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54 records · Page 3

Fabrication Of Fiber-Optic Waveguide Coupler

Technique for making four-port, single-mode fiber-optic waveguide couplers requires no critically-precise fabrication operations or open-loop processes. Waveguide couplers analogous to beam-splitter prisms. Essential in many applications that require coherent separation or combination of two waves; for example, for interferometric purposes. Components of optical waveguide coupler held by paraffin on microscope slide while remaining cladding of two optical fibers fused together by arc welding.

Goss, Willis↗

Development and applications of optical interferometric micrometrology in the angstrom and subangstrom range

The recent development of the scanning electron tunneling microscope and the atomic force microscope requires absolute standards for measurements in the angstrom and subangstrom range. Optical interferometry with lasers and multiple mode laser resonances can provide absolute measurements as the laser wavelengths are very accurately known. A key feature of such measurements is the use of piezoelectric crystals as translators of the highest accuracy for very small disturbances. However, the dimensional changes of these crystals resulting from electrical potential changes depend on many variables, among them the method of mounting, so that accurate calibrations are necessary. Starting from advances in optical metrology made by physicists trying to find gravity waves, advances which led to measurements down to 10 to the -5 A, the author designed and built a much simpler system for the angstrom range. The major limiting factors were mechanical vibrations, air currents, thermal changes and laser instabilities.

Lauer, James L.↗

Stitching interferometry for ellipsoidal x-ray mirrors

Ellipsoidal mirrors, which can efficiently produce a two-dimensional focusing beam with a single mirror, are superior x-ray focusing optics, especially when compared to elliptical-cylinder mirrors in the Kirkpatrick–Baez geometry. However, nano-focusing ellipsoidal mirrors are not commonly used for x-ray optics because achieving the accuracy required for the surface metrology of nano-focusing ellipsoidal mirrors is difficult due to their small radius of curvature along the short ellipsoidal axis. Here, we developed a surface metrology system for nano-focusing ellipsoidal mirrors using stitching interferometric techniques. The developed system simultaneously measures sub-aperture shapes with a microscopic interferometer and the tilt angles of the sub-aperture shapes with a large Fizeau interferometer. After correcting the systematic errors included in the sub-aperture shapes, the entire mirror shape is calculated by stitching the sub-aperture shapes based on the obtained relative angles between partially overlapped sub-apertures. In this study, we developed correction methods for systematic errors in sub-aperture shapes that originated from off-axis aberrations produced in the optics of the microscopic interferometer. The systematic errors on an ellipsoidal mirror were estimated by measuring a series of tilted plane substrates and the ellipsoidal substrate. From measurements of an ellipsoidal mirror with a 3.6-mm radius of curvature at the mirror center, we obtained a measurement repeatability of 0.51 nm (root-mean-square) in an assessment area of 0.5 mm × 99.18 mm. This value satisfies the requirements for surface metrology of nano-focusing x-ray mirrors. Thus, the developed metrology system should be applicable for fabricating nano-focusing ellipsoidal mirrors.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

EUV photolithography mask inspection using Fourier ptychography

Fourier ptychography is a computational imaging techniques that combines various full-field coherent images acquired under varied illumination angles and combined to yield a angular spectrum with a large synthetic numerical aperture and non-interferometric phase information. We present here the implementation of this technique in a full-field soft x-ray microscope designed to emulate modern EUV lithography tools imaging conditions, and we show that this technique can be used for the study of EUV photomasks. The technique allows us to quantitatively characterize phase defects (predominant in EUV lithography), to study new mask designs made of phase structures, to study sub-resolution assist features and extend the resolution of the microscope down to 26-nm, correspond to the N1 technology node.

Wojdyla, Antoine↗

Surface characterization and testing II; Proceedings of the Meeting, San Diego, CA, Aug. 10, 11, 1989

Various papers on surface characterization and testing are presented. Individual topics addressed include: simple Hartmann test data interpretation, optimum configuration of the Offner null corrector, system for phase-shifting interferometry in the presence of vibration, fringe variation and visibility in speckle-shearing interferometry, functional integral representation of rough surfaces, calibration of surface heights in an interferometric optical profiler, image formation in common path differential profilometers, SEM of optical surfaces, measuring surface profiles with scanning tunneling microscopes, surface profile measurements of curved parts, high-resolution optical profiler, scanning heterodyne interferometer with immunity from microphonics, real-time crystal axis measurements of semiconductor materials, radial metrology with a panoramic annular lens, surface analysis for the characterization of defects in thin-film processes, Spacelab Optical Viewport glass assembly optical test program for the Starlab mission, scanning differential intensity and phase system for optical metrology.

Greivenkamp, John E.↗

Standalone interferometry-based calibration of convex lens-induced confinement microscopy with nanoscale accuracy

Strongly confined environments (confined dimensions between 1–100 nm) represent unique challenges and opportunities for understanding and manipulating molecular behavior due to the significant effects of electric double layers, high surface-area to volume ratios, and other phenomena at the nanoscale. Convex Lens-induced Confinement (CLiC) can be used to analyze the dynamics of individual molecules or particles confined in a planar slit geometry with continuously varying gap thickness. Here, we describe an interferometry-based method for precise measurement of the slit pore geometry. Specifically, this approach permitted accurate characterization of separation distances as small as 5 nm, with 1 nm precision, without a priori knowledge or assumptions about the contact geometry, as well as a greatly simplified experimental setup that required only a lens, coverslip, and inverted microscope. The interferometry-based measurement of gap height offered a distinct advantage over conventional fluorescent dye-based methods; e.g., accurate interferometric height measurements were made at low gap heights regardless of solution conditions, while the concentration of fluorescent dye was significantly impacted by solution conditions such as ionic strength or pH. The accuracy of the interferometric measurements was demonstrated by comparing the experimentally measured concentration of a charged fluorescent dye as a function of gap thickness with dye concentration profiles calculated using Debye–Hückel theory. Accurate characterization of nanoscale gap thickness will enable researchers to study a variety of practical and biologically relevant systems within the CLiC geometry.

42 ENGINEERING↗

Aberration correction in photoemission microscopy and applications in photonics and plasmonics

We report on the design, assembly, operation and application of an aberration-corrected photoemission electron microscope. The instrument used novel hyperbolic mirror-correctors with two and three electrodes that allowed simultaneous correction of spherical and chromatic aberrations. A spatial resolution of 5.4nm was obtained with this instrument in 2009, and 4.7nm in subsequent years. New imaging methodology was introduced involving interferometric imaging of light diffraction. This methodology was applied in nano-photonics and in the characterization of surface-plasmon polaritons. Photonic crystals and waveguides, optical antennas and new plasmonic devices such as routers, localizers and filters were designed and demonstrated using the new capabilities offered by the microscope.

36 MATERIALS SCIENCE↗

Interpretable and Efficient Interferometric Contrast in Scanning Transmission Electron Microscopy with a Diffraction-Grating Beam Splitter

Efficient imaging of biomolecules, 2D materials and electromagnetic fields depends on retrieval of the phase of transmitted electrons. We demonstrate a method to measure phase in a scanning transmission electron microscope using a nanofabricated diffraction grating to produce multiple probe beams. The measured phase is more interpretable than phase-contrast scanning transmission electron microscopy techniques without an off-axis reference wave, and the resolution could surpass that of off-axis electron holography. Here, we apply the technique to image nanoparticles, carbon sub- strates and electric fields. The contrast observed in experiments agrees well with contrast predicted in simulations.

36 MATERIALS SCIENCE↗

Transport of intensity equation: a tutorial

When it comes to “phase measurement” or “quantitative phase imaging”, many people will automatically connect them with “laser” and “interferometry”. Indeed, conventional quantitative phase imaging and phase measurement techniques generally rely on the superposition of two beams with a high degree of coherence: complex interferometric configurations, stringent requirements on the environmental stabilities, and associated laser speckle noise severely limit their applications in optical imaging and microscopy. On a different note, as one of the most well-known phase retrieval approaches, the transport of intensity equation (TIE) provides a new non-interferometric way to access quantitative phase information through intensity only measurement. Despite the insufficiency for interferometry, TIE is applicable under partially coherent illuminations (like the Köhler’s illumination in a conventional microscope), permitting optimum spatial resolution, higher signal-to-noise ratio, and better image quality. In this tutorial, we give an overview of the basic principle, research fields, and representative applications of TIE, focus particularly on optical imaging, metrology, and microscopy. The purpose of this tutorial is twofold. It should serve as a self-contained introduction to TIE for readers with little or no knowledge of TIE. On the other hand, it attempts to give an overview of recent developments in this field. These results highlight a new era in which strict coherence and interferometry are no longer prerequisites for quantitative phase imaging and diffraction tomography, paving the way toward new generation label-free three-dimensional microscopy, with applications in all branches of biomedicine.

42 ENGINEERING↗

Single-particle scattering spectroscopy: fundamentals and applications

Metallic nanoparticles supporting a localized surface plasmon resonance have emerged as promising platforms for nanoscopic labels, sensors, and (photo-) catalysts. To use nanoparticles in these capacities, and to gain mechanistic insight into the reactivity of inherently heterogeneous nanoparticles, single-particle characterization approaches are needed. Single-particle scattering spectroscopy has become an important, highly sensitive tool for localizing single plasmonic nanoparticles and studying their optical properties, local environment, and reactivity. In this review, we discuss approaches taken for collecting the scattered light from single particles, their advantages and disadvantages, and present some recent applications. We introduce techniques for the excitation and detection of single-particle scattering such as high-angle dark-field excitation, total internal reflection dark-field excitation, scanning near-field microscopy, and interferometric scattering. We also describe methods to achieve polarization-resolved excitation and detection. We then discuss different approaches for scanning, ratiometric, snapshot, and interferometric hyperspectral imaging techniques used to extract spectral information. Finally, we provide a brief overview of specialized setups for in situ measurements of nanoparticles in liquid systems and setups coupled to scanning tip microscopes.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Optical Interferometric Micrometrology

Resolutions in angstrom and subangstrom range sought for atomic-scale surface probes. Experimental optical micrometrological system built to demonstrate calibration of piezoelectric transducer to displacement sensitivity of few angstroms. Objective to develop relatively simple system producing and measuring translation, across surface of specimen, of stylus in atomic-force or scanning tunneling microscope. Laser interferometer used to calibrate piezoelectric transducer used in atomic-force microscope. Electronic portion of calibration system made of commercially available components.

Abel, Phillip B.↗

Mirrorlike pulsed laser deposited tungsten thin film

Mirrorlike tungsten thin films on stainless steel substrate deposited via pulsed laser deposition technique in vacuum (10{sup -5} Torr) is reported, which may find direct application as first mirror in fusion devices. The crystal structure of tungsten film is analyzed using x-ray diffraction pattern, surface morphology of the tungsten films is studied with scanning electron microscope and atomic force microscope. The film composition is identified using energy dispersive x-ray. The specular and diffuse reflectivities with respect to stainless steel substrate of the tungsten films are recorded with FTIR spectra. The thickness and the optical quality of pulsed laser deposition deposited films are tested via interferometric technique. The reflectivity is approaching about that of the bulk for the tungsten film of thickness {approx}782 nm.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging

Motivated by the advanced photon source upgrade, a new hard X-ray microscope called "Velociprobe" has been recently designed and built for fast ptychographic imaging with high spatial resolution. We are addressing the challenges of high-resolution and fast scanning with novel hardware designs, advanced motion controls, and new data acquisition strategies, including the use of high-bandwidth interferometric measurements. The use of granite, air-bearing-supported stages provides the necessary long travel ranges for coarse motion to accommodate real samples and variable energy operation while remaining highly stable during fine scanning. Scanning the low-mass zone plate enables high-speed and high-precision motion of the probe over the sample. With an advanced control algorithm implemented in a closed-loop feedback system, the setup achieves a position resolution (3σ) of 2 nm. The instrument performance is evaluated by 2D fly-scan ptychography with our developed data acquisition strategies. A spatial resolution of 8.8 nm has been demonstrated on a Au test sample with a detector continuous frame rate of 200 Hz. Using a higher flux X-ray source provided by double-multilayer monochromator, we achieve 10 nm resolution for an integrated circuit sample in an ultrafast scan with a detector's full continuous frame rate of 3000 Hz (0.33 ms per exposure), resulting in an outstanding imaging rate of 9 x 10 4 resolution elements per second

36 MATERIALS SCIENCE↗

Quantum master equation for collisional dynamics of massive particles with internal degrees of freedom

We address the microscopic derivation of a quantum master equation in Lindblad form for the dynamics of a massive test particle with internal degrees of freedom, interacting through collisions with a background ideal gas. When either internal or center-of-mass degrees of freedom can be treated classically, previously established equations are obtained as special cases. If in an interferometric setup the internal degrees of freedom are not detected at the output, the equation can be recast in the form of a generalized Lindblad structure, which describes non-Markovian effects. The effect of internal degrees of freedom on center-of-mass decoherence is considered in this framework.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Short fatigue crack behavior in notched 2024-T3 aluminum specimens

Single-edge, semi-circular notched specimens of Al 2024-T3, 2.3 mm thick, were cyclicly loaded at R-ratios of 0.5, 0.0, -1.0, and -2.0. The notch roots were periodically inspected using a replica technique which duplicates the bore surface. The replicas were examined under an optical microscope to determine the initiation of very short cracks and to monitor the growth of short cracks ranging in length from a few tens of microns to the specimen thickness. In addition to short crack growth measurements, the crack opening displacement (COD) was measured for surface cracks as short as 0.035 mm and for through-thickness cracks using the Interferometric Strain/Displacement Gage (ISDG), a laser-based optical technique. The growth rates of short cracks were faster than the long crack growth rates for R-ratios of -1.0 and -2.0. No significant difference between short and long crack growth rates was observed for R = 0.0. Short cracks had slower growth rates than long cracks for R = 0.5. The crack opening stresses measured for short cracks were smaller than those predicted for large cracks, with little difference appearing for positive R-ratios and large differences noted for negative R-ratios.

Lee, J. J.↗

Manipulation of Micro Scale Particles in an Optical Trap Using Interferometry

This research shows that micro particles can be manipulated via interferometric patterns superimposed on an optical tweezers beam. Interferometry allows the manipulation of intensity distributions, and thus, force distributions on a trapped particle. To demonstrate the feasibility of such manipulation, 458 nm light, from an argon-ion laser, was injected into a Mach Zender interferometer. One mirror in the interferometer was oscillated with a piezoelectric phase modulator. The light from the interferometer was then injected into a microscope to trap a 9.75 micron polystyrene sphere. By varying the phase modulation, the sphere was made to oscillate in a controlled fashion.

Seibel, Robin↗

Interferometry of dipole phase in high harmonics from solids

Understanding the temporal profiles of high harmonics is essential for their applications in attosecond science. Microscopically, the dipole phase plays an important role in determining the high-harmonic emission phase. In gas-phase high-harmonic generation, the tunnel-ionized electron spends much of its travel time in the continuum—far from the parent ion, where it accumulates the dipole phase. Therefore, the atomic dipole phase is largely independent of the target atom. In solid-state high-harmonic generation, since the driven electron experiences a periodic potential during the entire travel time, the dipole phase may depend on the electronic structures of source materials. Here, we employ an interferometric method to characterize high harmonics from magnesium oxide and quartz crystals. We measure material-dependent intensity-induced high-harmonic phase delays that we attribute to the intensity-induced changes in the dipole phase originating from the interband polarization. The material-dependent dipole phase can provide a robust platform for high-harmonic spectroscopy of solids.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗

Design of a dynamic biofilm imaging cell for white-light interferometric microscopy

In microbiology research there is a strong need for next generation imaging and sensing instrumentation that will enable minimally invasive and label-free investigation of soft, hydrated structures such as in bacterial biofilms. White light interferometry (WLI) can provide high resolution images of surface topology without the use of fluorescent labels but is not typically used to image biofilms because there is insufficient refractive index contrast to induce reflection from the biofilm’s interface. The soft structure and water-like bulk properties of hydrated biofilms make them difficult to characterize in situ , especially in a non-destructive manner. In this report, we build on our prior description of static biofilm imaging and describe the design of a dynamic imaging flow cell that enables monitoring the thickness and topology of live biofilms over time using a WLI microscope. The microfluidic system is specifically designed to create a reflective interface on the surface of biofilms while minimizing disruption of fragile structures. The imaging cell was also designed to accommodate limitations imposed by the depth of focus of the microscope’s objective lens. Example images of live biofilm samples are shown in order to illustrate the ability of the flow cell and WLI instrument to 1) support bacterial growth and biofilm development, 2) image biofilm structure that reflects growth in flow conditions, and 3) monitor biofilm development over time non-destructively. In future work, the apparatus described here will enable surface metrology measurements (roughness, surface area, etc.) of biofilms and may be used to observe changes in biofilm structure in response to changes in environmental conditions (e.g., flow velocity, availability of nutrients, and presence of biocides). Furthermore, this development will open new opportunities for the use of WLI in bioimaging.

47 OTHER INSTRUMENTATION↗