The applicability of the patterned approach to produce dynamic coatings was expanded from nematic elastomers to their smectic counterparts. The project combined a battery of imaging techniques to unveil the dynamic properties of the coatings, ranging from the state-of-the-art dynamic holographic microscopy to fluorescent confocal polarizing microscopy and polscope microscopy. The research uncovered potential applications of dynamic elastomer coatings, such as control placement of colloidal particles, engineering of living tissues with alignment patterns of cells that follow the orientational order of elastomer coatings. The approach developed in the project can be used to design programmable dynamic coatings with functionalities that mimic biological tissues such as skin.

36 MATERIALS SCIENCE↗
DOE OSTI2020

Controlling Drug Absorption, Release, and Erosion of Photopatterned Protein Engineered Hydrogels

A protein-engineered triblock copolymer hydrogel composed of two self-assembling domains (SADs) has been fabricated by a photoactivatable diazirine group followed by ultraviolet (UV)-mediated crosslinking. The photocrosslinkable protein polymer CEC-D has been patterned into various features including different micrometer-scale stripes by using lithographic techniques. The patterned hydrogels are important for encapsulation of small molecules where a photopatterned fraction of 50% is optimal for maximum absorption. Stripe-patterned CEC-D 100–100 exhibits slightly lower swelling ratios, an 8.9 times lower erosion profile, and a 2.6-fold higher drug release compared to the unpatterned hydrogel control, CEC-D0. Our studies demonstrate the potential of photocrosslinkable protein polymer hydrogels to be used as scaffolds for therapeutic delivery of small molecules. Furthermore, through photolithographic techniques on the protein hydrogel, a variety of functionalities can be achieved by patterning different features enabling the mimicry of biological systems.

77 NANOSCIENCE AND NANOTECHNOLOGY↗
DOE OSTI2022

First Synoptic Images of FUV Discrete Aurora and Discovery of Sinuous Aurora at Mars by EMM EMUS

Abstract We present the first measurements of Mars discrete aurora in the extreme ultraviolet (<110 nm) and the first synoptic aurora images in the far ultraviolet (110–180 nm). Auroral emission is detected in >75% of nightside images, with patterns shifting visibly over 15–20 min. Aurora is observed most frequently in regions of open magnetic topology (where crustal magnetic fields are very weak and/or vertical), with the brightest aurora where crustal fields are strongest. We present the first disk‐averaged spectrum of discrete aurora, with several O, C, and CO features as expected for electron impact primarily on CO 2 . We categorize discrete auroral morphology into three types: crustal field aurora, non‐crustal field patchy aurora, and a new type we call “sinuous” aurora, an elongated serpentine structure that stretches thousands of kilometers into the nightside from near midnight in the northern hemisphere. These observations point to a highly dynamic environment in Mars' magnetotail.

Lillis, Robert J.↗
NASA NTRS2004

Did a Gamma-Ray Burst Initiate the Late Ordovician Mass Extinction?

Gamma-ray bursts (hereafter GRB) produce a flux of radiation detectable across the observable Universe. A GRB within our own galaxy could do considerable damage to the Earth's biosphere; rate estimates suggest that a dangerously near GRB should occur on average several times per billion years. At leastfive times in the history of lfe, the Earth experienced mass extinctions that eliminated a large percentage of the biota. Many possible causes have been documented, and GRB may also have contributed. The late Ordovician mass extinction approximately 440 million years ago may be at least partly the result of a GRB. Due to severe depletion of the ozone layer, intense solar ultraviolet radiation is expected to result from a nearby GRB, and some of the patterns of extinction and survivorship at this time may be attributable to elevated levels of UV radiation reaching the Earth. In addition a GRB could trigger the global cooling which occurs at the end of the Ordovician period that follows an interval of relatively warm climate. Intense rapid cooling and glaciation at that time, previously identijied as the probable cause of this mass extinction, may have resultedfiom a GRB.

Melott, A. L.↗
NASA NTRSDate not supplied

Unveiling Urban Pollution Patterns from a Bird’s-Eye View

Low-earth orbiting satellites have been observing the global distribution of nitrogen dioxide (NO2) since the 1990s and these observations have been used to identify pollution source regions, temporal trends, and links to health effects and community disparities. However, historically, space-based NO2 observations have been coarse in spatial and temporal resolution resulting in challenges in data interpretation and product validation; therefore, NASA developed airborne capabilities and measurements strategies to observe ultraviolet-visible (UV-VIS) trace gases at high temporal and spatial resolutions to unveiling never before seen spatiotemporal patterns over major urban hubs during recent air quality field studies. In this talk, Dr. Judd will share the story of these field studies with datasets collected from NASA’s airborne spectrometers, GeoTASO and GCAS, and how they integrate in with other space- and ground-based instrumentation to illustrate the conceptual model of air quality episodes in coastal urban environments, contribute to satellite validation and regional chemical transport model evaluation. These imagers have the capability to observe UV-VIS absorbing species, typically NO2 and HCHO, at spatial resolutions as fine as 250 m when observing from the upper-troposphere. Flight strategies allowed for the collection of repeated raster samples over urban areas multiple times per flight day in cities like Chicago, Los Angeles, and New York City, capturing never before seen pictures of the diurnal evolution of emissions, chemistry, and meteorology associated with NO2 heterogeneity. These airborne efforts help local air quality management better understand their air quality challenges as well as benefit the larger air quality community in preparation for geostationary air quality observations and the development of the global air quality observing system.

Laura Judd↗
DOE OSTI2025

Ptychography at all wavelengths

Ptychography is a computational imaging technique that operates across multiple wavelength regimes, from electron (picometres) to X-ray (~0.1 nm), extreme ultraviolet (~10 nm) and visible light (micrometres). By reconstructing both amplitude and phase from diffraction patterns, ptychography enables high-resolution, quantitative imaging without conventional limitations imposed by lens-based optics. Ptychography has enabled advances across a range of scales: achieving deep-sub-angstrom resolution with electron microscopy, becoming an indispensable tool at X-ray synchrotron facilities worldwide and overcoming the trade-offs between resolution and field-of-view in optical imaging. This Primer provides a unified treatment of ptychography across these wavelength regimes. First, we discuss theoretical foundations, reconstruction algorithms, experimental considerations and wavelength-specific challenges. We then give examples of raw and processed data from various configurations and wavelengths. Next, we highlight key applications of ptychography in life sciences, materials science and industry. We also discuss data standards, open-source software implementations and best practices for ensuring reproducibility across different wavelength regimes. Finally, we consider limitations and future opportunities for ptychography. Together with accompanying datasets and code implementations, this Primer aims to serve newcomers and experienced practitioners in the field, facilitating broader adoption of ptychography across different disciplines.

47 OTHER INSTRUMENTATION↗
DOE OSTI2023

Multiwavelength analysis of Fermi -LAT blazars with high-significance periodicity: detection of a long-term rising emission in PG 1553+113

ABSTRACT Blazars display variable emission across the entire electromagnetic spectrum, with time-scales that can range from a few minutes to several years. Our recent work has shown that a sample of five blazars exhibit hints of periodicity with a global significance ${\gtrsim}2\, \sigma$ at γ-ray energies, in the range of 0.1 GeV < E < 800 GeV. In this work, we study their multiwavelength emission, covering the X-ray, ultraviolet, optical, and radio bands. We show that three of these blazars present similar periodic patterns in the optical and radio bands. Additionally, fluxes in the different bands of the five blazars are correlated, suggesting a co-spatial origin. Moreover, we detect a long-term (≈10 yr) rising trend in the light curves of PG 1553+113, and we use it to infer possible constraints on the binary black hole hypothesis.

Astronomy & Astrophysics↗